Surface roughness measurement based on fiber optic sensor

The multi-wavelength fiber sensor for measuring surface roughness and surface scattering characteristics were investigated. In this paper, specimens with different surface roughness were analyzed by using 650 nm, 1310 nm and 1550 nm laser as the light source, respectively. The working distance of 2 mm was chosen as the optimum measurement distance. The experimental results indicate that multi-wavelength fiber sensor can accurately measure surface roughness, and can effectively reduce the unsystematic error. The light scattering intensity ratio has a good linear relationship with the surface roughness. The minimum relative error of the surface roughness is 2.92%, the maximum relative error is 13.4%, and the average relative error is about 7.48%. The accuracy for measuring surface roughness by multi-wavelength fiber sensor is about twice as large as that by single-wavelength fiber sensor.     

A multilevel calibration technique for an industrial robot with parallelogram mechanism

This paper presents a multilevel calibration technique for improving the absolute accuracy of an industrial robot with a parallelogram mechanism (ABB IRB2400). The parallelogram structural error is firstly modeled based on the partial differential of the position function of a general four-bar linkage and the linearization of the position constraints of the parallelogram mechanism, the model coefficients are fitted from experimental data. Secondly, an absolute kinematic calibration model is established and resolved as a linear function of all the kinematic parameters, as well as the base frame parameters and tool parameters. Finally, contrary to most other similar works, the robot joint space (rather than Cartesian space) is divided into a sequence of fan-shaped cells in order to compensate the non-geometric errors, the positioning errors on the grid points are measured and stored for the error compensation on the target points. After the multilevel calibration, the maximum/mean point positioning errors on 284 tested configurations (evenly distributed in the robot common workspace) are reduced from 1.583/0.420 mm to 0.172/0.066 mm respectively, which is almost the same level as the robot bidirectional repeatability.     

Non-kinematic calibration of a six-axis serial robot using planar constraints

This paper describes a non-kinematic calibration method developed to improve the accuracy of a six-axis serial robot, in a specific target workspace, using planar constraints. Simulation confirms that the stiffness of the robot, as well as its kinematic parameters, can be identified. An experimental validation shows that the robot's accuracy inside the target workspace is significantly enhanced by reducing the maximum distance errors from 1.321 mm to 0.274 mm. The experimental data are collected using a precision touch probe, which is mounted on the flange of a FANUC LR Mate 200iC industrial robot, and a high precision 9-in. granite cube. The calibration method makes use of a linear optimization model based on the closed-loop calibration approach using multi-planar constraints. A practical validation approach designed to reliably evaluate the robot's accuracy after calibration is also proposed.     

Development and evaluation of a two-axial shearing force sensor consisting of an optical sensor chip and elastic gum frame

We developed a promising shearing force sensor that is small in size and can measure shearing force along two axes independently. This sensor consists of an elastic gum frame and an optical sensor chip (6 mm × 6 mm × 8 mm). From the experimental results, the resolutions of the sensor along the x- and y-axes are found to be 0.070 N and 0.063 N. We also experimentally demonstrated that the sensor can separately measure shearing force along two axes. Finally, we demonstrated that the scale factor which correspond to resolution and linear portion which correspond to measuring range of the signals can be changed easily by using three types of elastic gum frame. This sensor can be embedded in the finger of a robot hand and use it to not only measure shearing force but also detect the slip phenomenon.     

High-precision radius measurement of ball indenter

To solve the problem of calibrating the radius of a ball indenter in a hardness tester, a laser confocal radius measurement and calibration method for the ball indenter is proposed without separating the ball from the body of the indenter. The laser confocal radius measurement and calibration method uses the maximum of the confocal axial intensity curve to precisely identify the cat’s eye and confocal position of the test ball indenter. The distance between these two positions is then measured to achieve high-precision radius measurement. The theoretical analyses and experimental results indicate that the radius measurement uncertainty of the ball indenter with a diameter of 1.5875 mm is within 0.12 μm.     

A motorized 5 m tape comparator for traceable measurements of tapes and rules

A motorized 5 m tape comparator was constructed in TUBITAK UME for calibration of tapes and rules up to 5 m length in one set-up and further lengths in multiple set-ups. The system is a practical development and provides a cost effective solution for calibration of tapes in which the highest grade’s accuracy requirement in OIML R35-1 e.g. is 600 μm for 5 m length and 1100 μm for 10 m length. It is mainly composed of 6 m rail system, mechanical parts, optical units and an integrated 6 m incremental linear encoder as a reference measurement axis for traceable measurements. The rails are kinematically located on a heavy marble construction and a motorized carriage, which employs a camera for probing of the scales on the tapes, is moved along the rails during the measurement. The image of the scale taken by the camera is viewed on the monitor screen together with the running software. The operator can perform the probing process by simply moving the carriage over the measured scales (tapes or rules) using a joystick. The carriage movement is measured by the incremental linear encoder previously calibrated by a laser interferometer and the software automatically takes the measurement results from the incremental linear encoder, applies correction values previously defined and determines the length of the tapes and rules as well as deviations from nominal lengths. The estimated expanded uncertainty of the steel tape measurement is U = 54 μm in one set-up (for 5 m length) and U = 77 μm in two set-ups (for 10 m length) at the confidence level of approximately 95%. Uncertainty budget for calibration of the device itself and for calibration of the test tapes are explained in detail. The results of extensive experimental work and analysis are provided by demonstrating application of science and technology of measurement and instrumentation. Investigations for long term stability of the system are given with the reported test results for the years of 2003-2011 and participated intercomparison results to validate the device scientifically are illustrated.     

Error analysis of a twin-cantilever sensor for measuring external diameter

The error characteristics of the twin-cantilever sensor for measuring external diameter of tensile test piece were discussed. By using of beam bending theory and strain electric measurement theory, the origins of the errors of the twin-cantilever measuring system were analyzed, and a synthetic error formula of the system was established, which contains four components, the contact offset error, the tilt error, the Abbe error and the implicated error. A experimental system was designed, and the calibration and measurement experiments were carried out. The synthetic error formula was used to analyze the errors of the experimental system, and the error control method, including a set of error correction formula, was discussed. The analytical result shows that the resolution of the experimental system is smaller than 0.0002 mm; through error correction, the absolute error limit of the experimental system can be determined as ±0.001 mm.     

Development of high-precision micro-roundness measuring machine using a high-sensitivity and compact multi-beam angle sensor

With recent development in advanced manufacturing, demand for nanometric accuracy in dimensional metrology has increased dramatically. To satisfy these requirements, we propose a high-accuracy micro-roundness measuring machine (micro-RMM) using a multi-beam angle sensor (MBAS). The micro-RMM includes three main parts: the MBAS, a rotary unit, and a bearing system. The MBAS has been designed and established in order to improve motion accuracy of the micro-RMM. The dimensions of the MBAS are 125(L) mm × 130(W) mm × 90(H) mm. Compared with other methods, an MBAS is less susceptible to spindle error (stage-independence) when detecting angles, can maintain high sensitivity with miniaturized size, and can be used conveniently at the factory level. The optical probe, reported in this paper, is based on the principle of an autocollimator, and the stability is improved when using the MBAS. Unlike multi-probe methods, the micro-RMM is constructed to realize roundness measurement by using only one probe, which is less susceptible to instrumental errors. Experimental results confirming the feasibility of the multi-beam angle sensor for roundness measurement are also presented.     

Performance tests of a new non-invasive sensor unit and ultrasound electronics

Industrial applications involving pulsed ultrasound instrumentation require complete non-invasive setups due to high temperatures, pressures and possible abrasive fluids. Recently, new pulser-receiver electronics and a new sensor unit were developed by Flow-Viz. The complete sensor unit setup enables non-invasive Doppler measurements through high grade stainless steel. In this work a non-invasive sensor unit developed for one inch pipes (22.5 mm ID) and two inch pipes (48.4 mm ID) were evaluated. Performance tests were conducted using a Doppler string phantom setup and the Doppler velocity results were compared to the moving string target velocities. Eight different positions along the pipe internal diameter (22.5 mm) were investigated and at each position six speeds (0.1–0.6 m/s) were tested. Error differences ranged from 0.18 to 7.8% for the tested velocity range. The average accuracy of Doppler measurements for the 22.5 mm sensor unit decreased slightly from 1.3 to 2.3% across the ultrasound beam axis. Eleven positions were tested along the diameter of the 48.4 mm pipe (eight positions covered the pipe radius) and five speeds were tested (0.2–0.6 m/s). The average accuracy of Doppler measurements for the 48.4 mm sensor unit was between 2.4 and 5.9%, with the lowest accuracy at the point furthest away from the sensor unit. Error differences varied between 0.07 and 11.85% for the tested velocity range, where mostly overestimated velocities were recorded. This systematic error explains the higher average error difference percentage when comparing the 48.4 mm (2.4–5.9%) and 22.5 mm (1.3–2.3%) sensor unit performance. The overall performance of the combined Flow-Viz system (electronics, software, sensor) was excellent as similar or higher errors were typically reported in the medical field. This study has for the first time validated non-invasive Doppler measurements through high grade stainless steel pipes by using an advanced string phantom setup.     

Large-scale accelerator alignment using an inclinometer

A precise inclinometer (Talyvel 4) was adopted for evaluating aligning straightness of the first 71 m of the KEK electron/positron injector linear accelerator (linac). The straightness could be evaluated with a standard deviation of less than 49 μm. It is in good agreement with those obtained using a conventional alignment telescope and our laser-based alignment system.Error estimation based on the rules of error propagation shows that shape evaluation with a standard deviation of 0.3 mm for a distance of 500 m can be achieved using the proposed method. It indicates that this method is suitable for evaluating straightness of several hundred meters of linacs with sub-millimeter of accuracy.     

Design and experimental validation of an ultra-precision Abbe-compliant linear encoder-based position measurement system

The design and development of an Abbe-compliant linear encoder-based measurement system for position measurement with a targeted 20 nm uncertainty (k = 2) in machine tools and CMMs is presented. It consists of a linear scale and a capacitive sensor, mounted in line on an interface which is guided in the scale's measurement direction and driven by a linear motor based on the output signal of the capacitive sensor. The capacitive sensor measures the displacement of a target surface on the workpiece table. The functional point, which is the center of a tool or touch probe, is always aligned with the scale and capacitive sensor such that this configuration is compliant with the Abbe principle. Thermal stability is achieved by the application of a thermal center between the scale and capacitive sensor at the tip of the latter, which prevents both components to drift apart. Based on this concept, a prototype of a one-DOF measurement system was developed for a measurement range of 120 mm, together with an experimental setup aimed at verifying the reproducibility of the system for changing ambient conditions of ±0.5 °C and ±5%rh and the repeatability during tracking of a target surface over a short period of time. These experiments have shown that the measurement uncertainty of the one-DOF system is below 29 nm with a 95% confidence level.     

Development and evaluation of a compact 6-axis force/moment sensor with a serial structure for the humanoid robot foot

In order to walk safely, forces and moments exerted on humanoid robot foot should be measured and used for controlling the robot. This paper describes the development and evaluation of a six-axis force/moment sensor used under humanoid robot foot. The developed sensor is capable of measuring 400 N horizontal force, 1000 N vertical force, 20 N·m moment about the horizontal axis and 10 N·m moment about the vertical axis using rectangular cross-sectional beams. The structure of the sensor is newly modeled, and the sensing elements are simulated by using finite element method (FEM). Then the sensor is fabricated by attaching strain gages onto the beams. Finally, a characteristic test of the developed sensor is carried out, and the output from FEM analysis agrees with those from the characteristic test.     

Design and testing of a long-range,precision fast tool servo system for diamond turning

A long-range, precision fast tool servo (FTS) system was developed that is capable of accurately translating the cutting tool on a diamond turning machine (DTM) with maximum accelerations of 260 m s^?2 and bandwidths of up to 140 Hz. The maximum displacement range of the cutting tool is 2 mm. The FTS utilizes a flexure mechanism driven by a voice coil actuator, a custom linear current amplifier and a laser interferometer feedback system. This paper describes the design of the electromechanical system, controller configuration and cutting tests to evaluate the system. Initially, low disturbance rejection and poor command following degraded the surface finish of machined test parts. Several techniques to add damping to the dynamic system were investigated to improve the generated surface finishes. Electromotive damping was applied inside the voice coil actuator, and two different viscoelastic damping materials were applied to the flexure mechanism. A control strategy consisting of linear and non-linear feedforward controllers and a proportional, integral and derivative (PID) feedback controller was implemented to accommodate the changed system dynamics. The workpieces were analyzed using form and surface inspection instruments to evaluate the overall system performance. A cylindrical part with five lobes cut across the face had a surface finish value between 20 and 30 nm R_a.     

Atomic force microscope probe calibration by use of a commercial precision balance

In this paper, we investigate the characteristics of a piezoresistive AFM cantilever in the range of 0–1.6 μN by using nano force calibrator (NFC), which consists of a high precision balance with resolution of 1 nN and 1-D fine positioning stage. Brief modeling of the cantilever is presented and then, the calibration results are shown. Tests revealed a linear relationship between the probing force and sensor output (resistance change), but the force vs. deflection is not as linear as the force vs. sensor output curve. The force constant of the cantilever was measured to 0.26 N/m with a standard deviation of 0.01 N/m. It shows that there is big difference between measured and nominal spring constant of 1 N/m provided by the manufacturer’s specifications.     

Obtaining four-dimensional vibration information for vibrating surfaces with a Kinect sensor

In this paper, we present a real-time approach to obtain four-dimensional (4D) information from the surfaces of low-frequency vibrating rigid objects using a Kinect sensor. This consumer-grade range sensing technology is used for markerless tracking on the three-dimensional (3D) coordinate points of object surfaces. The time coordinates are simultaneously defined by the sampling interval converted from the frame rate of 30 frames per second (fps). Then the 4D (defined in the space time) vibration information can be recorded in the form of (x, y, z, t), enabling researchers to investigate the dynamic features of object surfaces efficiently. A comparison of the measurement accuracy and efficiency of a Kinect sensor, a stereo vision system and a contact sensor is carried out. The results confirm the superiority of our approach in efficient measurement and demonstrate that the contrastive amplitude error ranges within 0.6 mm when the frequency is not beyond 15 Hz.     

A new digital background calibration for redundant radix-4 pipelined ADCs by modeling of adaptive filter for linear and nonlinear errors

In this paper a new digital background correction and calibration technique for redundant multi-bit pipeline stages is presented. In this method output voltage of each stage in converter is defined as sum of the ideal product and error signal, which error voltage include of linear non-ideal section or first order error and nonlinearity undesired signal or third order error. Linear error is formed by capacitor mismatch, op-amp offset, comparator offset and finite op-amp gain effects. Nonlinear error is deformed the output voltage depend on the nonlinear results of open loop residue amplifier. Correction begins with separately calculation and cancelation of the nonlinear and linear errors respectively. For calibration of each stage at first step, the nonlinear effects in digital output of backend ADC is eliminated and then by digital modeling of first order analog error the influence of this unfavorable signal is diminished from digital equivalent of input voltage. Therefore for cancelation of non-ideal impairment in each stage a digital filter consist of linear and nonlinear channel in digital domain is designed. The first order and third order coefficients of designed digital function are unknown and should by a pertinent method be estimated simultaneously. Adaptive filter are best choose for this method. Simulation results show that INL/DNL parameters of 14-bit radix-4 pipelined converter are improved from 17LSB/3LSB to 0.45LSB/0.41LSB after calibration. The SNDR/SFDR parameters are increased from 30 dB/36 dB to 83 dB/90 dB.     

FEA simulation of thermal processes during the direct metal laser sintering of Ti64 titanium powder

With regard to the fact that laser sintering belongs to the high-temperature processes in which metal particles are sintered by a high-power laser, forming a homogenous structure, it is necessary and important to know the characteristics and the mechanism of these thermal processes. A high-power laser system produces three forms of heat that include convection, conduction, and radiation. These thermal processes affect the formation of internal stresses and tension that lead to deformations and rapidly influence the resulting quality, dimensions, density, micro-structure, and mechanical properties of fabricated parts. In response to this fact, it was important to analyse these heat transfer methods instantly during the direct metal laser sintering (DMLS) process simulation and subsequently monitor the parameters and settings of the sintering equipment in order to obtain acceptable manufacture outputs intended for further use. This work is focused on the creation of a FEA simulation model and the simulation of thermal processes across an object during and after the sintering process in the cooling stage, when it is important to consider a laser beam trajectory, temperatures of individual elements affected by the laser beam, and current laser energy in time. A 3D FEA simulation model was created in order to represent actual behaviour of a part during the sintering process. The simulation model consisted of two sub-models, particularly the building platform model with the dimensions of 250 mm × 250 mm × 22 mm, with stainless steel as the selected material, and the model of individual layers of sintered titanium powder with the dimensions of 10 mm × 10 mm × 0.03 mm. The total number of used layers was 12, which represents the total thickness of 0.36 mm. Applied power was P = 170 W. The simulation as such was carried out using the FEA software, Simulia Abaqus supported on the Windows x86-64 platform, which uses an integrated solver to make thermal and mechanic calculations. The calculations included also the impact of the protective argon atmosphere located in the process chamber. Mutual impact between individual layers was also considered. The simulation results were confronted with the results of already performed experimental studies of other scientific works, with the compliance and confirmation of assumptions being on a very good level.     

Drop swarm analysis in dispersions with incident-light and transmitted-light illumination

The new developed Optical Multimode Online Probe (OMOP) can process images from either incident-light illumination (also called epi-illumination) or transmitted-light illumination (also called trans-illumination). The probe has an outer diameter of 38 mm and the illumination is achieved by high performance Light Emitting Diodes (LEDs) with specifications of 1.96 mm² and 493 lm (251.53 lm/mm²) at an angular deviation of 0.37°. A camera probe is used with either an object-space telecentric (telecentricity <0.2°, 2437 mm virtual pupil distance) or entocentric objective (Köhler based illumination, 6238 mm virtual pupil distance). Using the telecentric mode, the particle distance independency is located within 20 mm while the focal depth is approximately 5 mm. The local resolution is between 20 and 30 μm, according to the used optics, with a standard deviation less than 4.5%. Maximum particle diameter is up to 5 mm while particles can reach up to 2 m/s as function of exposure. The basic distance transform approach with watershed segmentation for analysis of transmitted-light images gives deviations less than 5% at high particle densities and less than 2% at low ones. The error of false positives typically is below 5% while the error of wrong radiuses is below 1% for up to 90% of all droplets and below 5% otherwise. Up to five images per core and second (trans-illumination) can be analyzed automatically and online at densities up to 25% (trans-illumination, gap width less than 5 mm) 40% (object side telecentric epi-illumination, single probe) respectively.The advanced pre-segmentation approach based on the Random Forest Classifier (RFC) is used to perform the more complex image analysis with epi-illumination. As long as the quality of pre-segmentation is high enough, the classification results in images, which can be analyzed in the following distance transform approach. This is considerably depending on the quality of training the algorithm and recurring image features. Compared to the distance transform analysis at low densities the deviation increases. The RFC pre-segmented image gives an additional deviation of 1.1% (both in regard to the total amount of evaluated pixels) and a deviation of 12.9% in regard to the mean particle diameter. Below a particle size of 50 pixels the image analysis overestimates the actual number of particles due to the sensitivity of the Euclidian distance approach.     

An orifice meter for bidirectional air flow measurements: Influence of gas thermo-hygrometric content on static response and bidirectionality

This paper presents the design and calibration of an ISO non-compliant orifice plate flowmeter whose intended use is for respiratory function measurements in the bidirectional air flow range ±9 L/min.The novelty of the proposed sensor consists of a plate beveled in both upstream and downstream sides: a symmetrical geometry is adopted in order to perform bidirectional measurements of flow rate. A mathematical model is introduced to quantify the influence of temperature on the sensor output. Four different positions of the pressure static taps are evaluated in order to maximize bidirectionality. An index is also introduced in order to quantitatively estimate the anti-symmetry of the sensor's response curve.Trials are carried out to evaluate the influence on sensor output of air temperatures (22 °C, 30 °C and 37 °C) at different values of relative humidity (5%, 55% and 85%). Experimental data show a quite good agreement with the theoretical model (R²>0.98 in each condition).The influence of air temperature on the sensor output is minimized by introducing a correction factor based on the theoretical model leading to measurement repeatability better than 2% in overall range of calibration. The mean sensitivity in the calibration range is about 2 kPa L⁻¹·min allowing to obtain a sensor discrimination threshold lower than 0.2 L/min in both directions. The time constant of the whole measurement system, equal to 2.40±0.03 ms, leads to a bandwidth up to 80 Hz making the sensor suitable for respiratory function measurements.     

Application of blue laser direct-writing equipment for manufacturing of periodic and aperiodic nanostructure patterns

This study presents the novel development of low cost, highly efficient blue laser direct-writing equipment for using mask-less laser lithography to manufacture periodic and aperiodic nanostructure patterns. The system includes a long-stroke linear motor precision stage (X, Y), a piezoelectric nano-precision stage (Y, θz), a 3-DOF (degrees of freedom) laser interferometer measurement system, and a blue laser direct-writing optical system. The 3-DOF laser interferometer measurement system gives the control system feedback for displacement (X, Y, θz) of the equipment. The laser processing equipment consists of a blue laser direct-writing optical head, a field-programmable gate array (FPGA) alignment interface, and an optical head servo controller. The optical head operates at a wavelength of 405 nm. Processing the nanostructures on thermo-reaction inorganic resists with precise control of the laser intensity, taking advantage of the threshold effect to exceed the limitations of optical diffraction, and reduces the nanostructure hole size. The equipment can be used to fabricate various periodic nanostructure patterns, aperiodic nanostructure patterns, and two-dimensional patterns. The equipment positioning accuracy is within 50 nm at a speed of 50 mm/s, and the minimum critical dimension can be achieved about 100 nm or so.