Multi-objective optimization of circular magnetic abrasive polishing of SUS304 and Cu materials

In this paper, a Multi-objective particle swarm optimization algorithm (MOPSOA) is applied to optimize surface roughness of workpiece after circular magnetic abrasive polishing. The most important parameters of polishing model, namely current, gap between pole and workpiece, spindle speed and polishing time, were considered in this approach. The objective functions of the MOPSOA depend on the quality of surface roughness of polishing materials with both simultaneous surfaces (Ra1, Ra2), which are determined by means of experimental approach with the aid of circular magnetic field. Finally, the effectiveness of the approach is compared between the optimal results with the experimental data. The results show that the new proposed polishing optimization method is more feasible.

     

New iron-based SiC spherical composite magnetic abrasive for magnetic abrasive finishing

SiC magnetic abrasive is used to polish surfaces of precise, complex parts which are hard, brittle and highly corrosion-resistant in magnetic abrasive finishing(MAF). Various techniques are employed to produce this magnetic abrasive, but few can meet production demands because they are usually time-consuming, complex with high cost, and the magnetic abrasives made by these techniques have irregular shape and low bonding strength that result in low processing efficiency and shorter service life. Therefore, an attempt is made by combining gas atomization and rapid solidification to fabricate a new iron-based SiC spherical composite magnetic abrasive. The experimental system to prepare this new magnetic abrasive is constructed according to the characteristics of gas atomization and rapid solidification process and the performance requirements of magnetic abrasive. The new iron-based SiC spherical composite magnetic abrasive is prepared successfully when the machining parameters and the composition proportion of the raw materials are controlled properly. Its morphology, microstructure, phase composition are characterized by scanning electron microscope(SEM) and X-ray diffraction(XRD) analysis. The MAF tests on plate of mold steel S136 are carried out without grinding lubricant to assess the finishing performance and service life of this new SiC magnetic abrasive. The surface roughness(Ra) of the plate worked is rapidly reduced to 0.051 μm from an initial value of 0.372 μm within 5 min. The MAF test is carried on to find that the service life of this new SiC magnetic abrasive reaches to 155 min. The results indicate that this process presented is feasible to prepare the new SiC magnetic abrasive; and compared with previous magnetic abrasives, the new SiC spherical composite magnetic abrasive has excellent finishing performance, high processing efficiency and longer service life. The presented method to fabricate magnetic abrasive through gas atomization and rapid solidification presented can significantly improve the finishing performance and service life of magnetic abrasive, and provide a more practical approach for large-scale industrial production of magnetic abrasive.     

利用复合磨粒抛光液的硅片化学机械抛光

为了提高硅片的抛光速率,利用复合磨粒抛光液对硅片进行化学机械抛光.分析了SiO2磨粒与聚苯乙烯粒子在溶液中的ζ电位及粒子间的相互作用机制,观察到SiO2磨粒吸附在聚苯乙烯及某种氨基树脂粒子表面的现象.通过向单一磨粒抛光液中加入聚合物粒子的方法获得了复合磨粒抛光液.对硅片传统化学机械抛光与利用复合磨粒抛光液的化学机械抛光进行了抛光性能研究,提出了利用复合磨粒抛光液的化学机械抛光技术的材料去除机理,并分析了抛光工艺参数对抛光速率的影响.实验结果显示,利用单一SiO2磨料抛光液对硅片进行抛光的抛光速率为180 nm/min;利用SiO2磨料与聚苯乙烯粒子或某氨基树脂粒子形成的复合磨粒抛光液对硅片进行抛光的抛光速率分别为273 nm/min和324 nm/min.结果表明,利用复合磨粒抛光液对硅片进行抛光提高了抛光速率,并可获得Ra为0.2 nm的光滑表面.     

A study on deburring of magnesium alloy plate by magnetic abrasive polishing

Drilling is one of the most important machining operations in manufacture process. When drilling process is applied, unexpected burrs will be formed on the surface of workpiece. Even a small burr can cause unwanted problems, resulting in low quality products. In order to get better drilled parts, it is very important to know characteristics of burr formation and to remove the burr from the drilled surface with machining process. In this study, magnetic abrasive polishing (MAP) was used to research the deburring factors of magnesium alloy. Moreover, design of experiments was performed to evaluate parameters’ effect on the MAP process. As a result, it was seen that the MAP was useful to remove the burrs on the workpiece without damage from its original surface.     

A physically-based abrasive wear model for composite materials

A simple physically-based model for the abrasive wear of composite materials is presented based on the mechanics and mechanisms associated with sliding wear in soft (ductile)- matrix composites containing hard (brittle) reinforcement particles. The model is based on the assumption that any portion of the reinforcement that is removed as wear debris cannot contribute to the wear resistance of the matrix material. The size of this non-contributing portion (NCP) of reinforcement is estimated by modeling three primary wear mechanisms, specifically, plowing, cracking at the matrix/reinforcement interface or in the reinforcement, and particle removal. Critical variables describing the role of the reinforcement, such as relative size, fracture toughness and the nature of the matrix/reinforcement interface, are characterized by a single contribution coefficient, C. Predictions are compared with the results of experimental two-body (pin-on-drum) abrasive wear tests performed on a model aluminum particulate-reinforced epoxy-matrix composite material.     

Micro machining of high-hardness materials using magnetic abrasive grains

If processing speed is increased and processing time is lengthened, a magnetic abrasive system can be used as a tool both for finishing and precise dimensional control of manufactured products at the micro-level, and for mirror face processing. In this study, a micro machining system that can change its high rotational speed was developed. Using micro machining with a high speed magnetic abrasive system, the diameter of difficult-to-cut materials with high hardness could be controlled almost linearly by changing the rotational speed, the frequency of magnetic poles, and the size of diamond particles. By changing machining conditions, the surface roughness of the mirror face level could be obtained. To improve roundness, a higher rotational speed improved processing time and dimensional precision, and 20,000 rpm was the optimum speed in this experiment. Roundness was obtained up to 0.15 μm. Before and after the processing, there was almost no change in the WC(tungsten carbide) and Ni components of the material, and there were no remains of mixed-type particles such as iron and diamond on the material.     

Characterization and prediction of abrasive wear of powder composite materials

Composite materials produced by powder metallurgy provide a solution in many engineering applications where materials with high abrasion and erosion resistance are required. The actual wear behaviour of the material is associated with many external factors (particle size, velocity, angularity, etc.) and intrinsic material properties (hardness, toughness, Young modulus, etc.). Hardness and toughness properties of such tribomaterials are highly dependent from the content of reinforcing phase, its size and from the mechanical properties of the constituent phases. In this study an attempt is made to model the erosion wear behaviour of composite materials, to calculate the wear rate and to correlate erosion rates with experimental results and material parameters. Powder composites cermets and metal-matrix composite materials reinforced with different content of hard phase were used as examples in this research. Wear mechanisms of materials were investigated. Following from the main mechanisms of erosion wear the models of plastic deformation and brittle fracture are developed for prediction of erosion of powder composite materials. It was demonstrated, that the erosion rate of hardmetal-type materials can be predicted using the results obtained by microindentation methods. The use of hardness distribution parameters is justified with materials with low binder content.     

剪切增稠抛光磨料液的制备及其抛光特性

为了实现对工件的剪切增稠抛光(STP),采用机械混合与超声波分散法制备了一种Al2O3基STP磨料液,并研究了它们的抛光特性。利用应力控制流变仪考察其流变性能,通过扫描电镜和光学轮廓仪研究了单晶硅加工后表面显微组织的变化,并测量其表面粗糙度。结果表明:STP磨料液具有剪切变稀和可逆的剪切增稠特性,达到临界剪切速率后,会形成Al2O3"粒子簇";当剪切速率增大至1000s-1,储能模量,耗能模量和耗散因子都增至最大值,此时主要表现为类似固体的弹性行为,有利于形成类似"柔性固着磨具"。在STP加工单晶硅过程中,采用塑性去除的材料去除方式。随着抛光时间的延长,硅片去除速率先增大后减小;表面粗糙度不断减小并趋于稳定。实验显示,磨粒浓度不宜过高,否则会因剪切增稠效应造成黏度过大,导致流动性差而影响抛光质量。当Al2O3质量分数为23%时,抛光25min后,硅片表面粗糙度Ra由422.62nm降至2.46nm,去除速率达0.88μm/min,表明其能实现单晶硅片的高效精密抛光。     

Finishing of structured surfaces by abrasive polishing

A new polishing process for the finishing of structured optical elements was introduced by the authors. Abrasive polishing using pin type and wheel type polishing tools made of polyamide was applied to improve the surface roughness of structured molds exhibiting fly-cut and precision ground V-grooves. Surface roughness of abrasive polished sides of V-grooves was found to be about 5 nm Ra. Furthermore, material removal rates were determined according to Preston's equation resulting in increasing removal rates with increasing polishing pressure and relative velocity. Material removal in abrasive polishing of structured surfaces was observed to be caused mainly by two-body abrasion but also by three-body abrasion, depending on relative velocity and polishing pressure. Tribological investigations showed that in abrasive polishing of structures mainly micro-ploughing and less micro-cutting occurs.     

声悬浮抛光磨粒微流场研究

为了解决纳米试样超光滑表面的制备问题,将能提供稳定声压场的声悬浮抛光技术应用到流体抛光中,开展了声压场和磨粒流场之间关系的分析.利用Matlab/PDE工具箱对抛光装置内部声压仿真的方法,对比不同反射端对抛光槽声压场的影响,优化了适合抛光的反射端形状尺寸和发射端与反射端之间的距离.利用PIV测试分析了磨粒流场与声压场的相关性,建立了声压场和磨粒流场之间的关系.试验结果表明,磨粒的运动方向与声压等势线大致相同,而且磨粒的最大速度与声压大小成正比.     

磨粒流研抛伺服阀阀芯喷嘴的冲蚀磨损分析

为了研究固液两相磨粒流对伺服阀阀芯喷嘴的研抛性能,从冲蚀磨损的角度对比分析了不同磨粒硬度下的磨粒流研抛效果。利用计算流体力学方法,求解分析了磨粒流研抛伺服阀阀芯喷嘴时流场中的冲蚀磨损特性,采用电子显微镜以及扫描电镜仪检测伺服阀阀芯喷嘴零件经磨粒流研抛前后的表面粗糙度和表面形貌。实验结果表明:采用碳化硅磨粒和白刚玉磨粒加工后的伺服阀阀芯喷嘴主干通道、交叉孔以及小孔区域的粗糙度分别由1.1μm、0.823μm、0.743μm降低为0.735μm、0.721μm、0.571μm和1μm、0.747μm、0.696μm。在本试验中碳化硅磨粒的加工效果优于白刚玉磨粒,即具有高磨粒硬度的磨粒研抛效果好。检测结果显示,磨粒流研抛技术可有效改善伺服阀阀芯喷嘴的表面质量;提高磨粒硬度可提高磨粒流的研抛效果;伺服阀阀芯喷嘴的交叉孔以及小孔区域的表面质量要高于主干通道的表面质量。     

无磨料低温抛光的工艺方法研究

对无磨料低温抛光这种全新的工艺方法进行了系统的研究,包括抛光设备、抛光冰盘的制备、工件盘的制备、抛光盘的修整、抛光后工件的清洗、抛光后表面粗糙度的测量等。并用此种方法对石英晶体进行了抛光实验,得到了Ra0．53mm的超光滑表面,结果证明这是一种获得超光滑表面的新方法。     

Copper polishing with a polishing pad incorporating abrasive grains and a chelating resin

This study sought to decrease dishing and erosion as they cause reduced yield in copper chemical mechanical polishing (Cu-CMP), which is a multilayer interconnect process that is a part of the overall semiconductor manufacturing process. We prepared a polishing pad that incorporated abrasive grains (AC Pad) and used a chelating resin in the matrix (resin). Moreover, we studied whether this polishing pad was applicable to the Cu-CMP process. Results indicated that the pad was selectively abrasive to copper (Cu) and that in the polishing of patterned wafers, it vastly decreased dishing to 1/8th and erosion to half of their respective levels in abrasive polishing. Therefore, the pad has considerable potential for use in Cu-CMP.     

Effects of particle size, polishing pad and contact pressure in free abrasive polishing

The objective of this research is to better understand the mechanisms of material removal in the free abrasive polishing process. Experiments were carried out to understand the effects of particle size, polishing pad and nominal contact pressure on the wear rate and surface roughness of the polished surface. A theoretical model was developed to predict the relationship between the polishing parameters and the wear rate for the case of hard abrasive particles sandwiched between a soft pad and a workpiece (softer than the abrasive particles). Experimental results and theoretical predictions indicate that the wear rate increases with an increase in particle size, hardness of polishing pad and nominal contact pressure, and with a decrease in elastic modulus of the polishing pad. Surface roughness increases with an increase in particle size and hardness of polishing pad, and nominal contact pressure has little effect on the roughness. A dimensionless parameter, wear index which combines all of the preceding parameters, was introduced to give a semi-quantitative prediction for the wear rate in free abrasive polishing. It is also suggested that when polishing hard material, in order to achieve a high materials removal rate and a smooth surface, it is preferable to use diamond as the polishing particles because of their high deformation resistance.     

Improving the quality of surface in the polishing process with the magnetic abrasive powder polishing using a high-frequency induction heating source on CNC table

In this research, polishing flat surfaces has been done by using a completely new and innovative method. In this method, rotary magnetic tool that carry magnetic abrasive powders, is placed in a very strong thermal induction field, and magnetic rotary tool frequently change its direction from clockwise (CW) to counterclockwise (CCW) and CCW to CW. The frequency of changing rotation direction is an important parameter of this innovation method. The intended pieces for polishing operations have been placed on a synchronic two-axis Cartesian CNC table, and the gap between rotary magnetic tool and the sheet surface can be controlled by a power transmission screw operating in the direction of the vertical axis. Several experiments have proved high performance of the new proposed method in the process of polishing.     

Electrical discharge abrasive drilling of hard materials using a metal matrix composite electrode

The main object of the present work was to develop an electrical discharge abrasive drilling (EDAD) methodology to remove the re-solidified layer through the grinding induced by a metal matrix composite electrode prior to the re-solidification of molten material. A metal matrix composite (Cu/SiC_p) electrode, with an electroless pretreatment of Cu coating on SiC_p to enhance bonding status between Cu and SiC_p, was made with a rotating device and this was employed to study the EDAD technology. The machinability of the mold steel HPM50 and tungsten carbide P20 was investigated by the combined technologies of EDAD. The machined surfaces of these materials were examined by scanning electron microscopy (SEM) and their surface roughness measured by a profilemeter. From the experimental results, it was found that the EDAD machining efficiency was three to seven times than that of normal EDM operation for mold steel. However, the efficiency improvement is hardly detectable for tungsten carbide. In addition, the surface roughness of both materials could be improved in comparison with that achieved after EDM.     

磁性材料在起重永磁吸盘中的应用

从节能、省材、安全的角度,就起重永磁吸盘设计制造中有关永磁材料与导磁材料选用、磁路设计组合、永磁体的充退磁方法等问题进行了讨论,着重介绍了用电脉冲充退磁的铝镍钴永磁、钕铁硼永磁或二者组合式的起重永磁吸盘的结构设计、RLC电路在脉冲充退磁技术中的应用,及如何合理选用参数以实现起重永磁吸盘的小自重、低成本及长寿命。     

Surface roughness modeling in chemically etched polishing of Si (100) using double disk magnetic abrasive finishing

Abstract

The present paper focuses on proposing a new method for determining the surface roughness of chemically etched polishing of Si (100) using double disk magnetic abrasive finishing (DDMAF). Based on chemical etching in KOH solution Vicker’s hardness of Si (100) at different concentration of KOH was determined in context to chemical etching phenomenon. A mathematical relationship was established to relate Vicker’s hardness of Si (100) as a function of the concentration of KOH. The penetration depth of abrasive particle into Si (100) workpiece was determined considering viz; the normal force acting on the abrasive particle under the influence of magnetic flux density and Vicker’s hardness of etched Si (100). The other modeling variables such as wear constant, penetration area of the abrasive particle into Si (100) workpiece which is dependent on the penetration depth of abrasive particle was modified in terms of magnetic flux density and concentration of KOH. The process parameters such as working gap, abrasive mesh number and the rotational speed of the primary magnet were also considered in modeling the surface roughness. The results of surface roughness obtained by the model were also experimentally validated. The theoretical and experimental findings agreed well with each other.     

气-液-固三相磨粒流光整加工及其工艺参数优化

考虑用流体抛光法加工大尺度工件存在效率低下问题,本文提出了一种气-液-固三相磨粒流抛光方法。该方法在约束流场中引入微纳米气泡,利用气泡在溃灭时释放的能量加速驱动磨粒运动,从而有效提升抛光效率。实验显示:在加工过程中,离心泵的发热会导致流体黏度下降,进而影响工件近壁面的湍动能和动压力的大小及分布,而加工工件近壁面的湍动能和动压力会对表面纹理的均匀性和材料的去除效率有重要影响。针对上述实验结果,文中基于对磨粒流抛光机理的研究,提出一种通过改变入口流速来补偿温升带来的湍动能和动压力变化的方法,实验求得了抛光流体温度从20℃到60℃之间的9个均等点对应的最优入口流速值。实验表明,相对未加入气泡时,该抛光方法的加工效率得到提高,而调速补偿明显提升了工件表面加工质量。