限流电阻层改善碳纳米管场发射显示器发光均匀度的研究

针对碳纳米管(CNT)场发射阴极薄膜中,CNT个体差异及其与衬底的不良接触对发光均匀性的影响,引入反馈限流电阻层以改善阴极薄膜的场发射发光均匀性.采用丝网印刷工艺在衬底上制备氧化锌作为电阻限流层,在其上制备CNT阴极薄膜.对CNT薄膜阴极的发射电流稳定性和均匀性进行了测试,给出了电阻限流层对场发射特性曲线的影响效果.SEM分析表明,氧化锌电阻层有利于消除CNT阴极的尖端屏蔽效应,并且使得CNT与衬底具有更加紧密的接触.场发射特性和场发射发光照片表明,虽然随着限流层厚度增加,阈值电压有所增加,发射电流有所减小,然而限流层的存在有效地改善了发射电流的稳定性,使得发射电流和场发射发光点分布更加均匀.     

限流电阻层改善碳纳米管场发射显示器发光均匀度的研究

针对碳纳米管(CNT)场发射阴极薄膜中,CNT个体差异及其与衬底的不良接触对发光均匀性的影响,引入反馈限流电阻层以改善阴极薄膜的场发射发光均匀性.采用丝网印刷工艺在衬底上制备氧化锌作为电阻限流层,在其上制备CNT阴极薄膜.对CNT薄膜阴极的发射电流稳定性和均匀性进行了测试,给出了电阻限流层对场发射特性曲线的影响效果.SEM分析表明,氧化锌电阻层有利于消除CNT阴极的尖端屏蔽效应,并且使得CNT与衬底具有更加紧密的接触.场发射特性和场发射发光照片表明,虽然随着限流层厚度增加,阈值电压有所增加,发射电流有所减小,然而限流层的存在有效地改善了发射电流的稳定性,使得发射电流和场发射发光点分布更加均匀.     

铜镀镍基底生长碳纳米管薄膜场发射特性研究

采用化学镀的方法在铜基底上镀镍作为缓冲层,以酞菁铁(FePc)作为催化剂,采用CVD法在Cu/Ni基底上制备出了碳纳米管薄膜(Cu/Ni-CNTs),利用扫描电镜(SEM)和拉曼光谱进行了表征。为了测试在Cu/Ni基底上生长碳纳米管薄膜的场发射特性,采用二极管结构,在真空度为2×10~(-4) Pa下进行直流场发射测试。结果表明Cu/Ni基底的碳纳米管薄膜具有优异的场发射特性,薄膜与阳极距离为9mm时开启场强为1.44V/μm,场发射测试数据符合Fowler-Nordheim(F-N)场发射特性曲线,在相同高压范围(0~20kV)进行多次重复测试,碳纳米管薄膜具有良好的发射可重复性。     

铁电电容的电极结构

作为铁电电容的电极材料 ,铂是使用最为广泛的金属。在 PZT薄膜的上下两层分别用离子束溅射淀积厚度为 50 nm和 10 0 nm的 Pt。在铂层上按常规工艺需蒸发 1～ 2 μm的 Al作为布线金属。为避免在热处理过程中的固相反应 ,Al/ Pt之间还需嵌入阻挡金属。观察了 Si,Co,Ni,Ti和 Ti/ W合金膜的阻挡特性。实验证明一定组分的 Ti/ W合金膜能有效地抑制 Al/ Pt固相反应 ,获得较为理想的接触特性。     

以金属为缓冲层在Si(111)上分子束外延GaN及其表征

用电子束蒸发方法在Si(111)衬底上蒸发了Au/Cr和Au/Ti/Al/Ti 两种金属缓冲层,然后在金属缓冲层上用气源分子束外延(GSMBE)生长GaN. 两种缓冲层的表面都比较平整和均匀,都是具有Au(111)面择优取向的立方相Au层. 在Au/Cr/Si(111)上MBE生长的GaN,生长结束后出现剥离. 在Au/Ti/Al/Ti/Si(111)上无AlN缓冲层直接生长GaN,得到的是多晶GaN;先在800℃生长一层AlN缓冲层,然后在710℃生长GaN,得到的是沿GaN(0001)面择优取向的六方相GaN. 将Au/Ti/Al/Ti/Si(111)在800℃下退火20min,金属层收缩为网状结构,并且成为多晶,不再具有Au(111)方向择优取向.     

衬底对微米金刚石聚晶薄膜生长及场发射特性的影响

摘要：本文在陶瓷衬底上面利用磁控溅射的方法镀上一层厚金属钛,用不同方法对金属钛层进行表面处理,处理后的衬底放在微波等离子体化学气相沉积腔中,在相同的沉积条件下制备出不同微米金刚石薄膜。对不同的薄膜的微观表面形态、结构组成进行对比研究;对不同的薄膜用二极管型结构测试了它们的场致发射电子的性能,并对发射机理进行了深入的研究。最终分析出不同方法处理的衬底,对微米金刚石聚晶薄膜生长及场发射特性的影响的原因。     

碳纳米管薄膜的场发射及其有效发射面积

讨论了薄膜与阳极间隔以及有效发射面积对碳纳米管薄膜场发射性能的影响。以磁控溅射Al和Ni在Si片上做为缓冲层和催化剂,以乙炔为C源气体,利用化学气相沉积法制备了碳纳米管薄膜。扫描电镜观测结果表明,碳纳米管的直径为50～80nm。采用二极管结构,测试了样品的场发射性能,结果表明碳纳米管薄膜具有优异的场发射特性,薄膜与阳极距离为400μm时开启场为0.85V/μm、阈值场为1.22V/μm。F-N理论计算结果表明,碳纳米管薄膜的有效发射面积几乎不随场发射所加电压的变化而改变;有效发射面积随着薄膜与阳极距离的增加而增大。     

纳米碳管场致发射冷阴极的研究

以热化学气相沉积法较容易地制备得到场发射冷阴极。在导电性较好的金膜上蒸镀镍点,以此作为热化学气相沉积反应的基底,首先高纯氢气被通入石英管中作为保护性气体,同时起到还原催化剂的作用;然后通人乙炔气体,在700℃下在镍催化剂颗粒上乙炔发生裂解反应,实现纳米碳管的生长,并进行了场致发射特性实验研究,发射电流密度可达1．29A／cm^2,获得较大发射电流密度。     

磁控溅射生长Cu/Si薄膜

用溅射方法在Si(111)上生长Cu/Si,Ti/Si,Cu/Ti/Si薄膜。用XRD,红外吸收光谱,台阶仪对薄膜进行分析和测量。结果表明:在150℃溅射生长出的Cu/Ti/Si薄膜的缓冲层为硅化物TiSi2(311);Cu薄膜的主要成分是晶粒大小为17nm的Cu(111);Cu/Ti/Si(111)平均厚度为462nm,粗糙度为薄膜厚度的3%。在以TiSi2薄膜为缓冲层的Si(111)衬底上生长出的Cu薄膜抗氧化性较强、薄膜均匀性和致密性较好。     

外延纳米金刚石膜及其场发射特性

研究了纳米金刚石外延薄膜的制备方法及其场发射特性。采用电泳方法将粒径20nm以下的纳米金刚石微品沉积到Ti电极衬底上，用热丝CVD方法在纳米金刚石微晶薄膜上再外延生长一层含非晶碳金刚石薄膜。用Raman光谱研究了外延纳米金刚石薄膜的结构并在高真空条件下研究了其场发射特性。     

电泳法制备平栅极碳纳米管场发射阴极及场发射特性研究

采用电泳法在ITO玻璃基板上选择性制备了碳纳米管(CNTs)阴极薄膜,采用电子扫描(SEM)分析了CNTs薄膜的表面形貌,并测试了碳纳米管阴极的场致发射特性.结果表明,利用电泳法制得的碳纳米管阴极薄膜均匀性、致密性良好,且具有较大发射电流密度;通过控制共面栅控CNTs场发射阴极的栅极电位能够有效控制阴极的场发射电流密度...     

钯膜上CVD法制备碳纳米管薄膜的研究

采用化学气相沉积法,以乙炔为碳源,在各种钯膜上制备了碳纳米管薄膜。通过电子显微镜观察了碳管薄膜和钯膜的表面形貌。结果表明,在真空气氛下磁控溅射的钯膜上无法生长碳纳米管。对溅射的钯膜进行大气气氛下的退火处理,则可生长出稀疏的碳纳米管团聚颗粒。采用在氧气气氛下磁控溅射的钯膜作为催化剂,则可显著提高碳管的生长密度和纯度,从而获得致密均匀的碳纳米管薄膜。     

生长在钨丝上的碳纳米管发射显示阴极

通过化学气象沉积的方法用甲烷作为碳源在金属钨作为衬生长的碳纳米管,我们能发现碳纳米管与催化溶液(Fe(NO3)3·9H2O)在 2.5 摩尔的浓度.在金属钨做衬底的碳纳米管的场发射电流可以达到 100 微安时场发射增强因子大约为5008.通过用一个简单的玻璃真空管结构作为真空腔,我们可以证明场发射发光管和研究这个发光器件的特性.这个发现为制作一种新型的无汞的持久的发光器件成为可能而且有很高的发光性能.     

碳纳米管薄膜的电泳沉积与场发射性能

采用电泳法在Si基片上沉积碳纳米管(CNTs)薄膜。研究了电泳极间距、电泳时间及电泳电压等对沉积的薄膜形貌结构与场发射性能的影响。SEM、高倍光学显微镜和场发射性能测试结果表明,保持阴阳极间距为2cm,在100V的直流电压下电泳2min所获得的CNTs薄膜均匀、连续、致密且具有最好的场发射性能,其开启电场强度仅为1.19V/μm,当外加电场强度为2.83V/μm时,所获得的最大发射电流密度可达14.23×10–3A/cm2。     

空气氧化法对纳米碳管场发射性能的影响

以镍金属为催化剂,在600℃条件下,采用化学气相沉积法(CVD)制备碳纳米管。将制得的碳纳米管用高能球磨法处理0.5～1h后,以空气氧化法进行提纯,并研究了氧化温度对碳纳米管形貌和场发射性能的影响。用扫描电镜、Raman光谱分别对300～500℃的氧化提纯后的碳纳米管的形貌和结构进行了表征。结果表明:碳纳米管的场发射性能随温度的升高而升高,经400～450℃加热10min后,非晶碳成分减少,碳管纯度得到提高,场发射性能达到最高;当氧化温度继续升高时,碳纳米管的缺陷密度增大,非晶化程度增加,场发射特性变差。因此,通过控制氧化温度可以有效提高碳纳米管的纯度和场发射性能。     

浸泡Ni(NO3)2溶液的石墨在不同温度下生长的碳纳米管及其场发射性能

将石墨衬底浸泡于0.5mol/LNi(NO3)2溶液中一段时间,之后利用低压化学气相沉积法在不同温度的条件下生长碳纳米管薄膜。研究了碳纳米管的生长温度对其场发射性能的影响。通过扫描电子显微镜和拉曼光谱对生长的碳纳米管薄膜的表征发现,随着碳纳米管的生长温度的增加,碳纳米管的直径与相应拉曼光谱中的G峰和D峰(ID/IG)的峰强比减小。同样,碳纳米管的G峰的半峰宽随着碳纳米管的生长温度的增加而减小,这表明碳纳米管的石墨化程度的增强。实验中发现,碳纳米管的场发射性能依赖于碳纳米管的生长温度。     

Carbon Nanotube Assisted Enhancement of the Magneto-Optical Kerr Signal in Nickel Thin Films

In this paper, the effect of carbon nanotubes (CNTs) acting as a covering layer on the [Glass/Ni] sample was experimentally investigated. To this end, a 48 nm thick Ni thin film was initially deposited on the glass substrate using a thermal evaporation method. Afterward, a spin-coating method was employed to deposit a thin layer of CNTs on the Ni thin film, thereby forming the [Glass/Ni/CNT] structure. Compared to [Glass/Ni] samples, the presence of CNTs led to 100% and 180% enhancement in the longitudinal Kerr signal of spin-coated samples. Field emission scanning electron microscopy, energy-dispersive x-ray spectroscopy, UV–Vis spectra and vibrating-sample magnetometer analyses were employed to characterize and investigate the morphology, elemental analysis, and optical and magnetic characteristics of the resulting structures. As a covering layer, the CNTs enhanced the absorption of light in the UV–visible wavelength range while also amplifying the interaction of light with the Ni layer without seriously changing other magnetic properties of the structure. Accordingly, using a simple approach, the Kerr signal was amplified more than three times compared to that of an uncovered sample, providing useful applications for magnetic sensors.     

Improved field emission characteristic of carbon nanotubes by an Ag micro-particle intermediation layer

An efficient way to improve field emission characteristic of carbon nanotubes (CNTs) through an Ag micro-particle intermediation layer is presented. In this way, the intermediation layer is deposited on an indium tin oxide glass substrate by electrochemical method and then the CNTs are covered onto surface of the intermediation layer by electrophoretic method as CNT field emitters. The field emission characteristic of the CNT field emitters with the intermediation layer is significantly improved compared to the one without the intermediation layer, including decreased turn-on electric field from 4.2 to 3.1 V/μm and increased emission current density from 0.224 to 0.912 mA/cm² at an applied electric field of 6 V/μm. The improved field emission characteristic may be attributed to gibbous surface of the CNT field emitters. This efficient way is much simple, low cost, and suitable for production of large scale CNTs–based field emission cold cathode.     

Investigation of growth properties of patterned and aligned carbon nanotubes for field emitter

We demonstrate the use of microstructures as an inducement for the growth of patterned and aligned carbon nanotubes (CNTs) during thermal chemical vapor deposition process. The growth of individual nanotube lines of vertical-standing 8-10 μm length can be controlled in almost any directions. In directions of approximate 90°, 60°, 45° or 0° relative to substrate surface, kinds of aligned CNTs patterns were synthesized. We also show that the flow of carrier gas and apical dominance like plant growth are the main factors of patterning CNTs, which indicates that the distribution of electric field can be controlled and the shielding effects can be weakened. The result establishes a method of patterned and aligned nanotubes, which is well suited for ordered arrays of CNTs field emitters. The field emission currents were observed to be fairly reproducible ranging from 375 to 1000 V and field emission measurements show a low turn-on field (1.25 V/μm).     

Controlling the formation of nanoparticles for definite growth of carbon nanotubes for interconnect applications

Our interest is the integration of carbon nanotubes (CNT) in electronic devices (IC, NEMS). In the scope of this work, we present a study on the preparation of the catalyst Ni particles from ultrathin films and the synthesis of carbon nanotubes by the chemical vapour deposition method. For the preparation, we use a cold-wall CVD reactor especially designed for handling samples up to a size of a 4” wafer. We show the influence of different process conditions like temperature, initial layer thickness of catalyst and substrate on particle formation characterized by scanning electron microscopy (SEM). We show that the optimization of process conditions in the catalyst preparation phase is constitutive for dense CNT films. Regarding the application of CNTs as electrical interconnects, we studied the arrangement of nanoparticles on Al and TiN supporting layer. Furthermore, we fabricated the first test structures for the selective growth of CNTs out of contact holes on a Cu/TiN metallization layer system.The growth of multi-walled nanotubes (MWNTs) was performed with thermal CVD with ethylene as a precursor gas and hydrogen as supporting gas mixed in a nitrogen gas flow. The effects of growth condition on the quality and morphology of the CNTs were characterized by scanning electron microscopy, transmission electron microscopy (TEM) and Raman spectroscopy. The influence of temperature, gas composition and substrate on CNT growth will be presented. We managed to grow dense CNTs even at temperatures as low as 500 °C.