Ka波段硅基MEMS滤波器

滤波器是微波毫米波电路中的一个重要部件,本文介绍了采用基片集成波导技术和ICP深刻蚀微机械通孔阵列的硅基MEMS滤波器.设计制作了MEMS滤波器的核心部件谐振器,测试结果显示该谐振器无载Q值大于180,频率误差控制在2%以内.以此为基础采用理论计算与实验设计相结合的方法设计了一个Ka波段硅基MEMS滤波器.滤波器中心频率为30.3 GHz,插入损耗1.5 dB,相对带宽5%.芯片尺寸为10.0 mm×2.8 mm×0.4 mm.     

K波段单片硅MEMS谐振器

介绍了基片集成波导技术和ICP深刻蚀微机械通孔阵列的硅基MEMS谐振器,通孔阵列和地平面形成不辐射介质波导,采用CPW电流探针与谐振腔进行信号耦合,在单层硅片上实现了平面电路与三维硅填充谐振腔的信号传输,得到低成本高性能可与平面电路集成的MEMS谐振器.谐振器工作于主模TE101模式,在片测试的Q值大于180,谐振频率21 GHz,与仿真结果吻合,芯片尺寸为4.7 mm×4.6 mm×0.5 mm.     

基于S0I光子集成技术的高速微型光子开关及大规模矩阵光开关

光开关及矩阵光开关是在多个光信号通道之间实施信号交换的操作器件,可以在任何输入端和输出端之间建立信号连接。本项目利用先进光波导技术研制与开发高速集成光开关与矩阵光开关。利用绝缘体硅（SOD技术和硅材料的电光调制效应研制超高速光子开关,开关速度为纳秒量级;进而利用超短网络结构研制高度集成大规模矩阵光子开关,这也是本项目两个主要创新点。     

基于偏振控制的硅基颗粒导向系统设计

光学微操控技术已从颗粒的捕获和传输拓展到颗粒的分选和导向等更高级的逻辑操控,硅基光镊技术因能突破衍射极限并操控亚微米量级的颗粒而成为了微操控领域中最重要的手段之一。传统的硅基光镊技术一般采用微环、定向耦合器和多模干涉仪等器件,通过调节波长实现颗粒导向操作。文章提出了一种通过偏振调控的硅基颗粒导向操作方法,通过时域有限差分设计和优化了系统结构参数,并验证了该结构在颗粒导向操作中的可行性。实验装置结构简单、体积小巧,且操控更加方便。     

聚合物光栅光波导器件的微复制技术

采用纳米压印微复制技术方法,研制了一种新型的聚合物柔性光栅光波导敏感器件,该器件可用于介入式医用导管的微弯挠曲监测或类似场合的微变形监测.重点阐述了聚合物柔性光栅光波导器件的微复制模具和器件微复制的工艺方法,并对制备工艺技术中的关键技术问题进行了讨论,讨论了测试光纤耦合一体化光栅波导器件的工艺方法.最后利用硅微模具和紫外固化介质材料,成功制备出了截面尺寸为4 μm×20 μm、光栅周期为0.75 μm的聚合物柔性光栅光波导器件.     

级联环形谐振腔温漂抑制效应实验研究

为降低温度变化对基于微环谐振腔的滤波器、调制器等光学精密器件性能的影响,研究了微环谐振腔的温度特性,设计加工了基于绝缘体上硅的单环以及多环微腔结构。通过数显温控加热系统对微环谐振腔加热,利用波长扫描的方式,进行了谐振腔透射谱线的测试实验,通过线性拟合分析,计算得到单环谐振腔谐振波长漂移与温度的变化关系为105 pm/℃,双环谐振器与温度的变化关系为97 pm/℃,三环谐振器与温度的变化关系为80 pm/℃,九环的谐振波长漂移与温度的变化关系为27 pm/℃。即环个数增加,谐振腔温度系数有减弱趋势,较好实现了谐振腔温漂抑制作用。     

求解分数阶微分系统的一种数值算法

由于分数阶微分系统具有记忆功能,在其求解过程中计算量较大.文中的目的是针对分数阶Grunwald-Letnikov(6L)定义,研究并寻求一种求解分数阶微分方程的有效数值算法.首先由分数阶GL定义得出分数阶的数值计算公式,进而从理论上分析了算法中分数阶项计算系数的特点,结合计算机数值仿真的结果,得出了远离当前时间的无穷小项一般不可忽略的结论,并设计了一种合理有效的计算方法.计算机数值仿真的结果表明,所设计的求解分数阶微分方程的算法精度高,通用性好,且易于编程实现.     

MZI型MOEMS压力传感器的研究

集成光学压力传感器利用幅度、相位、折射率分布、光程和光波极化方式的改变来感应外部压力。设计了马赫-曾德尔干涉仪（MZI）型微型光机电系统（MOEMS）压力传感器,探讨了工作原理,分析了弹性薄膜尺寸对应力的影响和波导中TE、TM模式的光对波导折射率的影响。通过设计弹性薄膜的尺寸和选用特定波长的单模激光,得到传感器的工作特性。     

MEMS扭转光开关压模阻尼研究

基于MEMS技术的光开关是光通信领域实现全光交换的核心器件。针对一种常用的静电扭转驱动光开关,基于流体动力学方程,采用格林函数（Green。sfunction）分析了压膜阻尼系数的解析求解方法,并以流场分析技术进行了气体压强分布仿真,进而求解压膜阻尼,运用解析计算与数值仿真得到的参数进行系统仿真与实验数据比对,证实了建模的准确性。     

基于小波逼近变换的非线性分布参数系统辨识

利用Haar小波正交规范基的微分运算矩阵及其运算性质,将描述一类非线性分布参数系统的偏微分方程转化为代数矩阵方程,结合最小二乘法,确定出待辨识的系统参数,避免了对偏微分方程进行多重积分运算的繁琐;并且,可以不考虑初始条件和边界条件,较其他采用积分运算矩阵的辨识方法要简单得多,简化了分布参数系统辨识的求解过程。该方法简单,计算量小,辨识精度高。仿真结果表明了该算法应用在非线性分布参数系统辨识中的有效性。     

Optical multiplexing techniques for photonic Clos networks in High Performance Computing Architectures

Future high-performance computing (HPC) architectures will consist of whole parallel computing systems integrated on chip-level and boards mounted with lots of computing chips and chip-external main memory. Photonic networks on board and photonic network on chips (NoCs) offer the potential to fulfill the high bandwidth requirements in such systems. In addition they need less power, offer better EMC capabilities and can reduce cabling effort compared to electronic networks. Due to their non-blocking property Clos networks are frequently used in HPC architectures. Therefore we investigated how a photonic on-board Clos network can be realized using Coarse Wavelength-Division-Multiplexing (CWDM) techniques with state-of-the art components based on fiber technology. In addition we present a new photonic Clos NoC architecture based on Wavelength Interchanging (WI) elements, optical waveguide structures, mode-locked laser sources, nanophotonic microrings and passive optical deflection elements to reduce the number of switches. We discuss the benefits and drawbacks for using different optical technologies for such an architecture.     

Fabrication of the plastic component for photonic crystal using micro injection molding

In this decade, many techniques have been introduced to fabricate photonic crystal in optical applications. Most of the processes used to fabricate the photonic crystal are time consuming and not cost effective. This study demonstrates an efficient method to fabricate photonic crystals. A polymer-based photonic crystal slab has been developed by embedding mixture with a high dielectric constant. Photonic crystals have patterned structures in which periodicity of dielectric properties can manipulate electromagnetic waves. The operation wavelength is about half of the characteristic dimension. Technique of injection molding is applied to make polymer parts with the photonic crystal pattern. Then mixture of barium titanate powder and epoxy is embedded on the patterned structure of the polymer part. The contrast of dielectric coefficients between mixture and polymer can constitute a structure with some photonic band gap. By means of polymer processing, mass production of photonic crystal devices like optical switch, optical waveguide, optical filter and so forth can be realized in a cost effective way.     

Active photonic crystal cavities for optical signal integration

We describe and numerically investigate an all-optical high-order temporal integrator based on photonic crystal nanobeam cavities. The ways to increase the time-bandwidth product of the integrator by using an active cavity are discussed. In particular, an in-plane optical pumping suggested. The model of two-component nanocavity with possibility of vertical electrical pumping is also described.     

Photonic integration technologies for indoor optical wireless communications

Indoor optical wireless communication (OWC) using steerable infrared beams is regarded as an important component in future 5G network. Photonic integration technologies can meet the criteria of such application, and provide low-cost, high-performance and very compact chips. In this paper, we review the recent development of photonic integration technologies suitable for indoor OWC application, and discuss in detail the current status and future opportunities of several key devices, such as the chip to free space couplers, integrated receivers and transmitters.     

Switching cell embedded in photonic crystal

We analyze and propose a directional optical coupler embedded in photonic crystal (PhC) for the C, L, and U bands of ITU (International Telecommunications Union), which is driven by an external command signal. Therefore, this switching cell can work in an all-optical switch. The switching method uses a low power external command signal, inserted in the central coupling region, which acts as another waveguide. The switching process is based on the change of the straight state to the cross state owing to the external command signal.     

Integrated optical planar waveguide components

 Planar optical waveguides for applications in communication networks can be fabricated using conventional chip-manufacturing techniques. We present a planar optical waveguide technology that is based on a silicon-oxynitride (SiON) core and silicon-oxide cladding layers. In addition to more compact, conventional optical devices, it also enables enhanced optical functions such as dynamically reconfigurable planar integrated optical devices. Examples of adaptive devices realized in this technology include finite and infinite impulse response (FIR and IIR) filters. Received: 13 February 2002/Accepted: 28 February 2002 In realizing the SiON waveguide technology and the adaptive optical filter functions with the subsystem control, the dedicated work of the waveguide process technology, the photonic device technology, and the engineering services teams at IBM's Zurich Research Laboratory were instrumental and are gratefully acknowledged. For the concept-level optical-packaging work we thank Optospeed SA. This paper was presented at the Workshop “Optical MEMS and Integrated Optics” in June 2001.     

Optofluidic waveguides: II. Fabrication and structures

We review fabrication methods and common structures for optofluidic waveguides, defined as structures capable of optical confinement and transmission through fluid filled cores. Cited structures include those based on total internal reflection, metallic coatings, and interference based confinement. Configurations include optical fibers and waveguides fabricated on flat substrates (integrated waveguides). Some examples of optofluidic waveguides that are included in this review are Photonic Crystal Fibers (PCFs) and two-dimensional photonic crystal arrays, Bragg fibers and waveguides, and Anti Resonant Reflecting Optical Waveguides (ARROWs). An emphasis is placed on integrated ARROWs fabricated using a thin-film deposition process, which illustrates how optofluidic waveguides can be combined with other microfluidic elements in the creation of lab-on-a-chip devices.     

Loss-aware routing algorithm for photonic networks on chip

Photonic network on chip was introduced as an efficient communication platform to overcome the existing challenges in traditional networks on chip. Optical networks provide high bandwidth and low power dissipation infrastructure. Insertion loss is one of the important parameters in photonic networks on chip. In this study, we propose a solution in routing algorithm level in order to reduce insertion loss in photonic network on chip, by passing packets through paths with lower number of optical elements. Simulation results reveal that a novel approach in the routing level decreases insertion loss as much as possible, energy consumption and optical power budget. Our proposed routing has 29.05% less insertion loss under all2all traffic pattern for blocking torus topology, and it has about 12.37% less insertion loss for TorusNX topology in comparison with primary dimension-ordered routing. Proposed routing algorithm increases both the network bandwidth and scalability.     

Optofluidic waveguides: II. Fabrication and structures

We review fabrication methods and common structures for optofluidic waveguides, defined as structures capable of optical confinement and transmission through fluid filled cores. Cited structures include those based on total internal reflection, metallic coatings, and interference based confinement. Configurations include optical fibers and waveguides fabricated on flat substrates (integrated waveguides). Some examples of optofluidic waveguides that are included in this review are Photonic Crystal Fibers (PCFs) and two-dimensional photonic crystal arrays, Bragg fibers and waveguides, and Anti Resonant Reflecting Optical Waveguides (ARROWs). An emphasis is placed on integrated ARROWs fabricated using a thin-film deposition process, which illustrates how optofluidic waveguides can be combined with other microfluidic elements in the creation of lab-on-a-chip devices.     

光子晶体的研究及其在传感器中的应用

光子晶体是指具有光子带隙(PBG)特性的人造周期性电介质结构,有时也称为PBG光子晶体结构。按照光子晶体的光子禁带在空间中所存在的维数,可以将其分为一维光子晶体、二维光子晶体和三维光子晶体。光子晶体传感器应用包括应变传感器、温度传感器、化学传感器、光子晶体光纤传感器、长周期光纤光栅(LPFG)生物传感器、LPFG化学传感器等。本文从光子晶体传感器的概述、研究现状和应用几方面对光子晶体传感器的应用进展进行了综述,希望对光子晶体传感器有一个比较全面的了解。