基片温度对直流反应磁控溅射法制备玻璃基TiO2薄膜结构与亲水性的影响

在工作气压为 2 .0Pa的氧气氛下 ,通过改变基片温度 (室温 ,2 80℃ ,42 0℃ ) ,在预先镀 10nm左右SiO2 的普通玻璃基片上用直流磁控溅射法制备了 30 0nm左右的TiO2 薄膜试样。用X射线光电子能谱和X射线衍射仪分别研究了试样的表面元素组成、离子状态和物相组成 ,用接触角分析仪测试了试样在紫外光照射后的水润湿角。结果表明 :试样表面的钛离子都以 4价的形式存在 ,氧化钛表面易吸附OH-和CO32 - ,氧化钛中n (O)∶n (Ti) =1.90～ 1.97;基片不加热时 ,试样是非晶态 ,升高基片温度 ,薄膜结晶逐渐完善 ,并以锐钛矿形式存在。在相同时间的紫外线照射下 ,非晶TiO2 膜的润湿角从 34°降低到 2 2° ,而结晶完好的试样的润湿角从 18°～ 2 4°降低到 5°     

金属铝诱导法低温制备多晶硅薄膜

以氢气稀释的硅烷（SiH4）和硼烷（B2H6）为气源,利用等离子体增强化学气相沉积法（PECVD）制备出p型a-Si薄膜.采用铝诱导晶化技术对不同厚度的铝膜对a-Si薄膜晶化的影响进行了研究.实验中发现,铝膜溅射为10 s的非晶硅薄膜样品在450℃下退火10 min后,p型a-Si结构仍为非晶态,铝膜溅射为20 s的非晶硅薄膜在450℃下退火20 min后,p型a-Si薄膜开始晶化为polySi薄膜,并且铝膜厚度越厚,则a-Si薄膜晶化程度越强.     

磁控溅射制备非晶态WO_3薄膜的光催化性能

采用射频反应磁控溅射工艺在玻璃基片上沉积了非晶态WO3薄膜。通过光催化降解亚甲基蓝和罗丹明B溶液实验,研究了所制WO3薄膜的光催化活性和使用寿命。X射线衍射(XRD)分析表明:所制备的WO3薄膜为非晶态。光催化实验表明:紫外光照3h后,薄膜对亚甲基蓝和罗丹明B溶液的最大降解率分别为83.26%和72.73%。重复使用3次后,薄膜对亚甲基蓝的降解率保持在75%以上,7次使用后薄膜基本丧失光催化活性。采用去离子水超声处理30min的方法可使已失活薄膜对亚甲基蓝的降解率从20%恢复至81%。     

锂离子电池Si薄膜负极材料的制备及性能

采用直流磁控溅射法成功制备了钾离子电池用Si薄膜负极材料.通过SEM、恒电流充放电对薄膜材料的形貌及电化学性能进行了表征.结果表明,样品表面颗粒呈球状,表面较粗糙.电化学性能测试表明,Si电极存在较大的初期不可逆容量损失,其首次库仑效率为53%,首次嵌钾容量为1300 mAh/g,10次循环后,嵌锂容量维持在530 mAh/g,容量保持率为41%.     

ITO薄膜射频磁控溅射法制备及性能研究

以10%SnO2和90%In2O3(以质量计)烧结成的ITO氧化物陶瓷为靶材,采用射频磁控溅射法在玻璃基片成功地制备出光电性能优异的ITO透明导电薄膜。研究了基片温度和氧分压溅射工艺参数对ITO薄膜的结构和光电性能的影响。实验结果表明,采用氧化铟锡陶瓷靶射频磁控溅射制备的ITO薄膜沿(222)晶面生长,薄膜紫外透射光谱的吸收截止边带随着衬底温度和氧分压的升高向短波长方向漂移。     

V掺杂ZnO薄膜磁控溅射制备及其压敏性能

用磁控溅射成功制备出V掺杂ZnO压电薄膜。在不同温度对样品进行退火处理,采用扫描电子显微镜(SEM)、X射线衍射(XRD)和X射线光电子能谱仪(XPS)对薄膜的表面形貌、晶体结构和表面化学状态进行表征,并测量了不同退火温度下薄膜样品的电流密度(J)-电压(V)曲线。结果表明,高温退火后V向ZnO晶格内部迁移,引起晶格畸变,形成表面氧空位。随着退火温度的升高,非线性系数先增大后减小,薄膜的压敏电压逐渐增大,漏电流密度先减小后增大。800℃退火后样品表面氧空位浓度最高,薄膜具有较为理想的综合电性能,其非线性系数为15.19,压敏电压为5.13 V,漏电流密度为0.42μA·mm^-2。     

直流反应磁控溅射制备TiO2薄膜过程中热处理温度对薄膜性能的影响

采用直流反应磁控溅射法在玻璃基片上制备了TiO2薄膜，靶材为纯度99．9％的钛肥，溅射时基片不加热。XRD结果显示，所得TiO2薄膜的晶型为锐钛矿相；SEM结果显示，随着热处理温度的增加TiO2薄膜晶粒尺寸增大；光催化性能显示，经过500℃热处理1小时后的TiO2薄膜具有较好的光催化效率。     

铝锰合金表面直流反应磁控溅射制备氧化铟锡薄膜

采用直流反应磁控溅射在AlMn合金表面制备出ITO薄膜.采用扫描电镜、X射线衍射、紫外-可见光测试、磨损试验、盐雾试验、薄膜厚度测量和显微硬度试验等方法对制备的ITO薄膜表面进行检测分析.结果表明:在溅射功率210 W、衬底温度120℃、溅射时间20 min的条件下,AlMn合金表面的ITO薄膜晶粒尺寸细小,与基底结合良好,AlMn合金表面光泽度好,强度、硬度高,并具有一定的耐磨、耐蚀性能.     

高介电HfO_xN_y薄膜的制备及其光学性能研究

采用直流反应磁控溅射方法,在硅衬底制备了高介电HfOxNy薄膜。用椭偏仪研究了后期退火处理对薄膜光学性质的影响,结果表明,薄膜的折射率随退火温度的升高而增加,这主要是由于高温退火导致薄膜内部缺陷减少,使得薄膜松散的内部结构变得更加致密;薄膜的消光系数随退火温度的升高而降低,这是由于因为退火后薄膜内的缺陷减少。光学禁带宽度随退火温度的升高而增加,这是由于退火过程中薄膜中N含量的减少而导致。     

形状记忆电纺和本体薄膜的回复性能

采用溶液直接成膜法和静电纺丝法分别制得形状记忆聚氨酯本体薄膜和具有微结构的电纺薄膜,将其经过弯曲变形,测定形变后2种薄膜在空气中响应回复情况的差异.通过时间-形状回复率曲线可知,电纺薄膜先响应回复,且响应回复的时间是本体薄膜用时的1/3,达到6s.DSC结果显示,2种薄膜的熔融温度相差小于2℃,熔程均为30 ～ 50℃.其形状记忆性的差异主要由于薄膜不同的微结构造成.     

Melt-spun thin ribbons of shape memory TiNiCu alloy for micromechanical applications

The development of micromechanical devices (MEMS and NEMS) on the basis of nanostructured shape memory alloys is reported. A Ti₅₀Ni₂₅Cu₂₅ (at. %) alloy fabricated by the melt spinning technique in the form of a ribbon with a thickness around 40 μm and a width about 1.5 mm was chosen as a starting material. Technological parameters were optimized to produce the alloy in an amorphous state. The thickness of the ribbon was reduced to 5–14 μm by means of electrochemical polishing. A nanostructural state of the thin ribbons was obtained via the dynamic crystallization of the amorphous alloy by application of a single electric pulse with duration in the range of 300–900 μs. A microtweezers prototype with a composite cantilever of 0.8 μm thick and 8 μm long was developed and produced on the basis of the obtained nanostructured thin ribbons by means of the focused ion beam technique. Controlled deformation of the micromanipulator was achieved by heating using semiconductor laser radiation in a vacuum chamber of scanning ion-probe microscope.     

Microstructural and mechanical property evolutions of shape memory polyurethane during a thermodynamic cycle

To better understand the shape memory behaviors of synthesized shape memory polyurethane (SMPU) sealant with a tailored transition temperature (T_t) for concrete pavement joints, the thermal and dynamic mechanical properties of SMPU were first characterized to determine the shape memory switching temperature of SMPU. Then the microstructural and mechanical property evolutions of SMPU in the original, programmed, and recovered states during a five‐step thermodynamic cycle were discussed, respectively. The results indicate that the tailored T_t of prepared SMPU can be used as the shape memory switching temperature to match its working temperature. Further, the programming causes the phase separation in SMPU, leading to an obvious anisotropy. The SMPU has satisfactory shape memory performance. The orientation of molecular chains in soft segments is confirmed along the stretching direction. The oriented molecular chains can restore to the naturally curled state during the free recovery. Finally, the programming improves the mechanical properties of SMPU. The recovered SMPU shows a slight decrease in mechanical properties because of the partially impaired crystal structures and broken molecular segments during the programming and recovery. It is concluded that the synthesized SMPU with the specially tailored T_t is suitable to use as a sealant of concrete pavement joints. © 2017 Wiley Periodicals, Inc. J. Appl. Polym. Sci. 2018 , 135, 45703.     

磁控溅射法制备纳米Cu薄膜及其微结构的研究

采用磁控溅射法制备出以ITO为基底的纯Cu薄膜,考察溅射时间和基底温度等工艺条件对生长Cu薄膜的影响.用电子扫描显微镜(SEM)、X射线衍射仪(XRD)对薄膜的形貌、厚度和结构进行表征.实验结果表明:在一定范围内调控衬底温度和溅射时间,可获得不同形貌、尺寸和厚度的Cu薄膜,所得薄膜的晶体结构为面心立方结构,均沿(111...     

Effect of glucose crosslinking on thermomechanical properties and shape memory effect of PET‐PEG copolymers

Poly(ethylene terephthalate) (PET) and poly (ethylene glycol) (PEG) copolymers crosslinked with glucose as a crosslinker are prepared to improve their mechanical and shape memory properties compared to the one without crosslinking. Composition of PEG and glucose is varied to search for the one with the best mechanical and shape memory properties. The highest shape recovery rate is found in the copolymer composed of 25 mol % PEG‐200 and 2.0 mol % glucose. The result that crosslinking by glucose improves the shape recovery rate and supports the high shape recovery rate under the repetitive cyclic test conditions, compared to the one without crosslinking, will be discussed in the points of the structure and shape memory mechanism. © 2008 Wiley Periodicals, Inc. J Appl Polym Sci, 2008     

形状记忆聚合物材料的研发和应用

介绍了聚合物材料的形状记忆机理,概述了形状记忆聚合物材料的分类、特性及发展概况,展望了其应用及发展前景。     

电沉积Co-Mo合金薄膜的结构和热稳定性

通过电沉积,在铜基体上制备了Co-Mo合金薄膜.讨论了薄膜组成与结构以及非晶合金的晶体结构与热处理温度的关系.测定了薄膜磁性能(饱和磁化强度和矫顽力)随热处理温度变化的关系曲线.结果表明,薄膜中钼含量(质量分数)为6.05%～30.03%时,镀态Co-Mo合金薄膜具有非晶态结构;经连续升温到400℃并热处理1.5 h后,Co-Mo非晶态合金发生晶化,且随着薄膜中钼含量的增加,薄膜的晶化温度提高,热稳定性增强;在较高温度(高于500 ℃)下热处理后,Co-Mo非晶态合金晶化,并析出单一的hcp-Co相;热处理后,Co-Mo合金薄膜的软磁性变差.     

Blocking of soft segments with different chain lengths and its impact on the shape memory property of polyurethane copolymer

The arrangements, whether block or random type, of the soft segments of polyurethane block copolymers prepared with MDI and two kinds of poly(tetramethylene glycol) (PTMG; MW of 1000 or 2000) in various ratios were compared for possible effects on the physical properties of the copolymers. A long soft segment, PTMG‐2000, was superior in all mechanical properties (strain, stress, and modulus) because a long chain length could provide more motional freedom than a short one (PTMG‐1000) could and therefore was helpful in forming strong interchain attractions among hard segments. Inclusion of more PTMG‐2000 led to a lower T_g and a peak shift in infrared spectra. The arrangement of two soft segments in a block‐type copolymer, a key finding in this study, was controlled by separately synthesizing two prepolymers, each with a different chain length, and connecting two prepolymers in a second step. Random‐type copolymers prepared for purposes of comparison were allowed to react with two PTMGs in one step. Two types of copolymers were compared, and the reason for the differences in the shape memory property are discussed. © 2006 Wiley Periodicals, Inc. J Appl Polym Sci 103: 1435–1441, 2007     

Preparation and optical properties of W-doped VO2/AZO bilayer composite film

In order to improve its visible light transmittance, W-doped VO₂ thin film was prepared with direct current (DC) reactive magnetron sputtering on the surface of Al-doped ZnO (AZO) thin film deposited on quartz glass substrate in advance with radio frequency (RF) magnetron sputtering. The effects of sputtering power for AZO film were investigated on the crystal structures, surface morphologies and optical properties of AZO thin film and W-doped VO₂/AZO bilayer composite film. The results show that the crystallinity of both AZO monolayer film and the bilayer film first increases and then decreases with the increase of sputtering power. As the sputtering power increases, the film thickness increases. The integral visible luminous transmittance (T_lum) of the W-doped VO₂/AZO bilayer film decreases continuously, and the solar modulation efficiency (ΔT_sol) increases first and then decreases. When the sputtering power is 150 W, T_lum and ΔT_sol of W-doped VO₂/AZO bilayer film are 30.14% and 11.95%, 2.77% and 1.71% higher than those of W-doped VO₂ monolayer film, respectively.     

Structural and optical properties of a radio frequency magnetron-sputtered ZnO thin film with different growth angles

This study introduces optical properties of a columnar structured zinc oxide [ZnO] antireflection coating for solar cells. We obtained ZnO films of columnar structure on glass substrates using a specially designed radio frequency magnetron sputtering system with different growth angles. Field-emission scanning electron microscopy was utilized to check the growth angles of the ZnO films which were controlled at 0°, 15°, and 30°. The film thickness was fixed at 100 nm to get a constant experiment condition. Grain sizes of the ZnO films were measured by X-ray diffraction. A UV-visible spectrometer was used to measure the transmittance and reflectance of the ZnO film columnar structures as a function of the growth angles.