新型双臂菱形压电柔性机构理论设计与建模

针对目前传统菱形位移放大机构的输出刚度、固有频率和位移放大比无法同时提高的问题,提出了一种双臂复合菱形柔性机构,并介绍了其理论设计与建模方法。基于欧拉-伯努利梁理论和卡氏第二定理,推导出双臂复合菱形柔性机构的位移放大比和刚度解析模型,利用拉格朗日方程建立了该柔性机构的固有频率解析模型,并通过商业有限元软件验证了解析模型的准确性。根据理论计算结果,通过电火花切割工艺加工出复合柔性机构,并与相同尺寸参数的传统菱形位移放大机构进行实验比较研究。实验结果表明,压电双层臂柔性机构的固有频率为1330Hz,位移放大比为4.2,同时提高了固有频率和放大比。此外,所建立的位移放大比和固有频率力学解析模型可以为新型压电柔性机构的优化设计提供理论指导。     

垂直型多级位移放大机构设计与力学解析建模

针对压电位移放大机构在垂直方向较难实现大行程、高频带宽度的问题,结合两个复合菱形机构、两个杠杆机构以及一个普通菱形机构,提出了一种垂直型多级位移放大机构。基于能量守恒方法和弹性梁理论建立了位移放大比和输入/输出刚度解析模型,根据拉格朗日方程推导了固有频率解析模型。通过有限元法对解析模型进行了验证,所建立的位移放大比解析模型有较高的预测精度,可为大行程垂直型柔顺平台的优化设计提供参考。与文献中的位移放大机构性能对比结果表明,提出的垂直型位移放大机构具有更好的静动态平衡性能,其位移放大比可达43.29,同时保持一个较高的固有频率561.28 Hz。     

基于类V型柔性铰链的微位移放大机构

采用新型高精度类V型柔性铰链设计了柔性微位移放大机构,以减小该类机构的寄生运动并提高其动力学性能。对类V型柔性铰链与最常见的高精度直圆型柔性铰链的性能进行了比较;在考虑柔性铰链转动中心偏移量的基础上,基于弹性力学和材料力学理论推导了基于类V型柔性铰链和基于直圆型柔性铰链的两类二级杠杆式微位移放大机构的放大比。采用ANSYS软件,建立了放大机构的有限元模型,验证了位移放大比的理论推导,并对上述两类放大机构的位移放大比、寄生运动和固有频率进行了仿真和比较。有限元分析结果显示：基于类V型柔性铰链的放大机构有着更小的寄生运动和更高的固有频率,且前2阶固有频率分别是基于直圆型柔性铰链放大机构的1.68倍和1.41倍。最后,采用微视觉测量系统测量了两类放大机构的位移放大比和寄生运动。结果表明：基于类V型和直圆型柔性铰链放大机构的放大比和相对寄生运动比分别为4.387、4.529和0.314 7、0.334 2,显示类V型柔性铰链用于微位移放大机构可有效减小寄生运动并提高动力学性能。     

柔顺桥式位移放大机构的非线性建模与优化

柔顺桥式位移放大机构因结构紧凑、位移放大倍数大等优点已成为精密工程领域的研究热点。针对以往研究仅在线性范围内讨论桥式位移放大机构的设计与分析的问题,本文对典型集中柔度桥式位移放大机构进行了非线性建模与优化。考虑剪切作用与几何非线性,通过能量法、有限单元法与数值拟合,对机构的输入输出关系进行半解析建模,以实现非线性结果的快速预测。为实现输出位移最大化与抑制几何非线性作用,提出机构平面内尺寸与厚度的综合优化策略。ANSYS Workbench有限元仿真显示,机构非线性建模误差均在5%以内且优化结果具备有效性。本文提出的两步法半解析非线性建模方法以及平面内尺寸和厚度的综合非线性优化策略对其它复杂柔顺机构的非线性结果快速预测与优化设计具有参考意义。     

柔性铰链微定位平台的设计

设计了一种以平行板铰链机构进行导向,以桥式机构进行位移放大的新型压电陶瓷驱动微定位平台。应用弹性力学和材料力学理论建立该平台的桥式放大机构和平行板铰链机构的理论模型,分析了平台的驱动力、输出位移、刚度和固有频率,并运用Matlab软件优化了桥式机构铰链长度、厚度,平行板铰链长度及厚度等几何参数,获得了微定位平台的最优值。对优化后的结果进行了有限元仿真,并搭建了测试系统对平台性能进行了测试。测试结果显示,理论分析与实验结果的最大误差为9.8%,有限元分析与实验结果的最大误差为4.2%,得到的结果验证了理论分析和有限元分析的正确性,实现了平台体积小,放大倍数高,位移输出大的设计目标。     

基于类Ⅴ型柔性铰链的微位移放大机构

采用新型高精度类Ⅴ型柔性铰链设计了柔性微位移放大机构,以减小该类机构的寄生运动并提高其动力学性能。对类Ⅴ型柔性铰链与最常见的高精度直圆型柔性铰链的性能进行了比较;在考虑柔性铰链转动中心偏移量的基础上,基于弹性力学和材料力学理论推导了基于类Ⅴ型柔性铰链和基于直圆型柔性铰链的两类二级杠杆式微位移放大机构的放大比。采用ANSYS软件,建立了放大机构的有限元模型,验证了位移放大比的理论推导,并对上述两类放大机构的位移放大比、寄生运动和固有频率进行了仿真和比较。有限元分析结果显示:基于类Ⅴ型柔性铰链的放大机构有着更小的寄生运动和更高的固有频率,且前2阶固有频率分别是基于直圆型柔性铰链放大机构的1.68倍和1.41倍。最后,采用微视觉测量系统测量了两类放大机构的位移放大比和寄生运动。结果表明:基于类Ⅴ型和直圆型柔性铰链放大机构的放大比和相对寄生运动比分别为4.387、4.529和0.314 7、0.334 2,显示类Ⅴ型柔性铰链用于微位移放大机构可有效减小寄生运动并提高动力学性能。     

基于柔性铰链微位移放大机构的设计和分析

针对三级电反馈射流管电液伺服阀第三级滑阀阀芯行程较小,位移传感器较难检测的问题,提出了应用于三级电反馈射流管电液伺服阀的柔性铰链微位移放大器,利用解析法和有限元法对柔性铰链微位移放大机构进行了静力学和动力学分析,计算出了放大机构的放大倍数和输入刚度;输出位移和负载成线性关系,负载越大位移损失越大;应力分析表明此放大机构的最大应力远小于材料的最大许用应力;并通过有限元对固有频率和振型的计算,得出系统动力学参数。     

基于柔性铰链的柔性放大机构参数化设计

为了对柔性微位移放大机构进行优化设计,有必要对柔性铰链及柔性放大机构进行参数化分析与研究。提出了一个通用的结构参数ε,探讨了ε对不同柔性铰链柔度系数的影响规律,并横向比较了常用柔性铰链的柔度特性。另一方面,基于柔度特性的影响分析,提出了新的参数柔度比λ,重点分析了不同柔度比λ的柔性铰链主要输出位移形式的灵敏度。以实际的桥式柔性微位移放大机构为例,利用参数ε和λ实现了该柔性放大机构的参数化设计,并用有限元软件进行了仿真计算。实验测量结果表明,对基于柔性铰链的柔性微位移放大机构进行参数化设计,最终输出位移行程与有限元仿真设计的结果误差率为3.80%。基于柔性铰链的结构参数ε和柔度比λ对柔性放大机构进行参数化设计是可行且正确的,有利于这一类柔性放大机构的优化设计。     

基于GMA柔性换向放大机构的结构设计与优化

设计了一种以超磁致伸缩驱动器(GMA)为驱动单元,以杠杆式柔性铰链进行位移换向放大的微位移传递机构。根据弹性力学理论,在考虑柔性铰链转动中心偏移量的基础上,推导出柔性换向放大机构的放大比和固有频率表达式,运用Matlab软件优化分析柔性铰链的切割半径R和最小厚度t等几何参数,获得了柔性铰链几何参数的最优值,并对优化后的结果进行有限元分析,最后,将仿真结果与理论分析结果进行了对比。研究结果表明,理论分析与有限元分析验证了理论模型的正确性,实现了机构放大倍数高、位移换向呈直线输出的设计目标。     

一种垂直运动精密微定位平台的设计与分析

根据桥式放大机构和平行四边形导向机构相结合设计了一种新型的垂直运动精密微定位平台。利用卡式定理推导了微定位平台的最大行程、刚度及放大比,利用拉格朗日方程推导了微定位平台的动力学模型及其固有频率。采用有限元仿真软件分析微定位平台的动静力学特性,并与理论分析结果进行对比,两者结果吻合良好。制造了微定位平台的原型样机,并进行了实验验证,实验结果表明:垂直运动精密微定位平台的行程可达112.9μm,闭环分辨率为10 nm,可以用于显微镜聚焦系统的微调等垂直定位精度较高的场合。     

柔性二级差动式微位移放大机构优化设计

微位移放大机构常常用来扩大压电陶瓷致动器的行程范围。鉴于差动式微位移放大机构具有"小结构大倍数"的特点,设计了一种新型二级差动式杠杆微位移放大机构。应用矩阵表示法对其进行了运动静力学分析,在此基础之上,以柔性铰链的分布位置及其几何特征参数为优化变量,并以提高位移放大比和减小最大应力为目标函数建立一种双目标优化模型。机构经过优化设计后位移放大倍数高达48倍,并对其进行有限元仿真分析,计算结果为44倍,理论模型与有限元模型的误差小于10%。结果表明：提出的优化模型具有准确性和高效性,同样可适用于其他柔性铰链机构的优化设计。     

Analytical modeling, optimization and testing of a compound bridge-type compliant displacement amplifier

This paper investigates a flexure-based compound bridge-type (CBT) displacement amplifier for piezoelectric drives. In addition to the advantages of large amplification ratio and compact size, the CBT amplifier has a larger lateral stiffness and is more suitable for actuator isolation and protection than the ordinary bridge-type amplifier. An analytical model for amplification ratio calculation is established based on the Euler-Bernoulli beam theory because other simple theoretical approaches cannot predict the ratio properly. The reason why those approaches fail is discovered by resorting to the elastic model. The input stiffness and resonance frequency of the amplifier are also analytically modeled and verified by finite-element analysis (FEA). The derived models are utilized to optimize the amplifier structure through particle swarm optimization (PSO) to obtain a large resonance frequency subject to other performance constraints. The performances of the fabricated amplifier with optimized parameters are confirmed by both FEA simulation and experimental studies. Because an output displacement over 1 mm is achieved by the designed amplifier, it is employable to develop micro/nanopositioning stages with a cubic millimeter sized workspace.     

Nonlinear modeling of compliant mechanisms incorporating circular flexure hinges with finite beam elements

Modeling of compliant mechanisms incorporating flexure hinges is mainly focused on linear methods. However, geometrically nonlinear effects cannot be ignored generally. This work shows that nonlinear behavior plays an important role in the deformation and stress analysis, which consequently impacts the design of compliant mechanisms. In this study a nonlinear higher order finite beam element based modeling approach is presented strongly reducing the computation time of nonlinear models. Planar deformation and mechanical stress of a single circular flexure hinge under a wide range of loads is modeled and computed with the proposed approach. A comparison with a 3D-nonlinear finite element model shows very good agreement and validates the beam model. It is shown that the linear and nonlinear deformation behavior of a single flexure hinge deviate marginally so that linear modeling approaches are sufficient. Furthermore a planar displacement amplification mechanism incorporating circular flexure hinges is studied by means of the same method highlighting the distinct deviation of the behavior of the geometrically nonlinear model from its linear prediction. In conclusion the nonlinear behavior at the system level can not longer be neglected. Finally, a study shows that different designs of the displacement amplification mechanism are achieved when linear or nonlinear modeling approaches are applied.     

Analysis of parasitic motion in parallelogram compliant mechanism

In this paper, an analytical method for parasitic rotation and displacement calculations of parallelogram compliant mechanisms is formulated. Mathematical model is proposed for the geometrical parametric study of parasitic motion, through which the approach to reduce parasitic motion is obtained. The formulations for calculating the locations of the points on end-effectors with no theoretical parasitic displacement are presented. The analytical model predictions are confirmed by the finite element analysis. Theoretical basis is built for improving the output precision of parallelogram compliant mechanisms.     

A novel analytical model for flexure-based proportion compliant mechanisms

This paper proposes a novel analytical model for flexure-based proportion compliant mechanisms. The displacement and stiffness calculations of such flexure-based compliant mechanisms are formulated based on the principle of virtual work and pseudo rigid body model (PRBM). According to the theory and method, a set of closed-form equations are deduced in this paper, which incorporate the stiffness characteristics of each flexure hinge, together with the other geometric and material properties of the compliant mechanism. The rotation center point for a corner-filleted flexure hinge is investigated based on the finite element analysis (FEA) and PRBM. An empirical equation for the rotational angle is fitted in this paper in order to calculate accurately the position of the end-point of the flexure hinge. The displacement proportion equation for such mechanisms is derived according to the new approach. Combining the new proposed design equation and the existed stiffness equation, a new proportion compliant mechanism with corner-filleted flexure hinges is designed by means of the least squares optimization. The designed models are verified by finite element analysis.     

Analysis of frequency characteristics and sensitivity of compliant mechanisms

Based on a modified pseudo-rigid-body model, the frequency characteristics and sensitivity of the large-deformation compliant mechanism are studied. Firstly, the pseudo-rigid-body model under the static and kinetic conditions is modified to enable the modified pseudo-rigid-body model to be more suitable for the dynamic analysis of the compliant mechanism. Subsequently, based on the modified pseudo-rigid-body model, the dynamic equations of the ordinary compliant four-bar mechanism are established using the analytical mechanics. Finally, in combination with the finite element analysis software ANSYS, the frequency characteristics and sensitivity of the compliant mechanism are analyzed by taking the compliant parallel-guiding mechanism and the compliant bistable mechanism as examples. From the simulation results, the dynamic characteristics of compliant mechanism are relatively sensitive to the structure size, section parameter, and characteristic parameter of material on mechanisms. The results could provide great theoretical significance and application values for the structural optimization of compliant mechanisms, the improvement of their dynamic properties and the expansion of their application range.     

MEMS微型柔性力-位移传动机构设计

为了提高微机电系统中微执行器的作用距离,设计了一种全硅结构的微型柔性力-位移传动机构,用于放大微执行器的输出位移。建立了传动机构的简化力学模型和有限元模型,并对机构性能的影响因素进行了分析。用深层反应离子刻蚀工艺在硅隔离衬底上成功制备了电热微执行器-微型柔性传动机构样机,并进行测试。结果表明,柔性力-位移传动机构能够有效地放大微执行器的输出位移,实测放大倍数达到18.9,可以极大地扩展微机电系统微执行器的应用范围。     

Computational parametric analysis and experimental investigations of a compact flexure-based microgripper

This paper presents a flexure-based piezoelectric actuated microgripper for high precision grasping/releasing tasks. The design of the microgripper consists of a three-stage amplification and transmission mechanism, and the parallel grasping technique. A bridge-type mechanism and two sequential lever-type mechanisms are symmetrically connected to amplify the output displacement of the embedded piezoelectric actuator. The parallelogram mechanisms assist in linearizing the output displacement of both jaws of the microgripper. The computational analysis is conducted to investigate the effect of the dimensional parameters on the characteristics of the microgripper. A computational parametric optimization methodology is established to achieve the required attributes of the microgripper. The design optimization resulted in a compact design, a high displacement amplification ratio, and a large output displacement of the microgripper. The experimental studies are conducted to investigate the key characteristics of the microgripper such as the displacement amplification ratio, the output displacement, tracking performance. Further, the parasitic motion, input-end and output-end motion resolution of the microgripper are identified. The experimental results indicate that the compact microgripper can achieve a high displacement amplification ratio and large output displacement with a high positioning accuracy.