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非平衡磁控溅射沉积Ta-N薄膜的结构与电学性能研究 总被引:4,自引:0,他引:4
采用直流反应非平衡磁控溅射技术在单晶Si(100)和玻璃表面沉积氮化钽(Ta-N)薄膜,分别测试了薄膜的结构、成分、电阻率和吸收光谱,研究了氮氩流量比(N2∶Ar)变化对Ta-N薄膜的结构和电学性能的影响.研究结果表明随N2∶Ar增加,依次生成六方结构的γ-Ta2N、面心立方结构(fcc)的δ-TaNx、体心四方结构(bct)的TaNx;N2∶Ar在0.2~0.8的范围内,Ta-N薄膜中只存在着fcc δ-TaNx;当N2∶Ar>1之后,Ta-N薄膜中fcc δ-TaNx和bct TaNx共存.Ta-N薄膜电阻率随N2∶Ar流量比增加持续增加,当N2∶Ar为1.2时,薄膜变为绝缘体,光学禁带宽度为1.51eV. 相似文献
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微电子器件的迅速发展对TiN电极薄膜电阻率、表面粗糙度以及厚度均匀性均提出了更高的要求。本文采用半导体工艺兼容的反应磁控溅射技术在单晶硅上制备TiN薄膜。通过XRR、GIXRD、四探针测试仪和AFM等表征手段系统研究了衬底偏压、工作气压和溅射电源对薄膜晶体结构和电阻率的影响规律。结果表明,当采用直流电源进行溅射镀膜时,在-200 V的衬底偏压和0.3 Pa的工作气压下,得到了沿(200)晶面择优生长、表面粗糙度为0.7 nm、电阻率为38.7 μΩ·cm 的TiN薄膜。在该工艺条件下,分别采用直流和射频电源在4英寸单晶硅衬底上制备TiN薄膜。最终采用射频电源可获得高导电性、原子级平滑且厚度均匀分布的薄膜。分析发现:在使用射频电源的放电溅射过程中,高频交变电场使放电空间的电子在电极之间震荡,产生比直流放电更有效的碰撞电离,因此射频磁控溅射比直流磁控溅射沉积的薄膜更致密。 相似文献
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采用辉光弧光协同共放电混合镀方法在A3碳钢基体上沉积氮化钛薄膜,通过改变Ar/N2流量比,研究Ar/N2流量比对TiN薄膜结构及硬度的影响。X射线衍射谱图表明制备的TiN有明显的(111)晶面择优取向;Ti2p的X射线光电子谱谱峰拟合分析表明Ti2p1/2峰和Ti2p3/2峰均有双峰出现,可知氮化物中的Ti存在不同的化学状态,整个膜层是由TiN,TiO2,TiNxOy化合物组成的复合体系,Ar/N2流量比影响各成分的含量。对比硬度的变化和组成成分之间的关系发现,膜层硬度随着含TiN量的增多而增大,当Ar/N2流量比为3∶1时,硬度最大。 相似文献
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氮流量对TaN薄膜微结构及性能的影响 总被引:1,自引:0,他引:1
采用反应直流磁控溅射法在Al2O3陶瓷基片上制备TaN薄膜,研究了氮流量(N2/(N2+Ar))对TaN薄膜微结构及性能的影响。结果表明,随氮流量的增大,TaN薄膜的氮含量、电阻率、方阻以及TCR的绝对值逐渐增大,而沉积速率逐渐降低。当N2流量较低(2%~4%)时,TaN薄膜中主要含有电阻率和TCR绝对值较低的六方Ta2N相(hcp),薄膜的电阻率在344μΩ.cm到412μΩ.cm范围内,薄膜的TCR绝对值约为几十ppm/℃。当氮气流量较高(5%~6%)时,薄膜中Ta2N相消失,薄膜中主要含有TCR绝对值较大的体心四方结构(bct)的TaN和四方结构(bct)的Ta3N5相,薄膜的电阻率在940μΩ.cm到1030μΩ.cm范围内,薄膜的TCR绝对值约为几百ppm/℃。 相似文献
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以Zn/ZnO/ZnF2混合物为靶材,在衬底温度(Ts)为150℃和300℃、溅射气氛为Ar+O2和Ar+H2下反应溅射制备F掺杂ZnO(FZO)薄膜,研究气体流量、Ts以及溅射气氛对薄膜结构及透明导电性能的影响.结果表明:对于Ar+O2下制备的FZO薄膜,Ts=300℃时有利于制备出具有(002)择优取向、结晶度高、压应力低且透明导电性能较好的薄膜.对于Ar+H2下制备的薄膜,Ts增大到300℃虽然提高了薄膜结晶度和透光性,降低了压应力,但薄膜厚度明显降低,薄膜导电性能变差.比较两种气氛下制备的FZO薄膜,发现Ar+H2下制备的薄膜可在150℃和0.8~3.2 mL·min-1的H2流量范围内得到更好的透明导电性能(电阻率为3.5×10-3Ω·cm,可见光平均透光率为87%).讨论Ar+H2气氛时H等离子的刻蚀作用与H掺杂、A r+O 2气氛时O离子的轰击作用与薄膜氧缺陷的变化、Ts升高时沉积原子反应活性与迁移能力增强以及Eg与载流子浓度的关系. 相似文献
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采用射频磁控溅射技术,在室温下,以ZnO∶Al203(2%Al2O3(质量比))为靶材,在石英玻璃基底上,采用不同工艺条件制备了ZnO∶Al(AzO)薄膜.使用扫描电子显微镜观察了薄膜的表面形貌,X射线衍射分析了薄膜的结构,四探针测量仪得到薄膜的表面电阻,轮廓仪测量了薄膜厚度,并计算了电阻率,最后采用分光光度计测量了薄膜的透过率;研究了溅射功率、溅射气压与薄膜厚度对薄膜电阻率及透过率的影响.结果表明:所制备的AZO薄膜具有(002)择优取向,并且发现薄膜厚度对薄膜的光电性能有明显影响,溅射气压和溅射功率对薄膜电学性能有较大影响,但是对薄膜透过率影响不大.当功率为1kW、溅射气压0.052 Pa、AZO薄膜厚度为250nm时,其电阻率为8.38×10-4Ω·cm,波长在550 nm处透过率为89%,接近基底的本底透过率92%.当薄膜厚度为1125 nm时薄膜的电阻率降至最低(6.16×10-4 Ω·cm). 相似文献
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《International journal for numerical methods in engineering》2018,113(9):1488-1506
In this paper, we present a new method for inserting several triangulated surfaces into an existing tetrahedral mesh generated by the meccano method. The result is a conformal mesh where each inserted surface is approximated by a set of faces of the final tetrahedral mesh. First, the tetrahedral mesh is refined around the inserted surfaces to capture their geometric features. Second, each immersed surface is approximated by a set of faces from the tetrahedral mesh. Third, following a novel approach, the nodes of the approximated surfaces are mapped to the corresponding immersed surface. Fourth, we untangle and smooth the mesh by optimizing a regularized shape distortion measure for tetrahedral elements in which we move all the nodes of the mesh, restricting the movement of the edge and surface nodes along the corresponding entity they belong to. The refining process allows approximating the immersed surface for any initial meccano tetrahedral mesh. Moreover, the proposed projection method avoids computational expensive geometric projections. Finally, the applied simultaneous untangling and smoothing process delivers a high‐quality mesh and ensures that the immersed surfaces are interpolated. Several examples are presented to assess the properties of the proposed method. 相似文献
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Standards are the basis for production enterprises to organize production ex-factory inspection trade 《中国标准化(英文版)》2008,25(1):24-25
Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.…… 相似文献
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Steffen Müller-Probandt 《材料科学与工程:中英文B版...》2018,(4):161-177
We associate a variety of innovations with the term "Industry 4.0". The pioneer of many 4.0 modifications forms the basisfor the trend towards the integrated di... 相似文献
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A flow calorimeter for enthalpy increment measurements on condensed gases is presented. A better knowledge of the properties of the liquefied natural gas is needed, and therefore a liquid loop has been designed for our flow calorimeter. The fluid loop in the calorimeter is designed in order to avoid the two-phase region, since two phases would give compositional disturbances in the measurements. The avoidance of the two-phase region is made possible by increasing the pressure of the test fluid after the measurement section, then heating the fluid at super-critical pressure past the critical point. Finally, the fluid is throttled to the low-pressure gas state at the inlet condition of the compressor that circulates the fluid. To perform the pressure increase, a new cryogenic pump has been designed. To evaluate the new equipment, measurements were taken on liquid ethane over the temperature range 146–256 K at pressure between 0.9 and 5.1 MPa. 相似文献
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On November 30, 2007, the China Association for Standardization (CAS) held a press conference at Beijing Diaoyutai State Guest House. Leaders from the China Household Electric Appliance Research Institute, the China Household Electric Appliance Association, and the China Consumers' Association attended and made speeches.…… 相似文献
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Janet Lang 《Materials and Manufacturing Processes》2017,32(7-8):857-866
ABSTRACTThe production of ferrous metal increased during the Roman Late Republican period, Principate and Empire. The direct bloomery process was used to extract the metal from its ores using slag-tapping and slag-pit furnaces. The fuel was charcoal and an air blast was introduced by bellows-operated tuyères. Iron formed as a bloom, often as a spongy mass of metal, which contained impurities from the smelting process, including unreacted ore, fuel, slag and fragments from the furnace walls, while the metal was often inhomogeneous with varied carbon contents. Blooms were either smithed directly into bars or ingots or they were broken up, which also allowed the removal of gross impurities and a selection of pieces with similar properties to be made. These could then be forge-welded together and formed into characteristically shaped ingots. Making steel in the furnace seems to have been achieved: it depended on the ore and the furnace and conditions within it. Surface carburization was also carried out. Iron and steel were used extensively in construction and for tools and weapons. Fire welding was often used to add pieces of steel to make the edges of tools and weapons, which could be heat-treated by quenching to harden them. 相似文献
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Zusammenfassung Bei der Gestaltung von Ernteprozessen — beispielsweise des Prozesses Mähdrusch, Körnertransport und -abnahme — als transportverbundene Fließarbeitsverfahren mit mindestens zwei verschiedenen Arbeitsmitteln gibt es einen großen Optimierungsspielraum. Solche Prozesse sind mehrstufige Bedienungsprozesse mit gemischter Anordnung der Bedienungseinrichtungen. Außerdem besitzen sie stark ausgeprägte räumliche Aspekte. Es wird vor allem gezeigt, welche Merkmale solcher Prozesse in Simulationsmodellen abgebildet sein müssen, welche Zielgrößen in Abhängigkeit von welchen Einflußgrößen unter Berücksichtigung welcher Prozeßbedingungen ermittelt werden sollten und wie der Bewertungsprozeß zur Ermittlung der gewünschten Informationen gestaltet werden muß. 相似文献
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C. Qihong W. Zhan‐Wen J. Yi J. Yehua L. Fei F. Hanguang 《Materialwissenschaft und Werkstofftechnik》2014,45(7):582-590
In the present study a high‐boron high speed steel (HSS) roll material was designed. Many expensive alloy elements have been substituted by cheap boron alloy, and high‐boron high speed steel roll has been manufactured by centrifugal casting method. The microstructures, mechanical properties and wear resistance of centrifugal casting high‐boron high speed steel roll have been investigated by optical microscopy (OM), scanning electron microscopy (SEM), and X‐ray diffraction (XRD) analysis, hardness test, impact test and wear test. The results indicated that the solidification microstructures of high‐boron high speed steel roll consisted of M2(B,C), (W,Mo)2(B,C), M3(B,C), M23(B,C)6 type borocarbides and martensite, a small amount of retained austenite. Borocarbides were continuously distributed over the grain boundary. After quenching from 1050 °C, local broken network appeared in partial borocarbides, and fine secondary borocarbide precipitated from the matrix. After tempering from 525 °C, the amount of precipitated borocarbide increased significantly. After heat treatment, the hardness of high‐boron high speed steel roll excelled 60 HRC, and its impact toughness excelled 8.0 J/cm2. The single groove steel rolling amount of high‐boron high speed steel rolls increases by 500% than that of bainite cast iron roll, when the rolls are used in K1 mill housing of bar mill. 相似文献
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Dimiter Hadjistamov 《材料科学与工程:中英文B版...》2019,(2):56-65
The definition of the thixotropy is a decrease in viscosity with time in shear and a subsequent recovery of viscosity after the shear deformation is removed.We ... 相似文献