泡沫铝合金阳极氧化工艺研究

以草酸为电解液,对泡沫铝合金材料进行阳极氧化处理,制备多孔有序阳极氧化铝阵列模板,采用SEM扫描电镜对其形貌进行分析.研究了电流密度、电解液浓度、电解温度等条件对氧化铝膜结构的影响,并对一步法和两步法制得的多孔氧化铝膜进行了比较,结果表明,氧化膜上的微孔分布均匀,孔径大小基本相同;两步阳极氧化法制备的多孔氧化铝模板的有序性优于一步氧化法.     

氧化铝阵列模板制备及其影响因素研究

经预处理的铝箔,分别以不同浓度硫酸和草酸为电解液,在不同阳极氧化时间、电压下,用二步阳极氧化法制备多孔有序阳极氧化铝阵列模板,用透射电镜对其形貌和结构进行了表征,用测厚仪测量了氧化膜厚度.研究结果表明,电解液种类、阳极氧化时间、电压等因素对氧化铝阵列模板外观、膜厚、孔径、孔排列有序度都有不同程度的影响.     

预处理工艺对制备多孔阳极氧化铝膜的影响

对铝的预处理工艺进行了研究,详细探讨了高温退火、除油及电化学抛光等对多孔阳极氧化铝形貌的影响.实验结果表明,采用丙酮除油效果最好,不经高温退火和电化学抛光仍能得到高度有序的多孔阳极氧化铝膜,使制备工艺得到了简化.其原因是两步阳极氧化法可以消除铝的内部结构及表面缺陷对多孔氧化铝膜有序性的影响.     

纳米多孔阳极氧化铝膜形貌的控制研究

采用38g／L的草酸溶液为电解液,制备了孔洞规则有序,孔径和厚度均一可控的氧化铝模板,并研究了阳极氧化工艺对阳极氧化铝膜形貌的影响。实验结果表明,采用38g／L的草酸溶液作为电解液,经两步法阳极氧化可制得孔径均一,排列规则的多孔阳极氧化铝膜。随着氧化电流密度的升高,氧化膜孔径逐渐增大。电流密度过大,反应放热严重,氧化铝膜孔径均匀性,孔洞形状规则性和有序性都下降。在恒电流密度条件下,氧化膜厚度随着氧化时问的延长呈线性增长,但对氧化铝膜孔径影响较小。     

纳米多孔氧化铝膜的制备

以草酸为电解液,采用二次阳极氧化法于室温下制备了多孔阳极氧化铝膜,研究了电解液浓度和试样退火处理对膜表面形貌的影响.利用扫描电镜(SEM)对其表面形貌进行表征,并对其微观形貌进行分析.结果表明,草酸浓度在0.2～0.4 mol/,L范围内所制备的样品结构符合Keller结构模型,孔洞均匀分布于氧化铝膜表面,纳米孔阵列呈高度有序、紧密堆积的排列,孔径大小一致,约为86 nm,退火处理对膜的形貌没有明显影响.     

纳米氧化铝有序多孔膜制备工艺研究

为了获得大面积有序孔排列以及不同孔径的氧化铝膜,采用二次阳极氧化法可制备大面积有序铝阳极氧化多孔(AAO)膜,着重研究氧化电压、氧化时间、电解液浓度以及扩孔时间对AAO膜孔径大小、膜层厚度和形貌结构的影响,用X射线粉末衍射(XRD)仪进行物相分析,利用扫描电子显微镜(SEM)表征多孔膜的形貌.结果表明,在700 ℃以下条件下AAO膜以无定形态存在,经800 ℃退火后无定形氧化铝转化为γ-Al2O3,多孔膜随电压和电解液浓度增加而增大,经H3PO4溶液扩孔后可获得较大孔径模板,扩孔时间与孔径变化呈近似线性关系.为满足应用需求的AAO膜的制备提供了依据.     

多孔氧化铝模板的制备研究

以草酸为电解液,采用二次阳极氧化法制备多孔有序氧化铝模板,研究了氧化电压、电解液浓度、去一次氧化膜时间和二次阳极氧化时间对多孔氧化铝膜结构的影响。结果表明,退火后在60V电压、0.6mol/L的草酸溶液中、去一次阳极氧化膜5h、二次阳极氧化15h制备的膜结构孔洞均匀有序、孔径达80nm、孔密度达8.2×109个/cm2。     

多孔氧化铝模板的制备研究

以草酸为电解液，采用二次阳极氧化法制备多孔有序氧化铝模板，研究了氧化电压、电解液浓度、去一次氧化膜时间和二次阳极氧化时间对多孔氧化铝膜结构的影响。结果表明，退火后在60V电压、0．6mol／L的草酸溶液中、去一次阳极氧化膜5h、二次阳极氧化15h制备的膜结构孔洞均匀有序、孔径达80nm、孔密度达8．2×10^9个／cm...     

长程有序纳米孔氧化铝模板的制备与研究

以硫酸和草酸溶液为电解液,采用二次阳极氧化法制备出高度长程有序的纳米孔氧化铝(AAO)模板,并结合扫描电子显微镜(SEM)对其微观结构及形貌进行了观察和表征.通过研究不同的氧化电压和电解液浓度对AAO模板纳米孔形貌(孔径、孔间距、面密度和长程有序性)的影响,得到了最佳的氧化电压和电解液浓度.     

电化学阳极氧化法制备有序多孔材料的研究进展

阳极氧化法制备有序多孔材料具有工艺简单、孔径可控以及稳定性高等特点,具有广阔的应用前景.系统介绍了阳极氧化法制备有序多孔氧化铝和氧化钛的研究进展.重点介绍了阳极氧化法制备小孔径有序多孔氧化铝和氧化铝光子晶体的研究,特别介绍了有序多孔氧化钛膜的结构特点及该领域未来的发展方向.此外还简略介绍了阳极氧化法制备ZrO2、HfO2等有序多孔材料.     

阳极氧化法制备有序纳米多孔氧化铝膜的研究

利用电化学阳极氧化的方法,在草酸溶液中,精确控制反应条件,在高纯铝片表面有序生长了纳米多孔氧化铝膜。试验中,分别采用一次阳极氧化和二次阳极氧化方法制备氧化铝膜。利用H3PO4溶液浸泡法对氧化铝膜进行扩孔处理。通过扫描电子显微镜对样品进行表征分析。结果发现,二次阳极氧化制备的氧化铝膜的孔洞分布较一次氧化的更为规则有序,并且孔径大小均匀一致。扫描电镜观察显示,氧化铝膜的扩孔过程可以去掉阻碍层,并调节孔径大小,溶去二次氧化后黏附在氧化层表面的一些杂质,从而使氧化铝模板更为规则有序,孔径均一。这种经过二次阳极氧化和扩孔处理得到多孔阳极氧化铝模板的方法简单,成本较低,可以为后续的纳米材料合成提供高质量的合成模板。     

Comparative study of porous anodic alumina: effects of aluminium deposition methods

This article reports on the comparative study of the fabrication of porous anodic alumina films by anodisation of the aluminium films on glass substrates which were deposited by direct current sputtering and electron beam evaporation methods. The relationship between surface morphology of the deposited aluminum films and porous anodic alumina films was investigated. A more uniform and ordered porous anodic alumina was obtained by fabricating from electron beam evaporation deposited aluminium film with smaller and compact grains. Two-step anodisation was used to further improve the quality of porous anodic alumina compared to one-step anodisation. The optical transmittance spectra within wavelength of 370–800 nm were obtained and the optical properties were studied.     

两步阳极氧化法制备多孔阳极氧化铝膜

直流恒压下,在酸性溶液中对铝实施两步阳极氧化制备了多孔氧化铝膜。采用扫描电镜(SEM)、原子力显微镜(AFM)对制备的多孔氧化铝膜进行形貌分析,孔径在纳米级且孔分布具有高度均匀性。采用SEM对试样进行观察,分析了工艺对多孔氧化铝膜形貌的影响。利用阳极氧化初期电流密度的变化并结合阳极氧化过程中的试样的SEM照片,分析了多孔氧化铝膜的形成机理。     

Nanopatterned silicon emitters of a solar cell fabricated by anodic aluminum oxide masks

We investigated the nanopattern transferring process by a template of anodic aluminum oxide and the formation of a nanoporous aluminum oxide layer on a Si solar cell by the anodization process of Al thin films. The anodization process provided a template to transfer the nanopattern onto the Si surface. The small-sized nanoporous alumina template was attached to be covered on the textured surface and played the role of etching mask in the F-based dry etching process. Furthermore, we deposited an Al thin film onto the Si surface and the subsequent anodization process was performed. The alumina formulated on the deposited Al thin film did not show the array of nanoporous structure and no nanopatterns were transferred onto the surface. The large-areal alumina deposited on the Si surface showed enhanced photo-absorption in the ultraviolet spectral region of 243 nm, but increased the photo-reflectance in the visible and infrared spectral regions when compared to the Si-bare sample.     

How structure changes in fabrication of large size ordered anodic alumina film?

Large size anodic alumina film has not been used in the industry due to that the fabrication parameters are very difficult to control, but the fabrication of large size anodic alumina is exigent as a template in the fabrication of diverse nano-devices oriented to the industrialization. In this paper, large size (width length = 80 mm × 80 mm) porous ordered anodic alumina film was fabricated by using two-step anodization process as compared to the small size (diameter = 40 mm) anodic alumina film in the structures. Pore size and film thickness of anodic alumina film are strongly related to the size of the anodization film. The large size anodic alumina film has an ideally ordered pattern by applying low voltage. However, with the increase of voltage, the ordered pattern of the PAA films was gradually disrupted, especially in the 70 V due to the local thermal imbalance.     

Preparation and Analysis of Porous Anodic Alumina Template on Silicon Substrate

Porous anodic alumina (PAA) template is widely used to prepare ordered nanostructure materials. But conventional PAA templates have been restricted for application in micro-electro-mechanical systems (MEMS) technology due to limitations such as shape and brittleness. In this article, a novel process of fabricating alumina porous template based on silicon wafer is described. Porous alumina films were formed by two-step anodization of aluminum layers sputter deposited on silicon wafer. The pore diameters range from 80 to 100 nm. The Pilling–Bedworth ratio of Al/Al₂O₃ was measured and calculated. Thickness of PAA template can be precisely controlled. This research provides an effective tool to nanofabrication in MEMS technology.     

Fabrication of silicon-based template-assisted nanoelectrode arrays and ohmic contact properties investigation

A convenient fabrication technology for large-area, highly-ordered nanoelectrode arrays on silicon substrate has been described here, using porous anodic alumina (PAA) as a template. The ultrathin PAA membranes were anodic oxidized utilizing a two-step anodization method, from Al film evaporated on substrate. The purposes for the use of two-step anodization were, first, improving the regularity of the porous structures, and second reducing the thickness of the membranes to 100-200 nm we desired. Then the nanoelectrode arrays were obtained by electroless depositing Ni-W alloy into the through pores of PAA membranes, making the alloy isolated by the insulating pore walls and contacting with the silicon substrates at the bottoms of pores. The Ni-W alloy was also electroless deposited at the back surface of silicon to form back electrode. Then ohmic contact properties between silicon and Ni-W alloy were investigated after rapid thermal annealing. Scanning electron microscopy (SEM) observations showed the structure characteristics, and the influence factors of fabrication effect were discussed. The current-voltage (I-V) curves revealed the contact properties. After annealing in N2 at 700 degrees C, good linear property was shown with contact resistance of 33 omega, which confirmed ohmic contacts between silicon and electrodes. These results presented significant application potential of this technology in nanosize current-injection devices in optoelectronics, microelectronics and bio-medical fields.     

高度有序多孔氧化铝模板的制备工艺与生长机制的研究

采用二次氧化法制备出高度有序的多孔氧化铝模板，结合扫描电镜和原子力显微镜对其结构、形貌进行观察和表征。研究了铝箔预处理和温度等对多孔氧化铝模板孔洞有序性的影响，讨论了有序孔洞的自组织生长机理。     

用低纯度铝制备AAO模板及其结构研究

在0.3mol/dm3草酸溶液中,通过不同纯度铝的恒电位二次阳极氧化制备了纳米孔氧化铝模板,并用场发射扫描电子显微镜(FE-SEM)和原子力显微镜(AFM)观察模板结构.实验结果表明,一次氧化除膜后低纯度铝基体表面呈现较为规则的六边形结构,这种蜂巢结构有利于二次氧化过程中获得有序度更高的纳米孔模板.低纯度铝制备的模板表面被晶界分隔为微小的区域,只是在较窄区域内才出现六边形规则排列的纳米孔.恒电位40V时所得模板经扩孔处理后,孔径由35nm增大到100nm左右,且孔径大小几乎一致.从纳米孔的有序度来看,由低纯度铝制备模板还需要进一步优化阳极氧化参数.