软刻蚀技术及其应用

软刻蚀是通过表面带图案的弹性模板来实现图案的转移的图形复制技术，作为非光刻微米和纳米量级微加工方法，加工的分辨率可以达到5nm～100μm，它克服了传统光刻技术的缺陷，为形成和制作平面和曲面上的微米和纳米图案提供了简便、有效的低成本途径。本文将主要介绍微接触印刷、近场光刻蚀、纳米压印等软刻蚀方法的原理、方法以及面临的问题，并简介了它们在微米和纳米加工、微电子学、材料科学、光学、微电子机械系统、表面化学等方面应用。     

软膜紫外光固化纳米压印中Amonil光刻胶的刻蚀参数优化(英文)

报道了反应离子刻蚀转移图形过程中对Amonil光刻胶的刻蚀参数优化的结果.利用软膜紫外光固化纳米压印技术,首先制备了线宽/间距均为200 nm的纳米光栅结构.然后采用反应离子刻蚀的方法去除残留的Amonil光刻胶.研究了不同的气体组成、射频功率、压强和气体流量对刻蚀形貌、表面粗糙度以及刻蚀速度的影响.在优化的工艺条件下,获得了理想的具有垂直侧壁形貌和较小表面粗糙度的纳米光栅阵列.结果表明,选择优化的刻蚀工艺参数,既能有效地改善图形转移的性能,同时也能提高所制备结构的光学应用特性.     

Technology Assessment in Social Context: The case for a new framework for assessing and shaping technological developments

Traditional expert (or technocratic) approaches to Technology Assessment have been fundamentally challenged by two observations. The first is that social impacts are not side effects of technology; they are core dimensions of new technology and technological development, and are a function of the coproduction of technology and society. As such, they can only be understood in social, not technical terms. Secondly, technological developments are driven by particular visions for society that are normative. Because these visions (and the latent premises that underpin them) are implicit and not negotiated by society, they are, in effect, undemocratic. Participatory methods have been utilized by Technology Assessment to improve the evaluation of the social and ethical dimensions of technology, and to democratize decision making about science and technology. However, we argue that public participation on its own does not necessarily lead to deeper understandings of social effects, nor necessarily to democratic input into decision making. We therefore make a case for a new form of Technology Assessment which we call TASC — Technology Assessment in Social Context. It takes a constructive, social systems approach to assess technology in social context and seeks to shape technology and social contexts through information, interaction and dialogue.     

Metallic ions as therapeutic agents in tissue engineering scaffolds: an overview of their biological applications and strategies for new developments

This article provides an overview on the application of metallic ions in the fields of regenerative medicine and tissue engineering, focusing on their therapeutic applications and the need to design strategies for controlling the release of loaded ions from biomaterial scaffolds. A detailed summary of relevant metallic ions with potential use in tissue engineering approaches is presented. Remaining challenges in the field and directions for future research efforts with focus on the key variables needed to be taken into account when considering the controlled release of metallic ions in tissue engineering therapeutics are also highlighted.