共查询到19条相似文献,搜索用时 187 毫秒
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为了突破传统机电转换局限,提高加速度计灵敏度,提出以介观压阻效应为工作原理制作高灵敏度的硅微加速度计,基于这种原理设计并制备了GaAs基加速度计,通过理论分析计算与试验测试,得出该结构在0.1 gn输入下的输出,并对介观压阻灵敏度和压阻灵敏度的量级作出了比较,验证了采用介观压阻效应制作高灵敏度传感器的可行性,为此类加速度计的设计提供参考. 相似文献
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依据介观压阻效应原理,设计出一种以超晶格量子阱薄膜为敏感单元的高g值纳机电加速度计,期望利用超晶格量子阱薄膜的高灵敏特性,提高加速度计的灵敏度。结合GaAs基表面微机械加工工艺和控制孔技术完成了加速度计的加工。采用马歇特冲击的方法完成了加速度计的测试,并利用冲击响应谱分析了微加速度计在有外部冲击情况下的响应,研究结果表明:依据介观压阻效应原理和MEMS技术制作高g值纳机电加速度计具有可行性,从测试结果可以看出该微加速度计不但冲击响应信号与标准加速度计所测信号很接近,而且它们的响应一致性较好。 相似文献
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运用了一种新效应一介观压阻效应,以AIAs/GaAs/AIAs共振隧穿双势垒(DBRT)结构薄膜作为力敏元件,设计了一种压阻式微位移传感器。通过分析、计算和模拟得到了它的输入、输出特性和灵敏度,把它与同类传感器做了比较,结果显示:DBRT结构可以提高灵敏度、调节灵敏度。为设计介观压阻式微位移传感器提供了理论依据。 相似文献
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依据介观压光效应原理,设计出了一种新型高灵敏谐振式MEMS陀螺,其利用镜像异质三周期光子晶体的介观压光效应代替传统压阻式微陀螺中的力敏电阻器,当光子晶体受轴向应力作用时,其透射率随之发生变化,因此,通过检测透射光强可解算出输入角速度的大小。陀螺结构采用4对梳齿电容驱动,驱动模块与检测模块相互独立,其具有耦合效应小,机械灵敏度高的特点。经数值计算与仿真分析,得到该微陀螺频率匹配率为0.6%,透射率灵敏度达到73μcd/﹙°﹚/s,证明了其频率匹配良好,可实现高灵敏度的角速度的测量。 相似文献
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利用镜像异质三周期光子晶体的介观压光效应,用其来代替传统压阻式加速度传感器中的压敏电阻膜,设计出一种新型的高灵敏度加速度传感器。该加速度传感器采用四端固定梁结构,有效地消除了偏轴效应,具有很好的稳定性,在室温下其可测量的加速度范围为0~137gn。利用ANSYS软件对所设计的光子晶体加速度传感器进行静态分析和模态分析。可以看出在悬臂梁根部具有最大的应变值,而且第一模态频率与其他模态频率相差较大,可以有效降低交叉耦合。将光子晶体置于悬臂梁根部具有最大的感应灵敏度。这种加速度计具有很大的优势运用到以后的航天,军事等领域。 相似文献
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研究了一种主要应用于碰撞测试领域的硅微机械高性能压阻式加速度计,量程范围为2 000 gn.为满足技术性能要求,加速度计采用一种三梁-质量块结合梳齿阻尼器的新颖结构,从而可以同时具有高灵敏度及高动态特性(包括高谐振频率及精确阻尼控制).这种加速度计采用n型(100)普通硅片制作,主要工艺过程包括双面ICP深刻蚀和压阻集成工艺.振动台测试结果表明,加速度计的灵敏度为0.11 mV/gn/5 V,谐振频率为31 kHz,灵敏度±5%变化下平坦带宽大于5 kHz.采用落杆测试法测试了加速度计的冲击响应及0~2 000 gn满量程范围内的非线性度.封装后的加速度计承受15 000 gn的冲击测试后没有受到损坏. 相似文献
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Linggang Guan Chenyang Xue Guojun Zhang Wendong Zhang Panpan Wang 《Microsystem Technologies》2011,17(3):459-467
This paper reports on recent developments to improve the performance of hair vector hydrophone by means of several technological
advancements in the fabrication procedures and corresponding sensor design. With fish’s lateral line organs as prototypes,
NEMS (Nano-Electromechanical System) vector hydrophone with directivity has been designed. This paper describes the meso-piezoresistance
effect of resonant tunneling thin-film, and the NEMS hydrophone based on this effect is highly sensitive and small size. The
application of bionics structure may improve the low-frequency sensitivity of hydrophone. The calibration test shows that
NEMS vector hydrophone’s receiving sensitivity is up to −170 dB (0dB = 1 V/μPa), has a good directional pattern in the form
of “8” shape. The sea test shows that the direction of target can be detected by single NEMS vector hydrophone. In the anechoic
tank, it has been verified that NEMS vector hydrophone can track the trajectory of the moving target. 相似文献
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针对基于光弹效应的集成光学微腔悬臂梁式加速度计难以同时实现高灵敏度和高抗冲击性的问题,提出增加光学微腔周长的方案。经过详细的理论分析得出:通过增加微腔周长可以有效地增加惯性力下微腔谐振点波长偏移量,提高探测灵敏度。设计了多回路长直跑道型微腔结构,在100μm×600μm悬臂梁区域内集成出周长达5297μm的硅微谐振腔。利用MEMS工艺制作出所设计的微腔结构,测试品质因数达105。该结构应用于加速度等传感器中,在不减小传感器抗冲击性和量程的前提下,能有效提高探测灵敏度。 相似文献
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This paper considers the estimation of sensitivity coefficients based on sequential random sampling when the input parameters of a nonlinear model are correlated and have a multinormal distribution. Due to the difficulties in generating sequential random samples for correlated model inputs and the properties of response surface models, sampling-based (simulation- and experiment-based) methods could not be used to estimate sensitivity coefficients of correlated model inputs. For this reason, an algorithm based on multi-expressions of multinormal distribution has been developed and used to generate sequential random samples for estimation of sensitivity coefficients. The multi-expression approach has very high accuracy in generating multinormal random samples. The estimated sensitivity coefficients based on sequential random samples changed when sample size changed. Most estimates converged with a sample size of 5000. Model structure mainly determined the speed of convergence. Both correlation among input parameters and model structure influenced the estimates of sensitivity coefficients. The sensitivity coefficients were compared to global partial derivatives that were computed using numerical integration. 相似文献
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The influence of an improved magnetic core on the micro fluxgate sensor about sensitivity and power consumption is investigated and discussed in this paper. We have fabricated the micro solenoid fluxgate sensors based on the MEMS technologies, with the electroplating permalloy cores, which are easy to process and used in common; and the amorphous soft magnetic ribbon cores, which have better soft magnetic performances but be hard to be integrated, respectively. Four magnetic core structures are designed, including rectangular structure, unequal width rectangular structure, multi rectangular ring structure and spiral structure. Spiral structure can improve the performances of the fluxgate sensor significantly, both sensitivity and power consumption. The micro fluxgate sensors with the amorphous soft magnetic ribbon cores are promoted in all aspects than those with the electroplating permalloy cores, including ultra low power consumption of 2.4 mW with unequal width rectangular structure, and high sensitivity of 118 V/T with rectangular structure in wide linear range of 0–800 μT. 相似文献
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高灵敏度金属分离器传感线圈的设计 总被引:1,自引:0,他引:1
分析了电感线圈探测金属的理论,针对传统的金属探测传感器灵敏度低,抗干扰能力差和结构复杂的缺点,根据电磁感应原理提出了一种具有高探测精度和高抗干扰能力的新型金属探测传感器,并描述了其结构和材料设计方案。最后用试验验证了设计思想和设计方案的正确性和实用性。 相似文献
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基于标准CMOS工艺设计了一种新型的集成荧光传感器,该传感器采用P+/Nwell/Psub双结深光电二极管结构和高灵敏度的电容跨阻抗放大器(CTIA)有源像素电路结构。传感器采用0.5μm CMOS工艺实现,测试结果表明:双结深光电二极管在波长532 nm时具有峰值灵敏度为2×10-8A·m2/W,CTIA有源像素结构在光照6lx、积分时间为310μs时的灵敏度可以达到2243 V/lx·s。该设计表明:采用双结深光电二极管单元的CTIA有源像素电路对微弱的光具有更高的光电转换灵敏度。 相似文献