首页 | 本学科首页   官方微博 | 高级检索  
相似文献
 共查询到20条相似文献,搜索用时 62 毫秒
1.
N等离子体基注渗方法研究   总被引:3,自引:0,他引:3  
孙跃  董学军  夏立芳 《真空》2003,(3):33-37
等离子体基注渗技术在材料表面改性中具有极为重要的应用,本文报道了一种实现恒温条件的N等离子体基注渗的工艺方法,利用该方法可以根据工艺研究需要,实现注渗剂量、注渗能量(加速电压)和注渗温度单一参数调节,为等离子体体基注渗工艺的优化提供了一种切实可行的研究方法。利用本文提出的工艺方法,对纯铁进行了各种温度下的N离子注渗。结果表明,处理过程中,可依据工艺设计,单参数大范围改变注渗电压或注渗恒温温度,温度波动很小,离子注入层厚度得到明显提高。  相似文献   

2.
等离子体浸没离子注入(PIII)是用于材料表面改性的一种较新的、廉价的、非视线的技术.靶体被浸没在等离子体中,等离子体中的离子在靶体负脉冲偏压的作用下注入靶体而实现材料的表面改性.为了描述等离子体浸没离子注入过程,我们引用了一维粒子模型(PIC)对其进行了数值模拟,该模型通过求解空间电势的Poisson方程,电子的Bolzmann分布以及离子在网格中受力运动的Newton运动方程来完成.本文重点研究了一个初始离子阵鞘层内电势、离子浓度、离子注入靶体的速度和动能以及离子流密度的时空演化规律.  相似文献   

3.
于伟东  王曦  陈静  张苗 《功能材料》2002,33(4):347-349,353
注氧隔离法(SIMOX)和体硅智能剥离法(Smart-cut)是目前制备绝缘体上的硅(SOI)材料的最重要的两种方法。而离子注入是其中最主要工艺过程。本文简述了等离子体基离子注入(PBII)在制备SOI的两种方法中应用的国内外研究现状。讨论了两种方法中需要考虑的共性问题,包括注入剂量的均匀性、等离子体中离子的选择、单一能量的获得以及避免C、N、O及金属粒子的污染等。并且针对SIMOX和smart-cut各自的工艺特点,分别讨论了不同工艺参数的选择、工艺中出现的主要问题和一些已经得到的解决办法。  相似文献   

4.
等离子体浸没离子注入及表面强化工艺的进展   总被引:4,自引:0,他引:4  
等离子体浸没离子注入 (PIII)消除了传统束线离子注入 (IBII)固有的视线限制 ,是一种更适合于处理复杂形状工件的手段 .近十年来 ,PIII及其工业应用在国内外得到了迅速发展 .然而 ,随着PIII的研究与开发的深入 ,发现仍有若干重要的物理与技术问题 ,诸如浅的注入层、离子注入不均匀性、气体 (氮 )等离子体的有限应用范围等等 ,阻碍了PIII工业应用的发展 .目前 ,这些问题已成为国内外学者关注的焦点 .我实验室近年来在注入过程鞘层动力学的计算机理论模拟、离子注入剂量不均匀性改善、圆筒内表面注入研究、新型长射程阴极弧金属等离子体源研制、气体及金属等离子体的综合性表面改性工艺研究、以及低能高温PIII新工艺研究等方面进行了研究工作 .  相似文献   

5.
本文综述了近几十年才研制发展的一种新型的用于材料表面改性的离子注入新技术——等离子体浸没离子注入 (P ) ,待处理的材料直接浸泡在等离子体中进行处理。该技术保留了常规束线离子注入(CB )技术的主要特点 ,还具有需多独特的特点。将系统介绍该技术在现代材料表面改性中的各方面应用及发展。  相似文献   

6.
等离子体源离子注入(PSII)是一种新的离子注入技术。该技术与其它相关技术的结合又扩大了其应用。介绍国内首次研制成功的多功能PSI工业样机的结构、性能、参数以及材料改性的初步结果。  相似文献   

7.
微波电子回旋共振等离子体是淀积薄膜、微细加工和材料表面改性的一种重要手段。由于这种等离子体电离水平高,化学活性好,可以用来实现基片上薄膜的室温化学气相淀积和反应离子刻蚀,因此对于微电子学、光电子学和薄膜传感器件的发展,这种等离子体会具有重要的意义。此外,采用微波电子回旋共振等离子体原理,没有灯丝的离子源可以提高离子源的使用寿命,可以增加离子束的束流密度。可以确信,微波电子回旋共振等离子体的发展,将把离子源技术提高到一个新的水平。显然,这必将对材料表面改性工艺,包括离子注入掺杂等工艺的发展发挥作用。自从1985年以来,为了得到大容积等离子体而发展了微波电子回旋共振多磁极等离子体,这些技术在薄膜技术、微细加工以及材料表面改性中的应用前景是乐观的。我们将在本文中,介绍微波电子回旋共振等离子体的原理及其应用。  相似文献   

8.
等离子体基离子注入制备TiN膜的成分结构   总被引:1,自引:0,他引:1  
采用Ti、N等离子体基离子注入和先在基体表面沉积纯钛层然后离子注氮混合两种方法在铝合金基体上制备了TiN膜.利用XPS分析了两种方法制备TiN薄膜的成分深度分布和元素化学价态,并用力学性能显微探针测试对比了TiN膜的纳米硬度.研究表明:两种方法制备的薄膜均由TiN组成,Ti、N等离子体基离子注入薄膜中Ti/N≈1.1,而离子注入混合薄膜中Ti/N≈1.3,Ti、N等离子体基离子注入薄膜表面区域为TiN和TiO2的混合组织,TiN含量多于TiO2,离子注入混合薄膜表面主要是TiO2;Ti、N等离子体基离子注入所制备的薄膜的纳米硬度峰值为12.26 GPa,高于离子注入混合的7.98 GPa.  相似文献   

9.
采用新改进的阴极弧金属等离子体源,对9Cr18轴承钢进行了金属等离子体浸没离子注入(PⅢ)处理,首先将Ti、Mo和W离子分别注入到9Cr18钢的表面,然后再对其进行N等离子体浸没离子注入,从而在9Cr18钢表面形成了一层超硬耐磨的改性层。  相似文献   

10.
螺旋波等离子体的密度与离子能量分布的诊断   总被引:1,自引:0,他引:1  
螺旋波等离子体是一种高密度的低温、低气压等离子体。这种等离子体在超大规模集成电路工艺,微机电系统加工、新型薄膜材料及纳米材料制备、材料表面改性以及气体离子激光器等方面具有广泛的应用前景。本采用一套球栅阻滞场带通式能量分析器,对螺旋波等离子体在工艺室扩散区样品架表面的特性进行了一些初步的实验研究,主要测试了在样品附近的等离子体在其表面上所形成的离子流密度(从而导出等离子体密度)以及入射离子的能量分布,并对这些参数随射频输入功率的变化进行了研究。研究发现,在螺旋波等离子体的扩散区,离子能量分布的宽度比用离子温度预期的值大得多,本定性地讨论了其原因。  相似文献   

11.
In this paper, we present a new method for inserting several triangulated surfaces into an existing tetrahedral mesh generated by the meccano method. The result is a conformal mesh where each inserted surface is approximated by a set of faces of the final tetrahedral mesh. First, the tetrahedral mesh is refined around the inserted surfaces to capture their geometric features. Second, each immersed surface is approximated by a set of faces from the tetrahedral mesh. Third, following a novel approach, the nodes of the approximated surfaces are mapped to the corresponding immersed surface. Fourth, we untangle and smooth the mesh by optimizing a regularized shape distortion measure for tetrahedral elements in which we move all the nodes of the mesh, restricting the movement of the edge and surface nodes along the corresponding entity they belong to. The refining process allows approximating the immersed surface for any initial meccano tetrahedral mesh. Moreover, the proposed projection method avoids computational expensive geometric projections. Finally, the applied simultaneous untangling and smoothing process delivers a high‐quality mesh and ensures that the immersed surfaces are interpolated. Several examples are presented to assess the properties of the proposed method.  相似文献   

12.
Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.……  相似文献   

13.
14.
A flow calorimeter for enthalpy increment measurements on condensed gases is presented. A better knowledge of the properties of the liquefied natural gas is needed, and therefore a liquid loop has been designed for our flow calorimeter. The fluid loop in the calorimeter is designed in order to avoid the two-phase region, since two phases would give compositional disturbances in the measurements. The avoidance of the two-phase region is made possible by increasing the pressure of the test fluid after the measurement section, then heating the fluid at super-critical pressure past the critical point. Finally, the fluid is throttled to the low-pressure gas state at the inlet condition of the compressor that circulates the fluid. To perform the pressure increase, a new cryogenic pump has been designed. To evaluate the new equipment, measurements were taken on liquid ethane over the temperature range 146–256 K at pressure between 0.9 and 5.1 MPa.  相似文献   

15.
On November 30, 2007, the China Association for Standardization (CAS) held a press conference at Beijing Diaoyutai State Guest House. Leaders from the China Household Electric Appliance Research Institute, the China Household Electric Appliance Association, and the China Consumers' Association attended and made speeches.……  相似文献   

16.
Zusammenfassung Bei der Gestaltung von Ernteprozessen — beispielsweise des Prozesses Mähdrusch, Körnertransport und -abnahme — als transportverbundene Fließarbeitsverfahren mit mindestens zwei verschiedenen Arbeitsmitteln gibt es einen großen Optimierungsspielraum. Solche Prozesse sind mehrstufige Bedienungsprozesse mit gemischter Anordnung der Bedienungseinrichtungen. Außerdem besitzen sie stark ausgeprägte räumliche Aspekte. Es wird vor allem gezeigt, welche Merkmale solcher Prozesse in Simulationsmodellen abgebildet sein müssen, welche Zielgrößen in Abhängigkeit von welchen Einflußgrößen unter Berücksichtigung welcher Prozeßbedingungen ermittelt werden sollten und wie der Bewertungsprozeß zur Ermittlung der gewünschten Informationen gestaltet werden muß.  相似文献   

17.
In the present study a high‐boron high speed steel (HSS) roll material was designed. Many expensive alloy elements have been substituted by cheap boron alloy, and high‐boron high speed steel roll has been manufactured by centrifugal casting method. The microstructures, mechanical properties and wear resistance of centrifugal casting high‐boron high speed steel roll have been investigated by optical microscopy (OM), scanning electron microscopy (SEM), and X‐ray diffraction (XRD) analysis, hardness test, impact test and wear test. The results indicated that the solidification microstructures of high‐boron high speed steel roll consisted of M2(B,C), (W,Mo)2(B,C), M3(B,C), M23(B,C)6 type borocarbides and martensite, a small amount of retained austenite. Borocarbides were continuously distributed over the grain boundary. After quenching from 1050 °C, local broken network appeared in partial borocarbides, and fine secondary borocarbide precipitated from the matrix. After tempering from 525 °C, the amount of precipitated borocarbide increased significantly. After heat treatment, the hardness of high‐boron high speed steel roll excelled 60 HRC, and its impact toughness excelled 8.0 J/cm2. The single groove steel rolling amount of high‐boron high speed steel rolls increases by 500% than that of bainite cast iron roll, when the rolls are used in K1 mill housing of bar mill.  相似文献   

18.
The definition of the thixotropy is a decrease in viscosity with time in shear and a subsequent recovery of viscosity after the shear deformation is removed.We ...  相似文献   

19.
正Responding to ISO’s appeal for survey for the to-be-developed ISO Strategy Plan for 2016-2020,SAC hosted a special workshop over the needs and comments of various fi elds on June 8 in Beijing.The workshop was attended by ISO President-elect and Ansteel General Manager Zhang Xiaogang,SAC Vice-Administrator Yu Xinli,and 30 experts from  相似文献   

20.
正The review group of Asia Pacific Laboratory Accreditation Cooperation(APLAC)carried out a 4-day peer review of the proficiency testing provider(PTP)for China National Accreditation Service for Conformity Assessment(CNAS)from July 28 to 31,2014.CNAS passed the PTP review with excellent performance.Two senior peer reviewers of APLAC made a comprehensive,rigorous and detailed review of CNAS’s PTP accreditation activities,and made the on-spot inspection of the review groups in Shanghai and Shenzhen respectively.  相似文献   

设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号