涡街提频振荡水柱驱动压电发电理论分析

海洋波浪能频率低(0.3～1 Hz),海浪进入振荡水柱气室压缩空气形成高速气流。在高速气流通道内放置绕流圆柱钝体,采用卡门涡街效应提高波浪能振荡水柱采集气室气压激振频率,实现高频驱动压电发电,提高海洋能量转换效率。推导波浪进入气室形成振荡的水气动力转换理论,计算了气室初级压强和流速。分析了低频高压气流经钝体形成卡门涡街高频涡流激振提频过程,计算出气压作用于钹型压电发电结构输出的电量。研究气体流速、钝体等系统参数与输出能量的关系。计算结果表明,周期为0.65～1.1 s的海浪进入气室经提频作用于钹型压电发电结构,稳定输出电能可达70～80 mW,为新型波浪能采集技术提供了理论基础。     

双晶片压电材料微型驱动系统研究

在微型机器人应用中,双晶片压电材料作为执行器将电势能转化为机械变形。通常,此类执行器使用庞大而笨重的电源进行激励,因此限制了其应用范围。该文采用级联型抽头变压器(CTI)升压级与高电压驱动级进行级联,设计并研制了具有高能效、高增益双晶片压电材料微型驱动系统。该微型驱动系统能量转换效率峰值为68.5%,升压增益为162倍,且具备输出频率为4Hz,输出电压为600V的驱动能力。实验表明,该微型驱动系统可驱动双晶片压电材料,使其能在微型机器人领域中得到广泛应用。     

压电微泵驱动信号及流量影响因素分析

压电微泵的泵出流量由微泵结构、压电振子特性及驱动系统驱动信号的形式决定。在机械结构及材料特性确定的条件下,压电振子的驱动信号决定着微泵输出微流量的可靠性和稳定性。在分析压电微泵驱动基理的基础上,通过Ansys对驱动压电振子有效振动的一、二阶频率进行有限元模拟分析,确定了驱动信号电压幅值、频率对微泵流量的影响。以此为基础搭建压电微泵流量测试实验平台,在相同电压和频率条件下,研究了3种不同脉冲信号（正弦波、三角波、矩形波）对输出流量的影响。通过实验对理论模型进行修正,得到了压电微泵输出流量简化模型。实验验证了所得模型在正弦波、三角波、矩形波3种不同波形驱动下最大误差不超过4%,控制范围内可靠性在99.0%以上。综合比较可知,方波脉冲信号为压电微泵最佳驱动信号。     

压电式空气补气阀技术研究及应用

介绍了一种基于压电双晶片的空气补气阀(ACV)。该压电阀安装于摩托车化油器怠速补气通道,通过现场传感器信号的采集,根据控制策略,利用压电阀的流量特性,实施脉冲宽度调制(PWM)驱动控制,达到国Ⅲ排放要求。该文通过对逆向压电效应、压电方程的理论分析,依据实际的双晶片尺寸,得出空气补气阀的实际位移和力矩,并通过实际的测试,发现在100V、15Hz的PWM控制波形驱动下,该压电补气阀呈现出了良好的稳定性和一致性,满足了电控化油器中对怠速智能补气的需求。     

剪切模式压电光纤调制器

设计了一种基于剪切模式振荡的光纤光调制器.实验中,利用压电陶瓷控制2段对接光纤的相对截面积,在初始位置光束无损耗的全部通过,在压电陶瓷管切向形变为光纤内径r时,输出光强为零.本光纤信号调制器属于光的振幅调制器,调制度可达到100%,信噪比(SNR)约为25 dB,带宽约为200 kHz.     

绝缘与介电材料

0210287压电材料电荷能量回收技术研究〔刊〕/孙亚飞//压电与声光.-2002,24(1).-71～74(L) 0210288空间分布压电驱动的多自由度徽定位新方法〔刊〕/秦岚//压电与声光.-2002,24(1).-68～70,80(L)     

基于声学黑洞的压电俘能结构系统仿真与优化

薄板结构中的声学黑洞(ABH)可降低弯曲波的相速度,同时增大振幅,在声学黑洞区域产生高能量密度和能量聚集效应,与压电俘能结构相结合,可提升能量转化效率。该文首先建立了基于声学黑洞的压电俘能结构的有限元模型,对比分析了均匀板及声学黑洞结构的动能密度及电压输出特性;基于有限元法推导了压电振子等效电路模型,并通过Multisim软件建立压电俘能全系统等效电路耦合模型,确定了负载电路最优电阻,提高系统俘能效率。     

OPCM超声换能器的驱动性能及正交异性研究

研究了正交异性压电复合材料(OPCM)换能器的驱动特性,采用1-1型OPCM制备了换能器,对其驱动原理及正交异性进行了理论分析.通过数值仿真和实验测试了其在横观正交方向上不同的压电特性,即正交异性,并得出正交比,该特性可聚集特征信号的能量,从而提高结构损伤的定位精度.OPCM超声换能器模拟与实验测试结果一致,研究表明,这种新型换能器具有明显的正交异性,能在特定方向产生定向应力波,其驱动性能优于片状压电元件.     

基于压电效应的风力发电方法研究

为实现利用压电材料进行环境能量转换的目的,设计了一种能利用风能驱动多片压电片振动发电的装置。该装置通过风能驱动叶轮旋转,利用叶轮的旋转扭力迫使压电片振动,将压电片振动产生的电能通过整流电路、储能电容及DC-DC转换后供负载使用。通过实验对压电片在不同条件下的发电性能进行了测试,实验结果表明,该装置可实现多片压电片对环境能量的收集转换,为此类装置的设计提供了参考,同时也为压电环境能量采集技术提供了新思路。     

环形叉指电极型压电鼓膜驱动器的制备及其性能测试

制备了一种基于Pb(Zr52)O₃(P ZT52)材料的自适应光学用压电驱动器。驱动器采用鼓膜结构, 其工作区域由主动层—PZT52压电层和被动层—ZrO₂/Si复合层两部 分构成。PZT52压电层 采用环形叉值电极(IDT)驱动。采用Si(100)单晶作为衬底,并采用 溶胶-凝胶(Sol-gel) 法在其上制备ZrO₂阻挡层和PZT52压电层,其中引入PbTiO₃(PT) 种子层有利 于PZT52膜层的(110)择优取向。随后在其上热 蒸镀Al顶电极,并采用光刻方法制备图形,得到的IDT电极最大环形直径为 10.5mm,电极间距为0.05mm,中心非激活区 域直径为2mm。鼓膜结构则通过对Si衬底背部 进行各向异性湿法刻蚀(ODE)得到,保留的支持层厚度为5～10μm, 直径为 12mm。测试结果表明,压电驱动器阵列单元在100kV/cm驱动下,可产生6.5μm左右的形 变量。最后利用有限元分析方法(FEM)拟合了压电驱动器单元的面型,并分析了其形变模式 产生的内部原因。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.