Laser beam shaping with polarization-selective diffractive phase elements

A new scheme for converting a Gaussian irradiance profile beam on the input plane into a uniform irradiance profile beam on the output plane is presented based on polarization-selective diffractive phase elements. The relevant elements were designed by use of the simulated annealing method. The simulation design shows that the shaping quality is substantially improved and is much better than that obtained with traditional diffractive phase elements.     

Diffractive shaping of excimer laser beams

Abstract

We address the problem of shaping the intensity distribution of a highly directional partially coherent field, such as an excimer laser beam, by means of diffractive optics. Our theoretical analysis is based on modelling the multi-transverse-mode laser beam as a Gaussian Schell-model beam. It is shown numerically that a periodic element, which is unsuitable for the shaping of a coherent laser beam, works well with an excimer laser beam because of its partial spatial coherence. The conversion of an approximately Gaussian excimer laser beam into a flat-top beam in the Fourier plane of a lens is demonstrated with a diffractive beam shaper fabricated as a multilevel profile in SiOl by electron-beam lithography and proportional reactive-ion etching.     

Spatial beam shaping of ultrashort laser pulses: theory and experiment

We studied the spatial intensity profile of an ultrashort laser pulse passing through a laser beam shaping system, which uses diffractive optical elements to reshape a Gaussian beam profile into a flat-topped distribution. Both dispersion and nonlinear self-phase modulation are included in the theoretical model. Our calculation shows that this system works well for ultrashort pulses (approximately 100 fs) when the pulse peak intensity is less than 5 x 10(11) W/cm2. Experimental results are presented for 136 fs pulses at 800 nm wavelength from a Ti:sapphire laser with a 6 nJ pulse energy. We also studied the effects of lateral misalignment, beam-size deviation, and defocusing on the energy fluence profile.     

Diffractive phase elements for beam shaping: a new design method

A design method based on the Yang-Gu algorithm [Appl. Opt. 33, 209 (1994)] is proposed for computing the phase distributions of an optical system composed of diffractive phase elements that achieve beam shaping with a high transfer efficiency in energy. Simulation computations are detailed for rotationally symmetric beam shaping in which a laser beam with a radially symmetric Gaussian intensity distribution is converted into a uniform beam with a circular region of support. To present a comparison of the efficiency and the performance of the designed diffractive phase elements by use of the geometrical transformation technique, the Gerchberg-Saxton algorithm and the Yang-Gu algorithm for beam shaping, we carry out in detail simulation calculations for a specific one-dimensional beam-shaping example.     

Superresolution laser beam shaping

The superresolution technique is well known for its ability to compress the central diffractive spot that is smaller than the Airy diffractive spot. In this paper, we extend the superresolution technique for different laser beam shaping. A complete set of superresolution diffractive elements is developed for the flat-top beam shaping, the single-circle beam shaping, and the novel circular Dammann grating. Five phase plates, corresponding to each of its applications, have been made by use of micro-optics technology. Experiments that are presented are in good agreement with the theoretical results. The superresolution technique presented in this paper should be highly interesting for the wide applications of laser beam shaping.     

Compensation of beam ellipticity and astigmatism based on holographic diffractive elements recorded onto spherical substrates

Abstract

Edge emitting diode lasers with their divergent, highly elliptical and astigmatic beams in the visible spectrum are widely used in all branches of photonics. Usually the beams must be transformed into circular anastigmatic beams for the majority of applications. Holographic diffractive elements on spherical substrates are devised for transformation of beams to circular collimated beams. An off-axis holographic set-up is used to record diffractive elements into a thin photoresist layer as shallow surface-relief gratings working in reflection mode with curved and chirped grooves. The elements are destined for the diode lasers emitting at a suitable wavelength and with appropriate ellipticity and astigmatism. The performance of the elements is tested on the basis of intensity patterns and the elements produced at a focal plane on their illumination with a collimated expanded beam of a HeNe laser.     

Application of holographic diffractive doublets as collimators for highly elliptical light beams edge emitted from diode lasers

Two schemes for collimation of diode laser light beams with high cross-sectional ellipticity by means of a doublet of holographic diffractive elements are proposed and designed; one of the schemes is realized and tested. In both the schemes the first element of the doublet collimates the beam in the plane of the longer axis of the ellipse, and the second element collimates it in the perpendicular plane. Each element simulates a cylindrical lens. The set-up with the focal line of the cylindrical beam oriented perpendicular to the meridional plane is realized experimentally. The elements are holographic surface-relief gratings recorded in photoresist. For recording, only homocentric diverging beams are used, which minimizes potential aberrations and optical dirt. The parameters of the elements are computed using four equations, including one equation for compensation of the aberration of the lowest order. The doublet is proposed for the He—Ne red wavelength. A collimated He—Ne laser beam is employed for quality testing of collimation in a reverse way, with this beam impinging upon the second element. Characteristics of an outgoing beam from the first element of the doublet are recorded with a charge-coupled device camera. Calculated spot diagrams are compared with cylindrical focal lines captured separately from both the elements.     

Acoustooptic 2-D profile shaping of a Gaussian laser beam

Acoustooptic 2-D profile shaping of a Gaussian laser beam has been achieved by two plane ultrasonic waves progressing in orthogonal directions. The spot size W of the Gaussian laser beam must be considerable less than the wavelength lambda of the ultrasonic wave at the acoustooptic interaction region. The ultrasonic cell is dealt with as a Raman-Nath 2-D phase grating but serves as a 2-D beam deflector in time for the interaction scheme of interest. The wave front of the Gaussian laser beam must be almost plane in the interaction region. The profile shaping condition is 0.15 < or = (W/lambda) < or = 0.30 only when the Raman-Nath parameter dependent on the ultrasonic power has values between v = 1.0 and 2.0.     

Optimization design of diffractive phase elements for beam shaping

An improved approach called the weighted YG algorithm for the design of the diffractive phase element (DPE) that implements beam shaping in the fractional Fourier transform domain and free space is presented. Modeling designs of the DPE are carried out for several fractional orders and different parameters of the beam for optimally converting a Gaussian profile into a uniform beam. We found that our algorithm can improve the beam shaping effect, reduce the error function, and increase uniformity of light intensity.     

Comparison of resonator-originated and external beam shaping

The spatial shaping of laser beams is a subject of research in modern optics. Recently the introduction of diffractive elements in laser resonators has offered an alternative to external beam-shaping optics by mode shaping within the resonator. We describe the specification of the laser resonator mirrors to obtain by means of internal mode shaping a desired beam outside the resonator. Modal discrimination of the modified resonator and the mirror alignment sensitivity is discussed. Basic features of resonator-originated and external beam shaping are compared.     

Functional integrated optical elements for beam shaping with coherence scrambling property, realized by interference lithography

Many applications, such as semiconductor lithography and material processing, require the shaping of laser beams to provide a homogenous field illumination. We present the conception, implementation, and experimental verification of a combined single-element homogenizer. Additionally, for excimer laser applications, the concept is associated with a coherence scrambling capability. We used the technique of holographic interference lithography to integrate the multifunctional properties in a diffractive optical element. The wavelength difference between the recording process (457.9 nm) and the application (193 nm) results in a change of the imaging properties and requires a geometrical adaptation of the optical setup. The coherence scrambling effect of the setup is based on an off-axis design, including the beam shaping diffractive structure.     

Diffraction characteristics of optical elements designed as phase layers with cosine-profiled periodicity in the azimuthal direction

The article concerns an investigation of the Fresnel diffraction characteristics of two types of phase optical elements under Gaussian laser beam illumination. Both elements provide an azimuthal periodicity of the phase retardation. The first element possesses azimuthal cosine-profiled phase changes deposited on a plane base. The second element is a combination of the first element and a thin phase axicon. The cosine profile of the phase retardation of both diffractive elements produces an azimuthal cosine-profiled modulation on their diffractograms. It destroys the vortex characteristics of their diffraction fields.     

Effects of the spatial frequency composition of the target pattern and the number of quantization levels in diffractive beam shaper design

A mathematical model is derived, and numerical simulation is analyzed for laser beam shaping by using multilevel phase-only diffractive optical elements (DOEs). We used the simulated annealing algorithm to design the beam shapers. The result has an essential effect on the diffractive pattern quality caused by the spatial frequency composition of target patterns for the same incident gaussian beam size and target pattern area. The root mean square error between the diffractive and target patterns is smaller for the target patterns with lower spatial frequencies. Moreover, the effect of spatial frequency composition can be relaxed for the cases of larger incident gaussian beam size. In addition, finer quality control of a diffraction pattern can be obtained by increasing the number of quantization levels at the DOEs.     

Designing diffractive phase plates for beam smoothing in the fractional Fourier domain

A new modification of the output plane constraint is used in the iterative algorithm for designing diffractive phase plates (DPPs) to produce spatial beam smoothing in the fractional Fourier (FRT) domain. Compared with previously published algorithms, this algorithm can provide faster convergence, more powerful ability to overcome the local minimum problem and better smoothing quality. By computer simulation, it has shown that the DPP designed by this algorithm has the advantages of high uniformity at the main lobe, low profile error and steep edge.     

Phase-only diffractive optical elements with subdiffraction-limited depth of focus

Abstract

Phase-only subdiffraction-limited depth of focus (DOF) elements are proposed and a relatively simple method is given which reduces the number of design parameters to four. A diffractive optical element with subdiffractive-limited DOF was experimentally demonstrated for the first time. Experimental results are in close agreement with numerical prediction. Several calculated examples show that the DOF for subdiffraction-limited elements can decrease by an amount, ranging from 37% to 71% compared to the DOF for a diffraction-limited element when ρ is chosen close to zero. The reduction is determined by the focal length of the element and the required distance between the primary peak (focal plane) and the secondary peak, both in units of wavelength. The latter, i.e. the peak-to-peak distance, determines the maximum applicable DOF. The influence of input laser beam parameters, such as phase distribution and beam size, on the focusing performance have also been investigated.     

High-efficiency production of propagation-invariant spot arrays

Tailoring of the transverse intensity profiles of propagation-invariant optical fields is considered. The design of diffractive elements capable of realizing such fields by Fourier synthesis is discussed. High-efficiency realization of finite-aperture approximations of the constructed fields is demonstrated in a system consisting of two multilevel diffractive elements. The first element is a diffractive toroidal lens, which focuses the incident field into a ring pattern. The second diffractive element, located at the focal plane of the first element, introduces the phase modulation necessary to realize the desired transverse intensity profile behind a separate collimating lens. The influence of the fabrication errors of the diffractive elements on the fidelity of the propagation-invariant spot array is simulated, and system-integration aspects based on substrate-mode planar-integrated optics are considered.     

Diffractive microlenses replicated in fused silica for excimer laser-beam homogenizing

A diffractive beam homogenizer, based on an array of square, off-axis, continuous-relief diffractive microlenses, for use with an excimer laser has been studied. We originally fabricated the homogenizer by direct-write electron-beam lithography, from which we made replicas in UV-grade fused silica by hot embossing and reactive ion etching. Atomic force microscopy measurements of original and replicated elements showed the accuracy of the replication fidelity. One of the replicated homogenizers was evaluated together with a KrF excimer laser. The homogenized beam had a flat-top profile with 31% of the beam energy contained within an area where the beam intensity was above a threshold level of 90% of the maximum intensity.     

Automatic symmetrical iterative Fourier-transform algorithm for the design of diffractive optical elements for highly precise laser beam shaping

A symmetrical iterative Fourier-transform algorithm (IFTA) using a combination of phase and amplitude freedom for the design of diffractive optical elements for highly precise laser beam shaping is presented. We compare this method with the basic IFTA and the symmetrical IFTA exclusively using phase freedom, and the basic IFTA using both phase and amplitude freedom, by employing these methods for super-Gaussian beam shaping. While the latter three methods fail to produce satisfactory solutions, the first method results in a beam non-uniformity error of 0.44% and a theoretical efficiency of 97.2%. Moreover, the new approach avoids the use of the trial-and-error method for finding the appropriate modified Fourier-domain constraints during the iteration, which can be difficult for some beam-shaping problems.     

Beam shaping in the nonparaxial domain of diffractive optics

We address the problem of shaping the radiant intensity distribution of a highly nonparaxial coherent field by means of a diffractive element located in the plane of the beam waist. To be capable of wide-angle energy redistribution the element must necessarily contain wavelength-scale transverse features, and consequently it must be designed on the basis of rigorous diffraction theory. We consider, in particular, wide-angle Gaussian to flat-top beam shaping in one dimension. Scalar designs are provided and their validity is evaluated by rigorous diffraction theory, which is also used for optimization deep inside the nonparaxial domain, where the scalar designs fail. Experimental verification is provided by means of electron-beam lithography.     

Diffractive light attenuators with variable transmission

Abstract

A new application of diffractive optical elements (DOEs) for continuous or multistage adjustment of optical radiation intensity is described. The diffractive attenuators are linear or circular gratings (amplitude or phase) with constant period and diffraction efficiency that varies across the grating. The zero order of diffraction is used as the output and transmitted through the grating without angular deviation. The diffractive attenuators, in distinction to conventional analogues, allow one to change the intensity of the light beam according to predetermined function and have no limitations for power of the regulated light beam. These elements can be used in optical systems as a beam splitter with adjusted splitting coefficient. The experimental results on a circular diffractive attenuator fabricated by direct laser writing on a chromium film are presented. The range of transmission variation was 20 times within a 340° angle of attenuator turn. The possibility to use a phase diffractive attenuator as a light radiation modulator for a powerful technological laser is discussed.