实时共焦扫描光学显微镜

介绍了共焦扫描光学显微镜的结构、工作原理、特性、功能和在生物、医学及半导体计量中的应用,并与其他显微镜的特性进行了比较。     

Tip-Shape Reconstruction for a Laterally Vibrating SPM Probe

This study is concerned with the tip-shape reconstruction for the shear-force scanning probe microscope and the near-field scanning optical microscope, in which the probe executes lateral vibrations. The spatial resolution of the microscopes is directly dependent on the tip radius. A reconstruction method is proposed that employs specially designed test structures and is based on deconvolution. The method is used to generate images of tungsten and nickel wire probes, fabricated by electrochemical etching, and near-field optical-fiber probes. The results are verified by TEM imaging of the probes. By the same approach, correlation is revealed between reconstructed probe aperture and resolution for the near-field optical microscope.     

Integrated-optic implementation of a confocal scanning opticalmicroscope

A confocal scanning optical microscope implemented in an integrated-optic structure is demonstrated. The compact nature of the device proves to be more suitable for environments where mechanical shock can result in optical misalignment of discrete components. The device is implemented in a thin-film optical waveguide with optical fiber connections for light input and output. An objective lens and focusing beam splitter are incorporated into the waveguide structure to form the sensing head of the microscope. The fabrication of the device is discussed, and both intensity and differential contrast images are presented to demonstrate the device operation. The confocal imaging characteristics of the microscope are also demonstrated     

四象限光电探测器在激光光学系统中的典型应用分析

分析了四象限光电探测器在激光制导、光镊、扫描探针显微镜和空间光通信等激光光学系统中的典型应用。结果表明,四象限光电探测器应用在激光制导中具有高制导精度的优势;应用在光镊系统和扫描探针显微镜中具有纳米级分辨率：应用在空间光通信中具有较高跟踪和定位精度。     

Correlation of scanning thermal microscopy and near-field cathodoluminescence analyses on a blue GaN light emitting device

A scanning near-field thermal microscope and a scanning electron microscope/scanning near-field optical microscope hybrid system for near-field cathodoluminescence investigations were used to characterize blue GaN LEDs. Optoelectronic, electronic and thermal device properties are determinable with highest resolution. These results provide an interesting perspective with respect to failure analyses and reliability of the devices.     

Observations of dislocations and junction irregularities in bipolar transistors using the OBIC mode of the scanning optical microscope

We show that by monitoring the appropriate junction current in a bipolar transistor in the OBIC mode of a scanning optical microscope we can image either dislocations in the emitter region or the spatial inhomogeneities of the emitter-base junction. The method is very powerful as it does not cause specimen damage. Examples of scanning electron microscope induced damage are shown.     

激光扫描共焦荧光显微系统研究

讨论了激光扫描共焦荧光显微系统的光学设计问题,成象机理,参数确定及其设计关键,介绍了高精度光学扫描器件的设计方法及实现荧光共焦成象中成象器件的优化设计.     

共焦激光扫描显微镜光学系统的信息量

用光学信息论本征理论讨论共焦激光扫描显微镜光学系统的成像关系，获得在理想成像及有像差时系统的光学信息量的表达式。     

基于LCD的扫描显微镜扫描机理

为改进扫描显微镜,提出了一个新的光电扫描方法与装置。此装置采用了一个液晶显示器(LCD),它形成偏相位空间光调制器。该电寻址液晶显示器可形成不同的衍射光学元件。利用相移,可以完全控制扫描束的位置与焦点。当它被放入扫描显微镜中试用后,发现其效果良好,这表明液晶显示器可作为扫描显示镜扫描装置的关键部件。     

Differential amplitude imaging in scanning optical microscope

A differential amplitude scanning optical microscope (DASOM) is described. The system, which uses a simple optical and electronic arrangement, is capable of detecting variations in optical reflectivity of 9 × 10?6 in a 10kHz bandwidth. Results of surface studies of polished stainless steel and of natural diamond are presented.     

新型光学成像技术及其在生物医学中的应用

本文介绍了在生物医学中有广泛应用前景的共焦扫描光学显微镜、扫描近场光学显微术和光学相干微术三种新型成像技术的基本原理和应用。     

计量型扫描显微镜中大行程纳米定位系统研制

为克服现有计量型扫描探针显微镜(SPM)测量范围小、测量速度低的不足,提出了快速共焦显微镜和SPM结合的大量程、高速、可溯源扫描显微镜,实现了一种大行程纳米定位系统,用于显微镜的扫描定位。系统包括伺服电机驱动的两维机械位移台和压电陶瓷(PZT)驱动的三维柔性铰链微动台,具有双伺服环运动控制机制,由双频激光干涉测量系统进行反馈和溯源。为抑制系统噪声,提高定位精度,设计了数字切比雪夫滤波器,将噪声减小85%。在100 mm×100 mm×20μm行程内,系统具有优于5 nm的定位精度和2 nm的分辨率。     

贮存条件下电子油对电连接器插针表面的影响

对电连接器的插针依次进行高温贮存和常温贮存,并在每个贮存阶段结束后对插针进行光学显微镜检查与扫描电子显微镜检查。试验结果表明:在贮存条件下,电子油会引起插针的腐蚀;并且在高温贮存与常温贮存条件下,电子油在腐蚀中所起的作用不完全相同。     

激光共焦扫描显微镜及其在生物医学中的应用

本文介绍了激光共焦扫描显微镜的结构,分析了它的原理,研究了它的光学特性,并阐述了它在生物、医学上的应用,并给出了此系统的基本光学系统及其光路设计。     

准分子激光对半导体材料HgCdTe和Si的损伤实验研究

本文利用光学显微镜和扫描电镜对248nm准分子强激光辐照HgCdTe和Si晶片的表面损伤形貌和损伤过程进行了对比分析,结果表明在248nm准分子激光作用下,HgCdTe材料主要表现为解离剥蚀破坏和熔融烧蚀破坏,准分子激光对其损伤机理既包含光化学作用也包含光热作用;而Si材料则主要表现为熔融烧蚀破坏,准分子激光对其损伤机理主要为光热作用。     

殷瓦薄板高速激光焊接的热裂纹敏感性

以2.2 m/min激光扫描速度,采用对接和搭接两种方式高速焊接0.7 mm薄板殷瓦合金。借助金相显微镜和扫描电子显微镜观察焊缝显微组织,讨论焊缝中心的热裂纹形成机理,对比分析不同接头形式的热裂纹敏感性。实验结果显示,殷瓦合金的高速激光焊缝为铸态单相奥氏体树枝晶。对接焊缝中心出现热裂纹,而搭接焊缝未发现热裂纹。分析认为,在树枝晶凝固最后阶段,焊缝两侧树枝晶粒的大角度晶界能γgb大于2倍液态薄膜固/液界面能sγl,液态薄膜完全桥接需要临界过冷度ΔTb。殷瓦合金散热系数低,过冷度不足,焊接残余拉伸应力rδ将导致液态薄膜开裂。对接时容易出现热裂纹。而搭接时开裂的液态薄膜有上层液态金属流入补充,能有效降低焊缝的热裂纹敏感性。     

Simultaneous scanning optical and acoustic microscopy

We have demonstrated a combined scanning acoustic and optical microscope capable of simultaneously recording acoustic and optical images of the same field of view. The estimated resolution of the optical (6328 ?) and acoustic (550 MHz) images is 2 ?m, in good agreement with theory. The system is ideally suited to photoacoustic microscopy.     

碲镉汞p-on-n双层异质结材料表面缺陷研究

对碲镉汞p-on-n双层异质结材料的表面缺陷进行了研究。材料表面缺陷会对后续器件的性能产生影响。利用光学显微镜观察外延完的材料表面,发现表面不规则块状缺陷和表面孔洞缺陷较为常见。使用共聚焦显微镜、扫描电子显微镜、能谱分析等测试手段分析发现,缺陷的形成原因是p型层生长过程中镉耗尽以及n型层生长过程中产生缺陷的延伸。     

InGaAs探测器片上集成滤光膜的微结构与性能

为了适应未来红外焦平面探测器系统小型化、集成化和高精度的发展要求,采用了热蒸发方法分别在InP衬底和InGaAs探测器上实现了中心波长为1.38μm滤光膜的片上集成。利用偏光显微镜、原子力显微镜(AFM)和扫描电子显微镜(SEM)以及红外傅里叶光谱(FTIR)等实验手段研究了滤光膜的表面界面形貌和光学性能,结果显示,滤光膜为法布里-珀罗三谐振腔结构,与膜系设计一致;滤光膜中心波长为1.38μm,透射率在60%左右。对集成滤光膜InGaAs器件的电学和光学性能测试分析表明,滤光膜制备工艺对器件的电流电压特性和噪声基本没有影响;而集成滤光膜器件的响应要优于滤光膜分离器件的性能。     

薄膜型平栅极FED背光源的制备及性能研究

利用磁控溅射和光刻技术在玻璃基底上制备薄膜型平栅极场发射阴极阵列,采用电泳工艺将碳纳米管(CNTs)发射材料转移到薄膜型平栅结构的阴极电极表面,借助光学显微镜和扫描电镜观测薄膜型平栅极场发射阴极阵列。利用Ansys软件模拟阴栅间距对阴极表面电场分布的影响,优化其结构参数,对其场发射特性进行了讨论。实验结果表明,CNTs能均匀地分散在平栅型结构的阴极表面,当电场强度为2.4 V/μm时,器件发射电流密度达到1.8 mA/cm2,亮度达3 000cd/m2,均匀性为90%,能稳定发射28 h,且具有较好的栅控作用。该薄膜型平栅极背光源技术简单、成本低,为将来制备新一代大面积场发射背光源提供了可行性方案。