Dichroic rugate filters

We reduce the sidelobes that are present in the bandpass zones of rugate filters, using antireflection coatings to design dichroic rugate filters. Our designs are based on the formalism of equivalent systems that allow us to consider a rugate filter a simple equivalent layer with equivalent optical admittance and equivalent phase thickness functions. Rugate filters with apodization were considered.     

Rugate filters fabricated by a radio frequency magnetron sputtering system by use of an optical in situ monitoring technique

We propose, for the first time to our knowledge, a new feedback fabrication technique for rugate filters with sinusoidal refractive index distribution. The technique uses an in situ optical monitoring system, in contrast to conventional techniques for rugate filters that are based on time control, which is generally unsuitable for accurate fabrication of a continuous index distribution. We employed a-SiOx:H thin film as the material for the rugate filters because its refractive index can be successively controlled. Using the proposed technique and material, we fabricated near-infrared rugate minus filters having multiple and continuous refractive index distributions. The experimental and calculated spectra were well correlated as a result of applying the proposed feedback fabrication technique.     

Design and plasma deposition of dispersion-corrected multiband rugate filters

Inverse Fourier transform method has been commonly used for designing complex inhomogeneous optical coatings. Since it assumes dispersion-free optical constants, introducing real optical materials induces shifts in the position of reflectance bands in multiband inhomogeneous minus (rugate) filters. We propose a simple method for considering optical dispersion in the synthesis of multiband rugate filter designs. Model filters designed with this method were fabricated on glass and polycarbonate substrates by plasma-enhanced chemical vapor deposition of silicon oxynitrides and SiO2/TiO2 mixtures with precisely controlled composition gradients.     

Application of optical broadband monitoring to quasi-rugate filters by ion-beam sputtering

Methods for the manufacture of rugate filters by the ion-beam-sputtering process are presented. The first approach gives an example of a digitized version of a continuous-layer notch filter. This method allows the comparison of the basic theory of interference coatings containing thin layers with practical results. For the other methods, a movable zone target is employed to fabricate graded and gradual rugate filters. The examples demonstrate the potential of broadband optical monitoring in conjunction with the ion-beam-sputtering process. First-characterization results indicate that these types of filter may exhibit higher laser-induced damage-threshold values than those of classical filters.     

Application of constrained optimization to the design of quasi-rugate optical coatings

The constrained optimization approach is applied to the design of quasi-rugate optical coatings. These coatings are defined as multilayers with no thin layers where refractive index profiles resemble rugate-type refractive index profiles and where spectral properties are typical for rugate filters. It is shown that all design problems that are usually solved using rugate filters can be solved successfully in the frame of quasi-rugate optical coatings. Comparison between quasi-rugate and two-component multilayer designs is provided.     

Reflection from a semi-infinite rugate filter

A theoretical approach was applied to compute the reflectance spectrums of semi-infinite rugate filters with a sinusoidal refractive-index profile. Regardless of the linear polarization state of the incident plane wave, the reflectance spectrum of a sufficiently thick rugate filter contains a top-hat feature – indicative of the Bragg regime – with ripples on both flanks. The corresponding reflectance spectrum of a semi-infinite rugate filter also contains the top-hat feature, but is devoid of ripples.     

Porous silicon-based rugate filters

We report an experimental study of porous silicon-based rugate filters. We performed filter apodization, following a half-apodization approach, which successfully attenuated the sidelobes at both sides of the photonic stop band. We achieved successful reduction of interference ripples through the insertion of index-matching layers on the first and last interfaces. An apodized dielectric mirror and a rugate filter are compared: Appreciable differences in the harmonic presence and stop-band performance were observed and are commented on. Bandwidth control when index contrast is modified is also demonstrated. Finally, the possibility of combining different rugate filter designs to attain more complex responses is demonstrated by the achievement of a multi-stop-band filter. Numerical calculations for design optimization and comparison with experimental data are reported too.     

Effect of thermal annealing on the optical properties and residual stress of graded-index-like films deposited by radio-frequency ion-beam sputtering

Composite films of Ta-Si oxide and graded-index-like films have been realized by using radio-frequency ion-beam sputtering. The influence of thermal annealing on the optical properties and residual stress of single-layer composite films and graded-index-like films has been studied. The residual stress and optical properties of both types of films were more stable than that of the notch filters fabricated from a series of discrete quarter-wave layers made by alternatively stacking high and low index materials after annealing.     

Admittance of rugate filters derived from a 2 × 2 inhomogeneous matrix

Admittance diagrams are used to analyze qualitatively and quantitatively the behavior of inhomogeneous thin films with an arbitrary refractive-index function. From this study it follows that one can treat the behavior of rugate filters by using the concept of effective refractive indices, which are associated with the phase integral in a simple way. These results are applied to the study of periodic systems, and, as expected, one can consider high and low effective refractive indices to determine the important parameters of these stop bands. With these ideas it is possible that one can deal with rugate filters more closely as homogeneous periodic systems by taking advantage of the existing theory.     

Correlation of sidelobe suppression between rugate filters and multilayer mirrors

We present the study of the correlation between refractive index profiles and the optical response of rugate filters and multilayer mirrors. The conventionally used method in multilayer mirrors for ripple suppression in the passband will be compared with a similar simple method to remove the rugate filter sidelobes without apodization. The resulting layers are compared in performance with a typical quintic matching layer. An example based on silicon oxynitride alloys with refractive indices ranging between 1.47 and 1.83 was designed and deposited.     

Hybrid approach for rugate filter design

Fourier techniques and direct optimization are applied to the synthesis of complex rugate filters. A hybrid approach is presented. The design strategies are illustrated numerically for different spectral shapes.     

Flat-topped broadband rugate filters

A method of creating rugate interference filters that have flat-topped reflectance across an extended spectral region is presented. The method applies known relations from the classical coupled wave theory to develop a set of equations that gives the spatial frequency distribution of rugate cycles to achieve constant reflectance across a given spectral region. Two examples of the application of this method are discussed: a highly reflective coating for eye protection against harmful laser radiation incident from normal to 45 degrees , and a spectral beam splitter for efficient solar power conversion.     

等离子喷涂ZrC基涂层逐道逐层沉积残余应力模拟与实验验证

采用商用ANSYS14.5软件, 依据复合梁增层力学模型, 采用逐道逐层累积模型模拟了C/C复合材料表面等离子喷涂ZrC基涂层沉积残余应力的特征, 分析了SiC过渡层、第二相(SiC, MoSi₂)和涂层厚度对ZrC基涂层残余应力的影响, 并进行了实验验证。结果表明, SiC过渡层有效缓解了涂层与基体的热失配应力。涂层体系的应力随着涂层厚度的增加逐渐减小, 符合应力松弛和叠加规律。在涂层内部的径向应力以拉应力为主, 基体中主要为压应力, 且在界面边缘存在压应力集中的极限区域, 易使涂层产生裂纹并沿界面扩展。该模拟采用逐道逐层累积的方法更逼近实际喷涂过程, 能更准确预测涂层的残余应力。     

基于Rugate理论的负滤光片设计研究

研究基于Rugate理论设计负滤光片。分析了折射率剖面函数各参数对光谱性能影响,提出了基于Rugate理论负滤光片设计方法,并给出了两组基于Rugate负滤光片设计的实例。研究表明,折射率峰-峰幅值、光学厚度、中心波长分别决定负滤光片反射带宽度、截止深度和位置。     

Effect of particle bombardment on the orientation and the residual stress of sputtered AlN films for SAW devices

We present a study of the effect of particle bombardment on the preferred orientation and the residual stress of polycrystalline aluminum nitride (AlN) thin films for surface acoustic wave (SAW) applications. Films were deposited on silicon (100) substrates by radio frequency (RF) sputtering of an aluminum target in an argon and nitrogen gas mixture. The main deposition parameters were changed as follows: the total pressure from 4 mTorr to 11 mTorr, the N2 content in the gas mixture from 20% to 80%, and the substrate self-bias voltage from -10 V to -30 V. If a sufficiently high negative substrate self-bias voltage is induced, (00.2)-oriented films are obtained over the full ranges of pressure and N2 content. Such films have values of residual stress ranging from -3 GPa to +1 GPa, depending on the deposition conditions. Our results suggest that the energy of the Ar ions colliding with the substrate controls the preferred orientation of the films, whereas the directionality of the ions (for the same energy) is the main factor determining the residual stress. To demonstrate the suitability of our material for the intended application, SAW filters with good electroacoustic response have been fabricated using AlN thin films with optimized (00.2) orientation and controlled residual stress.     

TiO2--Ta2O5 composite thin films deposited by radio frequency ion-beam sputtering

TiO2--Ta2O5 composite films were prepared by a radio frequency ion-beam sputtering deposition process, and the refractive indices and extinction coefficients of the composite films were found to be between those of the TiO2 and Ta2O5 films. The structure of the as-deposited films was amorphous, and the surface roughness was approximately 0.1 nm. The residual stress of the composite films was less than that of pure TiO2 film. The structure of the composite films after annealing was amorphous, with low surface roughness and slightly increased residual stress. The film containing 6.3% TiO2 displayed better properties than either the pure TiO2 or the pure Ta2O5 film.     

Rugate filter made with composite thin films by ion-beam sputtering

Composite films of Ta-Si oxide with refractive indices that varied from 1.48 to 2.15 were realized by using rf ion-beam sputtering. All the composite films were amorphous and had a surface roughness of less than 0.3 nm. The inhomogeneity of the composite was discussed, and a rugate filter was designed and fabricated by automatic computer control.     

Investigation of thermal annealing of optical properties and residual stress of ion-beam-assisted TiO2 thin films with different substrate temperatures

Titanium oxide films were prepared by ion-beam-assisted deposition on glass substrates at various substrate temperatures. The effect of the temperature of thermal annealing from 100 degrees C to 300 degrees C on the optical properties and residual stress was investigated. The influence on the stoichiometry and residual stress of titanium oxides deposited at different substrate temperature was discussed. The residual-stress was minimum and the extinction coefficient was maximum at an annealing temperature of 200 degrees C with a substrate temperature of 150 degrees C. However, when the substrate temperature was increased to 200 degrees C and 250 degrees C, the residual stress was minimum and the extinction coefficient was maximum at an annealing temperature of 250 degrees C. The spectra of x-ray photoelectron spectroscopy reveal that the films lost oxygen and slowly generated lower suboxides at the annealing temperature at which the residual stress was minimum and the extinction coefficient was maximum. As the annealing temperature increased above the temperature at minimum stress, the lower suboxides began to capture oxygen and form stable oxides. TiO2 films deposited at substrate temperatures of 200 degrees C and 250 degrees C were more stable than films deposited at 150 degrees C.     

基底温度对Ag-MgF2金属陶瓷薄膜内应力的影响

用电子薄膜应力分布测试仪测量了基底温度对Ag-MgF₂金属陶瓷薄膜内应力的影响。结果表明:基底温度在300℃~400℃范围内,φ20.4mm选区内的薄膜平均应力最小,应力分布比较均匀,应力为张应力。XRD分析表明:当基底温度在300℃~400℃范围内,Ag-MgF₂薄膜中的Ag和MgF₂组分的晶格常数接近块体值,说明通过改变基底温度可以降低薄膜内应力。      

Thermal Residual Stress Distribution in Carbon Fiber/Novel Thermal Plastic Composite

Thermal residual stress is one of the major factors affecting composite mechanical performance. In this paper, a 3-D FEA technique was utilized to analyze the thermal residual stress distribution in Carbon fiber/PPESK composite. Parabolic failure criterion was used to predict composite potential failure zone. Results indicate that, thermal residual stress distributions in different parts of the composite are different. At composite free end zone, the maximum thermal residual stress is located at fiber surface; in composite inner zone, the maximum stress is located in the matrix; at composite defect zone, stress concentration is located at defect surface. Thermal residual stress at composite free end zone will lead to fiber–matrix interfacial de-bonding. Thermal residual stress concentration at composite defect zone will decrease composite mechanical performance.