共查询到19条相似文献,搜索用时 718 毫秒
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针对微小集中质量测量问题,提出并制备了一种梯形变截面悬臂梁式微质量传感器,建立了梯形变截面悬臂梁式微质量传感器的振动分析模型。采用有限元方法求解其振动控制方程,获得了微质量传感器的灵敏度。仿真分析结果表明,相对于等截面矩形悬臂梁式微质量传感器,单层压电和双层压电结构的变截面悬臂梁传感器的灵敏度分别提高了127.00%和263.00%。采用线切割工艺,加工制备了单压电层梯形变截面结构的微质量传感器并对传感器进行了实验测试,在误差允许范围内,仿真结果与实验结果基本一致,验证了采用梯形变截面悬臂梁式结构可以有效的提高传感器的灵敏度。 相似文献
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针对日常睡眠监测的需求,提出一种基于高压静电纺丝工艺制备的P(VDF-TrFE)/锆钛酸铅(PZT)压电传感器并对其性能进行了研究。首先,介绍了P(VDF-TrFE)/PZT压电传感器的制作及封装流程。其次对其灵敏度,频率响应特性,瞬时响应和稳定性等进行了测试。结果表明,该传感器不仅具有良好的微观外貌形态,且相比于纯P(VDF-TrFE)压电传感器0.73 V/N的灵敏度,制备的含30%PZT的P(VDF-TrFE)/PZT压电传感器灵敏度是纯P(VDF-TrFE)压电传感器的2.5倍,达到了1.78 V/N。此外在低频下能够保持稳定压电输出且具备2 ms较快的响应时间。最后采用自制的P(VDF-TrFE)/PZT压电传感器测量人体心冲击信号,并通过支持向量机(SVM)训练睡眠分期模型实现了对睡眠质量的监测,四分类模型平均准确率达到72.5%,为可穿戴睡眠监测传感器的选择提供了参考。 相似文献
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GaAs基PHEMT加速度传感器的研究 总被引:1,自引:0,他引:1
PHEMT结构一种高电子迁移率晶体管,以其高频和低噪声等方面的优越性,成为当今微电子领域中最活跃的研究主题之一。将其良好的力敏特性应用在加速度计方面更是成为前沿的研究方向。基于GaAs基PHEMT结构压阻效应,设计加工出一种悬臂梁式微加速度传感器,通过力作用在加速度计上,改变PHEMT结构漏极电流的输出,并通过外围测试电路来检测该电流变化,从而实现力电转换。文中,对其基本原理和结构设计进行阐述,并进行力学特性的研究。结果表明,在动态测试下,PHEMT结构的漏极输出电流与栅压、漏压之间的关系与静态测试I-V特性曲线保持一致。该加速度计具有良好的线性特性,经过测试在饱和区灵敏度为0.177 mV/gn。 相似文献
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通过测量压电悬臂梁的等效电容来检测悬臂梁的振动信息,以应用于基于扫描探针技术的高密度信息存储中进行数据读取.在压电悬臂梁的PZT压电层上施加交流电场使其工作在共振状态,并使其自由端与存储介质进行周期性的接触.当悬臂梁的自由端扫描到数据点时,其自由端的振幅和所受到的外力将发生变化,进而引起PZT压电层的介电常数发生变化.因此,通过检测悬臂梁上压电层的等效电容变化,便可以得到悬臂梁的振幅改变量,从而实现了对存储介质上数据的读取.实验结果表明,该可以实现1nm的位移检测分辨率. 相似文献
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D. IsarakornAuthor Vitae D. BriandAuthor VitaeA. SambriAuthor Vitae S. GariglioAuthor VitaeJ.-M. TrisconeAuthor Vitae F. GuyAuthor VitaeJ.W. ReinerAuthor Vitae C.H. AhnAuthor VitaeN.F. de RooijAuthor Vitae 《Sensors and actuators. B, Chemical》2011,153(1):54-63
In this paper, we investigate the performance of a piezoelectric membrane actuated by an epitaxial piezoelectric Pb(Zr0.2Ti0.8)O3 (PZT) thin film for localized-mass sensing applications. The fabrication and characterization of piezoelectric circular membranes based on epitaxial thin films prepared on a silicon wafer are presented. The dynamic behavior and mass sensing performance of the proposed structure are experimentally investigated and compared to numerical analyses. A 1500 μm diameter silicon membrane actuated by a 150 nm thick epitaxial PZT film exhibits a strong harmonic oscillation response with a high quality factor of 110-144 depending on the resonant mode at atmospheric pressure. Different aspects related to the effect of the mass position and of the resonant mode on the mass sensitivity as well as the minimum detectable mass are evaluated. The operation of the epitaxial PZT membrane as a mass sensor is determined by loading polystyrene microspheres. The mass sensitivity is a function of the mass position, which is the highest at the antinodal points. The epitaxial PZT membrane exhibits a mass sensitivity in the order of 10−12 g/Hz with a minimum detectable mass of 5 ng. The results reveal that the mass sensor realized with the epitaxial PZT thin film, which is capable of generating a high actuating force, is a promising candidate for the development of high performance mass sensors. Such devices can be applied for various biological and chemical sensing applications. 相似文献
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CHEN Fei 《数字社区&智能家居》2008,(35)
随着嵌入式技术、网络技术和监控技术的发展,基于嵌入式技术的远程环境监控系统在安防领域将得到越来越广泛的应用。该文介绍了基于嵌入式技术的远程环境监控系统前端无线数据采集系统中PT2262/PT2272工作原理。 相似文献
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面对日益紧缺的IP地址需求,NAT/PT不愧为解决这个问题的好办法。特别是对于小公司,家庭办公室(SOHO)用户来说意义更加重大。本文以NAT/PT原理以及在路由器上的实现为线索进行阐述,探讨一个基于NAT/PT技术的小型路由器的设计方法。 相似文献
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The electric and ferroelectric properties of lead zirconate titanate and strontium bismuth tantalate multilayer films prepared using photosensitive starting precursors were characterized. The electric and ferroelectric properties were investigated by characterization of the effect of stacking order of four ferroelectric layers of PZT or SBT in the multilayer films of 4-PZT, PZT/2-SBT/PZT, SBT/2-PZT/SBT, and 4-SBT. The Pr value of the 4-SBT multilayer film was relatively small (6 μC/cm2) and a two times higher value (12 μC/cm2) was obtained with the SBT/2-PZT/SBT multilayer film. The films with SBT layers at the top and bottom showed improved leakage current and fatigue resistance compared to the films with PZT layers at the top and bottom. It was revealed that the defect dipole was reduced at the SBT/Pt interface due to a self-regulation layer such as (Bi2O2)2+ in the SBT film. Also, the bottom layer on the Pt substrate showed a significant influence on the growth orientation of the entire ferroelectric films. 相似文献
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Rudeger H.T. WilkeAuthor Vitae Paul J. MosesPierre JousseAuthor Vitae Charles YeagerAuthor VitaeSusan Trolier-McKinstryAuthor Vitae 《Sensors and actuators. A, Physical》2012,173(1):152-157
Measurement of the transverse piezoelectric coefficient (e31,f) in thin films is crucial for the development of microfabricated sensors, actuators, and transducers. Here, a method is described such that lithographically defined strain gauges enable non-destructive, position-dependent characterization of e31,f in conjunction with the wafer flexure technique. Measurements of 100 nm thick Pt gauges deposited on 1 μm thick PbZr0.52Ti0.48O3 thin films yield gauge factors of 6.24, with a gauge-to-gauge variation that is 5% of this value. The system allows for simultaneous measurement of the charge and strain, improving the overall accuracy of measurement. The small footprint of the combined strain gauge array/electrode pattern used for determining e31,f, allows for a non-destructive mapping of the transverse piezoelectric coefficient across large-area wafers. Due to the clamping configuration used in wafer flexure experiments, e31,f values can accurately be obtained within the central ∼2/3 of a full wafer. Measurements performed on a 1.3 μm thick randomly oriented polycrystalline PbZr0.52Ti0.48O3 film made deposited on a 4 in. platinized silicon wafer by the sol-gel process show a high degree of uniformity, with e31,f of −6.37 ± 0.60 C/m2 for points measured within r = 3 cm. 相似文献
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Bulk PZT thick film actuator integrated with displacement sensor, the so-called self-sensing actuator, is presented in this paper. The PZT film is used as not only an actuating layer but also a displacement sensor, which is achieved by dividing the electrode on the top surface of the PZT film into two parts: central top electrode for actuating and outer annular sensor electrode for piezoelectric displacement detection. When the actuator moves, the piezoelectric charge is induced in the outer annular PZT due to the piezoelectric effect. The total amount of accumulated charge is proportional to the stress acting on the PZT, which is in turn proportional to the actuator displacement. By collecting the piezoelectric charge, the actuator displacement can be detected. A theoretical model is proposed to determine the structure parameters of the sensor and predict the sensor sensitivity. Experiments were performed on the micro-fabricated sensor integrated PZT thick film actuator, and the measured piezoelectric charge is close to the theoretical predictions. The integrated piezoelectric sensor has a displacement sensitivity of approximately 4 pC/nm. In addition, the integration of displacement sensor into the actuator needs no additional fabrication process and has no influence on the actuator performances. 相似文献
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