AlN/GaAs界面的AES和XPS研究

在室温下用直流磁控反应溅射的方法制备了ＡｌＮ薄膜．用ＡＥＳ方法和ＸＰＳ方法分析了ＡｌＮ膜和ＡｌＮ／ＧａＡｓ界面．在ＡｌＮ／ＧａＡｓ界面发现了Ｏ—Ａｌ键,没有发现Ｏ—Ｇａ键或Ｏ—Ａｓ键．本文通过实验证明,ＡｌＮ／ＧａＡｓ界面的Ｏ元素在ＡｌＮ淀积过程中从ＧａＡｓ表面转移到ＡｌＮ膜中．这与通过ＰＥＣＶＤ方法淀积ＡｌＮ薄膜形成的ＡｌＮ／ＧａＡｓ界面完全不同．由于ＡｌＮ／ＧａＡｓ界面的Ｏ元素是与Ａｌ结合的,因此有较好的界面特性．这是直流磁控反应溅射方法制备的ＡｌＮ薄膜适用于ＧａＡｓ器件钝化的主要原因     

新型复相陶瓷刀具材料JX—2—I的界面结构及其对材料性能的影响

本文利用ＴＥＭ研究了新型复相陶瓷刀具材料ＪＸ－２－Ｉ的界面结构，结果表明，在ＪＸ－２－Ｉ中Ａｌ２Ｏ３／ＳｉＣｗ（氧化铝／碳化硅晶须）界面和Ａｌ２Ｏ３／ＳｉＣｐ（碳化硅颗粒）界面结合良好，形成了具有较高强度的微观结构，发现在ＳｉＣｗ，ＳｉＣｐ和Ａｌ２Ｏ３晶粒上均有位错产生，在ＳｉＣｐ和Ａｌ２Ｏ３上有孪晶产生，分析表明，位错和孪晶的产生均吸收大量的断裂能，提高材料的断裂韧性，改善ＪＸ－２－Ｉ材料的整体     

新型陶瓷刀具材料JX－2－I界面结构的实验研究

利用ＴＥＭ和电子衍射图谱分析，研究了新型陶瓷刀具材料ＪＸ－２－Ｉ的界面微观结构。ＴＥＭ分析表明，ＪＸ－２－Ｉ刀具材料的界面结合状态较好，Ａｌ＿２Ｏ＿３／ＳｉＣｗ界面上形成了具有较高强度的“钢筋混凝土”结构，在Ａｌ＿２Ｏ＿３／ＳｉＣｗ和Ａｌ＿２Ｏ＿３／ＳｉＣｐ界面上没有剧烈的化学反应发生；通过ＴＥＭ和电子衍射图分析，发现在Ａｌ＿２Ｏ＿３的晶粒边界上有尖晶石（ＭｇＡｌ＿２Ｏ＿４）生成，这有利于控制Ａｌ＿２Ｏ＿３晶粒的长大，提高复合材料的强度。     

SiCw／Al－Li复合材料中界面无析出带的TEM观察

ＳｉＣｗ／Ａｌ－Ｌｉ复合材料中界面无析出带的ＴＥＭ观察董尚利，崔约贤，茅建富，来忠红，杨德庄（哈尔滨工业大学材料科学与工程学院，哈尔滨１５０００１）本文采用透射电镜选区电子衍射技术和暗场技术，研究了压铸法制备的１５Ｖｏｌ％ＳｉＣｗ／Ａｌ－２．１８ｗｔ...     

AlN基板与金属化层界面的分析电镜研究

利用各种分析电镜观察了掺杂助烧剂和未掺杂助烧剂的ＡｌＮ陶瓷的微观结构特征，鉴别了ＡｌＮ中的第二相，研究了ＡｌＮ基板上薄膜（Ａｕ－Ｐｔ－Ｔｉ）和厚膜（Ｍｏ－Ｍｎ）金属化界面的结构。     

新型Al金属化系统微波器件EB结的可靠性研究

对具有Ａｌ－Ｓｉ－Ｐｄ／ＴｉＮ／Ｔｉ／ＰｔＳｉ／Ｓｉ（样品Ａ）和Ａｌ－Ｓｉ－Ｐｄ／Ｔｉ／ＰｔＳｉ／Ｓｉ（样品Ｂ）两种新型金属化结构的微波管的ＥＢ结在不同温度、相同电流条件下进行了加速寿命试验，得到其中值寿命（ＭＴＦ）相差近一倍，激活能分别为０．９２和０．７９ｅＶ，并给出了在温度和电流应力下ＥＢ结反向击穿特性的变化规律     

AlN基板与金属化层界面的分析电镜研究

利用各种分析电镜观察了掺杂助烧剂和未掺杂助烧剂的ＡｌＮ陶瓷的微观结构特征，鉴别了ＡｌＮ中的第二相，研究了ＡｌＮ中的第二相，研究了ＡｌＮ基板上薄膜（Ａｕ－Ｐｔ－Ｔｉ）和厚膜（Ｍｏ－Ｍｎ）金属化界面的结构。     

金刚石薄膜-金属接触的SEM和XRD研究

用ＳＥＭ和ＸＲＤ研究了金刚石薄膜与双层金属之间的接触及界面性质，采用微波等离子体ＣＶＤ方法在Ｓｉ（１１１）基片上沉积了掺硼金刚石薄膜，然后蒸发上Ｔｉ／Ａｕ金属层，在氮保护气氛下７００℃热处理５０ｍｉｎ后获得一个线性的电流－电压特性，经ＳＥＭ和ＸＲＤ实验结果表明，Ｔｉ／Ａｕ金属与金刚石薄膜之间优良的接触性能的获得，显然是由于大金刚石膜－Ｔｉ／Ｔｕ界面处产生了ＴｉＣ新相以及ＴｉＣ的浸润性质的缘故。     

SiC颗粒增强Al—Si复事材料中的SiC及其界面

以常规ＴＥＭ为工具，对ＳｉＣｐ／ＺＬ１０９复合材料中ＳｉＣ颗粒及其界面进行了研究，除观察到大量α型六方６Ｈ ＳｉＣ外，还观察到少量α型六方４Ｈ和菱形１５Ｒ ＳｉＣ。观察到的都是单一的ＳｉＣ／Ａｌ及ＳｉＣ界面，无论是ＳｉＣ／Ａｌ或ＳｉＣ／Ｓｉ界面，界面清洁，结合紧密，无孔洞，无反应过渡层。     

Cu—Zn—Al合金中贝氏体的扫描隧道显微镜分析

本文用扫描隧道显微镜（ＳＴＭ）在大气中研究了Ｃｕ－２７．２ｗｔ．％Ｚｎ－４．７ｗｔ．％Ａｌ合金中的贝氏体的精细结构，并与透射电镜（ＴＥＭ）及扫描电镜（ＳＥＭ）下的形态进行了比较，发现Ｃｕ－Ｚｎ－Ａｌ合金中虫氏体是由亚片条或亚单元组成，亚单元由超亚单元构成，进而为贝氏相变机制的再认识提供了重要的实验基础，并在此基础上提出Ｃｕ－Ｚｎ－Ａｌ合金中贝氏体的形成模型。     

Al,Al/C and Al/Si implantations in 6H-SiC

Multiple-energy Al implantations were performed with and without C or Si coimplantations into 6H-SiC epitaxial layers and bulk substrates at 850°C. The C and Si co-implantations were used as an attempt to improve Al acceptor activation in SiC. The implanted material was annealed at 1500, 1600, and 1650°C for 45 min. The Al implants are thermally stable at all annealing temperatures and Rutherford backscattering via channeling spectra indicated good lattice quality in the annealed Al-implanted material. A net hole concentration of 8 × 10¹⁸ cm⁻³ was measured at room temperature in the layers implanted with Al and annealed at 1600°C. The C or Si co-implantations did not yield improvement in Al acceptor activation. The co-implants resulted in a relatively poor crystal quality due to more lattice damage compared to Al implantation alone. The out-diffusion of Al at the surface is more for 5Si co-implantation compared to Al implant alone, where 5Si means a Si/Al dose ratio of 5.     

Electrical analysis of Al/ZnO/p-Si,Al/PMMA/p-Si and Al/PMMA/ZnO/p-Si structures: Comparison study

Al/ZnO/p-Si, Al/PMMA/p-Si and Al/PMMA/ZnO/p-Si structures were fabricated. Based on the measured current–voltage (C–V) and capacitance–voltage curves, the electrical characteristics of these heterostructures such as ideality factor, barrier height and series resistance of each structure were analyzed and then compared with those of Al/PMMA/ZnO/p-Si. According to C–V measurement, it was found that the Al/PMMA/ZnO/p-Si structure indicates the better electronic performance rather than other structures. The obtained results represent low series resistance (19.3 Ω) after coating with polymethyl methacrylate (PMMA) over ZnO/p-Si heterojunction structure for Al/PMMA/ZnO/p-Si heterostructure.     

Contact resistance of LPCVD W/Al and PtSi/W/Al metallization

The sensitivity of measured specific contact resistivity to surface doping concentration has been investigated for selectively deposited LPCVD W contacts to n+ and p +Si with surface concentrations from 10¹⁸to 10²⁰cm^-3. W contact resistance to n+ Si is about a factor of 20 lower than that of Al; W contact resistance to p +Si is comparable to that of Al. Ultralow resistance, stable contacts with self-aligned PtSi, and W to p +Si are demonstrated.     

超声楔键合Au/Al和Al/Au界面IMC演化

基于固体相变理论,研究Au丝、Al丝超声楔-楔键合接头的温度长期可靠性.200℃下,存储时间＜48 h时,Au/Al接头界面并未发生明显变化;随着接头存储时间增加,界面金属间化合物(IMC)开始由焊盘向引线方向生长(垂直生长);240 h时,Al焊盘完全被消耗,接头连接界面部位生成Au5Al2,周边为Au2Al;继续增加存储时间,IMC向接头水平方向生长(水平生长),Au5Al2向更稳定的Au2Al转变,IMC与引线之间形成严重的Kirkendall孔洞.Al/Au系统相对稳定得多,界面IMC生长缓慢,然而,界面化合物AuAl2导致接头裂纹,而引线内部出现严重的空洞.对比并分析了两种楔焊系统界面演变特点和产生机制.     

Reliability Studies on the 2-Level Al/SiO2/Al System

The reliability of the 2-level aluminum/silicon dioxide/aluminum system has been investigated. Test structures were fabricated using two types of aluminum films, deposited on unheated substrates (Al-I) and on 200°C substrates (Al-II). Two types of insulation layers were used: SiO2 from oxidation of silane, and rf sputtered SiO2 with an overlay of silane SiO2. Scanning electron microscopy was used to examine the topography of the crossovers and via-holes. More hillocks were seen with Al-I films than with Al-II films. Via-hole resistance and the incidence of intralevel opens and interlevel shorts were determined. A comparative evaluation of the four structures indicated that Al-II films are more desirable for first-level metallization. The test structures with Al-II films, subjected to 150°C storage for 1000 hours, exhibited no increase in the interlevel resistance and a failure rate of one interlevel short per 12000 crossovers, each 0.5 mil (13 ?m) square. Temperature cycling of these structures from -65°C to 150°C for 500 cycles developed no interlevel shorts and resulted in a decrease of the interlevel resistance. These observations show a failure rate of less than one interlevel short per 13200 crossovers in 500 cycles. Process problems related to the reliability of 2-level structures are discussed.     

Thermal stability of Al/AlGaAs and Al/GaAs/AlGaAs (MBE) Schottky barriers

Outstanding stability has been observed in Al/Al/sub x/Ga/sub 1-x/As and Al/GaAs/Al/sub x/Ga/sub 1-x/As (x=0.25) Schottky barriers prepared by depositing Al in situ by MBE on annealing up to 400 degrees C. Conventionally evaporated barriers have been fabricated and compared with epitaxial ones. The changes in barrier height and ideality factor induced by annealing are reported.<>     

Al/Ag/Al复合薄膜电极的抗氧化性和电性能研究

为开发大尺寸场发射显示器需要的能承受高温热处理的薄膜电极,以Al作为Ag层的保护层和与玻璃衬底的粘附层,采用直流磁控溅射制备了Al/Ag/Al复合薄膜及其电极.采用XRD、AFM、光学显微镜和电性能测试系统,研究不同温度热处理对复合薄膜和电极结构、表面形貌和电性能的影响.由于表面致密的Al2O3膜的保护,使得加热退火(<600℃)不会对Al/Ag/Al薄膜和电极造成明显的氧化,然而Al层与Ag层发生的界面扩散和固相反应增大了电极的电阻率(从5.0×10~(-8) Ω·m 上升至23.6×10~(-8) Ω·m).另外热处理温度足够高时(500℃、600℃),Ag原子向表面的扩散一定程度上降低了电极的化学稳定性.尽管如此,与Cr/Cu/Cr薄膜电极相比Al/Ag/Al薄膜电极仍然是一种能够承受高温热处理并且保持较低电阻率的新型电极.     

Charge transport mechanism of Al/Bi2Te3/Al thin film devices

Results of dielectric and conduction properties of vacuum evaporated Bi₂Te₃ thin film capacitors (Al/Bi₂Te₃/Al) have been reported in the frequency range 12 Hz to 100 kHz at various temperatures (303–423 K). The variation of capacitance and dielectric constant was found to be temperature and frequency dependent. The capacitance of the film decrease with increasing temperature which may be due to the expansion of the lattice and also due to the excitation of charge carriers at the sites of imperfection. The dielectric constant decreases with frequency at all temperature. This can be attributed to an interfacial polarization caused by space charge. The prevailing ac conduction mechanism in these films is hopping type. The activation energies were evaluated for various thicknesses and it is found to be 0.016 and 0.014 eV for the frequencies 200 Hz and 1 kHz, respectively.     

The incubation time for hole formation due to electromigration in Al and Al/Cu/Al thin films

Transmission electron microscope observations of hole formation in Al and Al/Cu/Al thin film conductors carrying high current densities have revealed the presence of an incubation period for hole growth. The temperature dependence of this incubation period for pure aluminum conductors has been determined and found to follow an Arrhenius relationship with an activation energy of 0.55 ev ± 0.1 ev.     

用Al或Mo/Al/Mo低阻材料改善4-Mask工艺中Al腐蚀的方法

为了减少制造工艺的过程,改进的4-Mask工艺中采用Al基的数据线已得到进一步的完善。但这个工艺仍存在很多问题,主要是为减少工艺过程,而引入干法刻蚀对Al有腐蚀作用。本文应用CF4/O2等离子体处理,很好地阻止了对Al的腐蚀,得到很好的效果,对改进后4-Mask工艺的进一步应用具有非常重要的意义。