Analysis of a scanning pentaprism system for measurements of large flat mirrors

The optical surface of a large optical flat can be measured using an autocollimator and scanning pentaprism system. The autocollimator measures the slope difference between a point on the mirror and a reference point. Such a system was built and previously operated at the University of Arizona. We discuss refinements that were made to the hardware, the alignment procedure, and the error analysis. The improved system was demonstrated with a 1.6 m flat mirror, which was measured to be flat to 12 nm rms. The uncertainty in the measurement is only 9 nm rms.     

基于静力称重法的微小容量光学检测系统标定

实验室常用静力称重法对微量液体容量进行检测,该方法在1μL容量的精确度达到2.18%,重复性为1.85%,但该方法无法在实验室外进行。现有的光学测量微量液体容量法的在1μL的精度为6.09%,重复性为1.31%。该法可实现在线检测,但其精度不如静力称重法。对光学测量微量液体容量的方法进行研究分析,提出了一种新的标定容量参照标准的方法,该标定方法将静力称重法与光学测量法两者结合,以静力称重法容量测量结果为参照标准,代替光学法原先的标准液。新的标定方法在原理上将参照标准由点扩展到线,可将光学测量法在10μL点的精度提高到2.014%,重复性1.30%。     

Wavefront error measurement of high-numerical-aperture optics with a Shack-Hartmann sensor and a point source

We developed a new, to the best of our knowledge, test method to measure the wavefront error of the high-NA optics that is used to read the information on the high-capacity optical data storage devices. The main components are a pinhole point source and a Shack-Hartmann sensor. A pinhole generates the high-NA reference spherical wave, and a Shack-Hartmann sensor constructs the wavefront error of the target optics. Due to simplicity of the setup, it is easy to use several different wavelengths without significant changes of the optical elements in the test setup. To reduce the systematic errors in the system, a simple calibration method was developed. In this manner, we could measure the wavefront error of the NA 0.9 objective with the repeatability of 0.003 lambda rms (lambda = 632.8 nm) and the accuracy of 0.01 lambda rms.     

Improvements in the accuracy and the repeatability of long trace profiler measurements

Modifications of the long trace profiler at the Advanced Photon Source at Argonne National Laboratory have significantly improved its accuracy and repeatability for measuring the figure of large flat and long-radius mirrors. Use of a Dove prism in the reference beam path corrects phasing problems between mechanical errors and thermally induced system errors. A single reference correction now completely removes both of these error signals from the measured surface profile. The addition of a precision air conditioner keeps the temperature in the metrology enclosure constant to within +/-0.1 degrees C over a 24-h period and has significantly improved the stability and the repeatability of the measurements. Long-radius surface curvatures can now be measured absolutely with a high degree of confidence. These improved capabilities are illustrated with a series of measurements of a 500-mm-long mirror with a 5-km radius of curvature. The standard deviation in the average of ten slope profile scans is 0.3 microrad, and the corresponding standard deviation in the height error is 4.6 nm.     

计量型激光椭偏仪初始入射角校准方法的研究

为保证计量型激光椭偏仪测量结果的准确性,研究了一种初始入射角校准方法,通过线性位移台带动CCD相机进行一维运动,其运动轴作为空间线性辅助参考量,实现了椭偏仪的入射激光光轴与自准直仪光轴的90°校准。结果表明:采用该方法校准计量型激光椭偏仪的初始入射角,光轴俯仰角偏差＜0.05°,偏摆角偏差＜0.09°;校准后,对标称值为102.10nm的Si上SiO₂膜厚标准片进行测量,示值误差＜0.4nm,提升了计量型激光椭偏仪测量校准服务的准确性。     

Surface gradient integrated profiler for X-ray and EUV optics

A new ultraprecise profiler has been developed to measure, for example, asymmetric and aspheric profiles. The principle of our measuring method is that the normal vector at each point on the surface is determined by making the incident light beam on the mirror surface and the reflected beam at that point of coincident. The gradient at each point is calculated from the normal vector, and the surface profile is then obtained by integrating the gradients. The measuring instrument was designed in accordance with the above principle. In the design, four ultraprecise goniometers were applied to adjust the light axis for normal vector measurement. The angle-positioning resolution and accuracy of each goniometer are, respectively, 0.018 and 0.2 μrad. Thus, in the measuring instrument, the most important factor is the accuracy of the normal vectors measured by the goniometers. Therefore, the rotating angle-positioning errors were measured and calibrated. An elliptical profile mirror for nanometer hard-X-ray focusing was measured, and compared with the measured profile using a stitching interferometer. The absolute measurement accuracy of approximately 5 nm (peak-to-valley) was achieved. Then the measurements of 1000-mm-long flat, spherical and parabolic mirrors were demonstrated. The surface profiles of the mirrors were obtained by integrating the interpolated gradient.     

Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam

A fast scanning method for one-dimensional surface profile measurement is proposed. The profile is measured by integration of a slope distribution of the surface obtained from angular deflection of a scanning laser beam. A scanning optical system that consists principally of a spherical concave mirror and a rotating scanner mirror has reasonably low cost and is insensitive to mechanical vibration because of its high-speed scanning, of the order of milliseconds. A surface profile of a polygonal mirror along a 5-mm width was measured with the scanning method and with an interferometer. The root-mean-square difference between the two measured results is 0.98 nm.     

白光干涉测量系统的测量不确定度评定

白光干涉测量系统(white-light interference system,WLIS)广泛用于微纳米表面形貌的精密测量,其测量不确定度评定是研究白光干涉测量系统计量特性的一项重要工作.基于微纳米线间隔和台阶,建立了 WLIS测量表面形貌时的测量模型,明确了测量不确定度来源;以5000 nm的线间隔和180 nm的...     

半光斑成像式多功能激光瞄准测头的研究

运用半光斑成像原理设计了一种用于三坐标测量机的多功能激光瞄准测头。详细介绍了测头的光学系统工作原理和设计思路,采用自适应控制方法实时调节激光光强使其可以适应不同光学特性表面的瞄准测量,并进行了多功能测头的重复性瞄准测量、灵敏度测量、倾角跟踪实验。实验结果表明,该测头重复性瞄准测量不确定度优于1 μm,测量灵敏度可达30 mV/μm,激光跟踪瞄准被测曲面倾角可达25°,能满足三坐标测量机的使用要求。该测头具有检测速度快、自动化程度高、瞄准精度高的特点,结合三坐标测量机或者其它测长仪器,能够实现对自由曲面进行快速精确瞄准及轮廓图像瞄准测量,具有广泛的应用前景和实用价值。     

Surface characterization of micro-optical components by Foucault's knife-edge method: the case of a micromirror array

As micro-optical components are introduced into optical systems, accurate surface characterization becomes important. We describe a method for quantitative evaluation of surface deformations based on Foucault's knife-edge test. By measurement of local slopes, the surface shape of each mirror in a micromirror array has been reconstructed with a subnanometer accuracy. In addition to low-order deformation (tilt, curvature, astigmatism), each mirror is seen to be palm-tree shaped. This may be explained by strain relaxation in the fabrication process. Measurement on a conventional concave mirror confirms our method.     

Radiometric Measurement Comparison on the Integrating Sphere Source Used to Calibrate the Moderate Resolution Imaging Spectroradiometer (MODIS) and the Landsat 7 Enhanced Thematic Mapper Plus (ETM+)

As part of a continuing effort to validate the radiometric scales assigned to integrating sphere sources used in the calibration of Earth Observing System (EOS) instruments, a radiometric measurement comparison was held in May 1998 at Raytheon/Santa Barbara Remote Sensing (SBRS). This comparison was conducted in support of the calibration of the Moderate Resolution Imaging Spectroradiometer (MODIS) and the Landsat 7 Enhanced Thematic Mapper Plus (ETM+) instruments. The radiometric scale assigned to the Spherical Integrating Source (SIS100) by SBRS was validated through a comparison with radiometric measurements made by a number of stable, well-characterized transfer radiometers from the National Institute of Standards and Technology (NIST), the National Aeronautics and Space Administration’s Goddard Space Flight Center (NASA’s GSFC), and the University of Arizona Optical Sciences Center (UA). The measured radiances from the radiometers differed by ±3 % in the visible to near infrared when compared to the SBRS calibration of the sphere, and the overall agreement was within the combined uncertainties of the individual measurements. In general, the transfer radiometers gave higher values than the SBRS calibration in the near infrared and lower values in the blue. The measurements of the radiometers differed by ±4 % from 800 nm to 1800 nm compared to the SBRS calibration of the sphere, and the overall agreement was within the combined uncertainties of the individual measurements for wavelengths less than 2200 nm. The results of the radiometric measurement comparison presented here supplement the results of previous measurement comparisons on the integrating sphere sources used to calibrate the Multi-angle Imaging SpectroRadiometer (MISR) at NASA’s Jet Propulsion Laboratory (JPL), Pasadena, CA and the Advanced Spaceborne Thermal Emission and Reflection Radiometer (ASTER) at NEC Corporation, Yokohama, Japan.     

Calibration of a 300-mm-aperture phase-shifting Fizeau interferometer

A 300-mm-aperture digital phase-shifting Fizeau interferometer has been developed in-house for precision metrology of optical components fabricated by the optical workshop at Telecommunications and Industrial Physics, Commonwealth Scientific and Industrial Research Organization. We describe the procedures used in the calibration of the instrument. A reference data file representing the deviations from flatness of the reference surface is generated, measurement uncertainty estimated, and aberrations in the instrument assessed. Measurements on 250-mm-diameter uncoated optical surfaces have consistently shown short-term repeatability of 0.3-nm rms from measurement to measurement and allowed for absolute characterization of these surfaces to within a few nanometers.     

超光滑表面轮廓的绝对测量

本文提出了一种测量超光滑表面轮廓的绝对测量方法。采用微分干涉显微镜直接测量表面轮廓的差分，从而无需使用标准参考反射镜，并能有效在抑制机械振动等环境干扰对测量结果的影响。在不采取隔振和恒温等环境控制措施的一般实验室场合下，就可达到优于０．１ｎｍ的垂直分辨率和０．１５ｎｍ的表面轮廓重复测量精度。     

Determining the optical constants of read-write sliders during flying-height testing

Flying-height testers for rigid disk drives employ a transparent glass substrate in place of the magnetic disk and use optical interferometry to measure the flight properties of the read-write slider. Because of the material phase change on reflection, the effective optical constants n and k of the slider play an important role in the measurement. We describe an instrument that determines the optical constants simultaneously with flying height, using polarization interferometry. This in situ analysis of n and k obviates the need for independent ellipsometry, while avoiding the problematic retract calibration characteristic of traditional flying-height test equipment. The rms uncertainty for n and k are 0.04, resulting in height uncertainties that range from 3 nm for 250-nm flying heights down to 0.5 nm at contact. We verify these results by use of a variety of experimental techniques on both laboratory samples and actual read-write sliders.     

Measurement of profiles along a circle on two flat surfaces by use of a Fizeau interferometer with no standard

A method for measuring profiles along a circle on a flat surface with no standard is described. For the measurement, two unknown surfaces are placed almost parallel, and the distance between them is measured many times along a circle by rotation of one of the surfaces. Profiles of the two surfaces can be determined from the distance data. In this study the measuring method is explained: The space between two surfaces measured with a Fizeau interferometer. Four measuring experiments are carried out for determining the profile of a precision-grade half-mirror; in each experiment a different ordinary mirror with unknown profile is used as the second mirror. Profiles of the precise mirrors obtained by these experiments agree closely, with deviations of approximately 2 nm. A similar experiment with many concentric circles was carried out with a precise half-mirror and another precise mirror. Although the profiles of many concentric circles were independent of one another, the result shows that the high-frequency component of a whole plane can be estimated.     

Optical control of the Advanced Technology Solar Telescope

The Advanced Technology Solar Telescope (ATST) is an off-axis Gregorian astronomical telescope design. The ATST is expected to be subject to thermal and gravitational effects that result in misalignments of its mirrors and warping of its primary mirror. These effects require active, closed-loop correction to maintain its as-designed diffraction-limited optical performance. The simulation and modeling of the ATST with a closed-loop correction strategy are presented. The correction strategy is derived from the linear mathematical properties of two Jacobian, or influence, matrices that map the ATST rigid-body (RB) misalignments and primary mirror figure errors to wavefront sensor (WFS) measurements. The two Jacobian matrices also quantify the sensitivities of the ATST to RB and primary mirror figure perturbations. The modeled active correction strategy results in a decrease of the rms wavefront error averaged over the field of view (FOV) from 500 to 19 nm, subject to 10 nm rms WFS noise. This result is obtained utilizing nine WFSs distributed in the FOV with a 300 nm rms astigmatism figure error on the primary mirror. Correction of the ATST RB perturbations is demonstrated for an optimum subset of three WFSs with corrections improving the ATST rms wavefront error from 340 to 17.8 nm. In addition to the active correction of the ATST, an analytically robust sensitivity analysis that can be generally extended to a wider class of optical systems is presented.     

Phase-locked phase-shifting laser diode interferometer with photothermal modulation

We propose a phase-shifting interferometer that uses both phase-locked and photothermal modulating techniques. In this interferometer the measurement accuracy is not affected by the intensity modulation that usually appears in current modulation. The surface profile of a diamond-turned aluminum disk was measured; the rms repeatability obtained was lambda/460.     

飞秒脉冲光谱测量对时域波形重建的影响

利用光谱相位还原直接电场重建法对飞秒脉冲激光时域波形进行重建,分析了光谱测量波长示值误差和光谱辐照度示值误差对于飞秒脉冲光谱测量的影响。使用低压汞灯对光谱仪波长校准,根据校准结果,对测量光谱蓝移和红移,通过数值模拟研究波长示值误差对重建脉冲波形的影响;利用光谱辐射照度标准装置对光谱仪光谱辐照度校准,通过增加白噪声模拟分析和各种常用反射片实验测量研究光谱辐照度示值误差对重建脉冲波形的影响。结果表明,光谱测量波长示值误差和光谱辐照度示值误差对于飞秒脉冲光谱测量的相对标准差在1%之内。     

拉线传感器变角度工作条件下的校准

利用光频梳对稳频激光波长进行测量是建立基于光频梳的波长基标准的必经程序。为了建立基于光频梳的波长标准,并为开展激光波长校准工作提供技术准备,利用自研光纤光频梳对乙炔稳频1542 nm激光波长进行了测量。利用光频梳产生参考激光与待测激光差拍,通过简单的代数关系获得了乙炔稳频激光的绝对频率和真空波长,并与相应的国际推荐值进行了对比。实测获得的乙炔稳频激光的真空波长值为1542.38 371 235 742 nm,在CIPM给定的不确定度范围内,秒稳定度为4.13 × 10^-13。两台不同的光频梳对乙炔稳频激光波长的测量结果具有高度一致性,进一步证明了光频梳对激光波长的测量准确性。本研究对于顺应国际长度基标准发展趋势,加速光频梳在激光波长测量领域的应用进程具有重要意义。