采用双向偏置曝光的成像干涉光刻技术

成像干涉光刻技术(IIL)具有干涉光刻技术(IL)的高分辨力和光学光刻技术(OL)产生任意形状集成电路特征图形的能力。在IIL中,按掩模图形的不同空间频率成份分区曝光,并使其在抗蚀剂基片上非相干叠加,得到高分辨抗蚀剂图形。本文在研究一般三次曝光IIL原理基础上,提出采用沿X轴正、负方向以及沿Y轴正、负方向偏置的双向偏置照明,分别曝光 X方向、-X方向、 Y方向、-Y方向的高空间频率分量并与垂直于掩模方向的低空间频率分量曝光相结合的五次曝光IIL。理论和计算模拟表明,该方法可以提高图形对比度和分辨力,并减小因调焦误差引起的图形横向位移误差,有利于改善抗蚀剂图形质量。     

掩模投影成像干涉光刻研究

掩模投影成像干涉光刻技术以在很小或几乎不增加光刻系统成本的基础上来提高光刻分辨率为目的,充分利用系统的有限孔径,将掩模图形不同的空间频率分别进行传递,最终以高分辨率对掩模成像。本文阐述了IIL的基本原理,介绍了一种实验系统,并给出了部分模拟和实验结果。研究结果表明,掩模投影成像干涉光刻技术比传统投影光刻能够得到更高的光刻分辨率。     

振幅分割无掩模激光干涉光刻的实现方法

无掩模激光干涉光刻中的分束方法一般有波前分割和振幅分割。研究和比较了振幅分割无 掩模激光干涉光刻方法和系统,包括振幅分割双光束干涉系统、三光束干涉系统、液浸式深紫外干涉系统及全自动干涉光刻系统。建立了双光束双曝光干涉光刻实验系统。模拟和实验结果表明,对点阵或孔阵图形,在同样的图形尺度下,无掩模干涉光刻比传统光刻简单得多。     

光瞳滤波提高投影光刻成像分辨力研究

针对投影光刻成像系统在数值孔径足够大时所产生的分辨力和焦深的矛盾,详细研究了光瞳滤波对投影成像对比度的改善情况,根据不同掩模图形设计对应的最优滤波器。研究结果表明,光瞳滤波能大幅度提高投影光刻成像分辨力并增大焦深,是一种比较有效的提高光刻成像分辨力的方法。     

相移掩模和光学邻近效应校正光刻技术

详细地论述了相移掩模提高光刻分辨力和改善焦深的原理。介绍了光学邻近效应校正方法、改善光刻图形质量的机理及邻近效应校正掩模的一些设计问题。     

用于100nm节点ArF准分子激光光刻的相移掩模技术

用于100nm节点ArF准分子激光光刻的相移掩模(PSM)技术主要有无铬相移掩模(CPM),交替相移掩模(APSM)、衰减相移掩模(AttPSM)和混合相移掩模技术。对这些掩模的基本原理、制作方法及性能比较进行了分析研究。研究表明,无铬相位光刻(CPL)PSM和高透AttPSM 相结合构成的混合掩模最适合用于193nmArF光刻,以产生100nm节点抗蚀剂图形。     

用于大面积周期性图形制造的激光干涉光刻

用两束或多束相干激光束以不同的组合形式对光致抗蚀剂曝光,可在大面积范围内产生精细的二维周期性图形,这个方法特别适合于产生光电子器件和生电子器件的周期性结构。介绍激光干涉光刻的基本原理,对几种光束组合干涉方法给出了理论推导结果,并进行了计算机模拟。初步的实验结果表明,用激光干扰光刻技术产生大面积的亚微米级周期性孔、柱、锥图形是可行的。该方法不需要掩模、昂贵的光刻成像透镜、新的短波长光源和新型的抗蚀剂,提供了得到高分辨、无限焦深、大面积光刻的可能性。     

任意形状图形的灰度掩模图的设计系统研究

灰度掩模技术是制作三维微纳结构的有效方法之一,灰度掩模图设计是灰度掩模技术的重要组成部分.目前,在微机械器件制作领域中,通常只给出常用规则形状三维结构对应的灰度掩模图的设计方法,对于任意形状图形的灰度掩模图设计鲜有报道.本文综合灰度光刻技术中的编码原理和有限元法中的铺路法,提出了适合于任意形状图形的灰度掩模图设计算法,解决了误差处理和图形闭合两个关键问题,给出了算法及图形的评价方法,并利用AutoCAD二次开发工具ObjectARX研究了算法的程序实现,构建了灰度掩模图的设计系统.利用该系统设计了多幅常规规则形状和任意形状灰度掩模图,结果表明,该系统可以高效地设计任意形状图形的灰度掩模.研究工作为任意形状图形灰度掩模图的设计提供了一种新方法,可以提高灰度掩模图的设计效率,为三维微纳器件的制作提供技术积累.     

电子束散射角限制投影光刻掩模研制

掩模制作是电子束散射角限制投影光刻(SCALPEL)的关键技术。通过优化工艺,制作出具有“纳米硅镶嵌结构”的低应力SiNx薄膜作为支撑;开发了电子束直写胶图形的加法工艺,在支撑薄膜上得到清晰的钨 / 铬散射体图形。研制出的SCALPEL掩模,其晶片尺寸为80mm,图形线宽达到0.1m,经缩小投影曝光得到78nm的图形分辨力。     

用灰度曝光技术改善数字光刻图形轮廓

基于空间光调制器(SLM)数字光刻技术可用于IC掩模制作或直接作为微结构的加工工具,但用数字投影光刻系统加工某些结构的二元图形时,往往难以获得预期的图形轮廓,即图形边缘处有一定畸变,特别是较低缩小倍率时。本文提出优化设计图形边缘灰度的方法来校正光刻图形的畸变。文中分析了数字光刻制作这些二元光刻图形时空间像畸变产生的物理机制,详细讨论了设计图形边缘灰度优化的规则,并以加工圆孔滤波器为例,模拟了它的数字光刻成像过程。结果表明,设计图形的边缘采用灰度曝光可使其空间像畸变减小约8个百分点,光场分布更为均匀。数字灰度曝光技术简单易行,可为改善光刻图形质量提供了新途径。     

ISAR imaging of manoeuvring targets with the range instantaneous chirp rate technique

The conventional range instantaneous Doppler (RID) algorithm is a well accepted inverse synthetic aperture radar (ISAR) imaging method for manoeuvring targets. In the RID imaging, the cross-range resolution depends on the instantaneous Doppler of scatterers at the imaging instant. For a high manoeuvring target, the instantaneous Doppler of scatterers may be small at some imaging instants and the satisfactory RID images may not be obtained. On the other hand, a large instantaneous chirp rate is often present for the same scatterer at the same instant for RID imaging. In order to obtain some additional information of a manoeuvring target, a novel ISAR imaging approach, referred to as the range instantaneous chirp (RIC), is proposed based on instantaneous chirp rate of scatterer to provide cross-range resolution. Using the proposed imaging algorithm, with the same received data of RID, a RIC image is generated at the same instant with a different `view`. Therefore the RIC image may provide some additional information that is not shown in the RID image. With both the RIC and RID images, a better target recognition and identification can be achieved for high-manoeuvring targets. The proposed RIC algorithm is verified by raw radar data.     

Lensfree color imaging on a nanostructured chip using compressive decoding

We demonstrate subpixel level color imaging capability on a lensfree incoherent on-chip microscopy platform. By using a nanostructured substrate, the incoherent emission from the object plane is modulated to create a unique far-field diffraction pattern corresponding to each point at the object plane. These lensfree diffraction patterns are then sampled in the far-field using a color sensor-array, where the pixels have three different types of color filters at red, green, and blue (RGB) wavelengths. The recorded RGB diffraction patterns (for each point on the structured substrate) form a basis that can be used to rapidly reconstruct any arbitrary multicolor incoherent object distribution at subpixel resolution, using a compressive sampling algorithm. This lensfree computational imaging platform could be quite useful to create a compact fluorescent on-chip microscope that has color imaging capability.     

Fabrication of nano patterns on various substrates using nanosphere lithography technique

This paper presents a procedure for fabricating large-area, size-tunable, metal arrays with a periodically different shape using Nanosphere Lithography (NSL). This technique has attracted considerable interest because of its important applications as diffraction devices, chemical and optical data recording. Their ordered arrays can be used for anti-reflection surfaces, bio-sensors and nanopatterning masks. Two different types of patterns, honeycomb and hexagonal patterns, could be fabricated on various substrates with different procedures. All steps for making different patterns employed a PS (polystyrene) monolayer by spin coating. Honeycomb patterns were fabricated by spin coating a PS monolayer on a glass substrate and depositing a metal followed by removal of the monolayer, whereas the hexagonal pattern was produced by the transfer of a gold deposited monolayer onto a GaN substrate using the same process. These processes allow simple and excellent control of the size and shape of the patterns. All experimental results on structure characterization and determination of the nanoparticle metrics were accomplished by atomic force microscopy and field emission-scanning electronic microscopy.     

Nanostructures and functional materials fabricated by interferometric lithography

Interferometric lithography (IL) is a powerful technique for the definition of large-area, nanometer-scale, periodically patterned structures. Patterns are recorded in a light-sensitive medium, such as a photoresist, that responds nonlinearly to the intensity distribution associated with the interference of two or more coherent beams of light. The photoresist patterns produced with IL are a platform for further fabrication of nanostructures and growth of functional materials and are building blocks for devices. This article provides a brief review of IL technologies and focuses on various applications for nanostructures and functional materials based on IL including directed self-assembly of colloidal nanoparticles, nanophotonics, semiconductor materials growth, and nanofluidic devices. Perspectives on future directions for IL and emerging applications in other fields are presented.     

Sparsity-based single-shot subwavelength coherent diffractive imaging

Coherent Diffractive Imaging (CDI) is an algorithmic imaging technique where intricate features are reconstructed from measurements of the freely diffracting intensity pattern. An important goal of such lensless imaging methods is to study the structure of molecules that cannot be crystallized. Ideally, one would want to perform CDI at the highest achievable spatial resolution and in a single-shot measurement such that it could be applied to imaging of ultrafast events. However, the resolution of current CDI techniques is limited by the diffraction limit, hence they cannot resolve features smaller than one half the wavelength of the illuminating light. Here, we present sparsity-based single-shot subwavelength resolution CDI: algorithmic reconstruction of subwavelength features from far-field intensity patterns, at a resolution several times better than the diffraction limit. This work paves the way for subwavelength CDI at ultrafast rates, and it can considerably improve the CDI resolution with X-ray free-electron lasers and high harmonics.     

Spatial resolution enhancement of ultrasound images using neural networks

Spatial resolution in modern ultrasound imaging systems is limited by the high cost of large aperture transducer arrays, which require a large number of transducer elements and electronic channels. A new technique to enhance the spatial resolution of pulse-echo imaging systems is presented. The method attempts to build an image that could be obtained with a transducer array aperture larger than that physically available. We consider two images of the same object obtained with two different apertures, the full aperture and a subaperture, of the same transducer. A suitable artificial neural network (ANN) is trained to reproduce the relationship between the image obtained with the transducer full aperture and the image obtained with a subaperture. The inputs of the neural network are portions of the image obtained with the subaperture (low resolution image), and the target outputs are the corresponding portions of the image produced by the full aperture (high resolution image). After the network is trained, it can produce images with almost the same resolution of the full aperture transducer, but using a reduced number of real transducer elements. All computations are carried out on envelope-detected decimated images; for this reason, the computational cost is low and the method is suitable for real-time applications. The proposed method was applied to experimental data obtained with the ultrasound synthetic aperture focusing technique (SAFT), giving quite promising results. Realtime implementation on a modern, full-digital echographic system is currently being developed.     

CCD高分辨成像的梯度解析法

基于序列图像重建的高分辨成像技术需要获取互有位移的序列图像,并需利用图像重建算法进行高分辨率图像重建。为此,设计了一种利用压电陶瓷体控制CCD位移来获取互有微小位移的序列图像的装置,在此基础上提出了一种基于梯度理论从序列图像重建高分辨率图像的算法——梯度解析法。该解析法根据图像灰度场梯度理论,同时考虑了图像的更高频成分,提高了重建图像分辨率。仿真实验显示,该算法与已有算法相比,重建图像的失真度降低40％以上。     

Design of a multichannel, multiresolution smart imaging system

This paper presents the design of a multichannel imaging system where the different optical channels have a different angular resolution and field-of-view. Such an imaging system is able to resolve fine details in a small region of interest through the channel that has the highest angular resolution (0.0096°) while controlling the surrounding region through the channel that has the widest field-of-view (2×40°). An interesting feature of such a multichannel, multiresolution imaging system is that various image processing algorithms can be applied at different segments of the image sensor. We have designed a three channel imaging system where each optical channel consists of four aspheric lens surfaces. These three imaging channels share a single image sensor with a resolution of 1440×960 and a 10 μm pixel size. All imaging channels have diffraction-limited performance ensuring good overall image quality.