脉冲激光电化学复合的定域性研究及三维微细刻蚀加工

在激光电化学复合微细加工系统中,利用透光导电的氧化铟锡(Indium tin oxide,ITO)导电玻璃作为工具阴极,引入激光辐照能量,保证了激光电化学体系的高效复合。采用脉冲激光辐照和电化学溶解蚀除的方法对铝合金进行了加工试验,工件表面在均匀电场作用下所形成的钝化膜,在激光定域辐照的热力冲击作用下被破坏,使基体材料发生电化学反应,而非辐照区域则不发生反应,从而提高了电化学反应的定域性。研究了复合加工定域性受激光热力冲击和气泡折射影响的机理,根据试验结果分析了激光能量,加工电流以及不同加工方式对复合加工定域性的影响,采用优化的工艺参数,有效抑制了激光热影响区和电化学杂散腐蚀,实现了成形精度和表面质量均较好的三维槽腔加工。     

硅的准分子激光直写刻蚀微细加工特性研究

针对微机械三维结构对准分子激光直写微细加工的要求,在试验研究基础上,讨论了硅已加工表面形貌、加工热与热影响区等特性,得出了加工脉冲数、能量与刻蚀深度间的相互关系.     

脉冲电化学加工现状与进展

介绍了脉冲电化学加工(PECM)的机理,综述了PECM/PECMM的国内外技术现状及研究进展,详细阐述了脉冲电化学加工的工艺模型和复合加工技术,并展望了今后的发展前景和重点研究方向。     

水射流辅助激光刻蚀Al2O3陶瓷的试验研究

设计了一套用于实验的水射流辅助激光刻蚀加工装置,将激光和介质射流冲蚀加工相结合,研究激光加工参数和射流加工参数对试样材料激光复合刻蚀量和截面质量的影响。实验结果表明,激光工艺参数和射流加工参数对工件加工表面的质量优劣有着决定性的影响;该复合加工工艺可以清除加工时产生的90%以上熔渣,能有效地降低材料表面粗糙度,使得加工出的盲孔成为较为规则的倒三角形。     

激光微细孔加工技术及其应用

越来越多的产品向着微型化、精密化的方向发展。这促使微细孔加工技术也得到了飞速发展。本文对当前世界上利用激光加工微细孔的技术及其应用作了介绍。     

微细电化学加工纳秒脉冲电源的研制

根据微细电化学加工的工艺特点,采用CPLD器件EPM7160与8位单片机STC12C5A60S2,设计了微细电化学加工纳秒脉冲电源。脉冲参数设置通过专用键盘或RS232实现,参数显示采用国显电子的12864液晶模块实现,人机界面友好。通过RS232,电源可以接受主控计算机的实时参数调整。测试表明,脉宽、脉间等脉冲参数可调,且调节方便,通用性强。输出脉宽、脉间可以调至20ns以下,适于微细电化学加工。     

纳秒脉冲微细电化学加工的理论及试验

根据电化学反应原理,探讨纳秒脉冲电化学加工的特点及其实现微细加工的机理.建立纳秒脉冲微细电化学加工的理论模型,并分析电解液浓度、加工间隙、脉冲参数和加工电压等因素对微细电解加工的影响作用.构建微细电化学加工系统,包括微细加工机床、纳秒脉冲电源、电解液循环系统、运动控制部分和加工检测部分.试验研究了超短脉冲的电压幅值和脉冲宽度对侧面加工间隙的影响,结果表明减小脉冲宽度和降低加工电压可以提高微细电解加工的精度.在自制的微细电化学机床上,实现工具电极和工件微结构的连续加工.将加工间隙控制在5 μm以内,加工出中间有20 μm×30 μm×30 μm棱台的微型腔和30 μm槽宽的十字形孔,分析加工起始点对成形精度的影响,并提出解决方法.试验证明纳秒脉冲微细电解加工可以很好地满足微机电系统(Micro electromechanical system,MEMS)微器件的加工要求.     

微细电化学加工技术

介绍了微软电化学加工的原理及特点，详细介绍了基于电化学扫描探针显微镜进行的电化学微细加工技术，EFAB制作技术、刻蚀剂层技术（GELT）、超微细电极电化学加工技术等几种目前主要的微细电化学加工技术。     

实用型准分子激光微细加工机研制

介绍了研制成功的掩模投影式实用型准分子激光微细加工机的主要技术指标、结构特点、研制中解决的关键单元技术,并简要介绍其应用。     

脉冲电化学机械光整加工工艺的基础研究

着重介绍了脉冲电化学机械光整加工工艺的特点,光整加工原理;通过实验验证了这种光整加工工艺与电化学机械光整加工工艺相比,有着高效、高表面质量的优点;分析了脉冲电化学机械光整加工工艺的机理;对这种光整加工工艺目前存在的问题及发展前景进行了探讨。     

Effects of laser shock processing on mechanical properties of laser welded ANSI 304 stainless steel joint

With the rapid development of engineering component with integration,high-speed and multi-parameter,traditional techniques haven’t met practical needs in extreme service environment.Laser welding,a new welding technology,has been widely used.However,it would generate the drop of mechanical properties for laser welded joint due to its thermal effect.Laser shock processing(LSP) is one of the most effective methods to improve the mechanical properties of laser welded ANSI 304 stainless steel joint.In this paper,the effects of LSP on the mechanical properties of laser welded ANSI 304 stainless steel joint have been investigated.The welded joint on the front of the tensile samples is treated by LSP impacts,and the overlapping rate of the laser spot is 50%.The tensile test of the laser welded joint with and without LSP impacts is carried out,and the fracture morphology of the tensile samples is analyzed by scanning electron microscope(SEM).Compared with the yield strength of 11.70 kN,the tensile strength of 37.66 kN,the yield-to-tensile strength ratio of 0.310 7,the elongation of 25.20%,the area reduction of 32.68% and the elastic modulus of 13 063.876 MPa,the corresponding values after LSP impacts are 14.25 kN,38.74 kN,0.367 8,26.58%,42.29% and 14 754.394 MPa,respectively.Through LSP impacts,the increasing ratio of the yield strength and tensile strength are 121.79% and 102.87%,respectively;the elongation and area reduction are improved by 5.48% and 29.38%,respectively.By comparing with coarse fracture surface of the welded joint,the delamination splitting with some cracks in the sharp corner of the welded joint and asymmetric dimples,LSP can cause brighter fracture surface,and finer and more uniform dimples.Finally,the schematic illustration of dimple formation with LSP is clearly described.The proposed research ensures that the LSP technology can clearly improve the yield strength,tensile strength,yield-to-tensile strength ratio,elongation,area reduction and elastic modulus of the welded joint.The enhancement mechanism of LSP on laser welded ANSI 304 stainless steel joint is mainly due to the fact that the refined and uniform dimples effectively delay the fracture of laser welded joints.     

激光间接冲击下钛箔的微成形特性

采用具有高应变率加载特征的激光驱动飞片间接冲击微成形技术对钛箔进行了微成形实验,以解决难成形材料的微塑性成形问题。从飞片完整性、工件贴模性以及厚度减薄率等方面探究了该工艺的成形性能。实验中采用微细电火花和曲面研磨技术制造微模具,材料为AISI 1090模具钢,飞片为20μm的钛箔,成形工件为35μm的钛箔。通过KEYENCE VHX-1000C超景深显微系统对飞片和工件进行了观测和分析,结果显示:飞片具有较好的完整性,能够提供均匀的冲击压力;成形后的工件具有良好的表面质量和贴模性。借助冷镶嵌工艺测量了工件的厚度分布,分析了工件厚度减薄率,其最大值为19.8%,最小值为2%,显示工件的厚度分布比较均匀。研究表明:激光间接冲击微成形技术对于难成形材料具有良好的成形效果并且能有效抑制厚度减薄。     

激光冲击金属板料变形的 最小激光能量估算及其实验研究

介绍了激光冲击板料变形的机理和冲击波产生的原因,提出了激光冲击板料变形中激光－能量转换体－靶材系统的爆轰波压力估算式。根据此压力估算式和材料的动态屈服强度,对激光冲击板料变形中所需的最小激光能量进行了估算,板料厚度为0.5 mm,约束凹模孔径Φ20 mm,在光斑直径6 mm,脉宽25 ns条件下的不锈钢靶材变形所需的最低脉冲能量大约为11 J。实验结果表明估算的最小激光能量与板料变形所需的能量阈值基本一致,且板料变形量随激光能量的增加呈非线性增大。最小激光能量的估算以及能量与板料变形的实验研究为板料变形的精确控制和预测提供了理论依据。     

微尺度激光喷丸强化TiN涂层的表面性能

采用直径为300 μm的激光光斑对TiN涂层表面进行微尺度激光喷丸强化处理以进一步提高TiN涂层的表面性能.利用光学轮廓仪和纳米力学测试系统测量了不同激光工艺参数作用下TiN涂层喷丸区域的表面形貌、纳米硬度及弹性模量分布.结果表明,喷丸区域形成的圆锥形凹坑最大深度约为1.2 μm,纳米硬度和弹性模量在喷丸中心处变化最大...     

Effects on mechanical properties in electron beam welding of TC4 alloy by laser shock processing

The surface of TC4 titanium alloy welding line by electron beam welding (EBW) was processed by high power Q-switched and repetition-rate Nd: glass laser. Effects of laser power and spot diameter on residual stress and microhardness of the TC4 alloy welding line by laser shock processing (LSP) have been analyzed. Results show that residual stresses almost do not change as laser power is 45.9 J, spot diameter is ϕ9 mm; While laser power is 45.9 J, spot diameter less than ϕ3 mm, the distribution of residual stress in welding line occurs obvious variation, which residual stress increase obviously with spot diameter decrease. When power density is bigger than 1.8 × 10¹⁰ W/cm², residual stresses of electron beam welding line occur change by LSP, which improve obviously residual stress distribution; while laser power is bigger than 1.2 × 10¹⁰ W/cm², the surface micro-hardness of electron beam welding line occurs change by LSP, which improve obviously micro-hardness distribution. Mechanical properties of TC4 titanium alloy welding line will be improved by LSP, which provides experimental foundation for further controlling the distributions of residual stress and micro-hardness during laser shock processing. __________ Translated from Journal of Jiangsu University (Natural Science), 2006, 27(3): 207–210 [译自: 江苏大学学报 (自然科学版)]     

激光冲击软模大面积微弯曲成形方法

为了实现金属箔板大面积微弯曲成形,本文结合激光冲击微弯曲成形技术与软模成形技术的优点,提出了激光冲击软模大面积微弯曲成形方法。 该方法是在脉冲激光冲击波压力下,将软模作为柔性冲头作用于金属箔板来实现工件成形的。实验中使用了Innolas Gmbit公司生产的Spitlight 2000 THG脉冲激光器,将250 μm厚的聚氨酯橡胶薄膜作为软模,采用德国LPKF-ProtoMat-C60型雕刻机在印刷电路板上加工出深度为120 μm的U型多槽模具,实现了在厚度为30 μm的铜箔板上一次性对3个U型凹槽冲击成形。用KEYENCE VHX-1000C超景深三维显微系统进行工件观测,结果显示工件上的微成形槽具有良好的轮廓质量。以ANSYS/LS-DYNA为平台,使用有限元建模（FEM）方法对微弯曲过程进行了数值模拟。实验和模拟结果均表明,加载软模的工件与模具的U型凹槽特征在形状上更加接近,成形工件更加均匀,而且具有较好的表面质量,其最大平均成形深度可达110 μm,大于激光直接冲击成形的最大深度（88 μm）,说明使用软模提高了充型能力。     

激光冲击处理对曲轴疲劳强度的影响

利用激光冲击波对曲轴连杆轴颈圆角进行了强化处理,通过液压伺服疲劳试验研究激光冲击处理工艺对曲轴扭转疲劳强度的影响,利用X射线衍射法分析激光冲击处理后轴颈圆角处残余应力的分布规律,利用扫描电镜观察激光冲击处理表面微结构,分析激光冲击处理提高曲轴疲劳强度的微观机理。结果表明,激光冲击处理在曲轴圆角表面产生了残余压应力场,曲轴疲劳寿命显著提高,疲劳裂纹扩展速率大大降低;残余压应力场提高是激光冲击处理改善曲轴疲劳性能的主要机制。     

Analysis and experiment on deformation of sheet metal by laser shock wave

The mechanism of laser shock deformation and the reason for the production of the shockwave are introduced. An evaluation formula of the detonation wave pressure in the system of laser, energy transferring-medium and sheet metal is built according to the theory of detonation wave and blasting gas-dynamics. The minimal energy of the laser pulse is evaluated on the basis of the formula of the laser shock pressure and evaluation of dynamic yielding strength. The experiment is also validated. The result shows that the quantity of sheet metal deforming is nonlinearly increased with laser energy, i.e., pressure of the laser shock wave. Under a laser-induced ultra-high pressure and high strain rate, structural steels and composite materials undergo plastic deformation. __________ Translated from Journal of Nanjing University of Aeronautics and Astronautic, 2005(S1) (in Chinese)     

超短脉冲激光与介质相互作用过程中光学特性的变化

根据雪崩离化模型,分析了飞秒激光脉冲与介质材料相互作用过程中光学特性的变化规律。由于多层膜光学元件的光学特性与材料的折射率密切相关,当飞秒激光照射介质材料时,折射率会随着电场强度分布呈现不同程度的减小,从而会影响光学元件的性能。文中计算了飞秒激光照射多层膜光学元件时的透射光谱曲线,结果表明薄膜材料在发生不可逆损伤之前,光学元件的光谱特性已经发生变化。