基于侧壁压阻式的位移传感器研制及应用

为了提高面内运动位移检测的灵敏度和改善侧壁压阻工艺与其他工艺间的兼容性问题,研究了一种可用于面内运动位移检测的传感器,提出了利用离子注入工艺和深度反应离子刻蚀(DRIE)工艺相结合制作榆测梁侧壁压阻的方法.侧壁压阻式位移传感器的灵敏度比在检测梁表面制作压阻的传统位移传感器高近一倍.同时把位移传感器集成到基于体硅工艺的纳米级定位平台上,实验测试表明.这种位移传感器加工技术可以很容易地与其他工艺相兼容,位移传感器的灵敏度优于0.903mV/μm,线形度优于O.814%,分辨率优于12.3nm.     

用于纳米操作的硅基集成式微型 xy 定位平台

针对纳米级定位平台小型化和高定位精度的要求,基于体硅工艺研制出一种集结构、驱动和位移检测一体化的集成式微型纳米级xy定位平台. 采用体硅双面深度反应离子刻蚀（DRIE）技术释放出高深宽比的静电梳齿驱动器、检测梁及定位平台结构. 由于定位平台属于面内运动,为了提高面内运动位移检测的灵敏度提出了一种利用离子注入工艺和DRIE技术相结合制作检测梁侧壁压阻的方法,并利用该侧壁压阻工艺成功地把基于侧壁压阻式的位移传感器集成到微型xy定位平台上. 实验测试表明,位移传感器的灵敏度优于1.17mV/μm,线形度优于0.814%,当驱动电压取30V时,定位平台的单轴输出位移可达±10μm,并且定位平台x方向和y方向上的位移耦合量非常小;在空气条件下测得定位平台的一阶固有频率为983Hz.     

用于纳米操作的硅基集成式微型 xy 定位平台

针对纳米级定位平台小型化和高定位精度的要求,基于体硅工艺研制出一种集结构、驱动和位移检测一体化的集成式微型纳米级xy定位平台.采用体硅双面深度反应离子刻蚀(DRIE)技术释放出高深宽比的静电梳齿驱动器、检测梁及定位平台结构.由于定位平台属于面内运动,为了提高面内运动位移榆测的灵敏度提出了一种利用离子注入工艺和DRIE技术相结合制作检测梁侧壁压阻的方法.并利用该侧壁压阻工艺成功地把基于侧壁压阻式的位移传感器集成到微型xy定位平台上.实验测试表明,位移传感器的灵敏度优于1.17mV/μm,线形度优于0.814%,当驱动电压取30V时,定位平台的单轴输出位移可达±10/μm,并且定位平台x方向和y方向上的位移耦合量非常小;在空气条件下测得定位平台的一阶固有频率为983Hz.     

带有静电自检测功能的高灵敏度加速度传感器

研究了一种带有自检功能的在平面内自限制压阻式加速度传感器.为实现该加速度传感器,提出了一套新的体硅微机械工艺,使用普通硅片取代SOI硅片来制作器件.传感器采用在深槽侧壁(悬臂梁弯曲的表面)制作压阻的方法,灵敏度比在硅表面上制作压阻的传统器件高近一倍.传感器利用集成在内的静电驱动器,实现电自检测功能.     

带有静电自检测功能的高灵敏度加速度传感器

研究了一种带有自检功能的在平面内自限制压阻式加速度传感器．为实现该加速度传感器，提出了一套新的体硅微机械工艺，使用普通硅片取代SOI硅片来制作器件．传感器采用在深槽侧壁（悬臂梁弯曲的表面）制作压阻的方法，灵敏度比在硅表面上制作压阻的传统器件高近一倍．传感器利用集成在内的静电驱动器，实现电自检测功能．     

SOI压阻式面内加速度传感器的交叉灵敏度

设计了一种基于绝缘衬底上硅(SOI)片的面内振动压阻式加速度传感器,并针对其交叉灵敏度性能进行了研究,分析得出传感器的灵敏度与压阻微梁的轴向应力呈正比关系,并通过仿真说明该结构形式的加速度传感器具有非常低的交叉灵敏度,对检测方向的输出干扰非常小。进行了工艺加工和实验测试,实验结果表明,该面内振动的压阻式加速度传感器在20℃下,工作方向上的灵敏度为0.67 mV/g,而另外两个非工作方向(x轴和z轴)上的交叉灵敏度分别为7.3×10-4%和6.6×10-4%,对工作方向的加速度检测影响非常小,此结构的设计方法对于高性能的加速度传感器的研究具有重要的参考意义。     

一种半岛型结构谐振梁压力传感器

提出了一种新型结构压力传感器,器件由上下两硅片键合而成,上硅片制作半岛型结构氮化硅谐振梁,下硅片制作矩形压力膜.应用有限元软件对器件结构及灵敏度进行了计算机模拟分析,器件利用MEMS技术研制并采用电热激励压阻拾振方式进行了测试.实验及理论模拟分析结果证实新型结构可以大大提高压力传感器灵敏度.     

硅压阻式湿度传感器的研究

本文研究了一种利用压阻原理检测相对湿度的传感器结构.改进了压阻结构,在压阻的拐弯处用Al引线代替浓硼掺杂,避免了拐弯处压阻的负压阻效应,提高了传感器的灵敏度.采用离子注入工艺制作压阻,使得硼掺杂更加均匀,提高了压阻的匹配度.对流水出来的传感器进行测试和分析,数据结果表明:在20℃时,传感器的灵敏度为0.236 mV/%RH,最大湿滞约为5%RH,传感器有较好的线性.     

MEMS压阻超声传感器的设计与优化

提出了一种新的压阻式超声传感器结构,该结构由主振梁和微传感梁组成,在声压的作用下,主振梁振动从而带动微传感梁的振动.通过有限元软件Ansys仿真分析该结构的灵敏度,并与悬臂梁结构压阻式声传感器相比,结果表明灵敏度有了一定的提高.为了实现结构的优化,仿真了结构的尺寸与共振频率的关系,对相同共振频率的结构进行了静力分析,计算并对比了不同尺寸结构的灵敏度,从而得到灵敏度最高的结构,实现了结构的优化.     

500pa微压传感器的研制

硅压力传感器发展的一个重要趋势,是向高灵敏度的微压传感器发展。1993年我们率先采用微机械的梁膜结构制得PT-24量程lkpa微压传感器。但在进一步提高灵敏度的研究过程中,遇到如下几个问题:(1)非线性随着灵敏度提高变差;(2)灵敏度提高,稳定性变差;(3)过载能力不够;(4)静电封接时背岛与玻璃基片相接。本文针对上述问题进行了研究,在PT-24量程1kpa微压传感器的版图和工艺基础上进行改进和提高,成功地设计并制作出PT-28量程500pa压阻式扩散硅微压传感器。     

On a wing and a prayer

Aircraft giants Boeing and Airbus are pinning their hopes on very different visions of how air travel will evolve in the coming decade.     

一年之间，物换星移

去年的这个时候,供货商们还在为生存而挣扎。如今,2009年的年报已经公布,许多供应商的年报业绩之好,就连最乐观的分析师也始料未及。这种变化的原因很简单：供应商们大幅削减成本,接下来是强劲的需求,这又导致了随后高企的设备利用率。     

Building a in a flash supercomputer

A flash mob is a group of strangers, organized over the Internet, that comes together briefly, acts out a predetermined scenario-often something as simple as clapping for 30 seconds-and then disperses. A supercomputer is a very fast and powerful computer that outperforms most mainframes, at a cost, typically, of millions of dollars. Can a flash mob build a supercomputer? It can sure try, and so it did on 3 April at the University of San Francisco's Koret athletic center. The goal was to run the Linpack benchmark, a standard method of assessing the speed of supercomputers, to achieve a speed of at least 403 gigaflops (billion floating point operations per second). This would be fast enough to earn the system a place on the list of the world's fastest 500 supercomputers. The goal was not reached. The group reached just 180 gigaflops before it was time to pack up the computers and go home. However, even though the San Francisco effort fell short of speed goal, it did ignite imaginations.     

Cooperative control of a human and a robot manipulator for positioning a cart on a frictionless plane

Robots may be expected to execute some tasks in cooperation with humans. Control systems for such robots should be appropriate to adapt to human characteristics in order to successfully accomplish the task. Pushing a cart on a frictionless plane in cooperation with a human is a basic example to such a task. To control the motion of an object from one point to another on a frictionless plane is impossible by only pushing in one direction without supporting it in the opposite direction, since as soon as the force is applied, the object will move without stopping its motion. In this paper, compliant cooperative positioning of a cart on a frictionless plane by a human and a manipulator is proposed using impedance control method with the parameters obtained from human–human cooperation.     

Analysis of a coaxial-to-waveguide adaptor including a discendedprobe and a tuning post

A field matching analysis of a coaxial-to-waveguide adaptor incorporating a disc-ended probe and a tuning post is presented. In this analysis, the tuning post is considered as a short-circuited second probe. A computer algorithm for calculating the input impedance of this structure is developed. This algorithm is used to investigate and improve the operation of a commercially available coaxial-to-waveguide adaptor     

Transmission-Line Properties of a Strip on a Dielectric Sheet on a Plane

The subject is a strip Iine formed of a strip and a parallel ground plane separated by a dielectric sheet (commonly termed "microstrip"). Building on the author's earlier papers all the significant properties are formulated in explicit form for practical applications. This may mean synthesis and/or analysis. Each formula is a close approximation for all shape ratios, obtained by a gradual transition between theoretical forms for the extremes of narrow and wide strips. The effect of thickness is formulated to a second-order approximation. Then the result is subjected to numerical differentiation for simple evaluation of the magnetic-loss power factor from the skin depth. The transition formulas are tested against derived formulas for overlapping narrow and wide ranges of shape. Some of these formulas are restated from the earlier derivations and others are derived herein. The latter include the second-order approximation for a narrow thin strip, and a close approximation for a narrow or wide square cross section in comparison with a circular cross section. Graphs are given for practical purposes, showing the wave resistance and magnetic loss for a wide range of shape and dielectric. For numerical reading, the formulas are suited for programming on a digital pocket calculator.     

基于智能手机压电基片上微液滴位置分析章

为了降低微流分析成本,该文提出了基于智能手机检测压电基片上目标微液滴方法,并开发出相应的应用软件,通过分析微液滴颜色信息和几何信息定位目标微液滴位置,结合分析时间获取微液滴输运速度。为验证提出方法的正确性,以5 μL黑色墨水溶液微液滴为研究对象,进行压电基片上微液滴识别和位置分析实验。结果表明,该文所提方法和开发的应用软件可识别和定位压电基片上微液滴,在功率为27.5 dBm时,第2~10 s段内微液滴输运速度为0.416 mm/s。     

The measurement of a large antenna using a spacecraft as a receiver

Two computational methods for obtaining the gain pattern of a large antenna using power levels recorded by a spacecraft are developed from the transmission equation. Nominally, the large antenna is linearly polarized while the spacecraft's receiving antennas are circularly polarized. Since the spacecraft has no attitude control system, the orientation of the receiving antennas is not known a priori nor its orientation the same from orbit to orbit. The first method relies on an independent spacecraft attitude determination system to furnish the orientation of the receiving antennas. It combines this information with receiving-antenna gain measurements to give the power level of the incident radiation. Losses due to polarization mismatch are taken into account, but polarization loss factors are not actually computed. The second method relates simultaneous measurements made by separate channels with separate receiving antennas. By solving a system of equations numerically, one can determine the direction of the incident radiation as well as its power level. This alleviates the need for an attitude determination system. These methods originated in the operations of the spacecraft NUSAT1 (northern Utah Satellite)