Measurement and statistical analysis toward reproducibility validation of AZ4562 cylindrical microlenses obtained by reflow

This paper presents the statistical analysis applied into the shape of microlenses (MLs) for validating the high-reproducibility feature of their fabrication process. The MLs were fabricated with the AZ4562 photoresist, using photolithography and thermal reflow processes. Two types of MLs arrays were produced for statistical analysis purposes: the first with a cross-sectional diameter of 24 μm and the second with a cross-sectional diameter of 30 μm, and both with 5 μm spacing between MLs. In the case of 24 μm diameter arrays, the measurements showed a mean difference in diameter of 2.78 μm with a standard deviation (SD) of 0.22 μm (e.g., 2.78 ± 0.22 μm of SD) before the reflow, and 2.34 ± 0.35 μm of SD after the reflow. For the same arrays, the mean difference in height obtained was, comparatively to the 5.06 μm expected, 0.76 ± 0.10 μm of SD before the reflow and 1.91 ± 0.15 μm of SD after the reflow, respectively. A mean difference in diameter of 2.64 ± 0.41 μm of SD before the reflow, and 1.87 ± 0.34 μm of SD after the reflow was obtained for 30 μm diameter MLs arrays. For these MLs, a mean difference in height of 0.71 ± 0.12 μm of SD before the reflow and 2.24 ± 0.24 μm of SD after the thermal reflow was obtained, in comparison to the 5.06 μm of height expected to obtain. These results validate the requirement for reproducibility and opens good perspectives for applying this fabrication process on high-volume production of MLs arrays.     

Curved drilling via inner hole laser reflection

In this paper, we describe curved hole drilling via the reflection of a laser beam off the sidewall of the drilled hole. A slightly offset laser beam forms a tilted surface at the bottom of the hole, controlling the angle of curvature. An ultraviolet laser beam operating at a wavelength of 266 nm was used. To visualize the hole formation process, borosilicate glass was used as the laser workpiece. This method was able to drill a curved hole with an average angle of ∼3° with curvature beginning at a depth of 400–600 μm. A curved hole with a diameter of <50 μm was achieved. A branched hole was also demonstrated by using the reflection of the tilted sidewall. The curved hole formation process was recorded with a high speed camera. Once the ablated sidewall reached a certain depth, drilling ceased as the laser energy fell below the ablation threshold. Ultimately, judicious selection of an appropriate laser fluence and sidewall angle allow the formation of curved holes.     

Application of Monte Carlo simulation for estimation of uncertainty of four-point roundness measurements of rolls

Large-scale rotors in the paper and steel industry are called rolls. Rolls are reground at regular intervals and roundness measurements are made throughout the machining process. Measurement systems for roundness and diameter variation of large rolls (diameter <2000 mm) are available on the market, and generally use two to four sensors and a roundness measurement algorithm. These methods are intended to separate roundness of the rotor from its movement. The hybrid four-point method has improved accuracy, even for harmonic component amplitudes. For reliable measurement results, every measurement should be traceable with an estimation of measurement uncertainty. In this paper, the Monte-Carlo method is used for uncertainty evaluation of the harmonic components of the measured roundness profile under typical industrial conditions. According to the evaluation, the standard uncertainties for the harmonic amplitudes with the hybrid method are below 0.5 μm for the even harmonics and from 1.5 μm to 2.5 μm for the odd harmonics, when the standard uncertainty for the four probes is 0.3 μm each. The standard uncertainty for roundness deviation is 3.3 μm.     

Evolution of wear,roughness, and friction of Alloy 600 superalloy surfaces in water-submersed sliding

Self-mated wear and friction of Alloy 600 superalloy was studied in a water-submersed ring-on-rod configuration, loading the side of a 6.35 mm diameter rod across the flat surface of a rotating annular ring of 100 mm outer diameter and 70 mm inner diameter producing two sliding contacts along the ring. Tests were conducted at sliding speeds of 0.178 and 0.330 m/s for sliding distances of 100 m. Normal loads of 51 and 204 N were applied, and initial R_a surface roughnesses of the rings along the sliding direction were either smooth (～0.2 μm) or rough (～7.5 μm). Increased initial ring roughness caused a ～20-fold increase in rod wear at the lighter load, whereas at the heavier load increased initial roughness only caused a ～4-fold increase in wear. At lower initial ring roughness the 4-fold decrease in normal load caused a large (one order-of-magnitude) decrease in rod wear, whereas for rings of higher initial roughness the 4-fold decrease in normal load caused only minor (2-fold or less) decreases in rod wear. Wear during this 100 m sliding distance only experienced a minor effect from the 1.8-fold change in sliding speed, as did friction. In all cases friction coefficient rapidly settled into the range 0.6–0.7, except in the cases of lower load on rings of lower initial roughness where friction coefficient remained above 1 for most of this sliding duration. At this lower load the initial ～0.2 μm rod roughnesses increased to nearly 0.8 μm by the 100 m sliding distance, whereas at the higher load this same sliding distance resulted in roughnesses returning near to the initial 0.2 μm. It was hypothesized more highly loaded cases also went through initial roughening prior to smoothening back to 0.2 μm roughness within the 100 m sliding distance, and given additional sliding the more lightly loaded cases would also experience subsequent smoothening. Increasing sliding distance to 400 m, roughnesses indicated a smoothening back to 0.2 μm level during those lightly loaded tests, with friction coefficient correspondingly dropping from 1 into the 0.6–0.7 range observed in all other cases. Extended sliding to 400 m at light loading against rings of lower initial roughness also allowed a rod wear rate which increased with increased sliding distance to be observed, approaching the same rate observed against initially rough rings within the 100 m sliding distance.     

Enhancing electrical conductivity and electrical thermal characteristics of a PEDOT:PSS thin layer by using solvent treatment and adding Ag nanoparticle solution

A method of enhancing the electrical conductivity of 3,4-ethylenedioxythiophene:poly styrene sulfonate (PEDOT:PSS) by combining solvent treatment (adding high polar solvent: 5 wt% ethylene glycol) and adding a small amount of silver (Ag) nanoparticles in a solution was investigated. The main purpose of this was to apply a PEDOT:PSS conductive layer to micro-thermal devices driven by electricity and, for this, to reduce the layer thickness (for low stiffness) while maintaining necessary high electrical conductivity. Layers with thicknesses of less than about 10 μm were examined for electrical conductivity and temperature when electricity was applied. The solvent treated PEDOT:PSS had suitable electrical resistance to generate appropriate temperature properties. The added Ag nanoparticles reduced the electrical resistance by 30–70% over the measured thickness range. The electric conductivity applied with this method was 200–260 Ω⁻¹ cm⁻¹ for thicknesses of 1–2 μm (conductive area: 12 mm × 10 mm) and the generated temperature increase was 20–50 °C at applied voltages of 3–5 V. These characteristics are considered to be suitable to use the conductive layer as a heating element. In addition, the method we used scarcely degraded the transparency of the layer. Measurements of the conductive area in a layer with conductive atomic force microscope (AFM) indicated that the added Ag nanoparticles contributed to increasing the conductive areas and distributing them more uniformly.     

A motorized 5 m tape comparator for traceable measurements of tapes and rules

A motorized 5 m tape comparator was constructed in TUBITAK UME for calibration of tapes and rules up to 5 m length in one set-up and further lengths in multiple set-ups. The system is a practical development and provides a cost effective solution for calibration of tapes in which the highest grade’s accuracy requirement in OIML R35-1 e.g. is 600 μm for 5 m length and 1100 μm for 10 m length. It is mainly composed of 6 m rail system, mechanical parts, optical units and an integrated 6 m incremental linear encoder as a reference measurement axis for traceable measurements. The rails are kinematically located on a heavy marble construction and a motorized carriage, which employs a camera for probing of the scales on the tapes, is moved along the rails during the measurement. The image of the scale taken by the camera is viewed on the monitor screen together with the running software. The operator can perform the probing process by simply moving the carriage over the measured scales (tapes or rules) using a joystick. The carriage movement is measured by the incremental linear encoder previously calibrated by a laser interferometer and the software automatically takes the measurement results from the incremental linear encoder, applies correction values previously defined and determines the length of the tapes and rules as well as deviations from nominal lengths. The estimated expanded uncertainty of the steel tape measurement is U = 54 μm in one set-up (for 5 m length) and U = 77 μm in two set-ups (for 10 m length) at the confidence level of approximately 95%. Uncertainty budget for calibration of the device itself and for calibration of the test tapes are explained in detail. The results of extensive experimental work and analysis are provided by demonstrating application of science and technology of measurement and instrumentation. Investigations for long term stability of the system are given with the reported test results for the years of 2003-2011 and participated intercomparison results to validate the device scientifically are illustrated.     

Effect of surface laser texture on friction properties of nickel-based composite

Laser surface texturing (LST) was performed on the nickel-based composites by a Nd:YAG pulsed laser and the regular-arranged dimples with diameter of 150 μm were fabricated on their surfaces. The textured surfaces were smeared with molybdenum disulfide powder. The tribological properties of the textured and filled composites were investigated by carrying out sliding wear tests against an alumina ball as a counterface using a high temperature ball-on-disk tribometer. The tests were conducted at a sliding speed of 0.4 m/s and at normal loads ranging from 20–100 N and from room temperature to 600 °C. The friction coefficient of nickel-based composite textured and smeared with molybdenum disulfide was found to reduce from 0.18 to 0.1 at the temperature range from 200 to 400 °C. The texture with a dimple density of 7.1% was observed to prolong wear life of MoS2 film by more than four times in comparison to the texture with other dimple densities. The lubricious oxide particles stored in the dimples reduce friction coefficient at elevated temperatures and compensate for the extra lubricant owing to the degradation of MoS₂ caused by its oxidation at high temperatures.     

Study on the evaluation of cylinder’s global sizes

In ISO 14405-1, the global sizes, such as least-squares diameter, minimum circumscribed diameter and maximum inscribed diameter are defined. The diameters above can be measured by using cylindrical coordinate measuring method like the circular section measuring method of cylindricity error. The determination method of the least-squares diameter was firstly given based on the cylindrical measuring system, and the optimization models of the minimum circumscribed diameter and the maximum inscribed diameter were built, respectively. The corresponding objective functions were unified as “minimax” expressions. For the four axis parameters of the cylinder with the minimum circumscribed diameter or the maximum inscribed diameter, the searching ranges of cylinder’s axis parameters for their optimal solutions were defined numerically. Thereafter, the genetic, steepest decent and BFGS-0.618 algorithms were introduced, and the optimization evaluation algorithms of two kinds of diameters mentioned above were given. Based on many cylinders’ profiles obtained by the circular section measuring method on a measuring instrument of cylinder’s global sizes which was developed by Zhongyuan University of Technology, Zhengzhou, China. The accuracy, efficiency and suitability of three optimization algorithms were investigated through the evaluation of a lot of the minimum circumscribed diameters and the maximum inscribed diameters. The measurement uncertainty of the global sizes for the cylindrical specimen was analyzed, and the measurement uncertainties of the sizes in the radial and z directions are ±0.95 μm and ±0.5 μm, respectively. The total measurement uncertainties of the global sizes of the cylindrical specimens with the specifications of ϕ10 × 120 mm and ϕ100 × 300 mm are ±3.8 μm and ±5.7 μm, respectively. The investigation results showed that for the evaluation of the globe sizes, any one of three algorithms above is not absolutely prior to the other two algorithms while considering both evaluation accuracy and efficiency, and the difference of their evaluation results do not exceed 0.5 μm. On the other hand, many points between the maximum value and the least value do not affect the evaluation results in optimization process. For improving the evaluation efficiency, by de-selecting those points while considering the characteristic parameter was also studied based on the statistic method and experiment. Coefficient t should be less than 0.3 to ensure the evaluation accuracy. This research may be useful for developing the next generation measurement instrument for the global sizes and the way forward for the digital manufacturing.     

Uncertainty analysis of slot die coater gap width measurement by using a shear mode micro-probing system

A shear mode micro-probing system was constructed for gap measurement of a precision slot die coater with a nominal gap width of 90 μm and a length of 200 mm. A glass micro-stylus with a nominal tip ball diameter of 52.6 μm was oscillated by a tuning fork quartz crystal resonator with its oscillation direction parallel to the measurement surfaces. An on-line qualification setup was established to compensate for the influences of the uncertainty sources, including the water layers on the measurement surfaces. The measurement uncertainty of the measured gap width was estimated to be less than 100 nm.     

Optimisation of a nano-positioning stage for a Transverse Dynamic Force Microscope

This paper describes the optimisation of a nano-positioning stage for a Transverse Dynamic Force Microscope (TDFM). The nano-precision stage is required to move a specimen dish within a horizontal region of 1 μm × 1 μm and with a resolution of 0.3 nm. The design objective was to maximise positional accuracy during high speed actuation. This was achieved by minimising out-of-plane distortions and vibrations during actuation. Optimal performance was achieved through maximising out-of-plane stiffness through shape and material selection as well optimisation of the anchoring system. Several shape parameters were optimised including the shape of flexural beams and the shape of the dish holder. Physical prototype testing was an essential part of the design process to confirm the accuracy of modelling and also to reveal issues with manufacturing tolerances. An overall resonant frequency of 6 kHz was achieved allowing for a closed loop-control frequency of 1.73 kHz for precise horizontal motion control. This resonance represented a 12-fold increase from the original 500 Hz of a commercially available positioning stage. Experimental maximum out-of-plane distortions below the first resonance frequency were reduced from 0.3 μm for the first prototype to less than 0.05 μm for the final practical prototype.     

Application of multispectral radiation thermometry in temperature measurement of thermal barrier coated surfaces

Ceramics coatings are materials widely used in gas turbines to provide thermal shielding of superalloy materials against excessive turbine temperatures. However, measurement of their surface temperatures using conventional radiation thermometers, more so in the presence of high ambient radiation and low emissivity is quite challenging. A multispectral method employing curve fitting technique to measure the temperature of such targets in the range of 800–1200 K and ambient temperature of 1273 K is implemented in this paper through simulation. Several simulated experiments were carried out to identify emissivity models best suited for multispectral radiation thermometry applicable to ceramic coatings. The best emissivity model applicable to yttria-stabilized zirconia of coating thickness of 330 μm in the wavelength range of 3.5–3.9 μm was found to predict temperature with an error of less than 1.5% in the presence and absence of background noise.     

A 3-axis precision positioning device using PZT actuators with low interference motions

For expected applications of fast tool servo (FTS) and vibration machining, a 3-axis positioning device with low interference motions is proposed in this paper. The positioning device was composed of a XY stage and a Z-axis stage, which were actuated by piezoelectric (PZT) actuators combined with specially-designed symmetric flexure hinges. Through fundamental experiments, when the applied voltage was 50 V, the displacements along the X-, Y-, and Z-axes were measured as 6.35 μm, 6.61 μm, and 10.12 μm, respectively, with the corresponding small percentages of interference displacement of 3.80%, 4.02%, and 3.30%. In addition, the resonant frequencies were obtained as 1.06 kHz, 0.65 kHz, and 0.54 kHz. To examine control performances, a real-time control system considering hysteresis effect of PZT actuators was implemented by the field-programmable gate array (FPGA) modules to conduct tracing controls for sinusoidal waveform, 3D Lissajous motion, and 3D spiral motion. The tracing errors along 3-axis actuations were under 30 nm. The performances of a 3-axis positioning device were well demonstrated. Future work is to perform machining examinations on a machine tool.     

Subpixel edge location method proposed to improve the performance of optical fiber spherical coupling probe during dimensional measurement of micro-cavities with high aspect ratio

A subpixel edge location method based on orthogonal Jacobi–Fourier moments is proposed in this paper to improve the performance of optical fiber spherical coupling probe during dimensional measurement of micro-cavities with high aspect ratio. The effectiveness of the proposed method is proved through the performance test of a micro-hole measuring machine with optical spherical coupling probe. Test results indicate that a blind micro-hole of 400 μm in diameter can be experimentally measured at the depth of 2000 μm with a repeatability of 40 nm and an extremity resolution of 42 nm.     

Research on ECM process of micro holes with internal features

Micro holes with internal features are widely used as spray holes and cooling holes nowadays, which are usually required to be with high aspect ratio and shape accuracy, as well as good surface quality. An electrochemical machining (ECM) process is presented to machine these micro holes with diameter <200 μm. A quantitative relation between micro-hole diameter and machining parameters including voltage, duty ratio and feedrate is obtained through orthogonal experiments. According to the designed shape of internal features, change rules of machining parameters for varied diameters in different depth are obtained, and then micro holes with internal features are shaped precisely. Taking reverse tapered hole as an example, ECM experiments by varying parameters of voltage, duty ratio and feedrate (called varying voltage machining, varying duty ratio machining and varying feedrate machining, respectively) are carried out. Micro holes with inlet diameter of 178 μm and taper angle of 1.05° are shaped on a 1.0 mm-thick workpiece of 18CrNi8. The deviation of inlet is <3 μm and the taper-angle error is <0.1° in varying voltage machining. The corresponding dimensional accuracy of taper angle is improved by 51% than that of varying duty ratio machining under the same efficiency. The machining efficiency of varying voltage machining is increased by 36% compared to the efficiency in varying feedrate machining. In addition, the micro holes with complex features of funnel shape and bamboo shape are machined.     

Non-contact measurement technique for dimensional metrology using optical comb

This paper proposes a non-contact pulsed interferometer for dimensional metrology using the repetition frequency of an optical frequency comb. A compact absolute-length measuring system is established for practical non-contact measurement based on a single-mode fiber interferometer. The stability and accuracy of the measurements are compared with those from a commercial incremental laser interferometer. The drifts of both systems have the same tendency and a maximum difference is approximately 0.1 μm. Subsequently, preliminary absolute-length measurements up to 1.5 m were measured. The signal-to-noise ratios of the small signals are improved by a frequency-selective amplifier. It is apparent that the noise is rejected, and the intensity of the interference fringes is amplified, achieving a maximum standard deviation of measurement approximately 1 μm. The proposed technique can provide sufficient accuracy for non-contact measurement in applications such as a simple laser-pulse tracking system.     

Tribological property investigation on a novel pneumatic actuator with integrated piezo actuators

Pneumatic piston–cylinder actuators are commonly used in industry for a variety of automation and robotics applications. In order to suppress leakage, these actuators comprise seal rings which unfortunately introduce friction and affect the positioning accuracy and output force. This article investigates vibrations of the seal generated by integrated piezo actuators to reduce friction force. For this, two piezoelectric stacks are integrated in the cylinder and used to excite vibration modes. This concept was studied in a compact cylinder pneumatic actuator with a bore diameter of 5 mm and a stroke of 10 mm. Dry friction measurement shows a 52% reduction from the original friction force at a driving frequency of 18.29 kHz and vibration amplitude of 0.05 μm. In the wet friction experiments, the friction force can be reduced by 54% from the original wet friction with vibrations at amplitude of 0.04 μm.     

High-precision radius measurement of ball indenter

To solve the problem of calibrating the radius of a ball indenter in a hardness tester, a laser confocal radius measurement and calibration method for the ball indenter is proposed without separating the ball from the body of the indenter. The laser confocal radius measurement and calibration method uses the maximum of the confocal axial intensity curve to precisely identify the cat’s eye and confocal position of the test ball indenter. The distance between these two positions is then measured to achieve high-precision radius measurement. The theoretical analyses and experimental results indicate that the radius measurement uncertainty of the ball indenter with a diameter of 1.5875 mm is within 0.12 μm.     

Micro-scale hole profile measurement using rotating wire probe and acoustic emission contact detection

The development of a new probing method to inspect the inner diameter of micro-scale holes is presented in this paper. This was accomplished by contact detection using acoustic emission with a Ø170 μm rotating wire probe tip. Contact is detected when the rotating probe approaches and impacts the hole’s inner surface. The effective diameter of the rotating probe is calibrated by using a high precision grade 0 Mitutoyo gauge block. The wire rotating probe used was fabricated with micro stainless steel wire and micro tubes. The probe’s effective diameter was compensated for in the measurement of the hole. The probe was used to measure the diameter and the roundness of micro-scale holes. Probes used in previous publications have different geometry than the probe in this paper and are used almost exclusively for external dimensions. Micro-scale holes of less than 1.0 mm in diameter and 10 mm in depth are successfully measured and the 3D profile is created accordingly. Also, the out-of-roundness values of each level spacing, 50 μm apart in height, are calculated.     

Thermopower detection of single nanowire using a MEMS device

We present a MEMS-based device on a silicon nitride membrane in order to measure the thermoelectric properties of a single nanowire. A temperature gradient along a nanowire was generated by a nanoheater, and the temperature was measured by Pt thermometers. A thermal simulation using a finite element method was conducted to analyze the temperature distribution over the MEMS device. The validity of the MEMS device was established by testing the Pt nanowires which had different symmetry configurations. From the test results of Pt nanowires, a convincing temperature calibration method was proposed and applied to an actual case of Bi₂Te₃ nanowire. We measured a Seebeck coefficient of −53 μV/K and electrical conductivity of 2.23 × 10⁵ S/m for a single Bi₂Te₃ nanowire with a diameter of 70 nm at 300 K. Our solid design for thermoelectric measurements based on a membrane structure enables the fast and high-yield characterization of one-dimensional nanostructures.     

Design and validation of a grinding wheel optical scanner system to repeatedly measure and characterize wheel surface topography

This paper describes the design and validation of an upgraded grinding wheel scanner system that controls the position of a Nanovea CHR-150 Axial Chromatism sensor along the x- and y-directions of the wheel surface to measure and characterize wheel surface topography. The scanner features a novel homing system that enables the wheel to be removed from the scanner, used on a grinding machine and then re-mounted and re-homed so that the same location on the wheel surface can be repeatedly measured and monitored. The average standard deviation for homing was 27.6 μm and 19.3 μm in the x- and y-directions, respectively, which is more than adequate for typical area scans of 25 mm². After homing, the scanner was able to repeatedly measure features that were similar in size to an abrasive grain (∼200 μm diameter) with an average error of 9.3 μm and 5.9 μm in the x- and y-directions, respectively. The resulting topography measurements were compared with Scanning Electron Microscope images to demonstrate the accuracy of the scanner. A custom particle filter was developed to process the resulting data and a novel analysis technique involving the rate of change of measured area was proposed as a method for establishing the reference wheel surface from which desired wheel topography results can be reported such as the number of cutting edges, cutting edge width and cutting edge area as a function of radial depth.