钙钛矿锰氧化物Ca_(0.5)Nd_(0.5)(Mn_(0.7)Fe_(0.3))O_3掺杂对Ca_(0.61)Nd_(0.26)TiO_3微波介电性能的影响

研究了传统固相反应法制备所得xCa_(0.5)Nd_(0.5)(Mn_(0.7)Fe_(0.3))O_3-(1–x)Ca_(0.61)Nd_(0.26)TiO_3(0.1≤x≤0.25,CNMFT_x)多晶陶瓷相组成、显微结构、烧结性能与微波介电性能之间的影响关系。X射线衍射研究表明,在研究组分范围内CNMFT_x样品均为单一正交钙钛矿结构;当烧结条件为1 400℃/4 h,x=0.1~0.2时,Fe~(3+)/Mn~(3+,4+)替代Ca_(0.61)Nd_(0.26)TiO_3中Ti~(4+)后,相对介电常数(εr为88.5~77.5)、品质因子(Q·f为7 010~9 370 GHz)和谐振频率温度系数(τf为207.4×10~(–6)/℃~149.1×10~(–6)/℃)逐渐降低,而当x=0.25时,εr(73.4)与τf值(119.6×10~(–6)/℃)仍按规律降低,虽然此时样品晶粒尺寸更为均匀,但Q·f值(5 100 GHz)降幅增加。因此,对于ABO3型钙钛矿结构的微波介质陶瓷,当具有铁磁效应离子的添加量较小时,微波介电性能的变化符合预期规律;但当置换量达到一定比例时,铁磁性增加,导电性增强,巨磁电阻效应减小,致使微波陶瓷介电损耗增加。     

Nd_2O_3掺杂(Sr_(0.9)Ba_(0.1))La_4Ti_4O_(15)陶瓷的结构及微波性能

采用传统的固相反应法制备(Sr_(0.9)Ba_(0.1))La_4Ti_4O_(15)+x%Nd_2O_3(质量分数0≤x≤8,BSN)系微波介质陶瓷,并对其物相组成、晶体结构及微波介电性能进行分析。研究结果表明,Nd_2O_3含量的增加降低了BSN陶瓷的烧结温度,陶瓷的主晶相为SrLa_4Ti_4O_(15)相,并伴随有少量第二相La_2TiO_5的生成。在微波频率下,随着Nd_2O_3含量的增加,BSN陶瓷的介电常数及谐振频率温度系数变化小,品质因数与频率之积(Q×f)值提高,优化出掺杂4%Nd_2O_3的(Sr_(0.9)Ba_(0.1))La_4Ti_4O_(15)陶瓷具有最佳微波介电性能:εr=43.2,Q×f=42 015 GHz(6.024 GHz),τf=-9.6μ℃-1。     

添加TiO_2对0.94 ZnTiNb_2O_8-0.06 BaCu(B_2O_5)材料的物相组成及介电性能的影响

采用传统固相反应法制备了(1–x)(0.94ZnTiNb_2O_8-0.06Ba Cu(B_2O_5))-xTiO_2(0.038≤x≤0.091)微波介质陶瓷,研究了不同含量TiO_2添加对0.94ZnTiNb_2O_8-0.06BaCu(B_2O_5)(0.94ZTN-0.06BCB)陶瓷烧结特性、相结构、微观形貌以及微波介电性能的影响。结果表明:(1–x)(0.94ZTN-0.06BCB)-x TiO_2陶瓷均由ZnTiNb_2O_8和Zn_(0.17)Ti_(0.5)Nb_(0.33)O_2相组成,随着TiO_2含量的增加,陶瓷的烧结温度、εr和τf增加,ρ和Q·f降低。烧结温度为880℃时,0.926(0.94ZTN-0.06BCB)-0.074TiO_2陶瓷表现出了优良的综合性能:εr=40.25,Q·f=32 000 GHz(5.89 GHz),τf=–3.86×10–6℃–1。且在此温度下介质材料与Ag电极兼容性良好,表明该材料是制备LTCC器件的备选材料。     

xCa_(0.8)Sr_(0.2)TiO_3-(1-x)Li_(0.5)La_(0.5)TiO_3系陶瓷介电性能的调控

采用烧成法制备了xCa_(0.8)Sr_(0.2)TiO_3-(1-x)Li_(0.5)La_(0.5)TiO_3(CST-LLT)(x=0.4~0.8)系介质陶瓷,表征了其物相组成、结构特征及介电性能。所制备的材料具有钙钛矿结构特征,随着Li_(0.5)La_(0.5)TiO_3组分的减少,1 170~1 260℃烧结的CST-LLT陶瓷介电常数(ε_r)变化范围在154.8~275.2,而品质因数(Q·f)在1 360~1 479GHz内先增加后逐渐减小,谐振频率温度系数(τ_f)变化范围为(-720.6~470.5)×10~(-6)/℃。当x=0.5,烧成温度为1 200℃,保温3h时,可得到理想的介电性能的介质陶瓷:ε_r=230,Q·f=1 455GHz,τ_f=24.5×10~(-6)/℃。     

(1-x)CaTiO_3-x(Li_(1/2)Ln_(1/2))TiO_3高介微波介质陶瓷

研究了烧结温度、组成和稀土元素对(1-x)CaTiO_3-x(Li_(1/2)Ln_(1/2))TiO_3(x=0.3、0.5(摩尔分数); Ln=La、Nd、Sm)微波介质陶瓷的晶体结构和微波介电性能的影响.X-射线衍射(XRD)分析表明,除(1-x)CaTiO_3-x(Li_(1/2)Ln_(1/2))TiO_3(x=0.5,Ln=Nd)陶瓷中含有少量Nd_2Ti_2O_7外,其余陶瓷均形成了单一的正交钙钛矿相.x=0.5的样品微波介电性能明显优于相应的x=0.3的样品.(1-x)CaTiO_3-x(Li_(1/2)Ln_(1/2))TiO_3(x=0.5)陶瓷微波介电性能:介电常数ε=160,品质因数与频率之积Qf =1 200 GHz,频率温度系数τ_f=-97×10~(-6)/℃(Ln=La);ε=129,Qf=2 000 GHz,τ_f=-52×10~(-6)/℃(Ln=Nd);ε=118,Qf=2 305 GHz,τ_f=-45×10~(-6)/℃(Ln=Sm).     

低温烧结(1–x)Ba_3(VO_4)_(2-x)Li_2WO_4微波介质陶瓷的研究

为了获得低温烧结的陶瓷材料,用固相反应制备了(1–x)Ba3(VO4)2-x Li2WO4(0.05≤x≤0.20)微波介质陶瓷。实验结果表明:随着添加剂Li2WO4的增加,复合陶瓷的相对体密度、相对介电常数εr和品质因数Q·f都呈现出先增加随后又降低的趋势,而谐振频率温度系数τf呈线性降低。添加了摩尔分数0.15Li2WO4的微波介质陶瓷在850℃烧结2 h达到约96.8%的致密度,并获得最佳的微波介电性能:εr=13.7,Q·f=97000 GHz,τf=1.8×10–6/℃。     

(1-x)ZnWO4-xTiO2陶瓷的微波介电性能研究

用固相反应法在1150℃烧结2h得到了致密的(1-x)ZnWO4-xTiO2 (0.1≤x≤0.8)系列微波介质陶瓷,对陶瓷的相组成、显微结构及微波介电性能进行了研究.结果表明:在(1-x)ZnWO4-xTiO2 (0.3≤x≤0.5)陶瓷样品中存在ZnWO4、TiO2及Zn2TiO4三相,当Zn2TiO4相的量较多时,样品的微波介电性能较好.随着TiO2的含量增加,(1-x) ZnWO4-xTiO2陶瓷的εr及τf值单调递增,而Q·f值则先上升后下降.当x=0.4时,(1-x)ZnWO4-xTiO2陶瓷样品的微波介电性能为:εr=26.56、Q·f=42 278 GHz及τf =61.37× 10-6/℃.它是一种具有中等介电常数,中低烧结温度且性能优良的微波介质陶瓷新体系.     

MZT-CLT介质陶瓷的微波烧结研究

微波烧结法制备(1-x)(Mg_(0.7)Zn_(0.3))TiO_(3-x)(Ca_(0.61)La_(0.26))TiO_3(MZT-CLT,x=0.13)系介质陶瓷,研究微波烧结工艺对MZT-CLT陶瓷烧结性能、微观结构、相组成和微波介电性能的影响。结果表明,MZT-CLT陶瓷的主晶相为(Mg_(0.7)Zn_(0.3))TiO_3(MZT)、Ca_(0.61)La_(0.26)TiO_3(CLT),第二相为(Mg_(0.7)Zn_(0.3))Ti_2O_5;升温速率15℃/min,烧结温度1 275℃,保温时间20min时,陶瓷微波介电性能优良:介电常数εr=26.21,品质因数与频率之积Q·f=120 000GHz,频率温度系数τf=-3×10~(-6)/℃。     

温度稳定型Li_2(Zn_(1–x)Co_x)_2Mo_3O_(12)陶瓷的微波介电性能研究

采用固相反应法制备了Li_2(Zn_(1–x)Co_x)_2Mo_3O_(12)陶瓷,研究了Co~(2+)取代对其相结构和微波介电性能的影响,并通过添加Ti O_2调节了该陶瓷的τ_f值。结果表明:不同Co~(2+)取代的Li_2(Zn_(1–x)Co_x)_2Mo_3O_(12)陶瓷均显示出单相钒铁铜矿结构。随着Co~(2+)取代量的增加,陶瓷的致密化温度显著降低,相对密度和Q·f值均呈现先增大后减小的趋势。当x=0.1时,陶瓷具有相对较好的微波介电性能:ε_r=10.85,Q·f=65 031 GHz,τ_f=–73×10~(–6)/℃。添加Ti O_2能够有效调节Li_2Zn_2Mo_3O_(12)陶瓷的τ_f值向正值方向移动,0.4Li_2(Zn_(0.9)Co_(0.1))_2Mo_3O_(12)-0.6Ti O_2陶瓷的介电性能较佳:ε_r=15.80,Q·f=22 991 GHz,τ_f=–4.5×10~(–6)/℃。     

Ba_5(Nb_(1-x)Sb_x)_4O_(15)微波介电陶瓷的低温烧结

添加质量分数为1%的H3BO3为助烧剂。研究了Ba5(Nb1–xSbx)4O15(0≤x≤0.2)陶瓷的烧结特性、显微结构和微波介电性能。结果表明:当x≤0.15时,该类陶瓷可在900℃附近烧结,并伴有少量BaSb2O6和BaB2O4相;随着x从0增加到0.2,εr和τf均有较大幅度下降;Q.f先升后降。在900℃烧成温度下,x为0.15的陶瓷获得较好的微波介电性能:εr为29.21,Q.f为13 266 GHz,τf为11×10–6℃–1,并能与Ag电极很好相容,基本满足LTCC工艺的要求。     

Thin film Al2O3:TiO2 composite dielectric

Composite dielectric thin films of various combinations of Al₂O₃ and TiO₂ were deposited by e-beam evaporation and co-sputtering. Composition control and dielectric properties are found to be superior for the co-sputtered films. A composition near 55 mole percent TiO₂ gives optimum dielectric properties, dielectric constant of 40 and dissipation near .01.     

BaO-3TiO_2微波介质陶瓷的H_3BO_3掺杂改性研究

为实现低温烧结,采用固相反应法制备了H3BO3掺杂改性的BaO-3TiO2微波介质陶瓷,研究了H3BO3掺杂量对其烧结温度和介电性能的影响,并与H3BO3掺杂改性的BaTi4O9陶瓷进行了对比研究。结果表明,H3BO3掺杂能使BaO-3TiO2陶瓷的烧结温度降低到950℃,原因是烧结过程中形成了熔点约为899℃的液相BaB2O4。当掺杂质量分数为3%的H3BO3时,制备的BaO-3TiO2微波介质陶瓷具有良好的介电性能:εr=34.1,Q·f=9000GHz(4.0GHz),略优于H3BO3掺杂改性的BaTi4O9陶瓷。     

(Mg_(0.7)Zn_(0.3))TiO_3-(Ca_(0.61)La_(0.26))TiO_3系微波介质陶瓷性能研究

采用传统固相反应法制备了(1-x)(Mg0.7Zn0.3)TiO3-x(Ca0.61La0.26)TiO3(MZCLT)微波介质陶瓷。分析了(Ca0.61La0.26)TiO3掺杂量对MZCLT陶瓷相结构、烧结性能和介电性能的影响。所制MZCLT陶瓷的主晶相为(Mg0.7Zn0.3)TiO3和(Ca0.61La0.26)TiO3,还存在微量的(Mg0.7Zn0.3)Ti2O5。当x=0.13,1275℃烧结4h时,0.87(Mg0.7Zn0.3)TiO3-0.13(Ca0.61La0.26)TiO3陶瓷介电性能较佳:εr=26.7,Q·f=86011GHz(8GHz),τf为-6×10-6/℃,优于(Mg0.7Zn0.3)TiO3陶瓷介电性能(εr=19.2,Q·f=253000GHz,τf为-39×10-6/℃)。     

(Zn,Mg)TiO_3微波介质陶瓷性能的改善

采用固相反应法制备了(Zn,Mg)TiO3(ZMT)微波介质陶瓷,研究分别添加CaTiO3和BaLiBSi对ZMT陶瓷介电性能的影响。结果表明:CaTiO3和BaLiBSi均能调节ZMT陶瓷的温度系数τε值;BaLiBSi能有效降低ZMT陶瓷的烧结温度,抑制Zn2TiO4相的产生,提高所制陶瓷的微波介电性能。当添加质量分数10%的CaTiO3时,950℃烧结的(Zn1.06Mg0.12)TiO3陶瓷的τε值接近零:–6×10–6/℃。加入质量分数1.2%的BaLiBSi时,900℃烧结的(Zn1.13Mg0.048)Ti1.29O3陶瓷具有最佳的微波介电性能:εr≈24.8,Q.f=10 898 GHz,τε=17×10–6/℃。     

(Mg_(1–x)Zn_x)TiO_3系陶瓷微波介电性能的研究

以MgCO3、ZnO和TiO2为原料,用固相反应法制备了(Mg1–xZnx)TiO3(MZT)系陶瓷。研究了ZnO含量对其微观结构和微波介电性能的影响。结果表明:添加适量ZnO,可有效降低烧结温度,拓宽烧结温度范围。当x(ZnO)为30%,烧结温度为1250℃时,MZT陶瓷具有优良微波介电性能,εr为16～18,Q·f为90000GHz,τc为–5.1×10–7℃–1。     

Integration of high dielectric Ba0.5Sr0.5TiO3 films into amorphous TaSiN barrier layer structures

The high-k dielectric material (Ba,Sr)TiO₃ has been intensively investigated for possible applications in dynamic random access memory circuits. During the BST deposition process in O₂ ambient, typically at 650°C, the diffusion of oxygen through the bottom electrode into the poly Si plug must be prevented. Amorphous TaSiN films are excellent candidates as oxygen barrier layers. Ba_0.5Sr_0.5TiO₃ (BST) films with thickness of 100 nm were deposited on the electrode structure SiO₂/TaSiN/Pt. The sol–gel method was used to grow the BST films. The barrier effect for oxygen diffusion is studied in TaSiN layers with thickness of 50 nm, which were deposited by a reactive sputter process. X-ray photoemission spectroscopy results confirm that this amorphous material is a suitable barrier against oxygen diffusion at 650°C. The BST films, deposited at 650°C and post-annealed at 650°C show a dielectric constant of 100 at 100 kHz and a dissipation factor of less than 5%.     

SrBaNb-SrBaTi复合陶瓷的制备和介电性能研究

采用传统固相反应法分别制作了SrxBa1–xNb2O6(x=0.3,0.4,0.5,0.6)和Sr0.6Ba0.4TiO3单相陶瓷以及两相混合的复合陶瓷。结果表明,该制备方法简单,能够精确控制复合陶瓷中SrxBa1–xNb2O6和Sr0.6Ba0.4TiO3的组分含量,其中Sr0.6Ba0.4Nb2O6与Sr0.6Ba0.4TiO3按摩尔比1∶1混合所得复合陶瓷样品的介电温度特性最佳,10kHz下在25～60℃温度范围内αε为3.224×10–7,tanδ小于0.7×10–2。     

Al2O3/TiO2 nanolaminate gate dielectric films with enhanced electrical performances for organic field-effect transistors

Nanolamination has entered the spotlight as a novel process for fabricating highly dense nanoscale inorganic alloy films. OFET commercialization requires, above all, excellent dielectric properties of gate dielectric layer. Here, we describe the fabrication and characterization of Al–O–Ti (AT) nanolaminate gate dielectric films using a PEALD process, and their OFET applications. The AT films exhibited a very smooth surface (R_q < 0.3 nm), a high dielectric constant (17.8), and a low leakage current (8.6 × 10⁻⁹ A/cm² at 2 MV/cm) compared to single Al₂O₃ or TiO₂ films. Importantly, a 50 nm thick AT film dramatically enhanced the value of μFET (0.96 cm²/V) on a pentacene device, and the high off-current level in a single TiO₂ film was effectively reduced. The nanolamination process removes the drawbacks inherent in each single layer so that the AT film provides excellent dielectric properties suitable for fabricating high-performance OFETs. Triethylsilylethynyl anthradithiophene (TES-ADT), a solution-processable semiconductor, was combined with the AT film in an OFET, and the electrical properties of the device were characterized. The excellent dielectric properties of the AT film render nanolamination a powerful strategy for practical OFET applications.     

Microwave dielectric properties of (1 − x)(Mg0.95Co0.05)TiO3– xCa0.6La0.8/3TiO3 ceramics with V2O5 addition

The microstructures and the microwave dielectric properties of the (1 − x)(Mg_0.95Co_0.05)TiO₃–xCa_0.6La_0.8/3TiO₃ ceramic system were investigated. In order to achieve a temperature-stable material, we studied a method of combining a positive temperature coefficient material with a negative one. Ca_0.6La_0.8/3TiO₃ has dielectric properties of dielectric constant ε_r ∼ 109, Q × f value ∼ 17,600 GHz and a large positive τ_f value ∼ 213 ppm/°C. (Mg_0.95Co_0.05)TiO₃ ceramics possesses high dielectric constant (ε_r ∼ 16.8), high quality factor (Q × f value ∼ 230,000 GHz), and negative τ_f value (−54 ppm/°C). As the x value varies from 0.1 to 0.8, (1 − x)(Mg_0.95Co_0.05)TiO₃–xCa_0.6La_0.8/3TiO₃ ceramic system has the dielectric properties as follows: 21.55 < ε_r < 75.44, 21,000 < Q × f < 90,000 and −10 < τ_f < 140. By appropriately adjusting the x value in the (1 − x)(Mg_0.95Co_0.05)TiO₃–xCa_0.6La_0.8/3TiO₃ ceramic system, zero τ_f value can be achieved. With x = 0.15, a dielectric constant ε_r ∼ 25.78, a Q × f value ∼ 84,000 GHz (at 9 GHz), and a τ_f value ∼ 2 ppm/°C were obtained for 0.85(Mg_0.95Co_0.05)TiO₃–0.15Ca_0.6La_0.8/3TiO₃ ceramics sintered at 1400 °C for 4 h. For practical application in communication systems, it is desirable to be able to sinter at lower temperatures. Therefore, V₂O₅ was as a sintering aid for lowering the sintering temperature of0.85(Mg_0.95Co_0.05)TiO₃–0.15Ca_0.6La_0.8/3TiO₃ ceramics. At the same time, the 0.85(Mg_0.95Co_0.05)TiO₃–0.15Ca_0.6La_0.8/3TiO₃ ceramic system with 0.5 wt% V₂O₅ can be obtained good properties at the microwave frequencies for 1200 °C.     

(Na_(1/2)Nd_(1/2))TiO_3陶瓷的晶体结构及微波介电性能

通过固相烧结法制备了具有高介电常数的(Na1/2Nd1/2)TiO3微波介质陶瓷,研究了烧结温度对该陶瓷微观结构及微波介电性能的影响。结果表明,在烧结温度低于或等于1 350℃时,所制陶瓷样品的主晶相为立方相的(Na1/2Nd1/2)TiO3;当烧结温度高于1 350℃时,所制陶瓷样品的主晶相变为四方相的Nd0.667TiO3。陶瓷样品的相对介电常数和品质因数随着烧结温度的升高均先增大后减小,在烧结温度为1 300℃时所制陶瓷样品最为致密,并具有最佳的微波介电性能,εr=110.06,Q×f=8 147 GHz,τf=244.6×10–6/℃。