Correcting electron energy loss spectra for artefacts introduced by a serial data collection system

The large range of signal intensities found in electron energy loss spectroscopy causes difficulty when trying to record the spectrum accurately. This paper describes a system which records the data serially as simultaneous pulse and analogue signals without the need for changing the gain of the photomultiplier tube during the scan. The effect of deadtime and dark current on the recorded signals is discussed and procedures for correcting the data for these effects are described. At the same time, it is possible to correct the data for stray signal in the spectrometer and non-linearity in the photomultiplier head-amplifier at high output signal levels. In addition to its use for electron energy loss spectroscopy, this system is ideal for recording other signals which have a wide dynamic range and change rapidly from point to point, e.g. energy filtered diffraction patterns from thin amorphous films.     

Highly spatially resolved electron energy-loss spectroscopy in the bandgap regime of GaN

The possibilities of obtaining information about interband scattering processes in the bandgap regime of GaN from electron energy-loss spectra, taken in a dedicated scanning transmission electron microscope (STEM), are investigated. With the help of precise simulations of the zero-loss peak it is feasable to process, extract and analyse data in the extreme low-loss regime of a few electronvolts. The accuracy of the results is restricted predominantly by instrumental broadening functions. By modelling these accurately, it is possible to eliminate the effects of the tail of the zero-loss peak and to extract the low-loss spectrum together with the correct value for the bandgap of GaN. Furthermore, differences in the shapes of the low-loss spectra can be revealed, depending on the microstructural features, probed at different beam locations.     

Deconvolution of core electron energy loss spectra

Different deconvolution methods for removing multiple scattering and instrumental broadening from core loss electron energy loss spectra are compared with special attention to the artefacts they introduce. The Gaussian modifier method, Wiener filter, maximum entropy, and model based methods are described. Their performance is compared on virtual spectra where the true single scattering distribution is known. A test on experimental spectra confirms the good performance of model based deconvolution in comparison to maximum entropy methods and shows the advantage of knowing the estimated error bars from a single spectrum acquisition.     

Electron energy loss spectra and reflection images from surfaces

There is renewed interest in the interaction of high energy electron beams with surfaces at glancing angles of incidence, due partially to recent improvements in, and consequential resurgence of, reflection electron microscopy. In this paper electron energy loss of beams running parallel to a surface or at glancing incidence to it are studied and compared with predictions arising from the classical theory of dielectric excitation by a moving charge. There is good agreement for both the Cu and MgO surfaces studied here. It is pointed out that small angle energy loss from high energy electrons is insensitive to surface reconstructions or surface steps. Reflection energy filtered micrographs of the Cu surface are shown and the similarity between the zero and various energy loss images shows the preservation of contrast mechanisms for elastic and inelastic electrons.     

Optimizing the window size for multiple least squares fitting of electron energy loss spectra

The purpose of this study was to determine the effect of the fitting window size used with the linear least squares fit method when quantitating trace elements with electron energy loss spectroscopy. Theory and computer simulation with a simple model of two 'signals' show that, when the background underlying the signal is slowly varying and the signal is localized, there exists a minimum window optimal for fitting raw spectra. The width of the minimum fitting window can be determined directly from the reference standard spectrum of the signal alone and the estimates of signal and background are related. Use of narrower than the minimum window will increase the fitting uncertainty of the signal and yield less reliable results. More complicated experimental spectra must be fitted to more than two standards and a simple analytical expression of the minimum fitting window cannot be derived, but can be determined empirically. Our study shows that the empirical value obtained from experimental spectra is only slightly larger than the theoretical value derived from the simple model, indicating that this conclusion is still valid. When fitting difference spectra with a slowly varying background, the estimates of signal and background are independent and windows wider than the size of the signal will yield the same fitting uncertainty. In the presence of a non-slowly varying background, common in difference spectra, the minimum window size depends on the fine structure of the signal and the background.     

Spectroscopic imaging of electron energy loss spectra using ab initio data and function field visualization

We have devised a technique for spectral imaging using accurate ab initio electron energy loss near edge structure (ELNES) data and function field visualization. The technique is initially applied to a planar defect model in Si with different ring structures and no broken bonds where experimental probes are severely limited. The same model with B doping is also considered. It is shown that specific deviations in different energy ranges of the ELNES spectra are correlated with different structural components of the models.     

In situ high resolution electron microscopy/electron energy loss spectroscopy observation of wetting of a Si surface by molten Al

Electron energy loss spectroscopy was used to observe the segregation of Al on a Si surface above the melting point of Al. A mixture of Al and Si particles was heated above the melting point of Al in a vacuum of 1 × 10⁻⁵ Pa. The Si surface, which initially had been covered with an amorphous oxide layer before heating, became clean and atomically facetted when the Al melted. It was shown that the Si surface was segregated with Al.     

Column ratio mapping: a processing technique for atomic resolution high-angle annular dark-field (HAADF) images

An image processing technique is presented for atomic resolution high-angle annular dark-field (HAADF) images that have been acquired using scanning transmission electron microscopy (STEM). This technique is termed column ratio mapping and involves the automated process of measuring atomic column intensity ratios in high-resolution HAADF images. This technique was developed to provide a fuller analysis of HAADF images than the usual method of drawing single intensity line profiles across a few areas of interest. For instance, column ratio mapping reveals the compositional distribution across the whole HAADF image and allows a statistical analysis and an estimation of errors. This has proven to be a very valuable technique as it can provide a more detailed assessment of the sharpness of interfacial structures from HAADF images. The technique of column ratio mapping is described in terms of a [110]-oriented zinc-blende structured AlAs/GaAs superlattice using the 1 angstroms-scale resolution capability of the aberration-corrected SuperSTEM 1 instrument.     

Deadtime corrections for a pulse counting system in electron energy loss spectroscopy

We have measured the relationship between the input and output pulse rates for an EELS pulse counting system. Two simple formulae for predicting the behaviour of such a system are compared with the data. One is for a system which has extendible deadtime. The other is for the counting system which has non-extendible deadtime. The latter provides agreement with our experimental results over the range 0–20 MHz.     

Demonstration of lanthanum in liver cells by energy-dispersive X-ray spectroscopy, electron energy loss spectroscopy and high-resolution transmission electron microscopy

The appearance of lanthanum in liver cells as a result of the injection of lanthanum chloride into rats is investigated by advanced transmission electron microscopy techniques, including electron energy loss spectroscopy and high‐resolution transmission electron microscopy. It is demonstrated that the lysosomes contain large amounts of lanthanum appearing in a granular form with particle dimensions between 5 and 25 nm, whereas no lanthanum could be detected in other surrounding cellular components.     

A new analytical method for characterising the bonding environment at rough interfaces in high-k gate stacks using electron energy loss spectroscopy

Determining the bonding environment at a rough interface, using for example the near-edge fine structure in electron energy loss spectroscopy (EELS), is problematic since the measurement contains information from the interface and surrounding matrix phase. Here we present a novel analytical method for determining the interfacial EELS difference spectrum (with respect to the matrix phase) from a rough interface of unknown geometry, which, unlike multiple linear least squares (MLLS) fitting, does not require the use of reference spectra from suitable standards. The method is based on analysing a series of EELS spectra with variable interface to matrix volume fraction and, as an example, is applied to a TiN/poly-Si interface containing oxygen in a HfO₂-based, high-k dielectric gate stack. A silicon oxynitride layer was detected at the interface consistent with previous results based on MLLS fitting.     

Experimental and theoretical evidence for the magic angle in transmission electron energy loss spectroscopy

We present experimental measurements of the C K-ELNES of high temperature pyrolysed graphite and related crystalline materials as a function of collection angle and sample tilt. These results together with a corresponding theoretical analysis indicate that the so-called "magic angle" for EELS measurements of an anisotropic crystal such as graphite, where spectra are independent of sample orientation, is approximately two times the characteristic scattering angle. We briefly discuss the implications of this result for the experimental measurement of anisotropic structures, including interfaces, as well as for the detailed modelling of ELNES structures using advanced electronic structure calculations.     

Independent component analysis: a new possibility for analysing series of electron energy loss spectra

A complementary approach is proposed for analysing series of electron energy-loss spectra that can be recorded with the spectrum-line technique, across an interface for instance. This approach, called blind source separation (BSS) or independent component analysis (ICA), complements two existing methods: the spatial difference approach and multivariate statistical analysis. The principle of the technique is presented and illustrations are given through one simulated example and one real example.     

Quantitative electron spectroscopic imaging in bio-medicine: Methods for image acquisition,correction and analysis

Many questions about the metabolism of specific elements in the human body might be answered if elemental concentrations could be measured in situ in cells. With electron energy-loss spectroscopic imaging (ESI), concentrations can potentially be determined with high spatial resolution. The theory of the quantification procedure has already been derived. Many practical instrument-related problems, however, have to be solved. In the current research an energy-filtering TEM is used and the image-acquisition chain is examined in detail. Quantification requires images to be recorded over a large dynamic range. To solve this problem, the use of optical attenuation filters has been introduced. The use of the combination of a scintillator screen and a TV-camera as a detection system has consequences for the processing of the data. Corrections for the camera photometric sensitivity and, to some extent, for shading are necessary. Further consequences of such a detection system for the correction of the element a-specific spectral background and element detection are discussed. The derived methodology is tested in several ways and finally applied for the quantitative analysis of iron in liver parenchymal cells of a porphyria cutanea tarda patient.     

An optical configuration for fastidious STEM detector calibration and the effect of the objective‐lens pre‐field

In the scanning transmission electron microscope, an accurate knowledge of detector collection angles is paramount in order to quantify signals on an absolute scale. Here we present an optical configuration designed for the accurate measurement of collection angles for both image‐detectors and energy‐loss spectrometers. By deflecting a parallel electron beam, carefully calibrated using a diffraction pattern from a known material, we can directly observe the projection‐distortion in the post‐specimen lenses of probe‐corrected instruments, the 3‐fold caustic when an image‐corrector is fitted, and any misalignment of imaging detectors or spectrometer apertures. We also discuss for the first time, the effect that higher‐order aberrations in the objective‐lens pre‐field has on such an angle‐based detector mapping procedure.