激光跟踪测量系统角度自动校正装置设计

激光跟踪测量系统是目前最新型的便携式空间大尺寸坐标测量系统,利用激光干涉测长、精密测角及目标跟踪技术,可对任意点的空间位置进行实时跟踪测量。然而,目标反射器接收角度的大小严重影响了激光跟踪测量系统角度测量精度,为解决激光跟踪测量系统在动态测量中因角锥棱镜逆反射器接收角度范围限制而导致无法测量问题,研制开发了一种能使激光跟踪测量系统在动态条件下连续测量的角度自动校正装置。它主要由精密圆形导轨和角度方位自动调节机构组成,能使角锥棱镜在动态测量过程中始终指向激光跟踪测量系统,从而实现在动态条件下的连续工作。最后利用研制角度自动校正装置对激光跟踪测量系统进行了角度误差补偿实验,结果表明该装置使激光跟踪测量系统的水平角测量误差由34.69µm减小到9.71µm,垂直角测量误差由35.43µm减小到10.03µm,从而有效地提高了激光跟踪测量系统的角度测量精度。     

机器人坐标系与激光跟踪仪坐标系的快速转换方法

针对机器人坐标系与激光跟踪仪坐标系的转换问题,提出一种机器人单轴旋转运动与自身读数相结合的方法。将靶标球安装在机器人末端,用激光跟踪仪实时测量球心坐标,对机器人单轴转动产生的圆弧轨迹进行空间圆拟合,由三个空间圆的单位法向量可得到旋转矩阵。再求取球心初始位置相对于机器人默认工具点的坐标偏移量,便可反推机器人坐标系原点在激光跟踪仪坐标系下的坐标,即平移向量。实验结果表明,转换后空间点X、Y、Z坐标的RMS误差分别为0.216 mm、0.111 mm、0.157 mm。     

激光跟踪测量系统研究

介绍了激光跟踪测量系统的结构.分析了激光跟踪测量系统利用目标反射镜和转镜的配合实现跟踪的原理,利用球坐标系、干涉测距实现坐标的原理,并对系统测量误差的产生原理及防止误差的方法进行了讨论,最后对激光跟踪测量系统的发展趋势做了展望.     

激光跟踪仪精密跟踪系统的设计

对激光跟踪仪的跟踪伺服控制系统进行了整体研究并给出了总体设计方案。针对跟踪目标的精密探测问题,研究了新型探测手段以及微弱光电信号的精细调理技术与数字滤波方法,使得脱靶量探测稳定性优于±2.0μm。针对跟踪角度精密测量问题,设计了圆光栅数据采集系统,实现了角度脉冲的细分、辨向与准确计数;基于谐波分析方法建立了跟踪过程中的误差补偿模型,将角度测量精度由3.5″提高到1.5″。建立了跟踪伺服电机的数学模型,分析了电流环在跟踪控制中的作用机理,提出了电流、速度、位置三闭环控制结构和复合跟踪控制策略。跟踪实验表明:系统最远跟踪距离不小于41.7m,跟踪速度不低于2.0m/s。该项技术还能为空间动态目标跟踪、激光通信等提供有益借鉴。     

激光跟踪运动目标伺服系统设计

激光跟踪测量系统实现对运动目标位置检测,要求跟踪机构响应快、动态性能好、精度高.本论文设计了伺服跟踪系统,采用直流力矩电机控制反射镜跟踪目标,实现了对运动目标的高精度快速跟踪.     

微间隙焊缝磁光成像卡尔曼滤波跟踪算法

在激光对接焊过程中,实时控制激光束准确对中焊缝是保证焊接质量的前提。针对紧密对接激光焊,研究一种用于微间隙(不大于0.1 mm)焊缝位置识别及跟踪的磁光成像卡尔曼滤波算法。采用磁光传感器实时获取焊接区域的微间隙焊缝磁光图像序列,利用微间隙焊缝磁光图像的灰度梯度特征提取焊缝位置坐标。以焊缝位置及位移量构成状态矢量,建立描述焊缝位置的状态方程和测量方程。同时,假设系统动态噪声和测量噪声为零均值随机分布的高斯白噪声,建立噪声环境下的卡尔曼滤波跟踪算法,计算最小均方差条件下焊缝中心最优预测值,减小系统噪声和过程噪声对焊缝位置测量的影响。试验结果显示,该方法能有效实现激光对接焊微间隙焊缝位置的识别与跟踪。     

基于FPGA的精跟踪系统

主要研究空间激光通信系统中精跟踪技术,根据精跟踪系统的组成原理与工作原理,设计了一种轻小型化、智能化精跟踪系统,该系统以FPGA作为核心器件,完成光斑图像采集、图像滤波、光斑位置计算、数字控制补偿函数及脱靶量的实时输出等功能。同时系统可根据外部环境变化,自动调整相机阈值、开窗口位置、积分时间。搭建试验系统完成精跟踪实验,实验表明系统可实现脱靶量实时输出3 000 Hz以上,符合精跟踪控制系统技术指标要求。系统在像元分辨力为3μrad的情况下,实时跟踪均方根值为1.17μrad,满足空间激光通信对精跟踪的要求,为其在空间激光通信中应用打下基础。     

四路激光跟踪柔性坐标测量系统的跟踪器设计

激光跟踪器是激光跟踪坐标测量系统的关键部件。采用双电机驱动的单转镜结构,模拟式的P ID与单片机的数字式P ID相结合的闭环控制方案,设计了一种新型的激光跟踪器。该跟踪器具有跟踪快速、平稳,反射基点在跟踪过程中保持不动,跟踪精度高等优点,并成功的应用于四路激光跟踪柔性坐标测量系统。实验表明,激光跟踪测量系统的有效跟踪速度优于0.4m/s,综合测量精度1.2μm。     

运动目标六自由度单束激光跟踪测量方法研究

本文提出了一种利用单束激光跟踪测量运动目标位置与姿态的新方法.设计了一种能产生多自由度信息的角锥靶镜.在描述系统工作原理,建立系统数学模型的基础上,分析了激光干涉测长数据和CCD信号特征与目标各平动和转动量之间的关系.通过数值方法测定物体六个自由度的变化量,并调整二自由度跟踪反射镜,以实现目标的连续跟踪测量.     

距离法运动目标激光跟踪测量系统的研究

运动目标空间位置坐标激光跟踪测量是计量测试领域的前沿课题。该测量系统集激光干涉测距、光电检测、精密机械、计算机及控制系统和现代数值计算于一体 ,对空间运动目标进行跟踪并实时测量其坐标和姿态。采用多个激光干涉仪进行冗余设计 ,仅通过测量距离的变化量而不需要测量角度量 ,就可以通过解最小二乘方程组计算出被测点的坐标。文中论述了纯距离法跟踪测量的数学模型、系统的光路设计以及基于 PID控制方法的跟踪控制系统 ,并完成了平面内运动物体的跟踪及测量可行性实验     

NOVEL METHOD FOR ERROR ANALYSIS AND SELF-CALIBRATION OF LASER TRACKING MIRROR MECHANISM

Laser tracking system （LTS） is an advanced device for large size 3D coordinates measuring with the advantages of broad range, high speed and high accuracy. However, its measuring accuracy is highly dominated by the geometric errors of the tracking mirror mechanism. Proper calibration of LTS is essential prior to the use of it for metrology. A kinematics model that describes not only the motion but also the geometric variations of LTS is developed. Through error analysis of the proposed model, it is claimed that gimbals axis misalignments and tracking mirror center off-set are the key contributors to measuring errors of LTS. A self-calibration method is presented of calibrating LTS with planar constraints. Various calibration strategies utilizing single-plane and multiple-plane constraints are proposed for different situations. For each calibration strategy, issues about the error parameter estimation of LTS are exploded to find out in which conditions these parameters can be uniquely estimated. Moreover, these conditions reveal the applicability of the planar constraints to LTS self-calibration. Intensive studies have been made to check validity of the theoretical results. The results show that the measuring accuracy of LTS has increased by 5 times since this technique for calibration is used.     

激光制导测量机器人运动系统设计

激光跟踪测量系统是目前最新型的便携式空间大尺寸坐标测量系统,但在测量大型被测对象时,人工布点及测量过程繁杂,测量效率低,并造成被测对象几何形状变形,严重影响其测量精度。为解决以上问题,提出了新型的“光束运动—光靶跟踪”激光跟踪测量方法,建立了新型激光跟踪测量方法论,并在此理论基础上,研制开发了一种能够在水平和垂直被测对象表面上运动小型轮臂复合式激光制导测量机器人。该机器人机构融合轮式机构、爬行臂式结构和真空吸附式机构优点,并且具有重量轻、体积小、运动灵活和反应快速等特点,可以根据不同的被测对象表面特征变换测量模式,利用轮式结构实现机器人在水平被测表面上高速远距离运动,利用爬行臂式和真空吸附式机构实现机器人在倾斜光滑表面上灵活地爬行和转向。对其运动特性进行了详细的分析。最后利用激光跟踪仪和三坐标测量机对研制激光制导测量机器人进行了性能测试,试验结果证明了该机器人能跟踪激光束自动高效地完成被测对象实体测量。     

An on-machine error calibration method for a laser micromachining tool

In this paper, an on-machine error calibration method, covering error modeling and measurement, is proposed to evaluate and compensate the errors caused by the mechanical and optical system equipped in the micromachining center using the femtosecond laser. Through preliminary tests by dicing silicon wafer, it has revealed that the squareness, laser beam misalign and focal position offset, are the main causes to result in the inaccuracy of micromachining. Consequently, an error modeling method is proposed to evaluate the error distribution in the workspace, and hereafter a comprehensive error vector of the laser beam, combining the squareness errors of Z-axis with the laser beam misalign, is generated by the variable substitution method. Subsequently, an increment error model in the instant local coordinates is established to satisfy the requirement of the programming method commonly used in the laser machine tools. Furthermore, a series of holes and grooves are machined on the femtosecond laser micromachining center to validate the proposed approach and model. The machining dimensions including diameters, distances and angles, are measured on-machine to identify the squareness errors, laser beam misalign and focal position offset according to the proposed error model. Finally, the experimental results show that, comparing to the uncompensated tests, the machining accuracy has been significantly improved with the proposed method.     

Development of a laser sensor for in-process guidance of an industrial robot

A pilot-type laser sensor for non-contacting distance measurement has been developed, which was aimed at application to in-process guidance of an industrial robot. A laser beam is emitted through a convex lens to an object and the reflected light is collected and focused by the lens. Diameter of its unfocused image is measured using one dimensional CCD-array, from which the distance is determined. Because the way of the beam emission and that of reflected light to the lens are the same, scanning of the beam to follow a path for robot guidance is easy and some geometric constraints, which may arise for a sensor using triangular principle, are removed. Geometric analyses for scanning the beam with a mirror are presented to determine the distance and position of an object point. A simple tracking control theory for the beam to follow a path and give informations about its position to a robot controller has been suggested and analyzed.     

基于单目视觉的激光光束方向标定研究

在由激光位移传感器组成的测量系统中,激光光束的方向是一个关键参数.方位角和俯仰角对于一条激光光束是最为重要的两个参数.本文中提出一种基于单目视觉的激光光束方向测量方法.首先,将CCD相机放置于基础平面上方,保持相机光轴与基础平面接近于垂直状态,并利用误差为10μm的圆孔型标定板建立单目定位模型.然后将激光光束发生装置放置在基础平面上并保持位置固定,同时在基础平面上放置特制靶块,使激光光束可以投射到靶块斜面上并形成一个激光光斑.在基础平面上方放置的CCD相机可以清晰的采集到激光光斑、靶块斜面的图像,应用相关算法提取出光斑质心的二维图像坐标.沿激光光束方向以相等间距移动靶块,通过CCD相机采集每移动一次靶块在当前位置下的光斑、靶块图像.利用相关的转换公式,结合靶块本身固有参数,将光斑质心图像二维坐标转换为基础平面下的空间三维坐标.由于靶块的移动,会得到靶块不同位置下激光光斑质心的三维坐标,将这些三维坐标拟合成空间直线表征待测激光光束.拟合直线得俯仰角即为待测激光光束的俯仰角.实验中,应用高精度仪器对靶块参数进行测定,并使用高精度标定板标定相机内外参数建立相应的定位模型.测量精度主要通过单目视觉定位精度、光斑重心提取精度来保证.结果显示,待测光束的俯角最大误差达到0.02°,光束间夹角的最大误差为0.04°.     

Algorithm for detecting volumetric geometric accuracy of NC machine tool by laser tracker

Quick and accurate detecting the error of NC machine tool and performing the error compensation are important to improve the machining accuracy of NC machine tool.Currently,there are many methods for detecting the geometric accuracy of NC machine tool.However,these methods have deficiencies in detection efficiency and accuracy as well as in versatility.In the paper,a method with laser tracker based on the multi-station and time-sharing measurement principle is proposed,and this method can rapidly and accurately detect the geometric accuracy of NC machine tool.The machine tool is controlled to move in the preset path in a 3D space or 2D plane,and a laser tracker is used to measure the same motion trajectory of the machine tool successively at different base stations.The original algorithm for multi-station and time-sharing measurement is improved.The space coordinates of the measuring point obtained by the laser tracker are taken as parameter values,and the initial position of each base point can be determined.The redundant equation concerning the base point calibration can be established by the distance information of the laser tracker,and the position of each base point is further determined by solving the equation with least squares method,then the space coordinates of each measuring point can be calibrated.The singular matrix does not occur in calculation with the improved algorithm,which overcomes the limitations of the original algorithm,that the motion trajectory of machine tool is in a 3D space and there exits height difference between the base stations.Adopting the improved algorithm can expand the application of multi-station and time-sharing measurement,and can meet the quick and accurate detecting requirements for different types of NC machine tool.     

Measuring large 3D structures using four portable tracking laser interferometers

A new concept that allows measuring 1D–3D objects in the range of several centimeters to 5 m × 5 m × 5 m is presented. In general terms the concept can be seen as a task specific correction of geometrical errors of coordinate measuring machines (CMMs). The developed system comprises a commercial CMM, its measurement and its evaluation software and a set of at least four high accurate tracking laser interferometers. The CMM is simply used as a mover which allows to capture points on the surface of a measuring object. In parallel the tracking laser interferometers follow a retro-reflector located close to the stylus tip of the tactile probe of the CMM. Based on a multi-lateration algorithm 3D-positions are calculated from the measured interferometric distances. Finally, two sets of coordinates emerged, namely, one by the CMM and the second from the metrological frame of the tracking laser interferometers. The interferometrically measured positions are usually more precise than the positions measured by the CMM. This is due to the high accuracy of the interferometric system and also due to the fact that the measurement positions are taken in a manner which almost avoids Abbe errors. Because of that, the measurement positions of the CMM are substituted with the more accurate measurement points calculated from distance measurements of the tracking interferometers. The position coordinates thus obtained are used for the further computerized evaluations, which yield the geometric parameters of the object measured. First measurements under laboratory condition show very promising results. It has been demonstrated that the concept is suitable for the high precision calibration of large workpieces with small tolerances, for instance, for the calibration of large gears for the windmill industry.     

飞秒激光跟踪仪光轴与竖轴同轴度的标定

考虑飞秒激光跟踪仪仪器轴系的几何误差会影响仪器的指向精度并最终影响坐标测量精度,本文研究了激光光轴与竖轴的几何误差对仪器测量精度的影响。提出了激光光轴与竖轴的同轴度标定方法,以降低其不重合带来的跟踪测量误差。首先,基于几何光学原理建立了光轴与竖轴的几何误差模型,分别分析了光轴与竖轴的倾斜与平移误差对仪器测角精度的影响。然后,针对设计的仪器提出了基于旋转成像原理的光轴与竖轴同轴度的检测方法,并设计了一套同轴度检测装置。最后,基于该检测装置,通过调节两组双光楔完成了激光光轴与竖轴的倾斜与平移误差的标定。结果显示,经标定校准后激光光轴与竖轴的角度误差为3.4″;平移误差为26.1μm,得到的结果为仪器后续建立误差补偿模型奠定了基础。     

Estimation of three-dimensional volumetric errors of machining centers by a tracking interferometer

A tracking interferometer is a laser interferometer with the mechanism to steer the laser direction to automatically follow a target retroreflector. This paper experimentally investigates the performance of the tracking interferometer prototype, developed by a part of the authors, in estimating the volumetric accuracy of a machining center based on the multilateration principle. Then, the prototype's technical issues are discussed based on the measurement uncertainty analysis. This paper briefly reviews the direct algorithm to calculate the three-dimensional position of the target, as well as the indirect algorithm to estimate geometric error parameters of the machine's kinematic model. Their comparison is also presented based on the uncertainty analysis.