磨料粒径对铝栅CMP去除速率和粗糙度的影响

在铝栅化学机械平坦化(CMP)中磨料直接影响去除速率和表面粗糙度。采用不同粒径的磨料配置抛光液对铝栅进行CMP实验,对去除速率和表面形貌测试结果进行分析。结果表明,去除速率与参与抛光的磨料颗粒数目和单个颗粒去除速率有关,表面粗糙度与单个磨料颗粒机械作用和抛光后磨料颗粒表面吸附有关,并对抛光液稳定性进行了研究。最终选用粒径70 nm,质量分数为5%的磨料,去除速率可达到181 nm/min,表面粗糙度为9.1 nm,对今后铝栅CMP的研究提供了参考。     

分散剂对纳米TiO2悬浮液稳定性的影响

选择不同的有机物为分散剂分别对纳米TiO2粒子进行了表面改性。通过采用重力沉降法、Zeta电位法等表征了其分散效果,研究了纳米TiO2悬浮液在不同PH值下的分散行为。结果表明:纤维素能使纳米TiO2悬浮稳定性明显提高。在纳米TiO2悬浮液中,纳米TiO2粉体表面的Zeta电位同水溶液的平衡PH有很大关系。提高颗粒表面电位(Zeta电位)是改善粉体分散体系稳定性的有效途径。     

硅溶胶的有机改性及应用

为了提升纳米硅溶胶在硅片上SiO_2薄膜的化学机械抛光(CMP)效率,用硅烷偶联剂KH550在酸性条件下对硅溶胶进行表面改性。对得到的产物进行化学机械抛光及通过粒度分析仪分析氧化硅粒径和Zeta电位变化,并通过红外光谱分析仪和原子力显微镜分析氧化硅颗粒表面是否接枝上了硅烷偶联剂。结果表明,经过改性后的硅溶胶在红外测试中3 400 cm^(-1)附近和1 616 cm(-1)附近和1 616 cm^(-1)附近出现了N—H的伸缩和弯曲振动峰;原子力显微镜探针离开氧化硅颗粒表面时存在粘弹性;用抛光机测得使用改性后的硅溶胶比使用未改性的硅溶胶去除速率有所提高,并在改性含量0.05%时,去除速率达到最快;改性后的硅溶胶粒子Zeta电位趋向于正向增大,且随着加入改性剂的量从0～0.1%逐渐增加,硅溶胶粒子Zeta电位向正电荷位移更加明显;对未改性的硅溶胶和加入0.05%KH550改性后的硅溶胶进行动态光散射分析,硅溶胶经过改性后粒径D_(25)由65.3 nm增大到73.2 nm,粒径D_(50)由79.2 nm增大到83.5 nm,粒径D_(99)由154.1 nm减小至131.8 nm,而用静态光散射分析时,硅溶胶经过改性后粒径D_(10)由69.0 nm变化为69.6 nm,粒径D_(50)由99.1 nm变化为100.8 nm,粒径D_(99)由191.2 nm变化为194 nm,可以看出D_(10),D_(50),D_(99)基本没有发生变化。红外实验和原子力实验证明KH550成功地接枝到颗粒表面;加入改性剂KH550后,不仅改变了氧化硅表面Zeta电位,也改变了水化层;同时使小粒径胶粒的水化层变厚,大粒径的水化层变薄,使Zeta电位由负电荷变为正电荷,从而影响到在硅片上SiO_2薄膜的抛光效率。     

铌酸锂晶体的抛光机理及精密加工工艺

采用Stober法制备了平均粒径分别约为50nm和300nm的SiO2抛光液.通过透射电镜、粒径测定仪、zeta电位仪测试和分析了制备的SiO2抛光液的粒径分布、分散度和稳定性.结果表明:抛光液中SiO2溶胶颗粒为球形,溶胶粒子的分散度小,并且具有较好的稳定性.用制备的粒径分别为50nm和300nm的SiO2抛光液对铌酸锂晶体样品进行化学机械抛光,研究了压力、抛光盘速度、抛光液流量及时间对抛光过程的影响.抛光结果表明:采用粒径为50nm的SiO2抛光液的抛光效果最好.最佳抛光工艺参数是:采用沥青抛光盘,50nm的SiO2抛光液,转速为40r/min,抛光液流量为3mL/min,压力为17kPa,抛光时间为60min,去除率为30nm/min.采用激光平面干涉仪、原子力显微镜检测了抛光后样品的面型精度和粗糙度,样品的最佳面型精度为0.134λ(λ=0.6328nm),粗糙度为0.32λ.     

硅溶胶的有机改性及应用

为了提升纳米硅溶胶在硅片上SiO_2薄膜的化学机械抛光(CMP)效率,用硅烷偶联剂KH550在酸性条件下对硅溶胶进行表面改性。对得到的产物进行化学机械抛光及通过粒度分析仪分析氧化硅粒径和Zeta电位变化,并通过红外光谱分析仪和原子力显微镜分析氧化硅颗粒表面是否接枝上了硅烷偶联剂。结果表明,经过改性后的硅溶胶在红外测试中3 400 cm~(-1)附近和1 616 cm~(-1)附近出现了N—H的伸缩和弯曲振动峰;原子力显微镜探针离开氧化硅颗粒表面时存在粘弹性;用抛光机测得使用改性后的硅溶胶比使用未改性的硅溶胶去除速率有所提高,并在改性含量0.05%时,去除速率达到最快;改性后的硅溶胶粒子Zeta电位趋向于正向增大,且随着加入改性剂的量从0～0.1%逐渐增加,硅溶胶粒子Zeta电位向正电荷位移更加明显;对未改性的硅溶胶和加入0.05%KH550改性后的硅溶胶进行动态光散射分析,硅溶胶经过改性后粒径D_(25)由65.3 nm增大到73.2 nm,粒径D_(50)由79.2 nm增大到83.5 nm,粒径D_(99)由154.1 nm减小至131.8 nm,而用静态光散射分析时,硅溶胶经过改性后粒径D_(10)由69.0 nm变化为69.6 nm,粒径D_(50)由99.1 nm变化为100.8 nm,粒径D_(99)由191.2 nm变化为194 nm,可以看出D_(10),D_(50),D_(99)基本没有发生变化。红外实验和原子力实验证明KH550成功地接枝到颗粒表面;加入改性剂KH550后,不仅改变了氧化硅表面Zeta电位,也改变了水化层;同时使小粒径胶粒的水化层变厚,大粒径的水化层变薄,使Zeta电位由负电荷变为正电荷,从而影响到在硅片上SiO_2薄膜的抛光效率。     

多元胺醇型表面活性剂对铜晶圆平坦化的影响

研究了一种多元胺醇型非离子表面活性剂对铜化学机械抛光(CMP)液粒径及分散度、抛光速率、抛光后铜膜的碟形坑高度、表面非均匀性和表面粗糙度的影响。抛光液的基本组成和工艺条件为:SiO_2(粒径60~70 nm)5%(体积分数,下同),多羟多胺螯合剂3%,30%(质量分数)过氧化氢3%,工作压力1 psi,背压1 psi,抛头转速87 r/min,抛盘转速93 r/min,抛光液流量300 mL/min,抛光时间60 s,抛光温度23°C。结果表明,表面活性剂的引入可提高抛光液的稳定性。当表面活性剂含量为3%时,抛光速率、抛光后碟形坑高度、表面非均匀性和表面粗糙度分别为614.86 nm/min、76.5 nm、3.26%和0.483 nm,对铜晶圆的平坦化效果最好。     

铝栅化学机械抛光工艺

探讨了抛光液组成和机械抛光工艺参数(包括抛光压力、转速、抛光液流速和抛光时间)对铝栅化学机械抛光过程中铝的去除速率的影响,确定抛光液的组成为:氧化剂H_2O_2 1.0%(体积分数,下同),螯合剂FA/O II 0.4%,非离子表面活性剂FA/O I 2.0%,纳米硅溶胶磨料12%,pH 10。粗抛工艺参数为:抛光压力3.0 psi,转速50 r/min,抛光液流速250 m L/min,抛光时间240 s。精抛工艺参数为:抛光压力2.0 psi,转速45 r/min,抛光液流速150 m L/min,抛光时间240 s。粗抛时铝的去除速率为330 nm/min,精抛时铝的去除速率为210 nm/min。通过2种抛光工艺相结合,铝栅表面粗糙度可达13.26 nm。     

包覆型CeO_2/SiO_2和CeO_2/聚苯乙烯复合磨料的制备及其化学机械抛光性能

以SiO2和聚苯乙烯(polystyrene,PS)微球为内核,采用液相沉淀工艺制备了具有包覆结构的CeO2/SiO2和CeO2/PS复合颗粒。利用X射线衍射仪、透射电子显微镜、场发射扫描电子显微镜、X射线光电子能谱仪、动态光散射仪和zata电位测定等手段对所制备样品进行了表征。将所制备的CeO2/SiO2和CeO2/PS复合颗粒用于硅晶片热氧化层的化学机械抛光,用原子力显微镜(atomic force microscope,AFM)观察抛光表面的微观形貌、测量表面粗糙度。结果表明:所制备的CeO2/SiO2和CeO2/PS复合颗粒呈球形,粒径在150～200nm,CeO2纳米颗粒在SiO2和PS微球内核表面包覆均匀。包覆的CeO2颗粒与SiO2内核之间形成了化学键结合。CeO2颗粒的包覆显著的改变了复合颗粒的表面电性。AFM测量结果表明:经CeO2/SiO2和CeO2/PS复合磨料抛光后的硅热氧化片表面在5μm×5μm范围内粗糙度值分别为0.292nm和0.180nm。     

胍离子对铜化学机械抛光的影响

对铜晶圆进行化学机械抛光(CMP),溶液组成和工艺条件为:胶体二氧化硅(平均粒径85 nm)5%(质量分数),30%H_2O_2 5 mL/L,胍离子(Gnd+,由碳酸胍GC或盐酸胍GC提供)适量,抛光压力5.2 kPa,抛头转速87 r/min,抛光盘转速93 r/min,抛光液体积流速300 mL/min,时间1 min。研究了抛光液中Gnd~+浓度对铜去除速率的影响,通过电化学方法及X射线光电子能谱分析了Gnd~+在铜表面的作用机制,探讨了Gnd~+对铜CMP后表面粗糙度的影响机制。一方面,随抛光液中GC浓度的升高,铜的去除速率增大,GC浓度为80 mmol/L时满足去除速率高于200 nm/min的要求;另一方面,Gnd+的引入不仅加剧了铜晶圆表面的化学腐蚀,而且使抛光液在铜晶圆表面的接触角增大,铜晶圆抛光后表面粗糙度增大。     

Ce_(0.8)Ti_(0.2)O_2复合氧化物的制备及其光学玻璃的抛光性能

采用机械化学反应法制各Ce0.8Ti0.2O2复合氧化物,运用差热一热重分析仪、X射线衍射仪、场发射扫描式电子显微镜、zeta电位仪、激光粒度仪等手段对其物相、外观形貌、表面电位、粒度大小等性质进行了表征,通过测定抛光速率和观察表面的微观形貌考察焙烧温度对磨料的ZF7光学玻璃的抛光性能的影响.结果表明:900℃焙烧时所合成的Ce0.8Ti0.2O2为纳米级类球状粉体,它对ZF7光学玻璃的抛光速率达到484nm/min,是纯CeO2磨料(241nm/min)的2倍.Ce0.8Ti0.2O2主要由CeO2和少量的CeTi～36组成,CeTi2O6的形成不但增大了Ce0.8Ti0.2O2颗粒的负表面电位,促进其悬浮分散稳定性能的提高和增大磨料粒子与玻璃表面硅酸凝胶层间相互接触作用,而且能提高其化学抛光活性,从而导致其光学玻璃抛光性能显著提高.     

Insect antifeedant properties of anthranoids from the genusVismia

Vismiones and ferruginins, representatives of a new class of lypophilic anthranoids from the genusVismia were found to inhibit feeding in larvae of species ofSpodoptera, Heliothis, and inLocusta migratoria.     

Direct observation of freeze-thaw instability of latex coatings via high pressure freezing and cryogenic SEM

Despite its industrial importance, the subject of freeze-thaw (F/T) stability of latex coatings has not been studied extensively. There is also a lack of fundamental understanding about the process and the mechanisms through which a coating becomes destabilized. High pressure (2100 bar) freezing fixes the state of water-suspended particles of polymer binder and inorganic pigments without the growth of ice crystals during freezing that produce artifacts in direct imaging scanning electron microscopy (SEM) of fracture surfaces of frozen coatings. We show that by incorporating copolymerizable functional monomers, it is possible to achieve F/T stability in polymer latexes and in low-VOC paints, as judged by the microstructures revealed by the cryogenic SEM technique. Particle coalescence as well as pigment segregation in F/T unstable systems are visualized. In order to achieve F/T stability in paints, latex particles must not flocculate and should provide protection to inorganic pigment and extender particles. Because of the unique capabilities of the cryogenic SEM, we are able to separate the effects of freezing and thawing, and study the influence of the rate of freezing and thawing on F/T stability. Destabilization can be caused by either freezing or thawing. A slow freezing process is more detrimental to F/T stability than a fast freezing process; the latter actually preserves suspension stability during freezing. Presented at the 82nd Annual Meeting of the Federation of Societies for Coatings Technology, October 27–29, 2004 in Chicago, IL. Tied for first place in The John A. Gordon Best Paper Competition.     

Ethanol and (−)-α-Pinene: Attractant Kairomones for Bark and Ambrosia Beetles in the Southeastern US

In 2002–2004, we examined the flight responses of 49 species of native and exotic bark and ambrosia beetles (Coleoptera: Scolytidae and Platypodidae) to traps baited with ethanol and/or (−)-α-pinene in the southeastern US. Eight field trials were conducted in mature pine stands in Alabama, Florida, Georgia, North Carolina, and South Carolina. Funnel traps baited with ethanol lures (release rate, about 0.6 g/day at 25–28°C) were attractive to ten species of ambrosia beetles (Ambrosiodmus tachygraphus, Anisandrus sayi, Dryoxylon onoharaensum, Monarthrum mali, Xyleborinus saxesenii, Xyleborus affinis, Xyleborus ferrugineus, Xylosandrus compactus, Xylosandrus crassiusculus, and Xylosandrus germanus) and two species of bark beetles (Cryptocarenus heveae and Hypothenemus sp.). Traps baited with (−)-α-pinene lures (release rate, 2–6 g/day at 25–28°C) were attractive to five bark beetle species (Dendroctonus terebrans, Hylastes porculus, Hylastes salebrosus, Hylastes tenuis, and Ips grandicollis) and one platypodid ambrosia beetle species (Myoplatypus flavicornis). Ethanol enhanced responses of some species (Xyleborus pubescens, H. porculus, H. salebrosus, H. tenuis, and Pityophthorus cariniceps) to traps baited with (−)-α-pinene in some locations. (−)-α-Pinene interrupted the response of some ambrosia beetle species to traps baited with ethanol, but only the response of D. onoharaensum was interrupted consistently at most locations. Of 23 species of ambrosia beetles captured in our field trials, nine were exotic and accounted for 70–97% of total catches of ambrosia beetles. Our results provide support for the continued use of separate traps baited with ethanol alone and ethanol with (−)-α-pinene to detect and monitor common bark and ambrosia beetles from the southeastern region of the US.     

Methyl 2,4,6-decatrienoates Attract Stink Bugs and Tachinid Parasitoids

Halyomorpha halys (Stål) (Pentatomidae), called the brown marmorated stink bug (BMSB), is a newly invasive species in the eastern USA that is rapidly spreading from the original point of establishment in Allentown, PA. In its native range, the BMSB is reportedly attracted to methyl (E,E,Z)-2,4,6-decatrienoate, the male-produced pheromone of another pentatomid common in eastern Asia, Plautia stali Scott. In North America, Thyanta spp. are the only pentatomids known to produce methyl 2,4,6-decatrienoate [the (E,Z,Z)-isomer] as part of their pheromones. Methyl 2,4,6-decatrienoates were field-tested in Maryland to monitor the spread of the BMSB and to explore the possibility that Thyanta spp. are an alternate host for parasitic tachinid flies that use stink bug pheromones as host-finding kairomones. Here we report the first captures of adult and nymph BMSBs in traps baited with methyl (E,E,Z)-2,4,6-decatrienoate in central Maryland and present data verifying that the tachinid, Euclytia flava (Townsend), exploits methyl (E,Z,Z)-2,4,6-decatrienoate as a kairomone. We also report the unexpected finding that various isomers of methyl 2,4,6-decatrienoate attract Acrosternum hilare (Say), although this bug apparently does not produce methyl decatrienoates. Other stink bugs and tachinids native to North America were also attracted to methyl 2,4,6-decatrienoates. These data indicate there are Heteroptera in North America in addition to Thyanta spp. that probably use methyl 2,4,6-decatrienoates as pheromones. The evidence that some pentatomids exploit the pheromones of other true bugs as kairomones to find food or to congregate as a passive defense against tachinid parasitism is discussed.     

2007～2008年世界塑料工业进展

收集了2007年7月～2008年6月世界塑料工业的相关资料,介绍了2007～2008年国外塑料工业的发展情况,提供了世界塑料产量、消费量及全球各类树脂的需求量及产能情况.按通用热塑性树脂(聚乙烯、聚丙烯、聚苯乙烯、聚氯乙烯、ABS树脂)、工程塑料(尼龙、聚碳酸酯、聚甲醛、热塑性聚酯、聚苯醚)、特种工程塑料(聚苯·硫醚、液晶聚合物、聚醚醚酮)、通用热固性树脂(酚醛、聚氨酯、不饱和聚酯树脂、环氧树脂)不同品种的顺序,对树脂的产量、消费量、供需状况及合成工艺、产品应用开发、树脂品种的延伸及应用的进一步扩展等技术作了详细介绍.     

2005～2006年国外塑料工业进展

收集了2005年7月～2006年6月国外塑料工业的相关资料,介绍了2005—2006年国外塑料工业的发展情况。提供了世界塑料产量、消费量及全球各类树脂生产量以及各国塑料制品的进出口情况。作为对比,介绍了中国塑料的生产情况。按通用热塑性树脂（聚乙烯、聚丙烯、聚苯乙烯、聚氯乙烯、ABS树脂）、工程塑料（聚酰胺、聚碳酸酯、聚甲醛、热塑性聚酯、聚苯醚）、通用热固性树脂（酚醛、聚氨酯、不饱和树脂、环氧树脂）、特种工程塑料（聚苯硫醚、液晶聚合物、聚醚醚酮）的品种顺序,对树脂的产量、消费量、供需状况及合成工艺、产品开发、树脂品种的延伸及应用的扩展作了详细的介绍。