Assembling ball-ended styli for CMM's tactile probing heads on micro EDM

This paper describes a hybrid gluing and assembling process on micro electrical discharge machine (EDM) to produce micro ball-ended spherical stylus tips for micro coordinate measurement machine's (CMM's) tactile probing heads. Combining wire electro-discharge grinding technology and position controlling function of EDM, a micro glass ball could be glued onto the cantilever successfully. The experimental results show that the roundness of the largest profile micro glass-ball-ended styli with a 0.07-mm diameter could be as small as 0.613 μm. The deviation and roundness of the stylus tips can be controlled more effectively by this gluing and assembling process. The adhesion strength of the gluing stylus tip is approximately 12 mN. These ball-ended stylus tips could be used on micro CMM's tactile probing head for micro component metrology in the near future.     

Influence of measured objects parameters on CMM touch trigger probe accuracy of probing

Influence of the measured objects parameters on coordinate measuring machine (CMM) touch trigger probe inaccuracy of probing is investigated. Factors such as material stiffness of measured workpiece, its surface shape and roughness are taken into consideration. The measuring method out off CMM, based on a rotary table and a reference axis is applied for tests. The concept is based on measurements of the distance between reference and triggering points in various directions. The reference points are established by the rotation of a precise rotary table. The statistical analysis of variance and regression is applied for data analysis.     

一种组合台面式多用途铁水罐计量轨道衡

本文介绍了日照钢铁有限公司（以下简称“日照钢铁”）针对炼铁到炼钢的短流程,生产区域紧凑的现状,为优化合理建设,减少投资,通过对轨道衡计量方式的分析、两种罐型兼顾、称重台面设计,选用一种组合式（两台面）的整车计量轨道衡,实现动静两用、铁水罐车混编动态计量。     

新型电子皮带秤和微机核子秤在钼原矿计量的应用

本文试对两种皮带秤在我公司钼原矿计量中的应用及优缺点作简单介绍.以及目前散装固态物料在线式计量控制大都采用核子皮带秤和电子皮带秤,二者在工作原理、系统特点上的优势,尤以重力式动态电子皮带秤和小感量非接触式核子皮带秤发展方向.     

Efficiency evaluation of micro factory for micro pump manufacture

The micro factory, a miniature manufacturing system, is a means of achieving higher throughput with minimal space, and minimal consumption of energy and resources by downsizing of production processes. Even though, a micro factory is able to perform whole manufacturing processes like the macro factory, the possibility of improving its manufacturing efficiency has not been considered enough. In this paper, an efficiency index is proposed to calculate the efficiency of the micro factory to manufacture a micro pump. The efficiency index has been proposed based on efficiency definition with input and output parameters of the system. Input parameters include cost of system, processing time and energy. Output parameters represent number of product manufactured from the microfactory. Cost of the system has been categorized by micro assembly machine cost, cost of resources, manipulators’ cost, manufacturing space value, and human operators. Processing time has been categorized by assembly time and material handling time. This paper was recommended for publication in revised form by Associate Editor Dae-Eun Kim Murali Subramaniyam received his B.E. and M.Tech. from India in 2003 and 2005, respectively. Currently, he is pursuing his Ph.D. in Me-chanical Design Engineering under Brain Korea 21 program fellowship at CNU (Chungnam National University), Korea. Also he is working as a research associate in LID (Laboratory of Intelligent Design and manufacturing) at CNU, under Professor Sangho Park. His research interests include CAD/CAM (Computer Aided Design/ Computer Aided Manufac-turing), Computer Integrated Manufacturing, Rapid Prototyping and DHM (Digital Human Modeling). Sangho Park is currently a Professor in Mechanical Design Engineering at CNU. He received his B.S., M.S. and Ph.D. from Seoul National University, Korea in 1988, 1990 and 1995 respectively. He was a Senior Research Scientist at ETRI (Electronics and Telecommunications Research Institute), Korea. His areas of expertise and research interest includes CAD/CAM, Virtual Reality, DHM and Micro Assembly. LID (renamed from CAD/CAM) is doing research under his advice. Sung-il Choi received a B.S. form Konyang University in 1995, Korea. He then received an M.S. from CNU in 1997. Currently, he is pursuing his Ph.D. in Mechanical Design Engineering at CNU. He was a researcher at ETRI. His research intersts include the areas of development of CAD interface, virtual simulation, 3D Web solutions, geometric modelling, micro-assembly, and application of distributed environment. Jun-Yeob Song is a Team Leader in the IT Machinery Research Team, Korea Institute of Machinery and Materials, Korea. Also, He is a Chief of National Research Laboratory on Knowledge Evolution based Manufacturing Devices. He received a Ph. D. from the School of Industrial Engineering at Busan National University in 2001. He has extensive experience in design & control of automation and autonomous manufacturing systems, and reliability engineering. In recent years, Dr. Song’s research interests are in the area of micro assembly, bonding, and multi chip packaging (MCP). Jong-Kweon Park received a B.S. degree in Mechanical Engineering from Inha University in 1977. He then received M.S. and Ph.D. degrees in mechanical engineering from Changwon National University in 1993 and 1997. Dr. Park is currently a principal research at Korea Institute of Machinery and Materials in Daejeon, Korea. His current research areas are cutting dynamics and control, structural dynamics and optimization, ultra precision machining systems, micro/nano manufacturing systems, and design and evaluation of machine tool systems. He is currently a project leader for the project, “Development of Microfactory System Technologies for Next Generation.”     

Precision machining of micro tool electrodes in micro EDM for drilling array micro holes

Micro electro discharge machining (micro EDM) is suitable for machining micro holes on metal alloy materials, and the micro holes can be machined even to several microns by use of wire electro discharge grinding (WEDG) of micro electrodes. However, considering practicability of micro holes <Φ100 μm in batch processing, the controllable accuracy of holes’ diameter, the consistency accuracy of repeated machining and the processing efficiency are required to be systematically improved. On the basis of conventional WEDG method, a tangential feed WEDG (TF-WEDG) method combined with on-line measurement using a charge coupled device (CCD) was proposed for improving on-line machining accuracy of micro electrodes. In TF-WEDG, removal resolution of micro-electrode diameter (the minimum thickness to be removed from micro electrode) is greatly improved by feeding the electrode along the tangential direction of wire-guide arc, and the resolution is further improved by employing negative polarity machining. Taking advantage of the high removal resolution, the precise diameter of micro-electrode can be achieved by the tangential feed of electrode to a certain position after diameter feedback of on-line measurement. Furthermore, a hybrid process was presented by combining the TF-WEDG method and a self-drilled holes method to improve the machining efficiency of micro electrodes. A cyclic alternating process of micro-electrode repeated machining and micro holes’ drilling was implemented for array micro holes with high consistency accuracy. Micro-EDM experiments were carried out for verifying the proposed methods and processes, and the experimental results show that the repeated machining accuracy of micro electrodes was less than 2 μm and the consistency accuracy of array micro holes was ±1.1 μm.     

Automated dimensional inspection planning using the combination of laser scanner and tactile probe

Combining multiple sensors on CMMs (Coordinate Measuring Machines) is useful to fulfil the increasing requirements on both complexity and accuracy in dimensional metrology. Yet, the methodology to plan measurement strategies for systems combining different types of sensors is still a major challenge. Such planning is commonly done in an interactive way. This paper presents a methodology which can create inspection plans automatically for CMM inspection combining a touch trigger probe and a laser scanner. The inspection features are specified based on the extracted geometry features and the associated PMI (Product and Manufacturing Information) items from a CAD model. A knowledge based sensor selection method is applied to choose the suited sensor for each inspection feature. For touch trigger measurements, the sampling strategy considers the measurement uncertainty calculated by simulation. A geometry-guide method is developed for collision-free probing path generation. For laser scan measurements, the required view angles and positions of the laser scanner are determined iteratively, based on which the scan path is generated automatically. The proposed methodology is tested for several cases and validated by measurement experiments. The methodology provides suited planning results and can be used for automated dimensional inspection, i.e. Computer Aided Quality Control (CAQC).     

Analysis and modeling for flexible joint interfaces under micro and macro scale

The flexible joint interfaces with random topography are re-constructed by data point cloud obtained by experimental measurements and a contact model between two rough random surfaces is established. Contact analysis is conducted by FEM considering the elasto-plastic constitution of the material. An exponential relationship model between normal pressure and normal deformation of the joint interfaces is presented by least-square method, and furthermore, the normal contact stiffness expressions of unit area of the joint interfaces are deduced. In order to use micro-scale model to deal with large scale practical engineering interfaces, a cantilever structure connected by bolted joint is taken as a macro scale example, and its dynamic model is established with the pressure distribution on the interface and real contact area obtained by simulations and experiments. Modal test experiments are conducted, and the first three natural frequencies and frequency response functions are obtained to validate the model.     

The frictional pattern of tactile sensations in anthropomorphic fingertip

In this report, to consider the technology of frictional tactile sensations (FTS) for a prosthetic fingertip, the anthropomorphic fingertip (silicone) was compared with the human fingertip in terms of sliding friction (reciprocating sliding on an acrylic plate under a load force of ∼2.5 N max.) and the prototype of a FTS was demonstrated. In the results, the friction coefficient of the human fingertip changed according to the contact location more than the anthropomorphic fingertip. In the demonstration, the prototype FTS that faked the human fingertip could generate a high friction coefficient and the peculiar signal pattern at each contact location. Moreover, the prototype FTS recognized a slight difference in the surface roughness of the copier paper. In conclusion, the friction coefficient in the human fingertip increases when increasing the contact area under the same load force. Increasing the contact area induces stiction and stick-slip phenomena, generating a high friction coefficient and vibrations. Moreover, the high friction coefficient amplifies slight contact signals and supports FTS in a prosthetic fingertip.     

微小型结构件显微图像边缘的自动识别

在前一阶段的研究工作中,针对微小型结构件的显微图像边缘提取,作者提出了一种基于工艺匹配的显微图像边缘提取算法（Micro Processing Technology Matching based Micro Image Edge Detection, MPTM-MIED）。使用MPTM-MIED提取图像边缘之前,需要手工从零件显微图像中选取边缘过渡区域,这一操作将极大影响微小型零件的检测速度,从而使MPTM-MIED不能应用在实时自动检测中。针对MPTM-MIED的这一不足,本文利用BP神经网络技术重新设计并实现了MPTM-MIED,提出了一种新的自动提取显微图像边缘的方法（An Automated Micro Image Edge Detection Method,AMIED）。为了验证该方法的有效性,本文还利用AMIED对4种工艺微小型结构件显微图像的边缘进行了提取,并对线切割工艺零件的尺寸进行了测量。边缘提取的分析结果表明：AMIED提取出的显微图像边缘与MPTM-MIED提取出的基本一致;与常用的边缘检测算法相比,AMIED提取出的显微图像的边缘线形连接程度较好。测量尺寸的分析结果表明：MPTM-MIED和AMIED测量的尺寸基本相同,与Canny测量的相比,更接近万能工具显微镜测得的尺寸。     

新型三维微动台的设计与试验分析

研究设计一种新型的、以压电陶瓷为驱动器的三维微动台结构。该微动台以柔性铰链为弹性导轨实现了微定位。 分析所采用的直圆柔性铰链的参数变化对其造成的性能影响;提出一种新型柔性铰链结构,利用有限元分析软件AN SYS对这种新型结构进行理论分析和试验测试。试验表明:采用这种柔性铰链结构的微动台刚度比较小、运动耦合误差 小,定位精度优于±0.01μm。     

微纳制造技术文献计量分析

对微纳制造技术领域2000-2010年时间段的SCI和EI文献计量分析,结果显示,近年来该领域的研究呈现出增长趋势,美国在微纳制造领域的研究处于绝对领先的地位.SCI文献分析表明,纳米尺度的制造技术、微米尺度的制造技术、微机电系统、微流体、微加工等是近年来研究的热点领域;EI分析则显示,光刻技术、微加工、微机电器件、纳米结构材料、扫描电子显微镜等是研究的热点.     

微机械电池及其充电器开发研究

介绍将机械能转变成电能的机械式电池方案和设计。其工作原理是通过摇动手柄产生的转速和转矩经过变速器传递到发电机发电 ,并将电能存储在电容器中。这种微机电系统可以做成通用电池的形状当作电池使用。由于它可以反复使用和无化学废料等优点 ,因此具有较好的应用前景     

Built-up edge effects on process outputs of titanium alloy micro milling

Built-up edge (BUE) is generally known to cause surface finish problems in the micro milling process. The loose particles from the BUE may be deposited on the machined surface, causing surface roughness to increase. On the other hand, a stable BUE formation may protect the tool from rapid tool wear, which hinders the productivity of the micro milling process. Despite its common presence in practice, the influence of BUE on the process outputs of micro milling has not been studied in detail. This paper investigates the relationship between BUE formation and process outputs in micro milling of titanium alloy Ti6Al4V using an experimental approach. Micro end mills used in this study are fabricated to have a single straight edge using wire electrical discharge machining. An initial experimental effort was conducted to study the relationship between micro cutting tool geometry, surface roughness, and micro milling process forces and hence conditions to form stable BUE on the tool tip have been identified. The influence of micro milling process conditions on BUE size, and their combined effect on forces, surface roughness, and burr formation is investigated. Long-term micro milling experiment was performed to observe the protective effect of BUE on tool life. The results show that tailored micro cutting tools having stable BUE can be designed to machine titanium alloys with long tool life with acceptable surface quality.     

Friction and wear effects on a micro/nano‐scale

In this paper are described tribological effects which can be found in micro‐tribological systems, and in those macro‐systems which can be analysed by micro‐methods, e.g., by atomic force microscopy (AFM) or related methods. Micro‐tribology systems have friction contacts with loads in the micro/nano‐newton range and/or dimensions in the micro/nanometre range. Experiments on the micro/nano‐scale should be easier to explain by theoretical modelling due to their simpler system structure. An example is discussed of adhesion and friction measurements between AFM tips and clean, flat, solid surfaces in ultra‐high vacuum, which shows some of the special aspects of micro/nano‐tribology. Surprising friction characteristics on surfaces with an artificial micro‐structure can be explained by skilled and careful topographical analysis of the friction path with an AFM. In micro‐sensor contacts, ‘single wear events’ can be detected using AFM analysis of the contact region. For ceramic compounds, different friction levels for the components of the material can be found. The problems, difficulties, and dangers of misinterpretation are also discussed.     

Performance evaluation experiments on a laser spot triangulation probe

Laser triangulation probes are increasingly used for dimensional measurements in a variety of applications. At the National Institute of Standards and Technology, we have recently explored the use of laser spot triangulation probes to determine dimensional features such as height and width of channels in a fuel cell plate. To assess the suitability of the probes for performing these dimensional measurements, we designed several experiments that highlighted different error sources in the probes. This report is a summary of those experiments. Numerous studies have been reported in the literature on error sources in laser triangulation probes utilizing artifacts of varying shape (form), color, reflectivity, surface finish, etc. However, our experiments are targeted towards establishing bounds on errors when measuring simple linear dimensions such as height and width on prismatic objects of a single color and material. Our scope is indeed narrow, but intentionally so; it is our objective to highlight the influence of a number of “hidden performance attributes” [1] that impact accuracy of even simple linear dimensional measurements so that it may be of use to others who perform similar measurements.     

Micro electro discharge machine with an inchworm type of micro feed mechanism

A micro electro discharge machine with an inchworm type of micro feed mechanism has been developed. The prototype of micro electro discharge machine is comprised of a wire electro discharge grinding unit, a rotating unit of electrode, RC circuitry for micro electro discharge generation and a subsystem detecting and controlling machining process, in addition to the inchworm mechanism. In the design of the inchworm mechanism, a novel clamp mechanism with force magnifying structure is devised to increase its thrust capability and a pair of guide sleeves together with the clamps are used to decrease yawing error. The inchworm mechanism prototype has 60 mm stroke only limited by the length of the shaft, less than 2 μm yawing error and reaches to 30N output thrust force. The machining experiments carried out on the micro EDM prototype are also described. The techniques to machine micro electrode, micro holes with high aspect ratio, micro structures on stainless steel and silicon materials are discussed. Micro electrode diameter as small as 25 μm and micro holes with minimum size of less than 50 μm are obtained. And the maximum aspect ratios of micro electrodes and micro holes exceed 20 and 10 respectively.     

Fabrication of various shaped tungsten micro pin arrays using micro carving technology

This paper describes a state of the art in micro-structuring high strength metallic materials. Tungsten micro pin arrays in a variety of shapes are fabricated using a micro carving technology, which combines laser beam machining and electrochemical etching processes. First, micro pin arrays were rough-shaped by laser beam machining along a pre-defined scanning path to control their structural shape. The micro pin array in this stage had near-conical shape of structures due to a recast layer. Next, the genuine shape of micro pin arrays came to the surface via electrochemical etching process to elute the recast layer into electrolyte. Quantitative elemental analysis with energy-dispersive spectroscopy (EDS) was implemented to characterize the formation of recast layer on a micro pin structure after the laser beam machining process. The atomic percentage EDS maps indicated that higher percentage of tungsten was detected on the core micro pin structure, whereas relatively large percentage of oxygen was found on the recast layer (O 9%, W 91% in the center area, and O 53%, W 47% in the outer area).     

Effects of off-focal radiation on dimensional measurements in industrial cone-beam micro-focus X-ray computed tomography systems

A study of the secondary source phenomenon due to the presence of off-focal radiation in industrial micro-focus cone-beam X-ray computed tomography (XCT) systems and its influence on dimensional measurements is presented. Although off-focal radiation production within X-ray tubes has been studied for medical X-ray imaging systems, its properties and its effects on dimensional measurements in industrial XCT systems have not been discussed prior to this research. The study comprises: evaluation of the geometrical properties of off-focal radiation through a theoretical and experimental study of two-dimensional projection images of the scanned objects, verification of these properties using computer simulations and evaluation of the impact of the secondary source on dimensional measurements using experimental and simulation approaches. In addition, ways to minimise the effects of off-focal radiation are discussed, and reference samples for characterising the properties of off-focal radiation are proposed.