Fabrication and flow test of long-term hydrophilic fluidic chip without using any surface modification treatment

In order to effectively pump liquid in a fluidic chip, the PDMS or SU8 channels were frequently modified by surface treatments to obtain the hydrophilic surface but encountered the problem of the hydrophobic recovery. In this article, long-term highly hydrophilic fluidic chips were demonstrated using rapid fabrication of low-power CO₂ laser ablation and low-temperature glass bonding with an interlayer of liquid crystal polymer (LCP). The intrinsic hydrophilic materials of glass and LCP were beneficial for self-driven flow in the long-term fluidic chip by surface-tension force with no extra fluidic pumps. The higher viscosity fluid could increase the difficulty of self-driven capability. The stability of contact angle and flow test of the chip after 2 months is similar to that at beginning. The high-viscosity human whole blood was successfully driven at an average moving velocity of about 1.89 mm/s for the beginning and at 2.04 mm/s after 2 months. Our fluidic chip simplifies the traditional complex fabrication procedure of glass chips and conquers the problem of traditional hydrophobic recovery.     

Fabrication and testing of embedded microvalves within PMMA microfluidic devices

The integration of a PDMS membrane within orthogonally placed PMMA microfluidic channels enables the pneumatic actuation of valves within bonded PMMA–PDMS–PMMA multilayer devices. Here, surface functionalization of PMMA substrates via acid catalyzed hydrolysis and air plasma corona treatment were investigated as possible techniques to permanently bond PMMA microfluidic channels to PDMS surfaces. FTIR and water contact angle analysis of functionalized PMMA substrates showed that air plasma corona treatment was most effective in inducing PMMA hydrophilicity. Subsequent fluidic tests showed that air plasma modified and bonded PMMA multilayer devices could withstand fluid leakage at an operational flow rate of 9 μl/min. The pneumatic actuation of the embedded PDMS membrane was observed through optical microscopy and an electrical resistance based technique. PDMS membrane actuation occurred at pneumatic pressures of as low as 10 kPa and complete valving occurred at 14 kPa for ~100 μm by 100 μm channel cross-sections.     

Fabrication of large-volume microfluidic chamber embedded in glass using three-dimensional femtosecond laser micromachining

We report on fabrication of large-volume, square-shaped microfluidic chamber embedded in glass by scanning a tightly focused femtosecond laser beam inside a porous glass immersed in water. After the hollow structure is created in the porous glass substrate, the fabricated glass sample is post-annealed at 1,050°C during which it can be sintered into a compact glass. By the use of this technique, a 1 mm × 1 mm × 100 μm microchamber connected to four microfluidic channels is created inside the transparent glass substrate, showing that our technique allows for fabrication of not only thin channel structures with arbitrary lengths and configurations, but also hollow structures with infinitely large sizes.     

3D-printed peristaltic microfluidic systems fabricated from thermoplastic elastomer

Recent advancements in 3D printing technology have provided a potential low-cost and time-saving alternative to conventional PDMS (polydimethylsiloxane)-based microfabrication for microfluidic systems. In addition to reducing the complexity of the fabrication procedure by eliminating such intermediate steps as molding and bonding, 3D printing also offers more flexibility in terms of structural design than the PDMS micromolding process. At present, 3D-printed microfluidic systems typically utilize a relatively ‘stiff’ printing material such as ABS (acrylonitrile butadiene styrene copolymers), which limits the implementation of large mechanical actuation for active pumping and mixing as routinely carried out in a PDMS system. In this paper, we report the development of an active 3D-printed microfluidic system with moving parts fabricated from a flexible thermoplastic elastomer (TPE). The 3D-printed microfluidic system consists of two pneumatically actuated micropumps and one micromixer. The completed system was successfully applied to the detection of low-level insulin concentration using a chemiluminescence immunoassay, and the test result compares favorably with a similarly designed PDMS microfluidic system. Prior to system fabrication and testing, the material properties of TPE were extensively evaluated. The result indicated that TPE is compatible with biological materials and its 3D-printed surface is hydrophilic as opposed to hydrophobic for a molded PDMS surface. The Young’s modulus of TPE is measured to be 16 MPa, which is approximately eight times higher than that of PDMS, but over one hundred times lower than that of ABS.     

Magnetically controlled valve for flow manipulation in polymer microfluidic devices

A simple, external in-line valve for use in microfluidic devices constructed of polydimethylsiloxane (PDMS) is described. The actuation of the valve is based on the principle that flexible polymer walls of a liquid channel can be pressed together by the aid of a permanent magnet and a small metal bar. In the presence of a small NdFeB magnet lying below the channel of interest, the metal bar is pulled downward simultaneously pushing the thin layer of PDMS down thereby closing the channel stopping any flow of fluid. The operation of the valve is dependent on the thickness of the PDMS layer, the height of the channel, the gap between the chip and the magnet and the strength of the magnet. The microfluidic channels are completely closed to fluid flows ranging from 0.1 to 1.0 μL/min commonly used in microfluidic applications.     

Symmetric surficial phaseguides: a passive technology to generate wall-less channels by two-dimensional guiding elements

We present the usage of the symmetrical surficial phaseguides to generate wall-less channels. Wall-less channels are microfluidic channels which contain one or two interfaces with air. The technology is based on the symmetric combination of hydrophilic and hydrophobic surfaces inside the chip both on the top and bottom plate. The hydrophilic surfaces enable liquid propagation because of the capillary effect, while the hydrophobic surfaces are used as phaseguides where the capillary force prevents liquid propagation. The symmetric pattern of phaseguides on top and on bottom of the chip results in a robust guiding of the liquid and thus stable liquid–gas interfaces at the transition from the hydrophilic plate and the hydrophobic phaseguide. In order to apply this technology in various applications, design rules based on analytical derivations are presented and verified by experiments. These rules describe all elements of common channels like corners and intersections as well as design parameters like the channel width and the horizontal misalignment tolerances of the phaseguides. Finally, the technology is applied exemplary to create well-defined hydrogel membranes and to pump liquid through a channel. The main advantages of the technology are the stability of the channel, the large liquid–air interface area, the straight and vertical interface and the easy fabrication method.     

Fabrication of layered polydimethylsiloxane/perfluoropolyether microfluidic devices with solvent compatibility and valve functionality

The development of multilayer soft lithography methodology has seen polydimethysiloxane (PDMS) as the preferred material for the fabrication of microfluidic devices. However, the functionality of these PDMS microfluidic chips is often limited by the poor chemical resistance of PDMS to certain solvents. Here, we propose the use of a photocurable perfluoropolyether (PFPE), specifically FOMBLIN^® MD40 PFPE, as a candidate material to provide a solvent-resistant buffer layer to make the device substantially impervious to chemically induced swelling. We first carried out a systematic study of the solvent resistance properties of FOMBLIN^® MD40 PFPE as compared with PDMS. The comparison presented here demonstrates the superiority of FOMBLIN^® MD40 PFPE over PDMS in this regard; moreover, the results permitted to categorize solvents in four different groups depending on their swelling ratio. We then present a step-by-step recipe for a novel fabrication process that uses multilayer lithography to construct a comprehensive solvent-resistant device with fluid and control channels integrated with a valve structure and also permitting easy establishment of outside connections.     

Pre-programmable polymer transformers as on-chip microfluidic vacuum generators

This paper develops novel polymer transformers using thermally actuated shape memory polymer (SMP) materials. This paper applies SMPs with thermally induced shape memory effect to the proposed novel polymer transformers as on-chip microfluidic vacuum generators. In this type of SMPs, the morphology of the materials changes when the temperature of materials reaches its glass transition temperature (T _g). The structure of the polymer transformer can be pre-programmed to define its functions, which the structure is reset to the temporary shape, using shape memory effects. When subjected to heat, the polymer transformer returns to its pre-memory morphology. The morphological change can produce a vacuum generation function in microfluidic channels. Vacuum pressure is generated to suck liquids into the microfluidic chip from fluidic inlets and drive liquids in the microchannel due to the morphological change of the polymer transformer. This study adopts a new smart polymer with high shape memory effects to achieve fluid movement using an on-chip vacuum generation source. Experimental measurements show that the polymer transformer, which uses SMP with a T _g of 40°C, can deform 310 μm (recover to the permanent shape from the temporary shape) within 40 s at 65°C. The polymer transformer with an effective cavity volume of 155 μl achieved negative pressures of −0.98 psi. The maximum negative up to −1.8 psi can be achieved with an effective cavity volume of 268 μl. A maximum flow rate of 24 μl/min was produced in the microfluidic chip with a 180 mm long channel using this technique. The response times of the polymer transformers presented here are within 36 s for driving liquids to the end of the detection chamber. The proposed design has the advantages of compact size, ease of fabrication and integration, ease of actuation, and on-demand negative pressure generation. Thus, this design is suitable for disposable biochips that need two liquid samples control. The polymer transformer presented in this study is applicable to numerous disposable microfluidic biochips.     

Embedding off-the-shelf filter in PDMS chip for microbe sampling

Filtration for microfluidic sample-collection devices is desirable for sample selection, concentration, preprocessing, and manipulation, but microfabricating the required sub-micrometer structures is an elaborate process. This article presents a simple method to integrate filters in polydimethylsiloxane (PDMS) devices to sample microorganisms in aqueous environments. An off-the-shelf membrane filter with 0.22-μm pores was embedded in a PDMS layer and sequentially bound with other PDMS channel layers. No leakage was observed during filtration. This device was validated by concentrating a large amount of biomass, from 15 × 10⁷ to 3 × 10⁸ cells/ml of cyanobacterium Synechocystis in simulated sample water with consistent performance across devices. The major advantages of this method are low cost, simple design, straightforward fabrication, and robust performance, enabling wide-utility of chip-based devices for field-deployable operations in environmental microbiology.     

Miniaturized variable-focus lens fabrication using liquid filling technique

This paper describes a simple method for fabricating a variable-focus lens using polydimethylsiloxane (PDMS) filling with liquid to produce a variable-focus lens. A 2-mm diameter lens was designed in this experiment, expected to reach a focal length in the range of 3 ∼ 12 mm. The theoretical value between the liquid volume and the lens contact angle at different focal lengths were simulated and measured. The pumped-in liquid volumes ranged from 200 to 1,400 μl. The contact angles ranged from 14.25° to 49.02°. Variable focal length was produced by changing the PDMS film deformation using different micro-fluidic volumes. The focal length produce in the experiment was from 4 ∼ 10 mm. The proposed method successfully fabricated a variable-focus lens. Bonding PDMS only once using no expensive instrument such as oxygen plasma was accomplished. The final objective is to insert the variable focus lens into portable optical imagery products.     

Long-term behavior of nonionic surfactant-added PDMS for self-driven microchips

The outstanding characteristics of polydimethylsiloxane (PDMS) owe its extensive use to the fact that it is a base material for the microfluidic devices manufacturers’. In spite of favorable physical and chemical properties, the hydrophobic surface of PDMS is a handicap when pumping aqueous solutions through microchannels using only capillary forces. There are several techniques to achieve a hydrophilic behavior of PDMS, but most of them face the problem of hydrophobic recovery after a short period of time while most commercial microdevices require long storage and distribution times. The use of surfactant-added PDMS provides a novel method to overcome hydrophobicity and to control the hydrophobic recovery over a long period of time. There are many different types of surfactants and not a deep methodology to choose one in terms of efficiency, clearance and duration of the hydrophilic behavior. This paper has compared three non-ionic surfactants with different critical micelle concentration and chemical composition: Triton X-100, Brij 35 and Tween 20. Short and long-term studies were done using 5-μL deionized water droplet on the surface of the prepared surfactant-added PDMS. The experiments demonstrated that Triton X-100 is more efficient than Brij 35 and Tween 20 since with less concentration it achieves a maximum contact angle of around 23.5°. In terms of hydrophobic recovery, the experiments showed that using surfactants and controlling humidity of samples, hydrophobic recovery of the surfactant-added PDMS was negligible after 2 months. According to these results, the use of PDMS with Triton X-100 and Brij 35 provides a good potential for building capillary driven devices without the need of tedious preprocessing techniques.     

Monolithic fabrication of nanochannels using core–sheath nanofibers as sacrificial mold

A simple and reliable approach for fabricating circular nanofluidic channels in polydimethylsiloxane (PDMS) microfluidic systems is described, which uses core–sheath nanofibers as sacrificial molds. The core–sheath structures consist of an electrospun polyvinylpyrrolidone (PVP) core and a sputtered aluminum sheath. The rupture of the sheath during master template releasing allows easy removal of the nanofibers to form the nanochannels. Straight nanochannels with the diameter as small as 390 nm are demonstrated. This technology is advantageous over existing nanochannel fabrication approaches in reduced risks of fluidic leakage and channel blocking, simpler fabrication process, lower cost and easier dimension control. This work provides a solid technical basis that enables development of various on-chip analytical devices for investigation of the unique transport phenomena at nanoscale.     

Surface microfluidics fabricated by photopatternable superhydrophobic nanocomposite

Surface microfluidics can be of potential use in a variety of emerging applications, including biological and chemical analysis, cellular detection and manipulation, high-throughput pharmaceutical screening, and etc. In comparison with the conventional closed-channel microfluidic system, surface microfluidics shows the distinct advantages of simple construction, direct surface access, no cavitation or interphase obstruction, clear optical path, easy fluidic packaging, and device reusability. In this article, we first present surface microfluidic networks microfabricated by a single-step lithographic process using a novel superhydrophobic photosensitive nanocomposite formula. The photopatternable superhydrophobic nanocomposite (PSN) incorporates PTFE nanoparticles into a SU-8 matrix, in which superhydrophobicity (contact angle of above 160°) is primarily contributed by the extremely low chemical energy and nano-topology of PTFE nanoparticles, while the SU-8 polymer matrix offers photopatternability (lithographic resolution of 10 μm) and substrate adhesion. Moreover, an additive intermediate layer with hydrophilic sidewall considerably reduces flow resistance while improving the substrate adhesion, as a crucial improvement from the previous surface flow configuration. Furthermore, self-propelled microfluidic networks driven by surface tension-induced pressure gradient have been fabricated and characterized to demonstrate the applicability of the novel nanocomposite fabrication approach.     

Fabrication of microfluidic devices for packaging CMOS MEMS impedance sensors

This work presents a polydimethylsiloxane (PDMS) microfluidic device for packaging CMOS MEMS impedance sensors. The wrinkle electrodes are fabricated on PDMS substrates to ensure a connection between the pads of the sensor and the impedance instrument. The PDMS device can tolerate an injection speed of 27.12 ml/h supplied by a pump. The corresponding pressure is 643.35 Pa. The bonding strength of the device is 32.44 g/mm². In order to demonstrate the feasibility of the device, the short circuit test and impedance measurements for air, de-ionized water, phosphate buffered saline (PBS) at four concentrations (1, 2 × 10⁻⁴, 1 × 10⁻⁴, and 6.7 × 10⁻⁵ M) were performed. The experimental results show that the developed device integrated with a sensor can differentiate various samples.     

Influence of geometry on hydrodynamic focusing and long-range fluid behavior in PDMS microfluidic chips

Details of hydrodynamic focusing in a 2D microfluidic channel-junction are investigated experimentally and theoretically, especially the effect on the focusing width of volumetric flow ratio r between main and side channels, as well as angle θ between channels. A non-linear relationship is observed where the focus width decreases rapidly with increasing r and levels off at higher values. For the dependence on θ, results from both experiments and modeling show that an increased focusing effect is obtained as θ approaches 90°. Long-range focusing is explored along a 1 cm long channel and it is observed that in the middle section of the channel, a smaller θ induces less divergence. This effect is of importance for microfluidic systems utilizing hydrodynamic focusing in long, straight channels.     

On-chip CO<Subscript>2</Subscript> incubation for pocket-sized microfluidic cell culture

We have developed an on-chip CO₂ incubation system based on mass/heat transfer from aqueous solutions of bicarbonate source to cell culture media through a permeable poly(dimethylsiloxane) (PDMS) wall. Heating a carbonate-buffered bicarbonate solution successfully regulated CO₂ generation without any feedback control. Because a microfluidic cell culture chip with the incubation system does not require an external chamber or gas supply, the entire microfluidic cell culture setup becomes pocket sized. Using 5 ml of 0.8 M sodium bicarbonate with 65 mM sodium carbonate as the water jacket, the chip maintained the temperature, osmolality, and pH of 750 μl cell culture medium within physiological levels when the chip was placed on a 37°C surface. The osmolality shift and pCO₂ of the media reservoir stabilized within <5 mmol/kg and 5.0 ± 1.0% over at least 9 days. The incubation capabilities were demonstrated through microfluidic culture of COS-7 epithelial cells under an inverted microscope for 17 days.     

Micro-electroforming metallic bipolar electrodes for mini-DMFC stacks

This paper describes the development of metallic bipolar plate fabrication using micro-electroforming process for mini-DMFC (direct methanol fuel cell) stacks. Ultraviolet (UV) lithography was used to define micro-fluidic channels using a photomask and exposure process. Micro-fluidic channels mold with 300 μm thick and 500 μm wide were firstly fabricated in a negative photoresist onto a stainless steel plate. Copper micro-electroforming was used to replicate the micro-fluidic channels mold. Following by sputtering silver (Ag) with 1.2 μm thick, the metallic bipolar plates were completed. The silver layer is used for corrosive resistance. The completed mini-DMFC stack is a 3.5 × 3.5 cm² fuel cell stack including a 1.5 × 1.5 cm² MEA (membrane electrode assembly). Several MEAs were assembly into mini-DMFC stacks using the completed metallic bipolar plates. All test results showed the metallic bipolar plates suitable for mini-DMFC stacks. The maximum output power density is 9.3 mW/cm² and current density is 100 mA/cm² when using 8 vol.% methanol as fuel and operated at temperature 30°C. The output power result is similar to other reports by using conventional graphite bipolar plates. However, conventional graphite bipolar plates have certain difficulty to be machined to such micro-fluidic channels. The proposed micro-electroforming metallic bipolar plates are feasible to miniaturize DMFC stacks for further portable 3C applications.     

An integrated genetic analysis microfluidic platform with valves and a PCR chip reusability method to avoid contamination

Clinical diagnostics and genomic research often require performing numerous genetic tests. While microfluidic devices provide a low-cost alternative to such demands, integrated microfluidic devices are fabricated using expensive technology not always affordable for single use. However, carryover cross-contamination (CXC) concerns (i.e. either false positive or false negative PCR data) in PCR chips prevent reuse, defying much of the advantages of miniaturized systems developed using expensive MEMS processing. In this work, we present an integrated and reusable PCR–CE glass microfluidic chip capable of multi-chamber PCR and sequential CE, with emphasis on a unique chip reusability approach to avoid CXC. For reliable PCR, the surface of the chamber is re-configured from its virgin hydrophilic (CA < 20°) to hydrophobic (CA > 110°) by silanization. To then extend this silanization method as a chip reusability technique, the silanization coating is ‘stripped and re-silanized’ (SRS) to create a fresh coating prior to each successive PCR run. Experimental confirmation of the effectiveness of SRS method in avoiding the CXC is demonstrated using plasmid DNA and HIV-1 infected DNA samples. We also present passive plug microvalves incorporated in the chip to enable fluid/vapor retention during the PCR and controlled fluid flow from the PCR chamber to the CE section for further analysis.     

Suction-enhanced siphon valves for centrifugal microfluidic platforms

In traditional centrifugal microfluidic platforms pumping is restricted to outward fluid flow, resulting in potential real estate issues for embedding complex microsystems. To overcome the limitation, researchers utilize hydrophilic channels to force liquids short distances back toward the disk center. However, most polymers used for CD fabrication are natively hydrophobic, and creating hydrophilic conditions requires surface treatments/specialized materials that pose unique challenges to manufacturing and use. This work describes a novel technology that enjoys the advantages of hydrophilic fluidics on a hydrophobic disk device constructed from untreated polycarbonate plastic. The method, termed suction-enhanced siphoning, is based on exploiting the non-linear hydrostatic pressure profile and related pressure drop created along the length of a rotating microchannel. Theoretical analysis as well as experimental validation of the system is provided. In addition, we demonstrate the use of the hydrostatic pressure pump as a new method for priming hydrophobic-based siphon structures. The development of such techniques for hydrophobic fluidics advances the capabilities of the centrifugal microfluidic platform while remaining true to the goal of creating disposable polymer devices using feasible manufacturing schemes.     

SU-8 microchannels for live cell dielectrophoresis improvements

In this work a novel highly precise SU-8 fabrication technology is employed to construct microfluidic devices for sensitive dielectrophoretic (DEP) manipulation of budding yeast cells. A benchmark microfluidic live cell sorting system is presented, and the effect of microchannel misalignment above electrode topologies on live cell DEP is discussed in detail. Simplified model of budding Saccharomyces cerevisiae yeast cell is presented and validated experimentally in fabricated microfluidic devices. A novel fabrication process enabling rapid prototyping of microfluidic devices with well-aligned integrated electrodes is presented and the process flow is described. Identical devices were produced with standard soft-lithography processes. In comparison to standard PDMS based soft-lithography, an SU-8 layer was used to construct the microchannel walls sealed by a flat sheet of PDMS to obtain the microfluidic channels. Direct bonding of PDMS to SU-8 surface was achieved by efficient wet chemical silanization combined with oxygen plasma treatment of the contact surface. The presented fabrication process significantly improved the alignment of the microstructures. While, according to the benchmark study, the standard PDMS procedure fell well outside the range required for reasonable cell sorting efficiency. In addition, PDMS delamination above electrode topologies was significantly decreased over standard soft-lithography devices. The fabrication time and costs of the proposed methodology were found to be roughly the same.