球面离子注入均匀性的计算机模拟

<正> 近几年来,金属材料的真空处理技术飞速发展,从原来的真空热处理,发展到今天的真空镀膜和在金属中的离子注入技术。无论是金属表面的镀膜还是在金属中注入离子,均可改善金属材料的机械性能。     

用阴极电弧源实现离子渗金属

<正> 前 言 近几年,在金属材料表面改性的工艺中出现了许多新的技术。其中真空镀膜、离子注入、离子渗较为典型。镀膜是在金属表面覆盖一层性质优良的材料,以此来改善金属材料的耐腐蚀性、耐磨性;离子注入是把要注入的离子加速,使其具有一定的能量,然后打入到金属表面,使金属表面产生晶体缺陷,从而改善了性能。介于镀膜与离子注入之间的是离子渗。在很早以前就出现了渗碳、渗硼、渗氮以及非金属多元渗的技术。     

金属材料改性的离子注入技术

本文概述了金属离子注入技术的特点，并就国内外的应用情况，介绍了离子注入后，金属材料耐磨性、抗蚀性显著改善的研究。着重对金属离子注入机的要求和发展方向作了简要介绍。     

脉冲钨离子注入4Cr5MoV1Si钢改善其耐磨性的研究

采用由金属蒸汽真空弧（MEVVA）离子源引的强束流脉冲金属钨离子对4Cr5MoV1Si(H13)钢进行了离子注入表面改性研究,用针盘式磨损机测得样品的耐磨性提高两部左右,使用卢瑟福背散射谱（RBS）测量了钨在样品中的浓度深度分布,采用X射线衍射考察了注入样品的表面微结构,按照非线性碰撞理论,讨论了样品的耐磨性,表面成分,结构与注入参数（主要是注入能量和注入束流密度）的关系。     

基于Opera-3D软件的碳化硅离子注入机光路设计与仿真

碳化硅（SiC）离子注入机是碳化硅半导体器件制造的核心装备，其光路设计与仿真是碳化硅离子注入整机研发的关键核心技术。利用Opera-3D软件研究了B+在不同注入能量下经加速、聚焦到靶室的传输包络图和束流截面形状，模拟仿真了B+通过扫描器、平行透镜后的注入均匀性，并与实际验证结果进行了对比。结果表明：现有SiC离子注入机光路在50～350 keV能量范围内具有较好的束流截面形状、离子传输效率和注入均匀性，能够满足SiC离子注入工艺需要。     

金属材料改性的离子注放技术

本文概述了金属离子注入技术的特点，并就国内外的应用情况，介绍了离子注入后，金属材料耐磨性，抗蚀性显著改善的研究。着重对金属离子注入机的要求和发展方向作了简要的介绍。     

离子注入的特殊应用

描述了离子注入的几个特殊应用,其中包括离子束退火效应,增加肖特基势垒高度,注入吸杂效应,合成 SiO_2膜及离子注入材料改性等。     

表面改性氮化钛薄层的电子衍射分析

近年来离子注入作为表面改性的有效方法得到了快速的发展,氮化钛具有很高的硬度,在材料表面形成的薄层氮化钛可以提高抗磨损性能,这使得氮离子注入受到工程界的重视。改性薄层的研究还能丰富金属物理及金属学的知识,所以也引起了科学界的兴趣。本工作对离子束强化沉积得到的表面改性氮化钛薄层作了透射电镜观察,着重分析了其电子衍射强度异常现象。     

强流氧离子注入机注入均匀性分析及提高

对强流氧离子注入机的注入靶室进行分析探讨,对影响均匀性指标的靶盘结构、束的形状和束扫描注入方式进行研究,结合主体硬件,增加晶片自旋装置和采用新的扫描方式,来提高注入均匀性指标。     

离子束辅助低能碳离子注入工艺原理

离子束辅助低能碳离子注入是在低能含碳离子束轰击样品表面并沉积膜层的同时采用中能离子束辅助轰击注入，它可在低温下将碳离子注入到样品表层足够的深度，其注入深度比动态离子束混合(DIM)增加1～2倍。离子束流实行交替变化，有利于保持较低的样品基体温度，且比恒束流注入的深度有明显增加。它对材料表面改性效果明显优于DIM工艺，离子注入改性后，40Cr钢表面显微硬度HV可提高一倍左右。     

纳米TiO_2太阳能电池电极修饰研究进展

综述了近年来国内外在TiO2太阳能电池电极修饰技术方面的研究成果,重点介绍了有关纳米TiO2薄膜电极和TiO2纳米管电极修饰技术的研究进展,包括半导体复合掺杂、过渡金属离子掺杂、非金属离子掺杂、导电高聚物掺杂和贵金属沉积掺杂等。并对该工作和今后的研究问题进行了总结和展望。     

中国集成电路多层布线工艺技术的实践及发展方向

本文结合我公司双层布线工艺技术的自我实践及我公司与日本富士通公司技术合作的成果，再引用当今世界上最先进的CMP多层布线技术，来阐述我国集成电路双层布线技术的实践及发展方向。     

Vanadium‐Based Nanomaterials: A Promising Family for Emerging Metal‐Ion Batteries

The emerging electrochemical energy storage systems beyond Li‐ion batteries, including Na/K/Mg/Ca/Zn/Al‐ion batteries, attract extensive interest as the development of Li‐ion batteries is seriously hindered by the scarce lithium resources. During the past years, large amounts of studies have focused on the investigation of various electrode materials toward emerging metal‐ion batteries to realize high energy density, high power density, and a long cycle life. In particular, vanadium‐based nanomaterials have received great attention. Vanadium‐based compounds have a big family with different structures, chemical compositions, and electrochemical properties, which provide huge possibilities for the development of emerging electrochemical energy storage. In this review, a comprehensive overview of the recent progresses of promising vanadium‐based nanomaterials for emerging metal‐ion batteries is presented. The vanadium‐based materials are classified into four groups: vanadium oxides, vanadates, vanadium phosphates, and oxygen‐free vanadium‐based compounds. The structures, electrochemical properties, and modification strategies are discussed. The structure–performance relationships and charge storage mechanisms are focused on. Finally, the perspectives about future directions of vanadium‐based nanomaterials for emerging energy storage devices are proposed. This review will provide comprehensive knowledge of vanadium‐based nanomaterials and shed light on their potential applications in emerging energy storage.     

一台新型的宽束离子束混合装置

本文描述了材料表面改性或优化的新型宽束离子束混合装置。系统含有引出离子不同能量范围的三种离子源。可用于单离子注入,离子束混合,单离子或反应离子束溅射淀积以及离子束增强淀积。它装备有大的水冷却台,可进行各种复杂的运动,以满足处理各种复杂形状的大的工件的需要。本文还对该机的两种使用实例做了介绍。     

Metal Ion Implantation for the Fabrication of Stretchable Electrodes on Elastomers

Here, the use of low‐energy metal ion implantation by filtered cathodic vacuum arc to create highly deformable electrodes on polydimethylsiloxane (PDMS) membranes is reported. Implantation leads to the creation of nanometer‐size clusters in the first 50 nm below the surface. When the elastomer is stretched, these small clusters can move relative to one another, maintaining electrical conduction at strains of up to 175%. Sheet resistance versus ion dose, resistance versus strain, time stability of the resistance, and the impact of implantation on the elastomer's Young's modulus are investigated for gold, palladium, and titanium implantations. Of the three tested metals, gold has the best performance, combining low and stable surface resistance, very high strain capabilities before loss of electrical conduction, and low impact on the Young's modulus of the PDMS membrane. These electrodes are cyclically strained to 30% for more than 10⁵ cycles and remain conductive. In contrast, sputtered or evaporate metals films cease to conduct at strains of order 3%. Additionally, metal ion implantation allows for creating semi‐transparent electrodes. The optical transmission through 25‐µm‐thick PDMS membranes decreases from 90% to 60% for Pd implantations at doses used to make stretchable electrodes. The implantation technique presented here allows the rapid production of reliable stretchable electrodes for a number of applications, including dielectric elastomer actuators and foldable or rollable electronics.     

离子注入技术在气敏材料上的应用

离子注入技术已被应用于气敏材料的开发研究，这是离子注入技术的一个较新的应用领域。本文介绍离子注入技术对气敏材料表面层组分、结构、电导率及气敏特性进行改性的研究进展。     

Post-Synthetic Modification of Metal–Organic Frameworks Toward Applications

Post-synthetic modification (PSM) of metal–organic framework (MOF) compounds is a useful technique for preparing new MOFs that can exhibit or enhance many of the properties of the parent MOFs. PSM can be carried out by a number of approaches such as modifying the linker (ligand) and/or metal node, and adsorption/exchange of guest species. The surface environment of the MOF can be modified to increase structural stability as well as introducing desired properties. There is considerable scope in widening the applications of the MOF with compatible metal or ligand employing the PSM. This review focuses on the recent developments of modified materials through PSM, which augers well for the chemical modification and functionalization of MOFs. In this review, different types of PSM methods are presented in an orderly manner, and the diverse applications of resultant frameworks are described and discussed.     

Surface Charge Modification on 2D Nanofluidic Membrane for Regulating Ion Transport

2D nanofluidic membranes are capable of regulating ion transport toward various applications concerning energy and environment, which is primarily contributed by the excess charge on the interior surface of narrow nanoscale pores. However, there is still a lack of comprehensive summaries and discussions on the surface charge modification principles and strategies of 2D nanofluidic membranes, as well as the practical applications of charge-modified 2D nanofluidic membranes for regulating ion transport. In this review, the surface charge modification principles and charge modification methods of 2D nanofluidic membranes are first introduced in detail, which is of great significance for improving the ion regulation capability of membranes and realizing the design of nanochannel materials. Next, recent advances in the two typical applications of concentration cells and water treatment based on charge-modified 2D nanofluidic membranes are summarized. Finally, some challenges and prospects related to charge-modified 2D nanofluidic membranes are discussed to indicate directions for future research in this field. It is anticipated that this review will provide valuable strategies for the development of high-performance charge-modified 2D nanofluidic membranes toward energy and environment applications.     

金属离子注入钢表面摩擦学特性及应用研究

着重介绍了改善钢表面摩察学特性的方法和提高离子束加工效率的途径。这项金属离子注入技术在工业生产发展中正发挥着重要的作用，并阐述了MEVVA离了注入新技术在工业化应用中的特点。     

Retrospect and Prospect: Nanoarchitectonics of Platinum-Group-Metal-Based Materials

Nanoarchitectonics, a concept encompassing nanoscale microstructures and atomic arrangements in materials, enables the precise modification of materials for desired applications by controlling their physical and chemical properties, as well as surface charge or energy. Particularly in metal materials, where surface reactions play a critical role, nanoarchitecture becomes the most influential factor affecting activity, selectivity, and stability. Focusing on platinum-group metals (PGMs) due to their inherently high efficiency in energy and environmental applications, this article provides a comprehensive review of synthetic methods for the morphological control of metal nanomaterials. The morphological control is classified into atomic arrangements in 0D, 1D, and 2D nanocrystals, as well as nanoporous structures, and the mechanisms of major reactions are covered in detail. Each chapter is supplemented with a table featuring several examples, facilitating the reader's understanding of the structural controls of PGMs. Finally, the article outlines future challenges in achieving novel metal nanoarchitecture. The hope is that this review provides valuable insights into the synthesis of PGM-based nanomaterials and serves as a guide for designing and synthesizing innovative metal nanostructures for diverse applications.