A novel plastic package for pressure sensors fabricated using the lithographic dam-ring approach

This study presents a novel plastic package for piezoresistive pressure sensors. A photoresist dam-ring patterned using the lithographic process is spin-coated on a piezoresistive pressure sensor to define a sensing channel in the pressure sensor package. Fluid epoxy molding encapsulates the pressure sensor and exposes the sensing channel during a high-temperature molding process at 165 °C. Experimental observations reveal that the silicon membrane of the pressure sensor is completely free of epoxy molding compound (EMC) contamination after the transfer molding process. The effectiveness of the dam-ring in shielding the silicon membrane of the pressure sensor during the molding process was confirmed. The packaged pressure sensor exerts a thermo-mechanical stress on the silicon membrane of the pressure sensor, resulting in an undesired output voltage drift. However, employing a package design with a large sensing channel opening can reduce the effect of package-induced stress. The proposed packaging scheme was a small package volume and surface-mount device (SMD) compatible features, making it suitable for portable commercial devices.     

Experimental study on use of nickel powder-filled Portland cement-based composite for fabrication of piezoresistive sensors with high sensitivity

Nickel powder-filled Portland cement-based composite was prepared by adding nickel powder as functional filler into conventional Portland cement-based materials, and piezoresistive sensors were fabricated by embedding four loop electrodes in the nickel powder-filled Portland cement-based composite. The relationship between the fractional change in electrical resistivity and the stress/strain of piezoresistive sensors was established for the compressive stress and was found to be in the range from 0 to 12.5 MPa. Experimental results indicate that the electrical resistivity of nickel powder-filled Portland cement-based composite under uniaxial compression decreases by 62.6144% within elastic regime, which justifies the use of this composite in the fabrication of piezoresistive sensors with high sensitivity to stress and sensitivity to strain (gauge factor). The sensitivity of piezoresistive sensors to compressive stress is higher than 0.050092 MPa^?1 and goes up to 0.123648 MPa^?1. The gauge factor of piezoresistive sensors is higher than 895.450 and goes up to 1929.500. It is therefore concluded that the newly developed piezoresistive sensors have a high sensitivity to stress/strain, and they can be used for measurement of stress/strain or force/deformation.     

Gas sensing behavior of polyvinylpyrrolidone-modified ZnO nanoparticles for trimethylamine

Gas sensors based on polyvinylpyrrolidone (PVP)-modified ZnO nanoparticles with different molar ratios of Zn²⁺: PVP were prepared by a sol–gel method. Morphology of the sensors was characterized by field emission-scanning electron microscopy (FE-SEM), which indicated that the sensor with a molar ratio of Zn²⁺: PVP = 5:5 showed uniform morphology. Moreover, the sensor exhibited fairly excellent sensitivity and selectivity to trimethylamine (TMA). The response and recovery time of the sensor were 10 and 150 s, respectively. Finally, the mechanism for the improvement in the gas sensing properties was discussed.     

Bulk property of 1/f noise for piezoresistive Ni/Cr thin films in pressure sensors on flexible substrate

In the current paper, we report the 1/f noise measurement of nichrome Ni/Cr (80/20 %) thin films for two types of pressure sensors: relative pressure sensors and absolute pressure sensors. The normalized Hooge coefficient for nichrome thin film was found to be 1.89 × 10^?10 for the relative pressure sensors and 4.64 × 10^?11 for the absolute pressure sensors. We demonstrated that the normalized Hooge coefficient multiplied by the volume of the thin film become constant regardless of the sensor types and discuss the complexities arise for the miniaturization of MEMS sensors due to the bulk noise properties of piezoresistive thin films.     

Passive single chip wireless microwave pressure sensor

A novel micromachined passive wireless pressure sensor is presented. The device consists of a tuned circuit operating at 10 GHz fabricated on to a SiO₂ membrane, supported on a silicon wafer. A pressure difference across the membrane causes it to deflect so that an antenna circuit detunes. The circuit is remotely interrogated to read off the sensor data wirelessly. The chip area is 5 mm × 4 mm and the membrane area is 2 mm² with a thickness of 4 μm. Two on-chip passive resonant circuits were investigated: a meandered dipole and a zigzag antenna. Both have a physical length of 4.25 mm. The sensors show a shift in their resonant frequency in response to changing pressure of 10.28–10.27 GHz for the meandered dipole, and 9.61–9.58 GHz for the zigzag antenna. The sensitivities of the meandered dipole and zigzag sensors are 12.5 kHz/mbar and 16 kHz/mbar respectively.     

Development of wireless compressive/relaxation-stress measurement system integrated with pressure-sensitive carbon black-filled silicone rubber-based sensors

In order to detect the installation compressive stress and monitor the stress relaxation between two bending surfaces on a defensive furnishment, a wireless compressive-stress/relaxation-stress measurement system based on pressure-sensitive sensors is developed. The flexible pressure-sensitive stress sensor array is fabricated by using carbon black-filled silicone rubber-based composite. The wireless stress measurement system integrated with this sensor array is tested with compressive stress in the range from 0 MPa to 3 MPa for performance evaluation. Experimental results indicate that the fractional change in electrical resistance of the pressure-sensitive stress sensor changes linearly and reversibly with the compressive stress, and its fractional change goes up to 355% under uniaxial compression; the change rate of the electrical resistance can track the relaxation stress and give out a credible measurement in the process of stress relaxation. The relationship between input (compressive stress) and output (the fractional change in electrical resistance) of the pressure-sensitive sensor is ΔR/R₀ = σ × 1.2 MPa^?1. The wireless compressive stress measurement system can be used to achieve sensitivity of 1.33 V/MPa to the stress at stress resolution of 920.3 Pa. The newly developed wireless stress measurement system integrated with pressure-sensitive carbon black-filled silicone rubber-based sensors has advantages such as high sensitivity to stress, high stress resolution, simple circuit and low energy consumption.     

A micro shear stress sensor based on laterally aligned carbon nanotubes

This paper reports the development of a micro thermal shear stress sensor that utilizes multiwalled carbon nanotubes as the sensing element. The sensor was fabricated by laterally aligning randomly distributed nanotubes into a 360 μm long and 90 μm wide conductive trace between two triangular shaped micro electrodes through the use of a high frequency AC electric field. During operation, the aligned nanotubes are electrically heated to an elevated temperature and surface shear stress is measured indirectly by the amount of convective heat transfer from the heated nanotubes to the surrounding fluid flow.The nanotube alignment process was primarily controlled by three different phenomena: dielectrophoresis, joule heating, and Brownian motion. Numerical simulations, together with experimental verifications, indicated that a successful alignment could only be realized if: (1) the dielectrophoretic force was positive, (2) the electro-thermal force was also positive, and (3) the dielectrophoretic force was high enough to overcome Brownian motion. The aligned nanotube trace has a room-temperature resistance of 580 Ω, which corresponds to a conductivity of 2.7 × 10⁴ S/m. The absolute temperature coefficient of resistivity ranges from 0.01 to 0.04% °C⁻¹. This is about one order of magnitude smaller than the highly doped polysilicon sensing material used in the MEMS micro shear stress sensor. The shear stress sensitivity of the nanotube trace operated at a 3% overheat ratio is found to follow the theoretical sensor power ∝ (shear stress)^1/3 relationship, provided the shear stress level is higher than 0.34 mPa. This result confirms the feasibility of using aligned multi-walled carbon nanotubes as a thermal shear stress sensing material.     

Fiber optics sensor for sub-nanometric displacement and wide bandwidth systems

In this paper, we report fiber optics sensor with sub-nanometric resolution and wide bandwidth. It relies on an increase of the reception fibers number and on low-noise electronics. Moreover, a reference channel has been implemented using a semi-reflective plate to eliminate the source fluctuations and the fiber sensor was isolated to limit external influence of temperature and pressure. Thus we achieve both a sub-nanometric resolution on a 400 ms integration time and a long-term drift as low as 40 nm h^?1. The setup has been also adapted to high speed applications by increasing the bandwidth up to 38 kHz. It can display a 28 nm peak-to-peak limit of resolution on an aluminized piezoactuator. It has been successfully used to test the resonance frequency of a vibrating plate actuated by two high-frequency prototypes of piezoactuators. These improvements lead to low cost fibers optic sensors interesting for non-contact displacement measurements with high sensitivity.     

Computer-based analysis of explicit approximations to the implicit Colebrook–White equation in turbulent flow friction factor calculation

The implicit Colebrook–White equation has been widely used to estimate the friction factor for turbulent fluid-flow in rough-pipes. In this paper, the state-of-the-art review for the most currently available explicit alternatives to the Colebrook–White equation, is presented. An extensive comparison test was established on the 20 × 500 grid, for a wide range of relative roughness (ε/D) and Reynolds number (R) values (1 × 10^?6 ? ε/D ? 5 × 10^?2; 4 × 10³ ? R ? 10⁸), covering a large portion of turbulent flow zone in Moody’s diagram. Based on the comprehensive error analysis, the magnitude points in which the maximum absolute and the maximum relative error are occurred at the pair of ε/D and R values, are observed. A limiting case of the most of these approximations provided friction factor estimates that are characterized by a mean absolute error of 5 × 10^?4, a maximum absolute error of 4 × 10^?3 whereas, a mean relative error of 1.3% and a maximum relative error of 5.8%, over the entire range of ε/D and R values, respectively. For practical purposes, the complete results for the maximum and the mean relative errors versus the 20 sets of ε/D value, are also indicated in two comparative figures. The examination results for error properties of these approximations gives one an opportunity to practically evaluate the most accurate formula among of all the previous explicit models; and showing in this way its great flexibility for estimating turbulent flow friction factor. Comparative analysis for the mean relative error profile revealed, the classification for the best-fitted six equations examined was in a good agreement with those of the best model selection criterion claimed in the recent literature, for all performed simulations.     

Mechanical design and characterization of a resonant magnetic field microsensor with linear response and high resolution

A resonant magnetic field microsensor based on Microelectromechanical Systems (MEMS) technology including a piezoresistive detection system has been designed, fabricated, and characterized. The mechanical design for the microsensor includes a symmetrical resonant structure integrated into a seesaw rectangular loop (700 μm × 450 μm) of 5 μm thick silicon beams. An analytical model for estimating the first resonant frequency and deflections of the resonant structure by means of Rayleigh and Macaulay's methods is developed. The microsensor exploits the Lorentz force and presents a linear response in the weak magnetic field range (40–2000 μT). It has a resonant frequency of 22.99 kHz, a sensitivity of 1.94 V T^?1, a quality factor of 96.6 at atmospheric pressure, and a resolution close to 43 nT for a frequency difference of 1 Hz. In addition, the microsensor has a compact structure, requires simple signal processing, has low power consumption (16 mW), as well as an uncomplicated fabrication process. This microsensor could be useful in applications such as the automotive sector, the telecommunications industry, in consumer electronic products, and in some medical applications.     

Spin-valve planar Hall sensor for single bead detection

The planar Hall effect (PHE) sensor with a junction size of 3 μm × 3 μm for a single micro-bead detection has been fabricated successfully using a typical spin-valve thin film Ta(5)/NiFe(16)/Cu(1.2)/NiFe(2)/IrMn(15)/Ta(5) nm. The PHE sensor exhibits a sensitivity of about 7.2 μV Oe^?1 in the magnetic field range of ±7 Oe approximately. We have performed an experiment to illustrated the possibility of single micro-bead detection by using a PHE sensor. A single micro-bead of 2.8 μm diameter size is secluded from 0.1% dilute solution of the Dynabeads^® M-280 dropped on the sensor surface and is located on the sensor junction by using a micro magnetic needle. The comparison of the PHE voltage profiles in the field range from 0 to 20 Oe in the absence and presence of a single micro-bead identifies a single Dynabeads^® M-280, the maximal signal change as large as ΔV ～ 1.1 μV can be obtained at the field ～6.6 Oe. The results are well described in terms of the reversal of a basic single domain structure.     

Simultaneous determination of epinephrine and ascorbic acid at the electrochemical sensor of triazole SAM modified gold electrode

The electrochemical sensor of triazole (TA) self-assembled monolayer (SAM) modified gold electrode (TA SAM/Au) was fabricated. The electrochemical behaviors of epinephrine (EP) at TA SAM/Au have been studied. The TA SAM/Au shows an excellent electrocatalytic activity for the oxidation of EP and accelerates electron transfer rate. The diffusion coefficient is 1.135 × 10⁻⁶ cm² s⁻¹. Under the optimum experiment conditions (i.e. 0.1 mol L⁻¹, pH 4.4, sodium borate buffer, accumulation time: 180 s, accumulation potential: 0.6 V, scan rate: 0.1 Vs⁻¹), the cathodic peak current of EP versus its concentration has a good linear relation in the ranges of 1.0 × 10⁻⁷ to 1.0 × 10⁻⁵ mol L⁻¹ and 1.0 × 10⁻⁵ to 6.0 × 10⁻⁴ mol L⁻¹ by square wave adsorptive stripping voltammetry (SWASV), with the correlation coefficient of 0.9985 and 0.9996, respectively. Detection limit is down to 1.0 × 10⁻⁸ mol L⁻¹. The TA SAM/Au can be used for the determination of EP in practical injection. Meantime, the oxidative peak potentials of EP and ascorbic acid (AA) are well separated about 200 ± 10 mV at TA SAM/Au, the oxidation peak current increases approximately linearly with increasing concentration of both EP and AA in the concentration range of 2.0 × 10⁻⁵ to 1.6 × 10⁻⁴ mol L⁻¹. It can be used for simultaneous determination of EP and AA.     

Evaluation of response characteristics of resistive oxygen sensors based on porous cerium oxide thick film using pressure modulation method

In order to reduce the response time of resistive oxygen sensors using porous cerium oxide thick film, it is important to ascertain the factors controlling response. Pressure modulation method (PMM) was used to find the rate-limiting step of sensor response. This useful method measures the amplitude of sensor output (H(f)) for the sine wave modulation of oxygen partial pressure at constant frequency (f). In PMM, “break” response time, which is minimum period in which the sensor responds precisely, can be measured. Three points were examined: (1) simulated calculations of PMM were carried out using a model of porous thick film in which spherical particles are connected in a three-dimensional network; (2) sensor response speed was experimentally measured using PMM; and (3) the diffusion coefficient and surface reaction coefficient were estimated by comparison between experiment and calculation. The plot of log f versus log H(f) in the high f region was found to have a slope of approximately −0.5 for both porous thick film and non-porous thin film, when the rate-limiting step was diffusion. Calculations showed the response time of porous thick film was 1/20 that of non-porous thin film when the grain diameter of the porous thick film was the same as the thickness of non-porous thin film. At 973 K, “break” response time (t_b) of the resistive oxygen sensor was found by experiment to be 109 ms. It was concluded that the response of the resistive oxygen sensor prepared in this study was strongly controlled by diffusion at 923–1023 K, since the experiment revealed that the slope of plot of log f versus log H(f) in the high f region was approximately −0.5. At 923–1023 K, the diffusion coefficient of oxygen vacancy in porous ceria (D_V) was expressed as follows: D_V (m²s⁻¹) = 5.78 × 10⁻⁴ exp(−1.94 eV/kT). At 1023 K, the surface reaction coefficient (K) was found to exceed 10⁻⁴ m/s.     

Software sensors are a real alternative to true sensors

At the Ejby Mølle WWTP in Odense Denmark a software sensor predicts the ammonium and nitrite + nitrate concentration in real-time based on ammonium and redox potential measurements. The predicted ammonium concentration is used to control the length of the nitrification phase in a Biodenipho^® activated sludge unit because the software sensor has a shorter response time and a better up-time than the ammonium meter. The software sensor simplifies meter service and can reduce maintenance costs. The computed nitrite + nitrate concentration is an added benefit of the software sensor. On 4 different days, series of grab samples of the mixed liquor were collected in the aeration tanks. The average difference between the ammonium concentrations in the grab samples and the predicted ammonium concentration was 0.2 mgN L^?1 and the average difference between the predicted and the measured nitrite + nitrate concentration was 0.3 mgN L^?1. The agreement between the predicted and the measured ammonium concentration in the grab samples was better than the agreement between the ammonium meter and the grab samples. This was due to the shorter response time of the software sensor compared with the ammonium meter.     

Humidity-insensitive and low oxygen dependence tungsten oxide gas sensors

Gas sensing characteristics of WO₃ powder and its physical properties under different heat treatment conditions have been investigated. The WO₃ powder was synthesized by wet process from ammonium tungstate parapentahydrate and nitric solution. The precipitated product was then calcined at 300–800 °C for 2–12 h. The physical properties of the products were characterized by using X-ray diffractometer (XRD), scanning electron microscope (SEM), and BET method. It was found that the crystallite size, particle size and surface area of the WO₃ powders were in the range of 30–45 nm, 0.1–3.0 μm and 1.2–3.7 m²/g, respectively. Calcination at higher temperature and longer time led to the increase of particle size by more than 300%, and reduction in specific surface area by more than 60%. However, the crystallite size was found to increase only by ∼30% under identical heat treatment. These results inferred that such heat treatment had more profound effect on crystallite aggregation than on crystallite growth. Gas sensing measurement showed that the largest change of output voltage to both ethyl alcohol and ammonia was obtained from the sensor calcined at 600 °C for 2 h, which had the highest surface area. However, the highest sensitivity which is defined as the ratio of sensor's resistance in air to that in the sample gas, R_air/R_gas, was obtained from the sensor calcined at 600 °C for 6 h due to its highest background resistance in air. Moreover, it was also found that the sensors were less sensitive to the oxygen content in the carrier gas and did not sensitive at all to water vapor.     

Remote sensing of canopy light use efficiency in temperate and boreal forests of North America using MODIS imagery

Light use efficiency (LUE) is an important variable characterizing plant eco-physiological functions and refers to the efficiency at which absorbed solar radiation is converted into photosynthates. The estimation of LUE at regional to global scales would be a significant advantage for global carbon cycle research. Traditional methods for canopy level LUE determination require meteorological inputs which cannot be easily obtained by remote sensing. Here we propose a new algorithm that incorporates the enhanced vegetation index (EVI) and a modified form of land surface temperature (T_m) for the estimation of monthly forest LUE based on Moderate Resolution Imaging Spectroradiometer (MODIS) imagery. Results demonstrate that a model based on EVI × T_m parameterized from ten forest sites can provide reasonable estimates of monthly LUE for temperate and boreal forest ecosystems in North America with an R² of 0.51 (p < 0.001) for the overall dataset. The regression coefficients (a, b) of the LUE–EVI × T_m correlation for these ten sites have been found to be closely correlated with the average EVI (EVI_ave, R² = 0.68, p = 0.003) and the minimum land surface temperature (LST_min, R² = 0.81, p = 0.009), providing a possible approach for model calibration. The calibrated model shows comparably good estimates of LUE for another ten independent forest ecosystems with an overall root mean square error (RMSE) of 0.055 g C per mol photosynthetically active radiation. These results are especially important for the evergreen species due to their limited variability in canopy greenness. The usefulness of this new LUE algorithm is further validated for the estimation of gross primary production (GPP) at these sites with an RMSE of 37.6 g C m^? 2 month^? 1 for all observations, which reflects a 28% improvement over the standard MODIS GPP products. These analyses should be helpful in the further development of ecosystem remote sensing methods and improving our understanding of the responses of various ecosystems to climate change.     

Chromium(III)-selective sensor based on tri-o-thymotide in PVC matrix

Tri-o-thymotide (I) has been used as an electroactive material in PVC (poly(vinyl chloride)) matrix for fabrication of chromium(III)-selective sensor. The membrane containing tri-o-thymotide, sodium tetraphenyl borate (NaTPB), dibutyl phthalate (DBP) and PVC in the optimum ratio 5:1:75:100 (w/w) exhibits a working concentration range of 4.0 × 10⁻⁶ to 1.0 × 10⁻¹ M with a Nernstian slope of 20.0 ± 0.1 mV/decade of activity in the pH range of 2.8–5.1. The detection limit of this sensor is 2.0 × 10⁻⁷ M. The electrode exhibits a fast response time of 15 s, shows good selectivity towards Cr³⁺ over a number of mono-, bi- and trivalent cations and can also be used in partially non-aqueous medium (up to 15%, v/v) also. The assembly has been successfully used as an indicator electrode in the potentiometric titration of chromium(III) against EDTA and also to determine Cr(III) quantitatively in electroplating industry waste samples.     

Flexible vapour sensors using single walled carbon nanotubes

Thin, strongly adhering films of single-walled carbon nanotube bundles (SWNT) on flexible substrates such as poly(ethyleneterephthalate) (PET) were used for vapour sensing (hexane, toluene, acetone, chloroform, acetonitrile, methanol, water, etc.). These sensors are extremely easy to fabricate using the line patterning method. For example, ‘4-probe’ sensor patterns are drawn on a computer and then printed on overhead transparency (PET) sheets. These PET patterns were coated with films of electronically conductive SWNT bundles (1–2 μm thick) by dip-coating in aqueous surfactant-supported dispersions and mounted in glass chambers equipped for vapour sensing. Experiments conducted under saturated vapour conditions in air showed sensor responses that correlated well with solvent polarity [E_T(30) scale]. Similar results were obtained under controlled vapour conditions (no air) at 10,000 ppm. Control experiments using films of carbon black on PET (Aquadag-E^®), also prepared by the line patterning method, showed very little response to vapours under identical experimental conditions. The sensors are very flexible, e.g., they can be bent to diameters as small as 10 mm without significantly compromising sensor function.     

Moisture sensor at glass/polymer interface for monitoring of photovoltaic module encapsulants

A sensor developed for measurement of water concentration inside glass/polymer encapsulation structures with a particular application area in accelerated aging of photovoltaic module encapsulants is described. An approximately 5 μm thick porous TiO₂ film applied to a glass substrate with a conductive coating acts as the moisture-sensitive component. The response is calibrated with weather chamber experiments for sensors open to the environment and with diffusion experiments for sensors laminated under an encapsulant. For the interpretation of diffusion experiment results, a transport model describing the diffusion of water across the polymer/TiO₂ interface is developed. The logarithm of AC resistance shows a linear dependence on water concentration in both open and encapsulated calibration. The first measurable response from an encapsulated 3.5 mm × 8 mm size sensor is obtained when approximately 10 μg of water has entered the film. Implications of the calibration results for sensor usage in accelerated aging tests are discussed.     

Thin film temperature sensor for real-time measurement of electrolyte temperature in a polymer electrolyte fuel cell

This paper describes a technique for the measurement of the electrolyte temperature in an operating polymer electrolyte fuel cell (PEFC). A patterned thin film gold thermistor embedded in a 16 μm thick parylene film was laminated in the Nafion^® electrolyte layer for in situ temperature measurements. Experimental results show that the sensor has a linear response of (3.03 ± 0.09) × 10⁻³ °C⁻¹ in the 20–100 °C temperature range and is robust enough to withstand the electrolyte expansion forces that occur during water uptake. An electrolyte temperature increase of 1.5 °C was observed in real-time when operating the fuel cell at 0.2 V and a current density of 0.19 A/cm². The temperature sensitivity of the present sensor is in an order of magnitude better than the conventional micro-thermocouples that have been reported. Additionally, use of micro-fabrication techniques allows for an accurate placement of the temperature sensor within the fuel cell. Simulation results show that the sensor has no significant effect on the local temperature distribution.