Si片上PbTiO3薄膜的XPS研究

用溶胶－凝胶方法在Ｓｉ上成功地制备了钙钛矿型的ＰｂＴｉＯ３薄膜。Ｘ射线衍射结果显示,在热处理温度为７５０￣９００℃范围内,随温度升高,薄膜由多晶转变为定向结晶。Ｘ射线光电子能谱分析发现,薄膜表面存在ＳｉＯ２薄层,其厚度大约为０．６ｎｍ,该薄层是在制膜过程中衬底Ｓｉ通过ＰｂＴｉＯ３薄膜扩散到表面与大气中的Ｏ２反应而形成的。在７５０℃热处理的薄膜,膜层中不含ＳｉＯ２,但温度升高,膜层中存在ＳｉＯ２成分     

X射线反射法和椭圆偏振法结合测量热处理溶胶-凝胶ZrO2薄膜的结构和光学参数

采用溶胶-凝胶法在硅片基底上制备ZrO2薄膜,在150℃～750℃范围内不同温度下进行热处理,研究了热处理对膜层结构和光学性能的影响。X射线反射用于膜层厚度和界面粗糙度分析,结果表明热处理温度由150℃升至750℃,膜层厚度由常温状态下的112.3nm减小到34.0nm,表面和界面粗糙度均小于2nm。以X射线反射法测得的膜层厚度为初始值,对椭圆偏振仪的测量结果进行拟合,得到不同温度的膜层折射率,结果表明热处理温度为550℃时膜层折射率达到最大值。X射线反射作为直接的膜层厚度测试手段,所得结果为准确分析椭偏光谱提供了参考。     

花蕾状ZnO层/SiO2多孔网络复合薄膜的制备及其发光特性

采用Zn／SiO2复合靶，用射频磁控共溅射技术在Si(111)衬底上沉积金属锌(Zn)／二氧化硅(SiO2)基质复合薄膜，在空气气氛中700℃条件下进行退火热处理1h，Zn从SiO2基质中析出并在薄膜表面被空气中的O2氧化，合成了花蕾状ZnO层／SiO2多孔网络复合薄膜材料．用X射线衍射(XRD)、扫描电镜(SEM)、透射电镜(TEM)和光致发光谱(PL)分析了复合薄膜的微结构、组成、表面形貌及光致发光特性。     

XPS结合氩离子溅射剖析Si/C多层膜的化学状态

采用X射线光电子能谱结合氩离子溅射对用作锂离子电池负极的Si/C多层膜进行了表面测试及深度剖析,获得了Si/C多层膜结构中不同深度位置的成分及化学状态.分析结果表明,Si/C多层膜中各层Si、C薄膜之间存在界面元素相互扩散,扩散至相邻层薄膜中的Si、C元素主要以化合物SiC形式存在,且处于不同位置的SiC的化学键能受周...     

PZT/Si薄膜的扩散反应研究

运用XPS和AES研究了PZT薄膜／Si在热处理过程中的薄膜及界面化学反应：在热处理过程中，气氛中的氧气通过PZT的缺陷通道扩散到PZT／Si界面上，并与界面上的硅发生氧化反应形成SiO2界面层。同时基底上的硅通过PZT的缺陷扩散到样品表面形成SiO2表面层。此外，在PZT／Si界面上，Ti的氧化物和Si发生还原反应，形成了TISix金属硅化物，并残留在PZT膜层和SiO2界面层中。在PZT膜层内，有机结碳和钛的氧化物发生还原反应形成了TiCx物种，并存在于PZT膜层中。     

原子层淀积 Al2O3薄膜的热稳定性研究

以Al（CH3）3和H2O为反应源，在270℃下用原子层淀积（ALD）技术在Si衬底上生长了Al2O3薄膜．采用X射线衍射（XRD）、X射线光电子能谱（XPS）、原子力显微镜（AFM）和傅立叶变换红外光谱（FTIR）等分析手段对Al2O3薄膜的热稳定性进行了研究．结果表明刚淀积的薄膜中含有少量A-OH基团，高温退火后，Al-OH基团几乎消失，这归因于Al-OH基团之间发生反应而脱水．退火后的薄膜中O和Al元素的相对比例（1．52）比退火前的（1．57）更接近化学计量比的Al2O3．FTIR分析表明，在刚淀积的Al2O3中有少量的-CH3存在，CH3含量会随热处理温度的升高而减少．此外，在高温快速热退火后，Al2O3薄膜的表面平均粗糙度（RMS）明显改善，900℃热退火后其RMS达到1．15nm．     

工艺参数和热处理温度对ZrW_2O_8薄膜制备的影响

采用WO3和ZrO2复合陶瓷靶材,以射频磁控溅射法在石英基片上沉积制备了ZrW2O8薄膜.利用X射线衍射仪(XRD)、表面粗糙轮廓仪和扫描电子显微镜(SEM),研究了不同工艺参数和不同退火温度对ZrW20s薄膜的相组成、沉积速率和表面形貌的影响.采用高温X射线衍射和Powder X软件研究薄膜的负热膨胀特性.实验结果表明随着溅射功率的增加,薄膜沉积速率增加;而随着工作气压的增加,薄膜沉积速率先增加后减小;磁控溅射沉积制备的ZrW20s薄膜为非晶态,表面平滑、致密,随着热处理温度的升高,薄膜开始结晶且膜层颗粒增大;在740℃热处理3 n血后得到膜层颗粒呈短棒状的三方相ZrW2O8薄膜,在1200℃密闭条件下热处理3 min淬火后得到膜层颗粒呈球状的立方相ZrW2O8薄膜,且具有良好的负热膨胀特性.     

Zr/Nb薄膜材料的制备及界面结构研究

通过直流磁控溅射法在单晶Si(100)基底上制备了Zr/Nb/Si薄膜材料。X射线衍射(XRD)研究表明Zr薄膜以多晶形式存在,而Nb薄膜则形成了(110)晶面择优生长。薄膜中Zr和Nb晶粒大小分别为14,6 nm。扫描电镜研究表明形成的薄膜表面平整光滑,没有微裂纹存在。扫描俄歇电子能谱及X射线光电子能谱的研究表明,Zr/Nb/Si薄膜样品具有清晰的界面结构。在薄膜表面形成了致密的氧化层物种,而在膜层内部少量氧则以吸附态形式存在。     

真空热处理制备β-FeSi2光电薄膜的研究

磁控溅射法沉积的Fe／Si多层膜和Fe单层膜经真空热处理后制备了β-FeSi2薄膜。[Fe1nm／Si3.2nm]60多层膜在〈880℃温度下真空热处理2h后，样品均呈现β（220）／（202）择优取向，而Fe单层膜制备的样品则易形成β-FeSi2与ε-FeSi相的混合物，且取向杂乱。在920℃真空热处理后，两种样品都形成了α-FeSi2薄膜。原子力显微镜分析表明，样品表面粗糙度随热处理温度升高而变大，最大表面均方根粗糙度约为16nm。卢瑟福背散射分析发现，Fe／Si多层膜样品热处理过程中元素再分布很小。根据光吸收谱测量，Fe／Si多层膜制备的β-Fesi2薄膜的禁带宽度为0．88eV。     

氧等离子体处理对氧化铟锡表面化学状态影响的ADXPS研究

利用变角X射线光电子谱对氧等离子体处理前后氧化铟锡ITO薄膜的表面化学状态进行了表征.实验发现用溶剂清洗之后的ITO薄膜表面存在一层厚度大约为0.7nm的非导电碳氢化合物污染层.氧等离子体处理方法可有效地消除C污染,而残存的少量污染C被部分氧化形成含羰基和羧基的化学物种.氧等离子体处理不仅提高了约5.0nm深度范围内的ITO薄膜表层中O的总体含量,更重要的是提高了膜层中O2-离子氧种的含量,改变了膜层化学结构,使得ITO薄膜表面的导电性能降低,同时改善了整个表面层化学结构的均匀性.     

Analysis of Carbon Materials by X‐ray Photoelectron Spectroscopy and X‐ray Absorption Spectroscopy

Since hard coating such as ta:C films are of growing interest for protecting surfaces of industrial machines and high capacity tools against wear and friction or for biomedical applications, more information about the structure‐to‐property relation is required. Therefore, core level X‐ray photoelectron sprectroscopy and X‐ray absorption spectroscopy and spectromicroscopy are used to derive chemical information about selected carbon species.     

热老化聚丙烯薄膜宏观力学性能及微观结构的研究

通过对热老化处理的聚内稀薄膜进行X射线衍射实验.对测得的实验数据采用X射线衍射线形分析理论处理,同时对热老化聚丙烯薄膜进行拉仲形变测量,得到材料的力学性质和微晶尺寸及内部点阵畸变的变化规律.从而将热老化聚丙烯材料宏观性质变化与微观结构联系起来,找出材料聚集态精细结构随老化时问而改变的微观规律.     

软X射线光刻研究现状和发展

新的一代光刻设备朝着两个方向发展 ,一是趋向于大数值孔径、短波长 ;另一方面国际上正在寻求适应二十一世纪、小于 0 .1 5微米线宽的软 X射线投影光刻技术 ,预计成为下世纪制造千兆位以上超大规模集成电路的主要设备。软 X射线光刻及其应用研究是目前国际上非常活跃的高技术领域。把软 X射线光刻列为重要发展项目。本文摘要综述德国、美国、日本、俄罗斯等国近年来在软 X射线光刻关键单元技术及整机研究和发展方面的概况、预计下世纪初美国和日本将有软 X射线投影光刻机投入工艺生产线     

Silver Iodide Formation in Methyl Ammonium Lead Iodide Perovskite Solar Cells with Silver Top Electrodes

Silver is a low‐cost candidate electrode material for perovskite solar cells. However, in such cells the silver electrodes turn yellow within days of device fabrication. The color change is also accompanied by a dramatic decrease in the power conversion efficiency when compared to otherwise identical devices using gold electrodes. Here, it is shown that the color change results from silver oxidation to silver iodide, due to a reaction with iodine in methyl ammonium lead perovskite. The change in X‐ray diffraction and X‐ray photo­electron spectroscopy is discussed. Exposure to air accelerates corrosion of the Ag electrodes when compared to dry nitrogen gas exposure. However, iodine not reacted with silver is observed by X‐ray photoelectron spectroscopy even for the perovskite solar cell kept in dry nitrogen gas. It is proposed that silver iodide is formed when methyl ammonium iodide migration is facilitated by the small pinholes in the hole transport layer spiro‐MeOTAD.     

应用感蓝增感染料以降低X线胶片的银耗

研制Ｘ线胶片，降银是焦点，应用感蓝增感染料是有效手段．合成并试验了零甲川丹宁份菁染料，在保持现有产品照相性能条件下，涂银量可从６．５ｇ／ｍ２降低到５．５ｇ／ｍ２．     

A Living‐Dead Magnetic Layer at the Surface of Ferrimagnetic DyTiO3 Thin Films

When ferromagnetic films become ultrathin, key properties such as the Curie temperature and the saturation magnetization are usually depressed. This effect is thoroughly investigated in magnetic oxides such as half‐metallic manganites, but much less in ferrimagnetic insulating perovskites such as rare‐earth titanates RTiO₃, despite their appeal to design correlated 2D electron gases. Here, the magnetic properties of epitaxial DyTiO₃ thin films are reported. While films thicker than about 50 nm show a bulk‐like response, at low thickness a surprising increase of the saturation magnetization is observed. This behavior is described using a classical model of a “dead layer” but assuming that this layer is actually “living,” that is, it responds to the magnetic field with a strong paramagnetic susceptibility. Through depth‐dependent X‐ray absorption and photoemission spectroscopy, it is shown that the “living‐dead layer” corresponds to surface regions where magnetic (S = 1/2) Ti³⁺ ions are replaced by nonmagnetic Ti⁴⁺ ions. Hysteresis cycles at the Dy M₅ and Ti L₃ edges indicate that the surface Ti⁴⁺ ions decouple the Dy³⁺ ions, thus unleashing their strong paramagnetic response. Finally, it is shown how capping the DyTiO₃ film can help increase the Ti³⁺ content near the surface and thus recover a better ferrimagnetic behavior.     

The effect of thermal oxidation on the luminescence properties of nanostructured silicon

Herein is reported a detailed study of the luminescence properties of nanostructured Si using X-ray excited optical luminescence (XEOL) in combination with X-ray absorption near-edge structures (XANES). P-type Si nanowires synthesized via electroless chemical etching from Si wafers of different doping levels and porous Si synthesized using electrochemical method are examined under X-ray excitation across the Si K-, L(3,2) -, and O K-edges. It is found that while as-prepared Si nanostructures are weak light emitters, intense visible luminescence is observed from thermally oxidized Si nanowires and porous Si. The luminescence mechanism of Si upon oxidation is investigated by oxidizing nanostructured Si at different temperatures. Interestingly, the two luminescence bands observed show different response with the variation of absorption coefficient upon Si and O core-electron excitation in elemental silicon and silicon oxide. A correlation between luminescence properties and electronic structures is thus established. The implications of the finding are discussed in terms of the behavior of the oxygen deficient center (OCD) and non-bridging oxygen hole center (NBOHC).     

Anatomy of Skyrmionic Textures in Magnetic Multilayers

Room temperature magnetic skyrmions in magnetic multilayers are considered as information carriers for future spintronic applications. Currently, a detailed understanding of the skyrmion stabilization mechanisms is still lacking in these systems. To gain more insight, it is first and foremost essential to determine the full real‐space spin configuration. Here, two advanced X‐ray techniques are applied, based on magnetic circular dichroism, to investigate the spin textures of skyrmions in [Ta/CoFeB/MgO]_n multilayers. First, by using ptychography, a high‐resolution diffraction imaging technique, the 2D out‐of‐plane spin profile of skyrmions with a spatial resolution of 10 nm is determined. Second, by performing circular dichroism in resonant elastic X‐ray scattering, it is demonstrated that the chirality of the magnetic structure undergoes a depth‐dependent evolution. This suggests that the skyrmion structure is a complex 3D structure rather than an identical planar texture throughout the layer stack. The analyses of the spin textures confirm the theoretical predictions that the dipole–dipole interactions together with the external magnetic field play an important role in stabilizing sub‐100 nm diameter skyrmions and the hybrid structure of the skyrmion domain wall. This combined X‐ray‐based approach opens the door for in‐depth studies of magnetic skyrmion systems, which allows for precise engineering of optimized skyrmion heterostructures.     

3D Nanoprinted Plastic Kinoform X‐Ray Optics

High‐performance focusing of X‐rays requires the realization of very challenging 3D geometries with nanoscale features, sub‐millimeter‐scale apertures, and high aspect ratios. A particularly difficult structure is the profile of an ideal zone plate called a kinoform, which is manufactured in nonideal approximated patterns, nonetheless requires complicated multistep fabrication processes. Here, 3D fabrication of high‐performance kinoforms with unprecedented aspect ratios out of low‐loss plastics using femtosecond two‐photon 3D nanoprinting is presented. A thorough characterization of the 3D‐printed kinoforms using direct soft X‐ray imaging and ptychography demonstrates superior performance with an efficiency reaching up to 20%. An extended concept is proposed for on‐chip integration of various X‐ray optics toward high‐fidelity control of X‐ray wavefronts and ultimate efficiencies even for harder X‐rays. Initial results establish new, advanced focusing optics for both synchrotron and laboratory sources for a large variety of X‐ray techniques and applications ranging from materials science to medicine.