Synthesis of diamond using ultra-nanocrystalline diamonds as seeding layer and their electron field emission properties

A modified nucleation and growth process was adopted so as to improve the electron field emission (EFE) properties of diamonds films. In this process, a thin layer of ultra-nanocrystalline diamonds (UNCD), instead of bias-enhanced-nuclei, were used as nucleation layer for growing diamond films in H₂-plasma. The morphology of the grains changes profoundly due to such a modified CVD process. The geometry of the grains transform from faceted to roundish and the surface of grains changes from clear to spotty. The Raman spectroscopies and SEM micrographs imply that such a modified diamond films consist of UNCD clusters (~ 10–20 nm in size) on top of sp³-bonded diamond grains (~ 100 nm in size). Increasing the total pressure in CVD chamber deteriorated the Raman structure and hence degraded the EFE properties of the films, whereas either increasing the methane content in the H₂-based plasma or prolonged the growth time improved markedly the Raman structure and thereafter enhanced the EFE properties of diamond films. The EFE properties for the modified diamond films can be turned on at E₀ = 11.1 V/μm, achieving EFE current density as large as (J_e) = 0.7 mA/cm² at 25 V/μm applied field.     

Effect of N2 addition in Ar plasma on the development of microstructure of ultra-nanocrystalline diamond films

The effect of the N₂ and H₂ addition in Ar plasma on the characteristics of the UNCD films was systematically investigated. It is found that, while the N₂/Ar plasma results in UNCD films with ultra-small grains (~ 5 nm), incorporation of H₂ into the N₂/Ar plasma increased monotonously the size of the grains. Moreover, the diamond grains synthesized in H₂ free plasma are of equi-axed geometry and those grown in H₂-containing plasma are of plate-like one. The optical emission spectroscopic investigation indicated that the increase in electron temperature due to the addition of H₂ into Ar plasma is the main cause, altering the microstructure of the UNCD films. As the H₂ content increases, the spherical diamond grains first agglomerated to form elongated grains, which coalesce to form dendrite clusters. The proportion of grain boundaries is thus decreased that increased the turn-on field necessary for inducing the electron field emission process.     

Growth of diamond by DC Arcjet Plasma CVD: From nano-sized poly-crystal films to millimeter-sized single crystal grain

A 30 kW-powered DC Arcjet Plasma enhanced chemical-vapor deposition (CVD) system was applied to grow diamonds which included the nano-crystal free-standing film, the nano-/micro-crystal layered free-standing film, the gradient micro-crystal free-standing film and the millimeter-sized grain. The free-standing film quality, such as the roughness, the sp² content, the residual stress and the grain morphology, was studied by an atomic force microscope (AFM), Raman spectra, a scanning electron microscope (SEM) and a high resolution electron microscope (HREM). In large-sized grain deposition, as-grown deposit was obtained about 1 × 1 × 1 mm³ in size under the condition of 10 μm/h of the substrate moving speed without Nitrogen enhancement. Characterized by Raman spectra and Laue back reflection X-ray diffraction, the deposit was proven to be single crystal diamond with small grains coving its surfaces. The growth rate was about 30 μm/h. Optical emission spectrum (OES) was utilized to characterize gas phases in the plasma for diamond deposition. The mean electron temperature (Te) in the plasma was calculated based on the value of the emission intensity ratio of I_Hγ/I_Hβ. Te varied from 0.33 eV to 0.5 eV depending on the concentration of CH₄ in H₂ from 1.0% to 25%. C₂ radical was found to be the dominant carbon source compared with CH radical. The influence of the radical on the morphology of diamond was discussed. It was found that the nano-crystal could be grown when the ratio of the emission intensity, I_C2/I_CH, was larger than 8.     

High-current electron emission of thin diamond films deposited on molybdenum cathodes

The results of investigation of emission characteristics of cold cathodes employing diamond and related films are presented. The films were deposited in a new millimeter wave plasma-assisted CVD reactor using Ar–H₂–CH₄ and Ar–H₂–CH₄–N₂ gas mixtures. To study the emission properties of the high-current cathodes they were subjected to ~ 50 ns high-voltage pulses with amplitudes up to 100 kV. Experiments show that the emission properties strongly depend on methane and nitrogen concentration in gas mixture. The homogeneous emission with current density of 220 A/cm² has been obtained. The prepared cathodes were successfully tested in high-power rf pulse compressor employing electron beam triggering.     

Effects of plasma treatments on the nitrogen incorporated nanocrystalline diamond films

The nitrogen incorporated nanocrystalline diamond (NCD) films were grown on n-silicon (100) substrates by microwave plasma enhanced chemical vapor deposition (MPECVD) using CH₄/Ar/N₂ gas chemistry. The effect of surface passivation on the properties of NCD films was investigated by hydrogen and nitrogen-plasma treatments. The crystallinity of the NCD films reduced due to the damage induced by the plasma treatments. From the crystallographic data, it was observed that the intensity of (111) peak of the diamond lattice reduced after the films were exposed to the nitrogen plasma. From Raman spectra, it was observed that the relative intensity of the features associated with the transpolyacetylene (TPA) states decreased after hydrogen-plasma treatment, while such change was not observed after nitrogen-plasma treatment. The hydrogen-plasma treatment has reduced the sp²/sp³ ratio due to preferential etching of the graphitic carbon, while this ratio remained same in both as-grown and nitrogen-plasma treated films. The electrical contacts of the as-grown films changed from ohmic to near Schottky after the plasma treatment. The electrical conductivity reduced from ~ 84 ohm^– 1 cm^− 1 (as-grown) to ~ 10 ohm^– 1 cm^− 1 after hydrogen-plasma treatment, while the change in the conductivity was insignificant after nitrogen-plasma treatment.     

Substrate temperature effects on the electron field emission properties of nitrogen doped ultra-nanocrystalline diamond

For the purpose of improving the electron field emission properties of ultra-nanocrystalline diamond (UNCD) films, nitrogen species were doped into UNCD films by microwave plasma chemical vapor deposition (MPCVD) process at high substrate temperature ranging from 600° to 830 °C, using 10% N₂ in Ar/CH₄ plasma. Secondary ion mass spectrometer (SIMS) analysis indicates that the specimens contain almost the same amount of nitrogen, regardless of the substrate temperature. But the electrical conductivity increased nearly 2 orders of magnitude, from 1 to 90 cm^− 1 Ω^− 1, when the substrate temperature increased from 600° to 830 °C. The electron field emission properties of the films were also pronouncedly improved, that is, the turn-on field decreased from 20 V/μm to 10 V/μm and the electron field emission current density increased from less than 0.05 mA/cm² to 15 mA/cm². The possible mechanism is presumed to be that the nitrogen incorporated in UNCD films are residing at grain boundary regions, converting sp³-bonded carbons into sp²-bonded ones. The nitrogen ions inject electrons into the grain boundary carbons, increasing the electrical conductivity of the grain boundary regions, which improves the efficiency for electron transport from the substrate to the emission sites, the diamond grains.     

Effect of diamond surface orientation on the thermal boundary conductance between diamond and aluminum

[100] and [111] oriented diamond substrates were treated using Ar:H and Ar:O plasma treatments, and 1:1 HNO₃:H₂SO₄ heated at 200 °C. Subsequent to these treatments, an aluminum layer was either evaporated or sputteredon the substrates. The thermal boundary conductance (TBC) as well as the interfacial acoustical reflection coefficient between this layer and the diamond substrate was then measured using a Time Domain ThermoReflectance (TDTR) experiment. For the Ar:H plasma treated surfaces the [111] oriented faces exhibited conductances 40% lower than the [100] oriented ones with the lowest measured TBC at 32 ± 5 MWm^− 2 K^− 1. The treatments that led to oxygen-terminated diamond surfaces (extiti.e. acid or Ar:O plasma treatments) showed no TBC anisotropy and the highest measured value was 230 ± 25 MWm^− 2 K^− 1 for samples treated with Ar:O plasma with a sputtered Al layer on top. Sputtered layers on oxygen-terminated surfaces showed systematically higher TBC than their evaporated counterparts. The interfacial acoustic reflection coefficient correlated qualitatively with TBC when comparing samples with the same type of surface terminations (O or H) but this correlation failed when comparing H and O terminated interfaces with each other.     

Growth and electron field emission properties of ultrananocrystalline diamond on silicon nanostructures

The electron field emission (EFE) properties of Si nanostructures (SiNS), such as Si nanorods (SiNR) and Si nanowire (SiNW) bundles were investigated. Additionally, ultrananocrystalline diamond (UNCD) growth on SiNS was carried out to improve the EFE properties of SiNS via forming a combined UNCD/SiNS structure. The EFE properties of SiNS were improved after the deposition of UNCD at specific growth conditions. The EFE performance of SiNR (turn-on field, E₀ = 5.3 V/μm and current density, J_e = 0.53 mA/cm² at an applied field of 15 V/μm) was better than SiNW bundles (turn-on field, E₀ = 10.9 V/μm and current density, J_e < 0.01 mA/cm² at an applied field of 15 V/μm). The improved EFE properties with turn-on field, E₀ = 4.7 V/μm, current density, J_e = 1.1 mA/cm² at an applied field of 15 V/μm was achieved for UNCD coated (UNCD grown for 60 min at 1200 W) SiNR. The EFE property of SiNW bundles was improved to a turn-on field, E₀ = 8.0 V/μm, and current density, J_e = 0.12 mA/cm² at an applied field of 15 V/μm (UNCD grown for 30 min at 1200 W).     

Hydrothermal synthesis,crystal structure and properties of a thermally stable dysprosium porphyrin with a three-dimensional porous open framework

A thermally stable dysprosium porphyrin with a three-dimensional (3D) porous open framework, [Dy(H₂TPPS)]_n∙ nH₃O∙2nH₂O (1) (H₂TPPS = tetra(4-sulfonatophenyl)porphyrin), has been synthesized via hydrothermal reactions and structurally analyzed by an X-ray single-crystal diffraction method. The 24-membered macrocyclic ring of H₂TPPS is exactly coplanar and the center is free from metal. The dysprosium ion is coordinated by eight O_sulfonic atoms from eight H₂TPPS moieties, forming a distorted square anti-prism geometry. Complex 1 shows a void space of 210 Å³, occupying 9.06% of the unit-cell volume. The 3D porous open framework of 1 is thermally stable up to 380 °C. Complex 1 exhibits a red fluorescence emission with a quantum yield and lifetime of 2.7% and 136 μs, respectively. CV result reveals one reductive peak at − 0.33 V and one quasi-reversible wave with E_1/2 = − 0.81 V.     

Deposition and characterization of nanocrystalline diamond films on Co-cemented tungsten carbide inserts

Nanocrystalline diamond films were deposited on Co-cemented tungsten carbides using bias-enhanced hot filament CVD system with a mixture of acetone, H₂ and Ar as the reactant gas. The effect of Ar concentration on the grain size of diamond films and diamond orientation was investigated. Nanocrystalline diamond films were characterized with field emission scan electron microscopy (FE-SEM), Atomic force microscopy (AFM), Raman spectroscopy and X-ray diffraction spectroscopy (XRD). Rockwell C indentation tests were conducted to evaluate the adhesion between diamond films and the substrates. The results demonstrated that when the Ar concentration was 90%, the diamond films exhibited rounded fine grains with an average grain size of approximately 60–80 nm. The Raman spectra showed broadened carbon peaks at 1350 cm^− 1 and 1580 cm^− 1 assigned to D and G bands and an intense broad Raman band near 1140 cm^− 1 attributed to trans-polyacetylene, which confirmed the presence of the nanocrystalline diamond phase. The full width at half maximum of the <111> diamond peak (0.8°) was far broader than that of conventional diamond film (0.28°–0.3°). The Ra and RMS surface roughness of the nanocrystalline diamond film were measured to be approximately 202 nm and 280 nm with 4 mm scanning length, respectively. The Ar concentration in the reactant gases played an important role in the control of grain size and surface roughness of the diamond films. Nanocrystalline diamond-coated cemented tungsten carbides with very smooth surface have excellent characteristics, which made them a promising material for the development of high performance cutting tools and wear resistance components.     

The effect of the CH4 level on the morphology,microstructure, phase purity and electrochemical properties of carbon films deposited by microwave-assisted CVD from Ar-rich source gas mixtures

Carbon thin films were deposited on Si substrates by microwave-assisted chemical vapor deposition (CVD) using variable CH₄ levels in an Ar/H₂ (Ar-rich) source gas mixture. The relationship between the CH₄ concentration (0.5 to 3 vol.%) in the source gas and the resulting film morphology, microstructure, phase purity and electrochemical behavior was investigated. The H₂ level was maintained constant at 5% while the Ar level ranged from 92 to 94.5%. The films used in the electrochemical measurements were boron-doped with 2 ppm B₂H₆ while those used in the structural studies were undoped. Boron doping at this level had no detectable effect on the film morphology or microstructure. Relatively smooth ultrananocrystalline diamond (UNCD) thin films, with a nominal grain size of ca. 15 nm, were only formed at a CH₄ concentration of 1%. At the lower CH₄ concentration (0.5%), faceted microcrystalline diamond was the predominant phase formed with a grain size of ca. 0.5 µm. At the higher CH₄ concentration (2%), a diamond-like carbon film was produced with mixture of sp²-bonded carbon and UNCD. Finally, the film grown with 3% CH₄ was essentially nanocrystalline graphite. The characteristic voltammetric features of high quality diamond (low and featureless voltammetric background current, wide potential window, and weak molecular adsorption) were observed for the film grown with 1% CH_4, not the films' grown with higher CH₄ levels. The C₂ dimer level in the source gas was monitored using the Swan band optical emission intensity at 516 nm. The emission intensity and the film growth rate both increased with the CH₄ concentration in the source gas, consistent with the dimer being involved in the film growth. Importantly, C₂ appears to be involved in the growth of the different carbon microstructures including microcrystalline and ultrananocrystalline diamond, amorphous or diamond-like carbon, and nanocrystalline graphite. In summary, the morphology, microstructure, phase purity and electrochemical properties of the carbon films formed varied significantly over a narrow range of CH₄ concentrations in the Ar-rich source gas. The results have important implications for the formation of UNCD from Ar-rich source gas mixtures, and its application in electrochemistry. Characterization data by scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray diffraction (XRD), visible-Raman spectroscopy and electrochemical methods are presented.     

Fabrication and field emission properties of ultra-nanocrystalline diamond lateral emitters

Field emission characteristics of ultra-nanocrystalline diamond (UNCD) have recently caught much attraction due to its importance in technological applications. In this work, we have fabricated lateral-field emitters comprised of UNCD films, which were deposited in CH₄/Ar medium by microwave plasma-enhanced chemical vapor deposition method. The substrates, silicon-on-insulator (SOI) or SiO₂-coated silicon, were pre-treated by mixed-powders-ultrasonication process for forming diamond nuclei to facilitate the synthesis of UNCD films on these substrates. Lateral electron field emitters can thus be fabricated either on silicon-on-insulator (SOI) or silicon substrates. The lateral emitters thus obtained possess large field enhancement factor (β = 1500–1721) and exhibit good electron field emission properties, regardless of the substrate materials used. The electron field emission can be turned on at 5.25–5.50 V/μm, attaining 5500–6000 mA/mm² at 12.5 V/μm (100 V applied voltage).     

Nano- and micro-crystalline diamond growth by MPCVD in extremely poor hydrogen uniform plasmas

It is well established that argon rich plasmas (> 90% Ar) in Ar/CH₄/H₂ gas mixtures lead to (ultra)nanodiamond nucleation and growth by microwave plasma chemical vapour deposition (MPCVD). Nonetheless, in the present work, both microcrystalline and nanocrystalline diamond deposits developed under typical conditions for ultrananocrystalline (UNCD) growth by MPCVD. Silicon substrates were pretreated by abrasion using two different diamond powder types, one micrometric (< 0.5 μm) and the other nanometric (∼ 4 nm), the latter obtained by detonation methods. Samples characterization was performed by SEM (morphology), AFM (roughness and morphology) and micro-Raman (structure).For all samples, Raman analysis revealed good crystalline diamond quality with an evident ∼ 1332 cm^− 1 peak. The Raman feature observed at ∼ 1210 cm^− 1 is reported to correlate with two other common bands at ∼ 1140 cm^− 1 and ∼ 1490 cm^− 1 characteristic of nano- and ultra-nanocrystalline diamond.A new growth process is proposed to explain the observed morphology evolution from nano- to microcrystalline diamond. Based on this, the microcrystalline morphology is in fact a crystallographically aligned construction of nanoparticles.     

Nucleation and growth surface conductivity of H-terminated diamond films prepared by DC arc jet CVD

High-quality polycrystalline diamond film has been extremely attractive to many researchers, since the maximum transition frequency (f_T) and the maximum frequency of oscillation (f_max) of polycrystalline diamond electronic devices are comparable to those of single crystalline diamond devices. Besides large deposition area, DC arc jet CVD diamond films with high deposition rate and high quality are one choice for electronic device industrialization. Four inch free-standing diamond films were obtained by DC arc jet CVD using gas recycling mode with deposition rate of 14 μm/h. After treatment in hydrogen plasma under the same conditions for both the nucleation and growth sides, the conductivity difference between them was analyzed and clarified by characterizing the grain size, surface profile, crystalline quality and impurity content. The roughness of growth surface with the grain size about 400 nm increased from 0.869 nm to 8.406 nm after hydrogen plasma etching. As for the nucleation surface, the grain size was about 100 nm and the roughness increased from 0.31 nm to 3.739 nm. The XPS results showed that H-termination had been formed and energy band bent upwards. The nucleation and growth surfaces displayed the same magnitude of square resistance (R_s). The mobility and the sheet carrier concentration of the nucleation surface were 0.898 cm/V s and 10¹³/cm² order of magnitude, respectively; while for growth surface, they were 20.2 cm/V s and 9.97 × 10¹¹/cm², respectively. The small grain size and much non-diamond carbon at grain boundary resulted in lower carrier mobility on the nucleation surface. The high concentration of impurity nitrogen may explain the low sheet carrier concentration on the growth surface. The maximum drain current density and the maximum transconductance (g_m) for MESFET with gate length L_G of 2 μm on H-terminated diamond growth surface was 22.5 mA/mm and 4 mS/mm, respectively. The device performance can be further improved by using diamond films with larger grains and optimizing device fabrication techniques.     

Nanocrystalline diamond on SiO2 fiber: A new class of hybrid material

We report a template technique for the fabrication of high density nanocrystalline diamond (NCD)-coated silica (a-SiO₂) nanofibers with diameters of 1–5 μm. This method includes the synthesis of templates (a-SiO₂ nanofibers) by conventional Vapor–Liquid–Solid method and the conformal coating of the nanofibers with nanodiamond by Microwave Plasma Chemical Vapor Deposition technique in hydrogen-deficient conditions. A detailed micro-structural analysis was performed to probe the interaction of the NCD grains with a-SiO₂ nanofibers. The specimen for Transmission Electron Microscopy was prepared using Focused Ion Beam lift-out method. Room temperature micro-Raman was performed to study the crystalline quality of the NCD-coated silica nanofibers. Field electron emission of as-synthesized NCD-coated silica nanofibers was observed with a threshold field of ~ 3 V/µm.     

High-temperature characteristics of Ag and Ni/diamond Schottky diodes

The high-temperature characteristics of diamond Schottky diodes fabricated using Ag or Ni on in-situ boron-doped diamond were examined. Up to 600 °C, Ag Schottky diodes exhibited a high rectification ratio of the order of 10⁴. Even at ~ 750 °C, their rectification ratio was about 10, indicating that diamond field effect transistors with Ag Schottky diodes can operate at this temperature. In contrast, Ni Schottky diodes did not show clear rectification above 600 °C. An analysis of the I–V curves indicated that the Ag Schottky diodes have a higher rectification ratio than the Ni Schottky diodes at high temperatures due to their higher barrier heights (ϕ_B = ~ 2.0 and ~ 0.7 eV for Ag and Ni, respectively).     

From micro to nanocrystalline transition in the diamond formation on porous pure titanium

A novel composite material of nanocrystalline (NCD) and/or microcrystalline (MCD) diamond films grown on porous titanium (Ti) substrate was obtained by hot filament chemical vapor deposition technique. Diamond films were grown using 1.5 vol.% CH₄ in a balanced mixture of Ar/H₂. The grain size control was obtained by varying the argon concentration from 0 up to 90 vol.% at substrate temperature of 870 K. Porous Ti substrates were obtained by powder metallurgy and presented an inter-connected open porosity. Scanning electron microscopy images of diamond/Ti exposed the substrate covered by a continuous textured coating which changed from MCD to NCD morphology; depending on the amount of Ar concentration in the feed gas. Micro-Raman spectra showed the characteristic t-polyacethylene peaks around 1150 cm^− 1 and 1470 cm^− 1, associated to NCD formation for samples grown with Ar concentration higher than 40 vol.%. X-ray diffraction patterns identified the diamond and TiC peaks, where the crystallinity of (111) TiC phase decreased as the Ar amount increased. This behavior was associated to diamond (220) peak increase for films grown with Ar concentration higher than 70 vol.%. Diamond crystallite size was also evaluated from Sherrer's formula in the range of 11 up to 20 nm.     

Quality of diamond wafers grown by microwave plasma CVD: effects of gas flow rate

We found a strong impact of gas flow rate on diamond growth process in a 5 kW microwave plasma chemical vapour deposition reactor operated on CH₄-H₂ gas mixtures. Diamond films of 0.1–1.2 mm thickness and 2.25 in. in diameter were produced at H₂ flow rates varied systematically from 60 sccm to 1000 sccm at 2.5% CH₄. The highest growth rate, 5 μm h⁻¹, was observed at intermediate F values (≈300 sccm). Carbon conversion coefficient (the number of C atoms going from gas to diamond) increases monotonically up to 57% with flow rate decrease, however, this is accompanied with a degradation of diamond quality revealed from Raman spectra, thermal properties and surface morphology. High flow rates were necessary to produce uniform films with thermal conductivity >18 W cm⁻¹ K⁻¹. Diamond disks with very low optical absorption (loss tangent tgδ<10⁻⁵) in millimetre wave range (170 GHz) have been grown at optimized deposition conditions for use as windows for high-power gyrotrons.     

Plasma post-treatment process for enhancing electron field emission properties of ultrananocrystalline diamond films

This paper demonstrated the plasma post-treatment (ppt) process for modifying the granular structure of ultrananocrystalline diamond (UNCD) films so as to improve their electron field emission (EFE) properties. The ppt-processed UNCD films exhibited improved EFE properties as turn-on field of E₀ = 7.0 V/μm (J_e = 0.8 mA/cm² at 17.8 V/μm). TEM investigation revealed that the prime factor, which enhanced the EFE properties of the UCND films, is the induction of nano-graphitic clusters due to the ppt-process. However, for achieving such a goal, the granular structure of the primary UNCD layer has to be relatively open. That is, the size of grains should be sufficiently small and the grain boundaries should be of considerable thickness, containing abundant hydro-carbon species. Such a simple and robust process for synthesizing conductive UNCD films is especially useful for practical applications.     

Electron field emission from filtered arc deposited diamond-like carbon films using Au and Ti layers

In this work, tetrahedral diamond-like carbon (DLC) films are deposited on Si, Ti/Si and Au/Si substrates by a new plasma deposition technique — filtered arc deposition (FAD). Their electron field emission characteristics and fluorescent displays of the films are tested using a diode structure. It is shown that the substrate can markedly influence the emission behavior of DLC films. An emission current of 0.1 μA is detected at electric field E_DLC/Si=5.6 V/μm, E_DLC/Au/Si=14.3 V/μm, and E_DLC/Ti/Si=5.2 V/μm, respectively. At 14.3 V/μm, an emission current density J_DLC/Si=15.2 μA/cm², J_DLC/Au/Si=0.4 μA/cm², and J_DLC/Ti/Si=175 μA/cm² is achieved, respectively. It is believed that a thin TiC transition layer exists in the interface between the DLC film and Ti/Si substrate.