Auto-tracking single point diamond cutting on non-planar brittle material substrates by a high-rigidity force controlled fast tool servo

This paper presents auto-tracking single point diamond cutting, which can conduct precision cutting on non-planar brittle material substrates without prior knowledge of their surface forms, by utilizing a force controlled fast tool servo (FTS). Differing from traditional force feedback control machining based on a cantilever mechanism such as an atomic force microscope (AFM) that suffers from low-rigidity and limited machining area, the force controlled FTS utilizes a highly-rigid piezoelectric-type force sensor integrated with a tool holder of the FTS system to provide sufficient stiffness and robustness for force-controlled cutting of brittle materials. It is also possible for the system to be integrated with machine tools to deal with the difficulties in the cutting of large area non-planar brittle materials, which requires not only high machining efficiency but also a high stiffness. Experimental setup is developed by integrating the force controlled FTS to a four-axis ultra-precision diamond turning machine. For the verification of the feasibility and effectiveness of the proposed cutting strategy and system, auto-tracking diamond cutting of micro-grooves is conducted on an inclined silicon substrate and a convex BK7 glass lens, while realizing constant depths of cuts under controlled thrust forces.     

高频响伺服刀架的建模与控制

考虑目前应用压电陶瓷驱动器的伺服刀架只能提供单向驱动力,设计了一种基于双压电陶瓷驱动器的快速伺服刀架。涉及的两个压电陶瓷驱动器分别为刀具的进给和回复提供驱动力,其呈对称布置,用于有效提高刀架的整体刚度。为了对两个压电陶瓷驱动器进行联动协调控制,建立了PI迟滞模型和其逆模型,并设计了相应的联动协调控制方法。利用PI逆模型作为PID反馈控制的前馈环节构成复合控制用于调节快速伺服刀架的输出位移。实验验证了新型快速伺服刀架的响应频率、响应时间、位移响应特性和定位精度。结果显示:新型快速伺服刀架的响应频率为871.86 Hz,响应时间为0.000 45s;三角波信号的最大定位误差为3.366 1μm,误差百分数为7.63%,平均绝对误差为0.698 0μm,误差百分数为1.58%;正弦波信号的最大定位误差为3.244 4μm,误差百分数为7.67%,平均绝对误差为0.930 9μm,误差百分数为2.20%。     

Micro/nano sculpturing of hardened steel by controlling vibration amplitude in elliptical vibration cutting

A new ultra-precision sculpturing method in micro/nano scale for difficult-to-cut materials is proposed in the present research. Elliptical vibration cutting technology is well-known for its excellent performance in achieving ultra-precision machining of steel materials with single crystal diamond tools. Elliptical vibration locus is generally controlled and held to a constant in practice. On the contrary, the proposed method utilizes the variations of the elliptical vibration locus in a positive manner. Depth of cut can be actively controlled in elliptical vibration cutting by controlling vibration amplitude in the thrust direction. By utilizing this as a fast tool servo function in elliptical vibration cutting, high performance micro/nano sculpturing can be attained without using conventional fast tool servo technology. A high-speed amplitude control system is developed for elliptical vibration, with a bandwidth of more than 300 Hz, where the vibration amplitude can be controlled within 4 μm_p-p. The developed control system is applied to sculpturing ultra-precision nano textured grooves on hardened steel with single crystal diamond tools. It is confirmed that the textured grooves have the desired shapes, and their profiles agree well with the vibration amplitude commands input to the control system. Further, a high performance micro/nano sculpturing system for plane surfaces is developed, where the vibration amplitude is controlled in synchronization with the planing motion of an ultra-precision machine tool. Nano sculpturing experiments on hardened steel, carried out by the developed system, are reported, as well as consequent picture images and a variety of dimple patterns that were formed successfully on the hardened steel as nano-scale sculptures.     

“Multimode vibration cutting” – A new vibration cutting for highly-efficient and highly-flexible surface texturing

This paper proposes a new vibration cutting method named “multimode vibration cutting” for precision surface texturing. The proposed cutting method utilizes multiple unidirectional vibration modes mainly in the depth-of-cut direction. The vibrations at multiple frequencies induced to the tool tip can generate not only sinusoidal but also highly-flexible trajectories such as trapezoidal, triangular, and distorted triangular waves. Notably, only a sinusoidal vibration can be induced when a single resonant vibration is applied to the tool tip. Compared to conventional highly-flexible cutting methods for surface texturing, such as the utilization of fast tool servo and amplitude control of ultrasonic elliptical vibration cutting, the proposed method is highly-efficient because of its direct usage of high resonant frequencies. Compared to conventional highly-efficient cutting methods for surface texturing, such as linear and elliptical vibration cutting which mainly utilizes the vibration component in the depth-of-cut direction, the proposed method can generate highly-flexible trajectories for various micro texture profiles. In this study, an ultrasonic multimode vibration device is developed, and the mechanics of generating multimode vibrations are demonstrated. Turning experiments with several texture profiles are performed to confirm the validity of the proposed method for highly-efficient and highly-flexible micro/nano surface texturing.     

Self-sensing of cutting forces in diamond cutting by utilizing a voice coil motor-driven fast tool servo

Cutting force measurement is important for monitoring the diamond cutting process. In this paper, a new measurement method of thrust cutting force associated with a voice coil motor (VCM) driven fast tool servo (FTS) system has been developed. Instead of integrating additional force sensors to the FTS which would influence the dynamics of the FTS, the force measurement in the proposed system is achieved associated with in-process monitoring the variation of the driving current of the VCM and pre-process determining the system parameters. In this way, the cutting forces are accurately obtained by subtracting the influences of the driving force, the spring force, the damping force and the inertial force associated with the system as well as the cutting process. Based on the proposed method, a microstructure array was machined using the developed VCM-FTS and the cutting force during the machining process was monitored in real time. The measured force signal was in good agreement with the machining result. The surface profile error of the fabricated microstructure could be clearly distinguished by the variation of the measured cutting force signal. This provides a new approach for in-process cutting force measurement associated with FTS based diamond cutting process.     

Smart Cutting Tools and Smart Machining: Development Approaches,and Their Implementation and Application Perspectives

Smart machining has tremendous potential and is becoming one of new generation high value precision manufacturing technologies in line with the advance of Industry 4.0 concepts. This paper presents some innovative design concepts and, in particular, the development of four types of smart cutting tools, including a force-based smart cutting tool, a temperature-based internally-cooled cutting tool, a fast tool servo (FTS) and smart collets for ultraprecision and micro manufacturing purposes. Implementation and application perspectives of these smart cutting tools are explored and discussed particularly for smart machining against a number of industrial application requirements. They are contamination-free machining, machining of tool-wear-prone Si-based infra-red devices and medical applications, high speed micro milling and micro drilling, etc. Furthermore, implementation techniques are presented focusing on: (a) plug-and-produce design principle and the associated smart control algorithms, (b) piezoelectric film and surface acoustic wave transducers to measure cutting forces in process, (c) critical cutting temperature control in real-time machining, (d) in-process calibration through machining trials, (e) FE-based design and analysis of smart cutting tools, and (f) application exemplars on adaptive smart machining.     

MACHINING CHARACTERISTICS OF COMPLEX SURFACES USING FAST TOOL SERVO SYSTEM

Optical components with complex surfaces are more and more widely applied, but it is very difficult to manufacture these components by using traditional mechanical fabricating methods. Fast tool servo system can manufacture these complex surfaces or microstructures efficiently and accurately. The relative position between the tool and workpiece surface will vary continuously in the fast tool servo machining process, owing to the height change of workpiece profile in the same circle, and this will worsen the cutting conditions and debase the machining accuracy. In this paper, the cutting characteristics are studied in the fast tool servo machining process of complex workpiece, including the varying rule of cutting angle, and its influences on the rake angle and back angle, and the choice of machining parameters. Furthermore, the conditions for identifying tool interference are given. On the basis of the above work, two kinds of typical complex workpieces are manufactured by using fast tool servo system, including radial sinusoidal workpieces and lens array. The measuring results indicate that surface accuracy can reach 0.14 μm (peak-to-valley value) and the roughness is less than 10 nm (mean value).     

A loop shaping perspective for tuning controllers with adaptive feedforward cancellation

This paper presents a loop-shaping perspective on the tuning of systems using adaptive feedforward cancellation (AFC). The AFC technique is very useful for reducing/eliminating errors in a controlled system at a selected set of harmonics. Such a technique has applicability for hard disk and optical disk track following, vibration rejection in spindle systems and helicopters, camshaft and piston machining, as well as in fast tool servos for diamond turning. This last application provides the motivation for the work described herein. The paper shows how an AFC loop with N resonators results in 2N parameters, a gain and phase advance parameter for each resonator, which must be adjusted to maximize closed-loop performance. This paper details a frequency shaping method of selecting the AFC phase advance parameters and resonator gains in multiple AFC resonator systems. We have applied these techniques to our prototype diamond turning machine with a fast tool servo for cutting ophthalmic lenses. Experimental results comparing the performance of this machine with and without AFC control are presented.     

新型切削加工机器人常用表面加工方法研究

在分析了传统切削加工机器人刚性差、精度低的基础上,研制成功了一种新型切削加工机器人。该切削加工机器人不仅具有机器人一样灵活的柔性,而且具有金属切削机床一样的刚性,特别适合于空间自由曲面的加工与测量等。在坐标变换理论的基础上,提出了切削加工机器人关联矩阵加工理论。并且根据这一理论,给出端铣刀立铣加工平面的计算方法。通过ADAMS进行仿真,验证了所开发的切削加工机器人的可靠性以及关联矩阵加工理论的正确性,为控制和数控编程提供依据。     

System design of Maxwell force driving fast tool servos based on model analysis

A prototype of the Maxwell force driving fast tool servo (M-FTS) is designed and developed. The M-FTS is capable of accurately translating the cutting tool on a diamond turning machine. The FTS utilizes a flexure-based mechanism driven by Maxwell force to generate movements, a custom linear power amplifier to drive the armature, and a capacitance feedback system to measure accurate displacement. This paper describes the design of electromagnetic circuit, mechanical structures, and controller. The kinematic model of M-FTS is derived to instruct the designs; high-frequency electromagnetic finite element analysis is accomplished to assure the proper driving frequency ranges, and mechanical structure is analyzed to verify the proper displacement and stiffness of mechanical structure. Custom linear power amplifier with a bandwidth of 200 kHz is designed for the M-FTS. According to the experiment results, the frequency response of M-FTS system can be up to 100 kHz when it is open-loop driven. M-FTS has obtained a stroke of 35.5 μm with an open-loop driving. M-FTS can realize a stroke of 11.3 μm and frequency response of 3 kHz with the closed-loop control.     

New method to improve dynamic stiffness of electro-hydraulic servo systems

Most current researches working on improving stiffness focus on the application of control theories.But controller in closed-loop hydraulic control system takes effect only after the controlled position is deviated,so the control action is lagged.Thus dynamic performance against force disturbance and dynamic load stiffness can’t be improved evidently by advanced control algorithms.In this paper,the elementary principle of maintaining piston position unchanged under sudden external force load change by charging additional oil is analyzed.On this basis,the conception of raising dynamic stiffness of electro hydraulic position servo system by flow feedforward compensation is put forward.And a scheme using double servo valves to realize flow feedforward compensation is presented,in which another fast response servo valve is added to the regular electro hydraulic servo system and specially utilized to compensate the compressed oil volume caused by load impact in time.The two valves are arranged in parallel to control the cylinder jointly.Furthermore,the model of flow compensation is derived,by which the product of the amplitude and width of the valve’s pulse command signal can be calculated.And determination rules of the amplitude and width of pulse signal are concluded by analysis and simulations.Using the proposed scheme,simulations and experiments at different positions with different force changes are conducted.The simulation and experimental results show that the system dynamic performance against load force impact is largely improved with decreased maximal dynamic position deviation and shortened settling time.That is,system dynamic load stiffness is evidently raised.This paper proposes a new method which can effectively improve the dynamic stiffness of electro-hydraulic servo systems.     

电火花线切割加工中放电间隙大小在线识别

为实现对线切割加工中放电间隙大小的在线识别，开发了电火花线切割加工间隙放电状态检测系统。在试验的基础上，运用时序分析法研究了放电间隙大小与间隙放电状态之间的关系；构造了一个反映放电间隙大小的样本空间，并以此训练一个神经网络模型来在线识别放电间隙大小。试验表明，该模型能较好地识别放电间隙大小。     

A novel surface analytical model for cutting linearization error in fast tool/slow slide servo diamond turning

Fast tool/slow slide servo (FTS/SSS) technology plays an important role in machining freeform surfaces for the modern optics industry. The surface accuracy is a sticking factor that demands the need for a long-standing solution to fabricate ultraprecise freeform surfaces accurately and efficiently. However, the analysis of cutting linearization errors in the cutting direction of surface generation has received little attention. Hence, a novel surface analytical model is developed to evaluate the cutting linearization error of all cutting strategies for surface generation. It also optimizes the number of cutting points to meet accuracy requirements. To validate the theoretical cutting linearization errors, a series of machining experiments on sinusoidal wave grid and micro-lens array surfaces has been conducted. The experimental results demonstrate that these surfaces have successfully achieved the surface accuracy requirement of 1 μm with the implementation of the proposed model. These further credit the capability of the surface analytical model as an effective and accurate tool in improving profile accuracies and meeting accuracy requirements.     

White layer formation and hardening effects in hard turning of H13 tool steel with CrTiAlN and CrTiAlN/MoST-coated carbide tools

White layers are hard, brittle and normally associated with a tensile stress and hence the ability to reduce the fatigue life of machined components. Several authors have reported the formation of white layers on components after turning processes by using CBN/PCBN and ceramic cutting tools. However, there are hardly any studies that have reported on white layer formation for new and low-cost-coated carbides. The study in this paper was conducted to determine the effect of CrTiAlN and CrTiAlN+MoST and high cutting speeds on white layer formation in machining tool steel. H13 tool steel (57 HRC) was examined after turning at a conventional and high cutting speed. Coated tools resulted in lower workpiece and tool temperatures. Hence coated tools resulted in reduced and also more homogeneous hardening effects compared to the uncoated tool. In addition, the higher cutting speed produced negligible white layers. Thus, the paper elucidates on the benefits of coatings on surface hardening in conventional and high speed machining.     

Servo piezo tool SPT400MML for the fast and precise machining of free forms

Recent requirements for accuracy and resolution demand higher quality in the machining of precision parts in many industries—such as optics, automotive and aerospace—by free form machining. The required operations are possible by using expensive manufacturing equipment in parallel with several processes such as grinding and polishing. By using a new fast tool servo, the so-called servo piezo tool SPT400MML, driven by a piezoelectric actuator for the precision diamond turning of non-symmetrical surfaces, components can be machined with a fast motion control of the tool (diamond or carbide). The SPT400MML embeds a patented amplified piezoelectric actuator APA400MML and a real-time controller based on a FPGA component able to improve the overall accuracy. Models based on mechanical FEM software and control design software are used to optimise the achieved performances. Experiments have been undertaken to show the capability to displace a diamond tool on a 400-µm stroke with a first resonant frequency of above 600 Hz.     

整体式波前校正器应用前景及加工技术基础研究

采用整体式波前校正器替代自适应式波前校正器可以大大降低光学系统的成本。介绍了整体式波前校正器的金刚石切削原理。利用所研制的快速伺服刀架、计算机控制系统 ,在超精密车床上进行了切削试验。试验表明 ,用单点金刚石车削整体式波前校正器是可行的。     

考虑摩擦影响的重型车床横向进给伺服系统建模与分析

进给伺服系统的性能对数控(Computer numerical control,CNC)机床的跟踪及定位精度、零件加工表面质量等有着重要的影响。摩擦的非线性还会导致系统产生爬行行为。结合Karnopp摩擦模型的建模思想,对导轨接触面建立一种改进的Stribeck摩擦模型,针对闭环控制的某重型车床的横向进给系统,建立综合考虑轴的扭转刚度、齿轮的啮合刚度、丝杠螺母副接触刚度、丝杠轴和轴承轴向刚度、导轨接触面摩擦的进给伺服系统的多自由度力学模型和数学模型,研究低速进给下各个刚度变化对工作台输出的影响,找出机械传动系统中的刚度薄弱环节。现场试验测试工作台不同进给位置下的临界爬行速度,得出临界爬行速度与丝杠的轴向刚度的关系,理论分析与试验结果相吻合。所得结论可为该重型车床横向进给伺服系统的优化设计和性能预测提供理论支持。     

车床振动的自动控制

车削时的振动,影响加工精度和生产率的提高,降低机床和刀具的寿命。因此,在现有机床和切削条件下,控制这种振动就成了十分重要的问题。在国内外,对车削时振动的控制的研究,一般均采用液压伺服系统或控制电机驱动系统,使刀具作补偿移动的方法。其控制方法复杂,控制装置的结构尺寸庞大,且对机床动态系统引入了附加系统的影响,对车床刀架的改装工作量也大。为此,我们提出了一种新的控制原理和方法,即外加上稳态控制力,同时利用车削时径向切削力的动态分量△P,来产生跟踪△P的变化,而相位与它相反的动态控制力△F,使切削力的波动的影响得到补偿,实现振动的自动控制。我们建立了控制系统,成功地进行了车削时振动的试验。试验结果表明,我们所建立的控制原理和方法,使车削时的振动显著减小,加工精度提高三倍,可大大提高生产率,不需要对车床的改装,方法简便。所以,它对于实际生产,和进一步扩展用于其它类型的切削加工,有重要的意义。     

基于特征的刀具选配系统的研究与开发

通过分析工件的特征信息,利用规范化数据库技术进行了刀具选配系统的开发,使用该系统可在特征的基础上实现刀具类型、刀具组件信息和工件与刀具材料匹配等快速查询以及刀具的组配。     

基于FTS的非轴对称微结构表面超精密切削系统研究

介绍了基于快速伺服刀架(FTS)的微结构表面超精密金刚石车削加工系统,并利用该系统成功实现了典型非轴对称结构正弦网格表面的加工。作为FTS的驱动元部件,压电陶瓷微位移驱动器的迟滞、蠕变非线性特性大大影响了系统的动态性能与加工精度。因此,建立了基于拓展输入空间法的FTS神经网络逆模型,并结合PID反馈控制,实现了FTS的闭环控制。实验结果表明,该控制策略可以有效提高FTS的动态性能,其跟踪误差小于150 nm,为微结构表面的加工提供了可靠的保证。