Functional integrated optical elements for beam shaping with coherence scrambling property, realized by interference lithography

Many applications, such as semiconductor lithography and material processing, require the shaping of laser beams to provide a homogenous field illumination. We present the conception, implementation, and experimental verification of a combined single-element homogenizer. Additionally, for excimer laser applications, the concept is associated with a coherence scrambling capability. We used the technique of holographic interference lithography to integrate the multifunctional properties in a diffractive optical element. The wavelength difference between the recording process (457.9 nm) and the application (193 nm) results in a change of the imaging properties and requires a geometrical adaptation of the optical setup. The coherence scrambling effect of the setup is based on an off-axis design, including the beam shaping diffractive structure.     

Diffractive phase elements for beam shaping: a new design method

A design method based on the Yang-Gu algorithm [Appl. Opt. 33, 209 (1994)] is proposed for computing the phase distributions of an optical system composed of diffractive phase elements that achieve beam shaping with a high transfer efficiency in energy. Simulation computations are detailed for rotationally symmetric beam shaping in which a laser beam with a radially symmetric Gaussian intensity distribution is converted into a uniform beam with a circular region of support. To present a comparison of the efficiency and the performance of the designed diffractive phase elements by use of the geometrical transformation technique, the Gerchberg-Saxton algorithm and the Yang-Gu algorithm for beam shaping, we carry out in detail simulation calculations for a specific one-dimensional beam-shaping example.     

Subwavelength-resolvable focused non-gaussian beam shaped with a binary diffractive optical element.

The diffraction-limited spot size limits the optical disk storage capacity and microscopic resolution. We describe a technique to shape a focused Gaussian beam into a superresolving beam by using a diffractive optical element fabricated by laser-assisted chemical etching. The focused shaped beam has a smaller width and a longer depth of focus than a similarly focused Gaussian beam. Using the diffraction-limited shaped beam along with threshold writing, we achieved a written pit size of less than 0.33 mum at a 695-nm laser wavelength, compared with a 0.7-mum focused Gaussian spot size (full width at e(-2) of the peak) with the same focusing lens. The energy conversion efficiency for the beam shaping was ~81%.     

Diffractive shaping of excimer laser beams

Abstract

We address the problem of shaping the intensity distribution of a highly directional partially coherent field, such as an excimer laser beam, by means of diffractive optics. Our theoretical analysis is based on modelling the multi-transverse-mode laser beam as a Gaussian Schell-model beam. It is shown numerically that a periodic element, which is unsuitable for the shaping of a coherent laser beam, works well with an excimer laser beam because of its partial spatial coherence. The conversion of an approximately Gaussian excimer laser beam into a flat-top beam in the Fourier plane of a lens is demonstrated with a diffractive beam shaper fabricated as a multilevel profile in SiOl by electron-beam lithography and proportional reactive-ion etching.     

Integrated diffractive andrefractive elements for spectrum shaping

Diffractive elements can be designed for spectrum shaping in the Fourier or Fresnel plane by iterative methods. It is necessary to use a Fourier lens and the wavelength for which the diffractive elements were designed to get the required spectrum shaping at the Fourier plane. Using a different wavelength will cause chromatic aberration. We deal with the combination of refractive and diffractive elements and two or more different diffractive elements on the same element to get appropriate beam shaping of light sources with a multiple spectral output. Simulations are preformed that transform the profile of a He-Ne laser with a Nd:YAG laser source, and shape the trapezoidal beam profile of an excimer laser into a Gaussian beam is also considered.     

Fabrication of micro optics on coreless fiber segments

Fabrication of micro optics for fiber optics applications is a challenge due to their size and the issues associated with alignment of the optics to single-mode fibers. This study summarizes a method for fabricating diffractive optical elements on the ends of coreless fiber segments for passive alignment to single-mode fibers. Results are presented for passively aligned diffractive lens elements used for both collimation and beam shaping.     

Beam-shaping longitudinal range of a binary diffractive optical element

An experimental and theoretical investigation of laser beam shaping using a simple binary diffractive optic is presented. Beam tailoring has been characterized by the experimental determination of two relevant parameters: beam propagation factor M(2) and the beam-shaping longitudinal range, which represents the propagating distance for which the tailored beam remains nearly unchanged.     

Comparison of resonator-originated and external beam shaping

The spatial shaping of laser beams is a subject of research in modern optics. Recently the introduction of diffractive elements in laser resonators has offered an alternative to external beam-shaping optics by mode shaping within the resonator. We describe the specification of the laser resonator mirrors to obtain by means of internal mode shaping a desired beam outside the resonator. Modal discrimination of the modified resonator and the mirror alignment sensitivity is discussed. Basic features of resonator-originated and external beam shaping are compared.     

Spatial beam shaping of ultrashort laser pulses: theory and experiment

We studied the spatial intensity profile of an ultrashort laser pulse passing through a laser beam shaping system, which uses diffractive optical elements to reshape a Gaussian beam profile into a flat-topped distribution. Both dispersion and nonlinear self-phase modulation are included in the theoretical model. Our calculation shows that this system works well for ultrashort pulses (approximately 100 fs) when the pulse peak intensity is less than 5 x 10(11) W/cm2. Experimental results are presented for 136 fs pulses at 800 nm wavelength from a Ti:sapphire laser with a 6 nJ pulse energy. We also studied the effects of lateral misalignment, beam-size deviation, and defocusing on the energy fluence profile.     

Pulse compression beyond the Fourier-transform limit

Theories of a technique for compression of an ultrashort femtosecond laser pulse beyond its Fourier-transform limit based on the pulse shaping technique are proposed. The technique is called superresolution in time domain (STD). Global optimization theories for the design of a mask to modulate the spectrum of an input pulse to obtain a STD output pulse are proposed. Several design examples illustrate the feasibility of STD. Some fundamental limits of STD are also provided.     

Automatic symmetrical iterative Fourier-transform algorithm for the design of diffractive optical elements for highly precise laser beam shaping

A symmetrical iterative Fourier-transform algorithm (IFTA) using a combination of phase and amplitude freedom for the design of diffractive optical elements for highly precise laser beam shaping is presented. We compare this method with the basic IFTA and the symmetrical IFTA exclusively using phase freedom, and the basic IFTA using both phase and amplitude freedom, by employing these methods for super-Gaussian beam shaping. While the latter three methods fail to produce satisfactory solutions, the first method results in a beam non-uniformity error of 0.44% and a theoretical efficiency of 97.2%. Moreover, the new approach avoids the use of the trial-and-error method for finding the appropriate modified Fourier-domain constraints during the iteration, which can be difficult for some beam-shaping problems.     

Optical superresolution of focused partially spatially coherent laser beams

We report design theories of a diffractive superresolution element (DSE) to implement optical superresolution of focused partially spatially coherent laser beams. The design problem of the DSE can be transformed into a problem of linear programming to obtain a globally optimal solution. By using the design theories, some fundamental limits of optical superresolution of focused partially spatially coherent laser beams are proposed, and several design examples are provided. As expected, both the fundamental limits and the design examples show that worse spatial coherence will cause worse superresolution performance. The design theories provide a design approach with partially coherent beams and may be useful for other design problems under partially coherent illumination.     

Coherent diffractive imaging using short wavelength light sources

Techniques that recover images from diffraction data obtained using coherent short-wavelength light sources are currently under active development for applications in nanotechnology and structural biology. In this review, an outline of paraxial optics is provided in a form that is sufficiently general to incorporate the coherence properties and frequency structure of illumination sources used in diffractive imaging applications. The Fourier phase problem is formulated in the context of imaging algorithms that are designed to obtain uniquely-determined phase distributions from measurements of diffraction data. The properties of several iterative phase retrieval algorithms for both coherent and partially-coherent diffractive imaging applications are presented in a unified formalism, together with a brief discussion of a non-iterative technique. Approaches to diffractive imaging based on Fraunhofer and Fresnel diffraction configurations are compared. Applications are described utilising quasi-monochromatic third-generation synchrotron X-ray sources and polychromatic high-harmonic generation table-top soft X-ray sources. The review concludes with a consideration of proposed applications of diffractive imaging approaches to the determination of biomolecular structures from isolated molecules using fourth-generation X-ray free-electron laser sources.     

Transverse or axial superresolution with radial birefringent filter

The superresolution technique is well known for its ability to compress the central diffraction spot to a size that is smaller than the Airy diffraction spot. The radial birefringent filter, which consists of two parallel polarizers and a rotationally symmetric birefringent element, is introduced into the superresolution technology, and the pupil function of it is deduced. It is shown that such a filter can be adapted either for transverse superresolution or for axial superresolution simply by changing the angle between either of the two polarizers and the radial birefringent element. At the same time the superresolution parameters are discussed. The filter is relatively simple in construction as it requires no phase changes, and low-cost replication is possible.     

Transverse superresolution technique involving rectified Laguerre-Gaussian LG(p)⁰ beams

A promising technique has been proposed recently [Opt. Commun. 284, 1331 (2011), Opt. Commun. 284, 4107 (2011)] for breaking the diffraction limit of light. This technique consists of transforming a symmetrical Laguerre-Gaussian LG(p)? beam into a near-Gaussian beam at the focal plane of a thin converging lens thanks to a binary diffractive optical element (DOE) having a transmittance alternatively equal to -1 or +1, transversely. The effect of the DOE is to convert the alternately out-of-phase rings of the LG(p)? beam into a unified phase front. The benefits of the rectified beam at the lens focal plane are a short Rayleigh range, which is very useful for many laser applications, and a focal volume much smaller than that obtained with a Gaussian beam. In this paper, we demonstrate numerically that the central lobe's radius of the rectified beam at the lens focal plane depends exclusively on the dimensionless radial intensity vanishing factor of the incident beam. Consequently, this value can be easily predicted.     

Laser beam shaping with polarization-selective diffractive phase elements

A new scheme for converting a Gaussian irradiance profile beam on the input plane into a uniform irradiance profile beam on the output plane is presented based on polarization-selective diffractive phase elements. The relevant elements were designed by use of the simulated annealing method. The simulation design shows that the shaping quality is substantially improved and is much better than that obtained with traditional diffractive phase elements.     

Effects of the spatial frequency composition of the target pattern and the number of quantization levels in diffractive beam shaper design

A mathematical model is derived, and numerical simulation is analyzed for laser beam shaping by using multilevel phase-only diffractive optical elements (DOEs). We used the simulated annealing algorithm to design the beam shapers. The result has an essential effect on the diffractive pattern quality caused by the spatial frequency composition of target patterns for the same incident gaussian beam size and target pattern area. The root mean square error between the diffractive and target patterns is smaller for the target patterns with lower spatial frequencies. Moreover, the effect of spatial frequency composition can be relaxed for the cases of larger incident gaussian beam size. In addition, finer quality control of a diffraction pattern can be obtained by increasing the number of quantization levels at the DOEs.     

Optimization design of diffractive phase elements for beam shaping

An improved approach called the weighted YG algorithm for the design of the diffractive phase element (DPE) that implements beam shaping in the fractional Fourier transform domain and free space is presented. Modeling designs of the DPE are carried out for several fractional orders and different parameters of the beam for optimally converting a Gaussian profile into a uniform beam. We found that our algorithm can improve the beam shaping effect, reduce the error function, and increase uniformity of light intensity.     

Beam shaping design for coupling high power diode laser stack to fiber

A beam shaping technique that rearranges the beam for improving the beam symmetry and power density of a ten-bar high power diode laser stack is simulated considering a stripe mirror plate and a V-Stack mirror in the beam shaping system. In this technique, the beam of a high power diode laser stack is effectively coupled into a standard 550 μm core diameter and a NA=0.22 fiber. By this technique, compactness, higher efficiency, and lower cost production of the diode are possible.     

Design considerations of stacked multilayers of diffractive optical elements for optical network units in optical subscriber-network applications

The detailed design process and experimental results of stacked multilayer diffractive optical elements are reported for an optical network unit used in optical subscriber-network applications. The optical network unit accepts two incoming light beams of 1.3- and 1.55-mum wavelengths through a single-mode optical fiber. A laser diode is also placed for bidirectional communications. The optical network unit consists of five diffractive optical elements that perform the following functions: collimation of incoming beams, focusing of the outgoing 1.55-mum beam, 3-dB splitting of the 1.3-mum beam, focusing of the 1.3-mum beam onto the photodiode, and collimation of the light emitted from a laser diode. Possible cost reductions as a result of mass production and the ease of alignment of the stacked diffractive optical elements could be ideal for constructing low-cost optical network units.