共查询到20条相似文献,搜索用时 15 毫秒
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介绍了一种基于集成双光栅干涉和CCD图像测量的微梁位移测量方法,并利用相位差约为π/2的一组光栅实现了扩量程位移检测。利用表面牺牲层工艺制作敏感芯片,在玻璃基底上刻蚀深度约为入射激光波长1/8的凹槽,凹槽上下的两组光栅与正上方对应的梁分别构成两组相位敏感集成光栅单元。利用1级衍射光将集成光栅单元成像在CCD靶面上,梁的位移变化通过CCD图像上对应光斑的灰度值变化来反映。实验结果表明,虽然玻璃凹槽腐蚀深度的误差导致光栅之间的相位差偏离π/2,但所制作的集成双光栅结构实现了多周期的扩量程位移检测,通过接近π/2相位差的两个光栅得到的光强信号的错峰使用,避免了干涉法正弦位移检测信号的峰谷不灵敏位置,实验测得微梁的位移变化为650nm。 相似文献
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Nieradka K Małozięć G Kopiec D Grabiec P Janus P Sierakowski A Gotszalk T 《The Review of scientific instruments》2011,82(10):105112
Here we present an extension of optical beam deflection (OBD) method for measuring displacement and vibrations of an array of microcantilevers. Instead of focusing on the cantilever, the optical beam is either focused above or below the cantilever array, or focused only in the axis parallel to the cantilevers length, allowing a wide optical line to span multiple cantilevers in the array. Each cantilever reflects a part of the incident beam, which is then directed onto a photodiode array detector in a manner allowing distinguishing between individual beams. Each part of reflected beam behaves like a single beam of roughly the same divergence angle in the bending sensing axis as the incident beam. Since sensitivity of the OBD method depends on the divergence angle of deflected beam, high sensitivity is preserved in proposed expanded beam deflection (EBD) method. At the detector, each spot's position is measured at the same time, without time multiplexing of light sources. This provides real simultaneous readout of entire array, unavailable in most of competitive methods, and thus increases time resolution of the measurement. Expanded beam can also span another line of cantilevers allowing monitoring of specially designed two-dimensional arrays. In this paper, we present first results of application of EBD method to cantilever sensors. We show how thermal noise resolution can be easily achieved and combined with thermal noise based resonance frequency measurement. 相似文献
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《Measurement》1986,4(4):148-153
The laser interferometers for angle measurement in a wide range have been presented. These are the systems based on the modified Twyman-Green interferometer principle, constructed and tested by the author. Each modification is aimed at the optimum configuration, which should combine high accuracy and wide range simultaneously. Starting with the simple interferometer, through its various versions with beam shift compensation and diametrically placed reflectors, to the set-up which has a measuring range of 2π rad and rotational positioning of 0.04″. The final system is designed for automatic measurement of angular positions and for checking the angle standards. The error analysis common to all interferometers with rotating reflector is given. 相似文献
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非接触式纳米精度位移测量在科研和工业生产中有重要应用价值。本文阐述了一种基于激光聚焦偏移原理测量微小位移的方法,首先分析了此方法的测量精度、误差及在所选光学元器件下的量程,进而描述了实验装置,并利用该装置对一个平面反射镜的微小位移进行了测量,结果显示位移测量精度优于10 nm(1σ),与理论计算的结果吻合。实验结果表明,该方法对测量微小位移可达nm精度,可应用于工业生产中对主轴振动、轴承球圆度等的在线精密测量。 相似文献
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利用光纤自聚焦透镜作为F-P干涉仪的反射面,根据F-P干涉光谱相邻波峰之间的波长差与其干涉腔长之间的关系,实现微位移的测量。克服了光强型F-P传感器测量结果受光源波动影响、难以识别位移方向等缺点,可直接测量绝对位移,并可识别位移方向。经实验得到其位移测量误差小于2.5nm。 相似文献
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在航天、军事、工业这些对器件的体积有着严格要求的领域,光电编码器不仅要求减小外径尺寸和重量,更要提高其测量精度。本文以光电编码器误差补偿方法为研究对象,基于后验误差拟合方法确定误差模型参数,从而实现对小型光电编码器的深度误差补偿。分析了影响光电编码器测角误差的主要因素,建立了长周期误差和短周期误差模型。然后,采用后验误差拟合算法实现了对误差模型参数的确定,提出误差补偿算法;最后,对某一小型光电编码器进行实验,验证了所提出误差补偿算法的性能。某型号光电编码器补偿前的精度为22.48″,补偿后的精度为5.82″。实验表明,采用后验误差补偿方法可以不考虑误差影响因素的大小,直接对编码器进行误差补偿,具有效率高、补偿准确等优点,极大地提高了批量生产时光电编码器产品的精度。 相似文献
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提出了散斑照相术数字化的技术,即利用电寻址液晶(EALCD)和CCD取代传统散斑照相术中记录干板,省去传统方法中干板显影、定影的烦琐的化学湿处理过程,实现其数字化。介绍了EALCD在散斑照相术测量高精度测量物体位移的优点,而且能通过现有的数字器件使其实现数字化,更加利于工程应用。采用全场分析法和逐点分析法2种方法对散斑照相术进行光学实验研究,都成功获得了含有物体位移信息的干涉条纹。实验研究表明,该研究方法简单、高效,能快速获得具有高对比度的散斑干涉条纹,为数字散斑照相术测量物体的微小形变奠定了坚实的基础。 相似文献
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基于模板匹配算法的压电微位移器位移量原位测量技术 总被引:3,自引:1,他引:2
针对压电微位移器的位移量高精度测量需要,基于模板匹配算法提出了一种新颖的位移量原位测量方法。利用改进型的Twyman-Green干涉系统对压电微位移器的电压——位移特性曲线进行原位测量,根据模板匹配算法实时计算干涉条纹的移动量,进而得到对应的压电微位移量,并对相关实验测量结果进行了分析与验证。结果表明,该测量技术具有较高的测量效率以及较好的随机噪声抑制能力,其测量精度和分辨率均可达到纳米量级。该方法属于非接触式测量,具有较高的可靠性,在微位移的高精度原位自动测量中具有较好的实用性。 相似文献
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位置敏感探测器(Position Sensitive Detector,PSD)是一种高精度的二维位移测量传感器,利用三片二维PSD的组合实现空间六自由度相对运动的位移和角度测量。测量系统主要包括三片PSD传感器(包括PSD光敏面和发光管)、低噪声的信号调理和AD采集电路,采用三片PSD正交布局方案,通过PSD光敏面的光点位置计算相对运动的位移和角度。设计了六自由度的PSD标定测试系统,用于PSD测量系统中心偏移和发光管安装误差的标定测试。测试结果表明,PSD测量系统的测量范围优于位移±10mm、角度±2.5°,标定后PSD测量系统的噪声误差为位移0.1mm、角度0.02°,测量系统的绝对位移误差小于0.5mm、角度误差小于0.14°,满足系统0.5mm和0.5°的指标要求。此外,对PSD传感器的环境适应性进行了评估。PSD测量系统具有量程宽、精度高、线性度好的优点,成功应用于天舟1号货运飞船微重力主动隔振装置的相对运动测量中。 相似文献
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针对面角度现场测试需求,利用激光位移传感器的漫反射测量特性,搭建了面角度非接触测量装置,提出了一种结合三坐标测量机和位置敏感探测器对激光位移传感器进行空间坐标化标定的方法,从而构建出精确的面角度测量模型;采用蒙特卡洛法对面角度非接触测量装置的不确定度进行评定,在±25°测量范围内其结果为U=0.044°~0.046°(k=2);通过性能验证试验、重复性试验和稳定性试验对装置的性能指标进行考核,在±25°测量范围内其绝对测量示值误差不超过0.036°,重复性不超过0.004°,稳定性不超过0.021°;实验结果表明该基于激光位移传感器的面角度非接触测量装置准确可靠,具备开展面角度现场测试应用的前景。 相似文献
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针对组成传统磁梯度仪的两个磁通门激励信号非同源性会导致磁梯仪准确度低的问题,设计了同源偶次谐波磁通门磁梯度仪,利用激励信号的同源性提高了磁梯度准确度。首先重构同源和非同源磁梯度仪的理论输出模型,通过拟合偶次谐波磁通门磁芯的磁滞回线,获取理论输出模型中各参数值,实现表达式定量化;然后仿真一定频率误差范围内同源和非同源磁梯度仪的输出信号,输出误差百分比分别为0.001 8%和0.092%,同源磁梯度仪误差减小98%;最后设计同源偶次谐波磁通门磁梯度仪,分别测试同源磁梯度仪及由两个Mag-03磁通门搭建的非同源磁梯度仪的输出信号,1 h时间内磁梯度计算结果误差范围为0.6和1.3 nT/m,同源磁梯度仪误差减小53.85%。 相似文献
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The measurement and evaluation technology of high precision diamond tools is critically important for supporting the ultra-precision machining. In practical cutting process, the edge profile quality of the diamond tool, including sharpness, micro defects, roughness and tip arc waviness, greatly affects the cutting quality. It is very difficult to measure and evaluate the diamond tool edge profile due to the high precision of tool edge profile and complexity of various measurement parameters. In this paper, an integrated method for measurement and characterization of diamond tools is proposed, which is based on an Atomic Force Microscope (AFM) module. Multiple technical indexes of diamond tools are obtained and validated based on the presented research and cutting experiments, and the evaluation model for each technical index is also proposed. The integrated measurement equipment, including an AFM, precision adjustment device and aerostatic bearings, has been established based on the accuracy requirement of measurement parameters. The edge sharpness, micro defects, surface roughness and tip arc waviness have been obtained based on the evaluation model and experimental data. The experimental results show that the measurement accuracy meets the requirements of the comprehensive evaluation of the diamond tool edge profile. The research work will also contribute to the development of ultra-precision machine. 相似文献