超精密外差利特罗式光栅干涉仪位移测量系统

开展了扫描干涉光刻机工作台超精密位移测量的实验研究,以提高扫描干涉光刻机的环境鲁棒性。针对扫描干涉光刻机工作台位移测量精度,提出了新型高环境鲁棒性外差利特罗式光栅干涉仪测量系统。介绍了系统测量原理,设计了测量系统,提出了基于Elden公式的系统死程误差建模方法。设计制造了尺寸仅为48mm×48mm×18mm的光栅干涉仪。基于误差模型计算了死程误差,计算结果表明:对于1.52mm死程的光栅干涉仪,宽松的环境波动指标(温度波动为0.01℃、压力梯度为±7.5Pa、相对湿度波动为1.5%、CO2含量波动为±50×10-6)仅引起±0.05nm的死程误差。最后,设计了基于商用双频激光平面镜干涉仪的测量比对系统,开展了光栅干涉仪原理验证实验和测并量稳定性实验。原理验证实验表明:光栅干涉仪原理正确且系统分辨率达0.41nm。测量稳定性实验表明:常规实验室环境下,环境波动引起的死程误差为7.59nm(3σ)@0.9Hz1~10Hz,优于同等环境条件下平面镜干涉仪的31.11nm(3σ)@0.9Hz1~10Hz。实验结果显示系统具有很高的环境鲁棒性。     

声光式外差干涉仪的光路设计与分析

制造业的发展迫切需要对高速加工过程中的物体进行测量和定位,利用声光调制法实现外差干涉能产生较高的频差可以实现高速测量.文中对声光式外差干涉仪的光路设计进行了分析,提出了空间分离一级衍射光和零级衍射光的一种方案,并且对光拍频的接收,光路的调整进行了分析,实验结果证明该实验系统可以用于外差干涉测量.     

High resolution heterodyne interferometer based on time-to-digital converter

A new heterodyne interferometer is presented, which adopts time-to-digital converter (TDC) measuring the time intervals of zero crossings of heterodyne signal for phase demodulation. Thanks to the 0.1 ns time resolution of TDC and linear phase demodulation, it can achieve high resolution and avoids nonlinear measuring distortion in other indirect high precise phase demodulation methods, such as pulse width modulation (PWM) and in-phase∕quadrature (I∕Q) method.     

基于保偏镜组的外差干涉测量几何误差分析

角锥棱镜由于本身缺陷会导致失偏效应。在平面镜外差干涉仪中,使用一种保偏反射镜组替代角锥棱镜,以减小外差干涉仪的非线性误差。根据这个平面镜外差干涉仪的基本光路图,基于偏振分光棱镜和角锥棱镜的基本光学特性,分析了平面镜外差干涉仪中3个偏振分光棱镜偏摆角、仰俯角和滚动角,保偏反射镜组中2个偏振分光棱镜之间的间距和角度,以及角锥棱镜的偏摆角和仰俯角等误差对干涉仪的影响。推导出外差干涉仪中各个光学元件的最大安装误差,并规定好其加工精度,确保外差干涉仪性能。     

Improvement and validity of shock measurements using heterodyne laser interferometer

The improvement and validity of shock measurements using only the laser head (heterodyne laser interferometer) of a commercial laser Doppler vibrometer was investigated by comparing acceleration waveforms measured by a homodyne laser interferometer with those measured by a heterodyne laser interferometer. The acceleration waveforms were generated from the displacement waveforms obtained with a reference quadrature homodyne laser interferometer by applying a numeric differentiation process twice. The differences between the two acceleration waveforms were found to be small with the measurement uncertainty in case of high acceleration level. In a further investigation, the accuracy of the shock measurements taken by the homodyne and heterodyne laser interferometers were compared in computational simulation. The results indicated that the accuracy of the heterodyne laser interferometer was superior to that of the homodyne laser interferometer.     

Validation of a single fibre-fed heterodyne laser interferometer with nanometre uncertainty

In this paper the validation of a fiber-fed heterodyne laser interferometer with nanometre uncertainty is presented. The achievable displacement measurement uncertainty is investigated for different polarisation maintaining fibres used in these interferometers. Measurement results are shown for both a range of m as well as a range of 300 mm. It is shown that a (selected) PM-fibre with an extinction ratio of 1:1650 and the use of an external reference allows realising a fibre-fed laser interferometer able to measure displacements with the same uncertainty as a laser interferometer system without fibre. Tests were performed with fibres ranging in length up to 50 m.     

An unmodulated bi-directional fringe-counting interferometer system for measuring displacement

A bi-directional fringe-counting Michelson interferometer is described that is used in conjunction with a frequency-stabilised laser for precise length measurement. The two counting signals, in phase quadrature and sinusoidally related to path difference, are produced by a novel system that does not employ any form of modulation. Under optimum conditions, the instrument is capable of measuring displacement to a precision of 0.1 μm and the correct fringe-count is maintained even with a signal attenuation corresponding to a 99% loss of intensity in one arm of the interferometer. This performance can be further improved by the application of an automatic gain control system. The interferometer is simple in concept, cheap to produce and easy to set up and align.     

Film thickness measurement by improved Michelson's interferometer

为了测量未知折射率或不透明薄膜的厚度,借助力传感器对传统迈克尔逊干涉仪加以改进,并运用等倾干涉的原理结合抵消法设计了测量装置.薄膜被等厚的空气层所代替,通过间接测量,避开了机械螺旋空程差造成的影响,使用力传感器有效减小了挤压形变引起的误差.该装置测量范围为0.3 μm～1.5 mm,分辨力为0.3 μm.实测数据表明,该装置具有良好的重复性和准确性.     

An interferometer for measuring surveyor's pillars in the open air

Electronic distance meters are performance tested on a 650 m long baseline at the National Measurement Laboratory, Sydney, Australia. The distances between the pillars which make up the baseline must be measured in a way which is traceable to the international definition of the metre. A laser interferometer has been developed to measure one of the intervals in a very accurate manner. It has some novel features to allow the use of a simple carriage-way to transport the reflector and has demonstrated a measurement accuracy of 0.2 ppm over a distance of 80 m in the open air.     

Measurement of large internal diameters with a compact apparatus based on dual-wavelength heterodyne interferometer

This paper presents a new method for measuring large internal diameters of 3∼20 m with submillimeter resolution. The method is based on a novel dual-wavelength heterodyne interferometer for absolute distance measurement and a new positioning method for aligning the laser beams with the diameter of the bore to be measured. The compact apparatus and convenience of operation in situ are the distinguishing features of this method. Preliminary experimental results of the prototype of the apparatus proved the feasibility of this method.     

磁光调制法测量玻璃内应力

提出了一种基于磁光调制法测量玻璃内应力方向和大小的方法,并建立了基于磁光调制的内应力测量系统。首先,采用光线追迹的方法,根据偏振光的琼斯矩阵描述方式推导了系统的测量模型;采用磁光调制器,对信号光束进行正弦交变的磁光调制,将直接测量光强信号改为测量频率信号,提高了测量准确度;采用磁旋光器,消除了人为操作引起的误差,并通过控制旋光器外加线圈驱动电流的大小,改变调制信号光偏振方向的旋转角度;最后,对待测样品进行了多次旋转测量。测量结果显示,本方法对玻璃内应力方向的测量准确度为5″,对应力双折射的测量准确度为0.3nm/cm。得到的结果验证了该方法的有效性和稳定性,显示系统具有稳定性高、准确度高、容易实现工程化等特点。     

Two color multichannel heterodyne interferometer set up for high spatial resolution electron density profile measurements in TJ-II

A high spatial resolution two color [CO(2), λ=10.6?μm/Nd:YAG (Nd:YAG denotes neodymium-doped yttrium aluminum garnet), and λ=1.064?μm] expanded-beam multichannel heterodyne interferometer has been installed on the TJ-II stellarator. Careful design of the optical system has allowed complete control on the evolution of both Gaussian beams along the interferometer, as well as the evaluation and optimization of the spatial resolution to be expected in the measurements. Five CO(2) (measurement) channels and three Nd:YAG (vibration compensation) channels have been used to illuminate the plasma with a probe beam of 100 mm size. An optimum interpolation method has been applied to recover both interferometric phasefronts prior to mechanical vibration subtraction. The first results of the installed diagnostic are presented in this paper.     

Influence of glass substrate thickness in laser scribing of glass

The thickness of the glass substrate used in liquid crystal displays continues to be decreased from its original thickness of 1.1 mm for the purpose reducing size and weight. The aim of this study was to clarify the influence of the glass substrate thickness during laser scribing with crack propagation caused by laser heating followed by quick quenching. The laser scribe conditions for soda-lime glass substrates with thickness equal to or less than 1.1 mm were obtained in laser irradiation experiments. Two-dimensional thermal elasticity analysis was conducted with a finite element method based on the scribable conditions obtained in the experiment. The laser scribable conditions can then be estimated by the upper limit of the maximum surface temperature, T_max, and the lower limit of the maximum tensile stress, σ_tmax, in the cooling area, regardless of the glass substrate thickness. There is a substrate thickness with which the maximum tensile stress σ_tmax becomes the largest under each scribe condition. The substrate thickness with which σ_tmax becomes the largest is obtained at a faster scribe velocity for thinner glass substrate and at slower scribe velocity for thicker glass substrate. Owing to these relations, the crack depth also has almost the same tendency as σ_tmax.     

A facility for measuring the thickness of thin metal films

A facility is described for measuring the thickness of a thin metal film. A measurement method is proposed that is based on the dependence of the phase velocity of harmonic antisymmetric Lamb waves that propagate along the film on the film thickness. A continuous method for excitation of acoustic waves has been applied to velocity measurements. It makes it possible to eliminate the effect of dispersion of the Lamb-wave velocity on the measurement accuracy.     

用空间载频法测量玻璃平板的厚度均匀性

设计了一种基于迈克耳逊干涉光路的相位测量系统,将单臂作为检测端完成了对玻璃平板厚度均匀性的直接测量和分析。该系统由CCD采集干涉图样,利用傅里叶变换条纹分析术和相位解包裹技术提取干涉图中所包含的待测相位信息;对于傅里叶变换法中频谱旁瓣中心无法准确定位的问题,采用三角变换法去载频,从而不需要准确地得知频谱旁瓣的中心位置就可以计算出相位结果,消除了人为估算和垂轴方向上的微小载频分量给测量结果带来的误差。实验测量了多块玻璃平板的厚度均匀性。测量结果显示：使用像元大小为4.65 μm×4.65 μm的CCD相机,测量玻璃平板两表面在长度方向和宽度方向上的厚度均匀性的理论精度分别达到0.93%和0.92%,表明本系统基本满足玻璃平板厚度均匀性测量的要求,且对干涉图频谱旁瓣的定位精度和载频的方向精度要求较低。     

外差干涉仪光路调节方法及对拍频的理解

外差激光干涉仪由于测量精度高,环境适应能力强和实时动态高速测量等特点而广泛应用于机床误差的实时监测中。外差激光干涉仪中,使用平面镜作为转向装置时,接收器上的两束光有可能只是相交而不是重合,这给光路的调节增加了很大的难度。针对这一问题,提出一种辅助光路调节方法,先将光路切换到单频干涉仪,调好光路,再切换到外差干涉仪,利用单频干涉条纹的直观性能可看出外差干涉仪光路调节的好坏。理论分析和实验结果表明,提出的调节方案具有可行性,效果良好,同时通过从单频切换到双频能更深入地理解拍频。     

Determination of the energy of a relativistic electron beam by measuring the thickness of the colored layer in glass

A method for determining the energy of relativistic electrons, which was used in the investigation of electromagnetic fields in plasma and dielectric structures, is described. The electron energy was determined by the extrapolated track of electrons in glass, which was estimated by the thickness of the colored (darkened) layer formed by electrons. The density distribution of the colored layer along the direction of electron motion makes it possible to record the width of the beam energy spectrum and the beam position relative to the axis of the transit channel. A stack of glass plates on which the beam is incident can be installed in the transit channel of the dielectric structure or in plasma. Each plate in the stack is placed in parallel to the beam axis. After irradiation of the plates with relativistic electrons, the colored layer depth and the density distribution are determined. Examples of determining the electron energy of a pulsed relativistic electron beam are presented. The method is insensitive to electromagnetic noise, is inexpensive, simple, and easy to use.     

Modulated heterodyne light scattering set-up for measuring long relaxation time at small and wide angle

We present a simple, compact, and versatile experimental setup working in the heterodyne detection mode with modulation of the reference beam. The system is implemented with a collection optics based on a unimodal optical fiber coupler. This choice allows the heterodyne to be used in a wide range of scattering angles, even for very small ones, without losing the optical beating. The apparatus can be successfully used to study translational diffusive dynamics of dispersed particles at scattering angles smaller than 5° and it is suitable for exploring slow relaxation processes in sub-Hertz frequency domain, for example, in glass-forming systems. It is also possible to measure the electrophoretic mobility by applying an electric field into a charged particles solution.