过滤管道磁场在改进真空弧沉积系统中的作用

在90°磁过滤管道和MEVVA源阴极之间加30～60V的正偏压可使磁过滤管道起到阴极弧放电第二阳极的作用.在此情况下,就磁过滤管道磁场对MEVVA源阳极-阴极和磁过滤管道-阴极两个回路弧放电和磁过滤管道等离子体传输效率的影响进行了实验研究.研究结果表明随磁过滤磁场升高,磁过滤管道和阴极之间的弧放电规模降低,系统的等离子体传输效率升高,但对MEVVA源阳极和阴极之间的弧放电规模影响不大.     

磁过滤等离子体沉积和注入技术

利用阴极真空弧放电技术能够产生高密度的金属等离子体。经过90度的磁过滤器，可以除去金属等离子体中的大颗粒微粒，从而为制备高质量的、致密的各种薄膜提供了一种全新的技术。利用该技术制备薄膜具有非常广泛的应用。本文介绍了阴极真空弧放电技术的应用，以及磁过滤等离子体沉积和注入装置及其应用。     

阴极真空弧源磁过滤弯管偏压模式研究

为了改进阴极真空弧等离子体通过磁过滤弯管的传输效率，测定了磁过滤弯管出口离子电流与阴极弧流的关系，结果表明：磁过滤弯管内表面中，靠近大径中心一侧的表面（内侧面）和远离大径中心一侧的表面（外侧面）与等离子体的相互作用是独立的，存在两种向磁过滤弯等内表面运动的离子流：离子碰撞导致的横向扩散离子流和从阴极弧出来的较高能量的惯性离子流。两种离子流通过磁过滤管的传输过程有不同的机制。整个磁过滤弯管偏压较仅仅Bilek板偏压有更高的离子传输效率，Bilek板偏压对磁过滤弯管离子传输起主要作用。     

采用磁过滤阴极弧沉积技术制备含Ti类金刚石薄膜的研究

采用磁过滤阴极弧沉积技术以金属Ti为阴极在真空室中加入C2H2气体来制备含Ti类金刚石薄膜,研究不同的过滤弯管电流和在有过滤磁场存在条件下不同的C2H2气压对含Ti类金刚石薄膜的成分和组织结构的影响规律。实验结果表明：薄膜是由TiC和类金刚石两种结构组成的复合薄膜。C2H2气压和过滤弯管电流都对含Ti类金刚石薄膜的成分和组织结构有显著的影响。增加C2H2气压和过滤弯管电流都使薄膜中雨元素的原子百分含量逐渐下降,C元素的原子百分含量逐渐增加,TiC峰强度逐渐降低,半高宽逐渐增加。     

磁过滤阴极真空弧法制备纳米nc-ZrCN/a-C:H(N)复合薄膜

采用磁过滤阴极弧法,以金属zr为阴极在真空室中通人C2H2和N2混合气体来制备纳米nc-ZrcN/a-c:H(N)复合薄膜,用X射线衍射(XRD)、扫描电镜的能谱仪(SEM-EDS)、X射线电子能谱(XPS)和纳米力学探针研究了薄膜的成分、结构及其性能.实验结果表明薄膜是由ZrCN和无定形碳两种纳米结构组成;气体流速对复合膜的的成分和结构有显著影响:随着混合气体流速的增加,薄膜的锆原子百分比减小,而N和C的含量逐渐增大,薄膜的硬度逐渐减小,ZrCN峰强度逐渐降低.     

磁过滤真空弧等离子体钛沉积膜改善H13钢腐蚀机理的研究

利用磁过滤真空弧等离子体积成膜系统,在H13钢基体上沉积一层360nm的钛膜。透射电镜（TEM）分析结果表明,沉积膜膜层的微观结构呈晶须状。在pH＝5．6的NaAc/HAc缓冲液中阳极极化扫描曲线测量表明,沉积膜品的腐蚀电流密度峰值较H13钢降低1－2个数量级,抗腐蚀性能大幅度提高,离子注入进一步降低了沉积膜样品的峰值腐蚀电流密度,提高了沉积膜样品的抗腐蚀性。SEM对腐蚀样品的表面形貌进行了分析,并对沉积膜样品的抗腐蚀机理进行了研究。     

第二阳极作用改善阴极真空弧沉积中弧放电稳定性的研究

研究了阴极弧等离子体沉积中第二阳极现象改善弧放电稳定性的作用。结果表明：由于弧放电规模增大,等离子体电阻降低,第二阳极现象的存在可大幅度提高造成阴极弧放电不稳定的聚焦磁场阈值。     

真空弧离子源脉冲工作瞬间的放电行为

采用高速摄影和光谱诊断的方法研究了真空弧离子源脉冲工作瞬间的放电行为。拍摄了离子源放电瞬间吸氢电极上阴极斑的形成过程，分析了不同放电电流时阴极斑的发射光谱。实验结果表明，当脉冲工作电流为10^1—10^2A时，真空弧离子源放电区一般只有单个阴极斑，阴极斑的位置在同一次放电中的变化很小；较大的脉冲工作电流有利于提高阴极斑的温度，并最终导致氢离子浓度的增加，但也会使阴极材料的溅射更加严重，造成离子源等离子体品质下降。     

类金刚石碳剥离膜的制备及其性能研究

采用磁过滤阴极真空弧(FCVA)技术制备了质量厚度为5~7μg/cm2的类金刚石碳(DLC)剥离膜。用XP2U型精密电子天平测试分析了100mm范围内的DLC剥离膜均匀性,结果显示其最大不均匀性小于10%。通过扫描电子显微镜(SEM)、原子力显微镜(AFM)、万能摩擦磨损试验机和X光电子谱(XPS)测试分析了DLC剥离膜的表面形貌、耐磨损特性和结构,结果显示采用双90°FCVA技术沉积的DLC剥离膜表面光滑致密、耐磨,几乎没有大颗粒的污染,表征金刚石特性的sp3键含量超过70%。在北京HI-13串列加速器上使用107 Ag-、70 Ge-、48 Ti-、28Si-、197 Au-和127I-六种典型质量的离子束对质量厚度为5~7μg/cm2的DLC剥离膜和碳剥离膜寿命进行测试比较,结果显示DLC剥离膜寿命比碳剥离膜的高2.6~10倍。     

中心螺线圈式大面积均匀金属等离子体形成方法

传统的磁过滤阴极真空弧系统的金属等离子体输出面积较小且出口处的密度呈高斯分布,阻碍了等离子体浸没离子注入与沉积(PⅢ&D)技术的工业化应用,使得大面积均匀金属等离子体的产生成为了业内研究的热点.本文提出了一种基于多阴极脉冲真空弧源对称配置的中心螺线圈式大面积均匀金属等离子体形成方法,可输出直径约为600mm的金属等离子体.沉积探针结果表明:载流螺线圈对沉积均匀性有较大的影响.单源X方向的沉积均匀性优于Y方向的沉积均匀性;四弧源的离子流密度约为单源的5.5倍,沉积均匀性最高可达83.8%.     

Impact of the Insulator on the Electric Field and Generation Characteristics of Vacuum Arc Metal Plasmas

The field electron emission plays a vital role in the process of vacuum discharge breakdown. The electric field strength at the cathode tip is significant to the generation char- acteristics of vacuum arc metal plasmas. To increase the field strength at the cathode tip, a coaxial electrode plasma source was employed with an insulator settled between the electrodes. The math expression of the field strength is derived based on the Gauss theory. The impact of the insulator on the electric field and parameters of plasmas were investigated by MAXWELL 3D simulation software and the Langmuir probe. In addition, a composite insulator was adopted to further strengthen the field strength. A series of experiments were performed to focus on the role of the composite insulator in detail. The experimental and simulation results indicate that, a reasonable layout of the insulator, especially the composite insulator, can effectively increase the field strength at the cathode tip and the plasma density.     

Analysis of Effects of the Arc Voltage on Arc Discharges in a Cathode Ion Source of Neutral Beam Injector

A hot cathode bucket ion source is used for the EAST(experimental advanced superconducting tokamak)neutral beam injector.The thermal electrons emitted from the surface of the cathode are extracted and accelerated by the electric field formed by the arc voltage,which is applied between the arc chamber of the ion source and the cathode.This paper analyzes the effects of arc voltage on the arc discharge in a hot cathode high current ion source.     

Measurement of cathode surface temperature using the method of CCD imaging in arc discharge

A two-wavelength pyrometry device using ordinary array CCD （charge coupled device） to collect the radiation data in the horizontal and vertical directions has been developed for measuring the cathode surface temperature during the arc discharge. Analyses of experimental results show that the device can make the measurement of the cathode surface temperature feasible. The cathode surface temperatures measured are lower than the melting point of tungsten （3653 K）, and the arc current, cathode diameter, and the cathode length are the main influencing factors of the cathode surface temperature.     

Study the Characteristic of the Hot Cathode of High Current Ion Source

The difference of hot cathode operation mode has great influence on the arc discharge of high current ion source. Based on the analysis of the theory of hot filament with two operation modes and combined with ion source experiments, the paper studies the effects of hot filament operation modes on ion source arc discharge.     

Investigation of Vacuum Arc Voltage Characteristics Under Different Axial Magnetic Field Profiles

Characteristics of the arc voltage under different profiles of axial magnetic field were investigated experimentally in a detachable vacuum chamber with five pairs of specially designed electrodes generating both bell-shaped and saddle-shaped mafnetic field profile. The arc column and cathode spot images were photographed by a high speed digital camera. The dependence of the arc voltage on arcing evolution is analyzed. It is indicated that the axial magnetic field profile could affect the arc behaviors significantly, and the arc voltage is closely related to the arc light intensity.     

Investigation of cathode spot characteristics in vacuum under transverse magnetic field (TMF) contacts

With the continuous improvement of current levels in power systems,the demands on the breaking capacity requirements of vacuum circuit breakers are getting higher and higher.The breaking capacity of vacuum breakers is determined by cathode spots,which provide electrons and metal vapor to maintain the arc.In this paper,experiments were carried out on two kinds of transverse magnetic field (TMF) contacts in a demountable vacuum chamber,the behavior of the cathode spots was recorded by a high-speed charge-coupled device (CCD) video camera,and the characteristics of the cathode spots were analyzed through the image processing method.The phenomenon of cathode spot groups and the star-shaped pattern of the spots were both discovered in the experiment.The experimental results show that with the condition of TMF contacts the initial expansion speed of cathode spots is influenced by some parameters,such as the tested current,contact gap,the structure of the contact,the contact diameter,the number of slots,etc.In addition,the influence of the magnetic field on the formation of the cathode spot groups,the distribution,and the dynamic characteristics of the cathode spots were analyzed.It is concluded that the characteristics of the cathode spots are due to the effect of the magnetic field on the near-cathode plasma.The study of the characteristics of cathode spots in this paper would be helpful in the exploration of the physical process of vacuum arcs,and would be of guiding significance in optimizing the design of vacuum circuit breakers.     

A Source for Multiply-Charged Ions and Acceleration of C, N and O Ions by IPCR Cyclotron

The design and performance of the ion source which is now used in the IPCR variable energy cyclotron are described. The source is of the electron-bombarded hot cathode type having two cylindrical cathodes of tungsten and a water-cooled copper anode containing a replaceable molybdenum slit plate. The arc discharge is established continuously but not pulsed. The source is usually operated very stably under an arc power of 1.5 to 3kW with a gas flow rate of 1 to 2 cc/min. The lifetime of the source is mainly limited by the erosion of the upper tungsten cathode at about 24 hours. At present, C4+, N4+, O4+, N5+ and O5+ ions are accelerated up to 48~100, 56~1100, 70~95, 56~125 and 70~125 MeV respectively, and a few micro-amperes of these ions are extracted from the cyclotron. The vacuum obtainable in the accelerating chamber is usually 2 ~ 4 × 10-6 mHg, and the loss of ion beam by the charge exchange effect is comparatively small. Extracted ion beams are used in several experiments for about 1900 hours in a year.