软刻蚀技术及其应用

软刻蚀是通过表面带图案的弹性模板来实现图案的转移的图形复制技术，作为非光刻微米和纳米量级微加工方法，加工的分辨率可以达到5nm～100μm，它克服了传统光刻技术的缺陷，为形成和制作平面和曲面上的微米和纳米图案提供了简便、有效的低成本途径。本文将主要介绍微接触印刷、近场光刻蚀、纳米压印等软刻蚀方法的原理、方法以及面临的问题，并简介了它们在微米和纳米加工、微电子学、材料科学、光学、微电子机械系统、表面化学等方面应用。     

陶瓷微器件的软刻蚀成形研究进展

软刻蚀技术是基于传统光刻蚀技术提出的一系列技术,包括微模塑、转移微模塑和毛细微模塑等,其共同特点是利用弹性模作为微结构转移元件,复制其他方法制备的原始模板的微结构,再用此弹性模进行微结构的成形。因其成本低廉、操作过程简单,为陶瓷微器件的制备提供了一种先进的净成形加工技术。其工艺步骤主要包括:弹性模的制备、浆料或陶瓷预聚体的制备、注模、干燥(交联固化)、脱模和烧结。本文按照制备工艺综述了软刻蚀技术成形陶瓷微器件的研究进展,着重讨论了影响微成形的关键因素,并对将来的研究方向进行了展望。     

软膜紫外光固化纳米压印中Amonil光刻胶的刻蚀参数优化(英文)

报道了反应离子刻蚀转移图形过程中对Amonil光刻胶的刻蚀参数优化的结果.利用软膜紫外光固化纳米压印技术,首先制备了线宽/间距均为200 nm的纳米光栅结构.然后采用反应离子刻蚀的方法去除残留的Amonil光刻胶.研究了不同的气体组成、射频功率、压强和气体流量对刻蚀形貌、表面粗糙度以及刻蚀速度的影响.在优化的工艺条件下,获得了理想的具有垂直侧壁形貌和较小表面粗糙度的纳米光栅阵列.结果表明,选择优化的刻蚀工艺参数,既能有效地改善图形转移的性能,同时也能提高所制备结构的光学应用特性.     

Technology Assessment in Social Context: The case for a new framework for assessing and shaping technological developments

Traditional expert (or technocratic) approaches to Technology Assessment have been fundamentally challenged by two observations. The first is that social impacts are not side effects of technology; they are core dimensions of new technology and technological development, and are a function of the coproduction of technology and society. As such, they can only be understood in social, not technical terms. Secondly, technological developments are driven by particular visions for society that are normative. Because these visions (and the latent premises that underpin them) are implicit and not negotiated by society, they are, in effect, undemocratic. Participatory methods have been utilized by Technology Assessment to improve the evaluation of the social and ethical dimensions of technology, and to democratize decision making about science and technology. However, we argue that public participation on its own does not necessarily lead to deeper understandings of social effects, nor necessarily to democratic input into decision making. We therefore make a case for a new form of Technology Assessment which we call TASC — Technology Assessment in Social Context. It takes a constructive, social systems approach to assess technology in social context and seeks to shape technology and social contexts through information, interaction and dialogue.     

Dynamically Tuning Particle Interactions and Assemblies at Soft Interfaces: Reversible Order–Disorder Transitions in 2D Particle Monolayers

Particles trapped at fluid interfaces experience long‐range interactions that determine their assembly behavior. Because particle interactions at fluid interfaces tend to be unusually strong, once particles organize themselves into a 2D assembly, it is challenging to induce changes in their microstructure. In this report, a new approach is presented to induce reversible order–disorder transitions (ODTs) in the 2D monolayer of colloidal particles trapped at a soft gel–fluid interface. Particles at the soft interface, consisting of a nonpolar superphase and a weakly gelled subphase, initially form a monolayer with a highly ordered structure. The structure of this monolayer can be dynamically varied by the addition or removal of the oil phase. Upon removing the oil via evaporation, the initially ordered particle monolayer undergoes ODT, driven by capillary attractions. The ordered monolayer can be recovered through disorder‐to‐order transition by simply adding oil atop the particle‐laden soft interface. The possibility to dynamically tune the interparticle interactions using soft interfaces can potentially enable control of the transport and mechanical properties of particle‐laden interfaces and provide model systems to study particle‐laden soft interfaces that are relevant to biological tissues or organs.     

Surface and Interface Properties in Thin‐Film Solar Cells: Using Soft X‐rays and Electrons to Unravel the Electronic and Chemical Structure

Thin‐film solar cells have great potential to overtake the currently dominant silicon‐based solar cell technologies in a strongly growing market. Such thin‐film devices consist of a multilayer structure, for which charge‐carrier transport across interfaces plays a crucial role in minimizing the associated recombination losses and achieving high solar conversion efficiencies. Further development can strongly profit from a high‐level characterization that gives a local, electronic, and chemical picture of the interface properties, which allows for an insight‐driven optimization. Herein, the authors' recent progress of applying a “toolbox” of high‐level laboratory‐ and synchrotron‐based electron and soft X‐ray spectroscopies to characterize the chemical and electronic properties of such applied interfaces is provided. With this toolbox in hand, the activities are paired with those of experts in thin‐film solar cell preparation at the cutting edge of current developments to obtain a deeper understanding of the recent improvements in the field, e.g., by studying the influence of so‐called “post‐deposition treatments”, as well as characterizing the properties of interfaces with alternative buffer layer materials that give superior efficiencies on large, module‐sized areas.     

Metallic ions as therapeutic agents in tissue engineering scaffolds: an overview of their biological applications and strategies for new developments

This article provides an overview on the application of metallic ions in the fields of regenerative medicine and tissue engineering, focusing on their therapeutic applications and the need to design strategies for controlling the release of loaded ions from biomaterial scaffolds. A detailed summary of relevant metallic ions with potential use in tissue engineering approaches is presented. Remaining challenges in the field and directions for future research efforts with focus on the key variables needed to be taken into account when considering the controlled release of metallic ions in tissue engineering therapeutics are also highlighted.