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1.
本文介绍了一种用于在线检测超精细表面的亚纳米分辨率激光轮廓仪,该轮廓仪基于差动干涉原理,其测量和参考光束同轴,并运用了可消除回光影响的双折射晶体分光光路,因此具有杰出的抗振动干扰能力和低噪声性能,当振动干扰达300nm时,其仪器噪声仍小于1nm。作在线检测时,可摆放于金刚石车床的刀架上测量超精密加工表面微观形貌,其垂直分辨率优于0.2nm,横向分辨率优于0.5μn。  相似文献   

2.
非接触型光外差轮廓仪   总被引:1,自引:0,他引:1  
尤政  李柱 《计量学报》1993,14(3):177-182
本文介绍一种纳米级非接触型高精度光外差轮廓仪,它是基于普通光路的光外差干涉仪。工件表面被两束有微小频差的激光束所照射,其中一束经聚焦后用作测量光探针来扫描工件表面,另一束则用作参考光束。两束光经表面反射后产生干涉。测量信号和参考信号的相位差与表面的微不平值成正比。仪器的横向分辨率为2μm,高度分辨率为1 nm,它不需要对试样作大范围的调整,且可用试样自身作参考面。信号经光电转换后由微型计算机进行处理,它能快速完成测量、计算、显示及打印出各种参数和曲线。  相似文献   

3.
超光滑表面轮廓的绝对测量   总被引:2,自引:0,他引:2  
高宏  薛实福 《计量学报》1995,16(2):104-108
本文提出了一种测量超光滑表面轮廓的绝对测量方法。采用微分干涉显微镜直接测量表面轮廓的差分,从而无需使用标准参考反射镜,并能有效在抑制机械振动等环境干扰对测量结果的影响。在不采取隔振和恒温等环境控制措施的一般实验室场合下,就可达到优于0.1nm的垂直分辨率和0.15nm的表面轮廓重复测量精度。  相似文献   

4.
提出一种集共路干涉与相关处理为一体的非接触表面轮廓仪。这种新的结构体系克服了同类仪器中环境干扰、导轨误差及光源噪声影响,适合于高精度表面轮廓测试。仪器测量精度优于4nm。  相似文献   

5.
小型微/纳米级三坐标测量机的研制   总被引:11,自引:1,他引:10  
介绍一套低成本小型三维坐标测量机的研制过程,作为微/纳米级超精密测量设备,整体机台结构采用花岗岩材料;X/Y轴的移动平台利用压电材料摩擦驱动与挠性变形原理,长短两行程可达25mm范围及5nm的微位移,藉自行研发的衍射干涉激光尺,位置回馈测量系统可具有0.025nm的分辨率;测量探头在一般DVD光读取头的自动聚焦原理基础上改装,最佳分辨率可达2.5nm,该雏形机适于测量微机电组件、微型器件及膜厚等。  相似文献   

6.
本文提出了一种以杠杆触针机构作为微位移传感器,将扫描白光干涉法运用于接触式表面形貌测量的轮廓仪.该仪器的理论分辩力可达纳米级,与垂直扫描测量工作台相结合,测量范围可达5mm.文中重点论述了该轮廓仪测量系统的构成,测量原理,干涉信号数据处理.  相似文献   

7.
探讨了白光干涉法测量波纹度指标的过程,介绍了波纹度的标准及影响波纹度测量结果的主要因素,阐述了白光干涉三维轮廓仪测量波纹度指标的具体方法.白光干涉测量法是一种非接触式测量方法,拓宽了分析方法.结果表明,该方法不仅可以得到材料表面的波纹度,而且可以得到具体的三维轮廓图像.  相似文献   

8.
正在半导体、超精密加工及微纳材料等领域,器件的表面质量直接关系着后期的产品质量和研究成果,中图仪器Super View W1系列光学3D表面轮廓仪,是一款分辨率达到亚纳米级别的光学检测仪器,助您轻松实现2D/3D表面粗糙度、轮廓测量,超高精度,"纳"么简单。  相似文献   

9.
计量型原子力显微镜   总被引:19,自引:5,他引:19  
本文报导国际上研制的第一台在纳米测量中,在中等测量范围内,具有微型光纤传导激光干涉三维测量系统、可自校准和进行绝对测量的计量型原子力显微镜。它的诞生,可使目前用于纳米技术研究的扫描隧道显微镜定量化,并将其所测量的纳米量值直接与米定义相衔接。使人们更加准确地了解纳米范围内的各种物理现象,并对它们进行更精确的分析。文章对计量型原子力显微镜进行了理论分析,提出了对各种测量误差的抑制及其补偿方法,并进行了大量的实验,得到良好的结果。目前,该计量型原子力显微镜在其测量范围内,任意两点间距离的测量不确定度为U95=5nm+2×10-4l;在z-轴上的测量不确定度为U95=(1.1~1.2nm)+2×10-4h。  相似文献   

10.
扫描探针显微镜是近十几年来在表面特征、表面形貌观测方面最重大的进展之一,是纳米测量学的基本工具。叙述了扫描探针显微镜的工作原理、检测模式及在观察检测纳米级的粗糙度、微小尺寸、表面形貌方面的特点和方法,比较了原子力显微镜、常规的表面轮廓仪、干涉显微镜、扫描电子显微镜在表面特性、表面形貌观测方面的性能,着重介绍了扫描探针显微镜在粗糙度、纳米尺寸、表面形貌观测方面的应用和存在的问题。  相似文献   

11.
In this paper, we present a new method for inserting several triangulated surfaces into an existing tetrahedral mesh generated by the meccano method. The result is a conformal mesh where each inserted surface is approximated by a set of faces of the final tetrahedral mesh. First, the tetrahedral mesh is refined around the inserted surfaces to capture their geometric features. Second, each immersed surface is approximated by a set of faces from the tetrahedral mesh. Third, following a novel approach, the nodes of the approximated surfaces are mapped to the corresponding immersed surface. Fourth, we untangle and smooth the mesh by optimizing a regularized shape distortion measure for tetrahedral elements in which we move all the nodes of the mesh, restricting the movement of the edge and surface nodes along the corresponding entity they belong to. The refining process allows approximating the immersed surface for any initial meccano tetrahedral mesh. Moreover, the proposed projection method avoids computational expensive geometric projections. Finally, the applied simultaneous untangling and smoothing process delivers a high‐quality mesh and ensures that the immersed surfaces are interpolated. Several examples are presented to assess the properties of the proposed method.  相似文献   

12.
13.
Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.……  相似文献   

14.
A flow calorimeter for enthalpy increment measurements on condensed gases is presented. A better knowledge of the properties of the liquefied natural gas is needed, and therefore a liquid loop has been designed for our flow calorimeter. The fluid loop in the calorimeter is designed in order to avoid the two-phase region, since two phases would give compositional disturbances in the measurements. The avoidance of the two-phase region is made possible by increasing the pressure of the test fluid after the measurement section, then heating the fluid at super-critical pressure past the critical point. Finally, the fluid is throttled to the low-pressure gas state at the inlet condition of the compressor that circulates the fluid. To perform the pressure increase, a new cryogenic pump has been designed. To evaluate the new equipment, measurements were taken on liquid ethane over the temperature range 146–256 K at pressure between 0.9 and 5.1 MPa.  相似文献   

15.
On November 30, 2007, the China Association for Standardization (CAS) held a press conference at Beijing Diaoyutai State Guest House. Leaders from the China Household Electric Appliance Research Institute, the China Household Electric Appliance Association, and the China Consumers' Association attended and made speeches.……  相似文献   

16.
We associate a variety of innovations with the term "Industry 4.0". The pioneer of many 4.0 modifications forms the basisfor the trend towards the integrated di...  相似文献   

17.
Zusammenfassung Bei der Gestaltung von Ernteprozessen — beispielsweise des Prozesses Mähdrusch, Körnertransport und -abnahme — als transportverbundene Fließarbeitsverfahren mit mindestens zwei verschiedenen Arbeitsmitteln gibt es einen großen Optimierungsspielraum. Solche Prozesse sind mehrstufige Bedienungsprozesse mit gemischter Anordnung der Bedienungseinrichtungen. Außerdem besitzen sie stark ausgeprägte räumliche Aspekte. Es wird vor allem gezeigt, welche Merkmale solcher Prozesse in Simulationsmodellen abgebildet sein müssen, welche Zielgrößen in Abhängigkeit von welchen Einflußgrößen unter Berücksichtigung welcher Prozeßbedingungen ermittelt werden sollten und wie der Bewertungsprozeß zur Ermittlung der gewünschten Informationen gestaltet werden muß.  相似文献   

18.
In the present study a high‐boron high speed steel (HSS) roll material was designed. Many expensive alloy elements have been substituted by cheap boron alloy, and high‐boron high speed steel roll has been manufactured by centrifugal casting method. The microstructures, mechanical properties and wear resistance of centrifugal casting high‐boron high speed steel roll have been investigated by optical microscopy (OM), scanning electron microscopy (SEM), and X‐ray diffraction (XRD) analysis, hardness test, impact test and wear test. The results indicated that the solidification microstructures of high‐boron high speed steel roll consisted of M2(B,C), (W,Mo)2(B,C), M3(B,C), M23(B,C)6 type borocarbides and martensite, a small amount of retained austenite. Borocarbides were continuously distributed over the grain boundary. After quenching from 1050 °C, local broken network appeared in partial borocarbides, and fine secondary borocarbide precipitated from the matrix. After tempering from 525 °C, the amount of precipitated borocarbide increased significantly. After heat treatment, the hardness of high‐boron high speed steel roll excelled 60 HRC, and its impact toughness excelled 8.0 J/cm2. The single groove steel rolling amount of high‐boron high speed steel rolls increases by 500% than that of bainite cast iron roll, when the rolls are used in K1 mill housing of bar mill.  相似文献   

19.
ABSTRACT

The production of ferrous metal increased during the Roman Late Republican period, Principate and Empire. The direct bloomery process was used to extract the metal from its ores using slag-tapping and slag-pit furnaces. The fuel was charcoal and an air blast was introduced by bellows-operated tuyères. Iron formed as a bloom, often as a spongy mass of metal, which contained impurities from the smelting process, including unreacted ore, fuel, slag and fragments from the furnace walls, while the metal was often inhomogeneous with varied carbon contents. Blooms were either smithed directly into bars or ingots or they were broken up, which also allowed the removal of gross impurities and a selection of pieces with similar properties to be made. These could then be forge-welded together and formed into characteristically shaped ingots. Making steel in the furnace seems to have been achieved: it depended on the ore and the furnace and conditions within it. Surface carburization was also carried out. Iron and steel were used extensively in construction and for tools and weapons. Fire welding was often used to add pieces of steel to make the edges of tools and weapons, which could be heat-treated by quenching to harden them.  相似文献   

20.
The definition of the thixotropy is a decrease in viscosity with time in shear and a subsequent recovery of viscosity after the shear deformation is removed.We ...  相似文献   

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