异质结位置对缓变集电结SiGe HBT性能的影响

研究了npn型SiGe HBT集电结附近的异质结位置对器件性能的影响.采用Taurus-Medici 2D器件模拟软件,在渐变集电结SiGe HBT的杂质分布不变的情况下,模拟了各种异质结位置时的器件直流增益特性和频率特性.同时比较了处于不同集电结偏压下的直流增益和截止频率.分析发现即使没有出现导带势垒,器件的直流和高频特性仍受SiGe层中性基区边界位置的影响.模拟结果对SiGe HBT的设计和分析都具有实际意义.     

SiGe HBT大信号扩散电容模型研究

基于SiGe HBT（异质结双极晶体管）大信号等效电路模型,建立了SiGe HBT大信号发射结扩散电容模型和集电结扩散电容模型．该模型从SiGe HBT正反向传输电流出发,研究晶体管内可动载流子所引起的存储电荷（包括正向存储电荷和反向存储电荷）的基础上,同时考虑了厄利效应对载流子输运的影响,其物理意义清晰,拓扑结构简单。将基于大信号扩散电容模型的SiGe HBT模型嵌入PSPICE软件中,实现对SiGe HBT器件与电路的模拟分析。对该模型进行了直流特性模拟分析,直流模拟分析结果与文献报道的结果符合得较好,瞬态特性分析结果表明响应度好。     

一种新型双多晶自对准结构的高压功率SiGe HBT

为了改善高压功率SiGe HBT的综合性能,应用图形外延SiGe工艺,研制出了一种新型的双多晶自对准SiGe HBT器件.相对于双台面结构的SiGe HBT而言,该结构的SiGe HBT在发射极总周长不变的情况下,其发射结面积减少超过50%,集电结面积减少近70%,BVCBO也提高了近28%.经测试,器件的结漏电和直流增益等参数均符合设计要求.     

SiGe HBT直流电流增益模型研究

基于器件结构特点和电学特性,研究了影响SiGe HBT(异质结双极晶体管)直流电流增益的主要因素,分析了不同的电流密度条件下,器件的物理参数、结构参数与集电极电流密度和中性基区复合电流的关系,建立了SiGe HBT集电极电流密度,空穴反注入电流密度、中性基区复合电流、SRH(Shockley-Read- Hall)复合电流密度、俄歇复合电流密度以及直流电流增益模型,对直流电流增益模型进行了模拟仿真,分析了器件物理、结构参数以及复合电流与直流电流增益的关系,得到了SiGe HBT直流电流增益特性的优化理论依据.     

SiGe异质结晶体管频率特性模型研究

在分析载流子输运和分布的基础上，建立了SiGe异质结晶体管(HBT)各时间常数模型；在考虑发射结空间电荷区载流子分布和集电结势垒区存在可劝电荷的基础上，建立了SiGe HBT发射结势垒电容模型和不同电流密度下包括基区扩展效应的集电结势垒电容模型。对SiGe HBT特征频率及最高振荡频率与电流密度、Ge组分、掺杂浓度、结面积等之间的关系进行了模拟，对模拟结果进行了分析和讨论。     

SiGe HBT传输电流模型研究

基于SiGe异质结双极晶体管(HBT)大信号等效电路模型,建立了SiGe HBT传输电流模型.重点考虑发射结能带的不连续对载流子输运产生的影响,通过求解流过发射结界面的载流子密度,建立了SiGe HBT传输电流模型.该模型物理意义清晰,拓扑结构简单.对该模型进行了模拟,模拟结果与文献报道的结果符合得较好.将该模型嵌入PSPICE软件中,实现了对SiGe HBT器件与电路的模拟分析,并对器件进行了直流分析,分析结果与文献报道的结果符合得较好.     

SiGe HBT传输电流模型研究

基于SiGe异质结双极晶体管(HBT)大信号等效电路模型,建立了SiGe HBT传输电流模型.重点考虑发射结能带的不连续对载流子输运产生的影响,通过求解流过发射结界面的载流子密度,建立了SiGe HBT传输电流模型.该模型物理意义清晰,拓扑结构简单.对该模型进行了模拟,模拟结果与文献报道的结果符合得较好.将该模型嵌入PSPICE软件中,实现了对SiGe HBT器件与电路的模拟分析,并对器件进行了直流分析,分析结果与文献报道的结果符合得较好.     

不同集电结结构的AlGaInP/GaAs异质结双极晶体管

设计并制备了三种不同集电结结构的A lG aInP/G aA s异质结双极晶体管,计算给出了三种集电结能带结构。通过对三种HBT的直流特性测试表明,N pN型HBT因异质集电结的导带尖峰出现电子阻挡效应;N p iN型HBT集电结引入i-G aA s层能有效克服电子阻挡效应,同时还具有拐点电压Vknee小、开启电压Voffset小、击穿电压BVCEO大等优点,但由于i-G aA s层引入增加了基区电子扩散长度,使器件电流增益有所下降。     

一种新型SGOI SiGe异质结双极型晶体管

为了改善SiGe异质结双极型晶体管(HBT)的电学特性和频率特性,设计了一种新型的SGOI SiGe HBT。在发射区引入了双轴张应变Si层。多晶Si与应变Si双层组合的发射区有利于提高器件的注入效率。利用Silvaco TCAD软件建立了二维器件结构模型,模拟了器件的工艺流程,并对器件的电学特性和频率特性进行了仿真分析。结果表明,与传统的SiGe HBT相比,新型SGOI SiGe HBT的电流增益β、特征频率fT等参数得到明显改善,在基区Ge组分均匀分布的情况下,β提高了29倍,fT提高了39.9%。     

Ge组分对SiGe HBT主要电学特性的影响

采用SiGe异质结结构提高晶体管的性能,分析了Ge对器件电流增益和频率特性提高的物理机制.综合考虑了Si1-xGex薄膜的稳定性、工艺特点和器件结构对Ge含量以及分布的要求和Ge组分的设计及其对器件电学特性的影响.从理论上推算了SiGe HBT的β和fT等主要特性参数,Ge的引入以及Ge的分布情况对提高这些参数有着显著的影响.Ge的引入对晶体管主要特性参数的提高使得SiGe HBT技术在微波射频等高频电子领域可以有更重要的应用前景.     

THE EFFECT OF DOPANT OUTDIFFUSION ON THE NEUTRAL BASE RECOMBINATION CURRENT IN Si/SiGe/Si HETEROJUNCTION BIPOLAR TRANSISTORS

A new analytical model for the base current of Si/SiGe/Si heterojunction bipolar transistors(HBTs) has been developed. This model includes the hole injection current from the base to the emitter, and the recombination components in the space charge region(SCR) and the neutral base. Distinctly different from other models, this model includes the following effects on each base current component by using the boundary condition of the excess minority carrier concentration at SCR boundaries: the first is the effect of the parasitic potential barrier which is formed at the Si/SiGe collector-base heterojunction due to the dopant outdlffusion from the SiGe base to the adjacent Si collector, and the second is the Ge composition grading effect. The effectiveness of this model is confirmed by comparing the calculated result with the measured plot of the base current vs. the collector-base bias voltage for the ungraded HBT. The decreasing base current with the increasing the collector-base reverse bias voltage is successfully explained by this model without assuming the short-lifetime region close to the SiGe/Si collector-base junction, where a complete absence of dislocations is confirmed by transmission electron microscopy (TEM)[1]. The recombination component in the neutral base region is shown to dominate other components even for HBTs with a thin base, due to the increased carrier storage in the vicinity of the parasitic potential barrier at collector-base heterojunction.     

SOI SiGe HBT集电结渡越时间模型研究

根据器件实际工作情况,找出SOI器件与传统器件的不同,建立并研究了SOI SiGe HBT集电结渡越时间模型。结果表明,模型与集电区掺杂浓度、集电结偏置电压、传输电流有关,电流的增加恶化了渡越时间,进一步恶化了器件性能。所建模型与仿真结果一致。SOI SiGe HBT集电结渡越时间模型的建立和扩展为SOI BiCMOS工艺的核心参数,如特征频率的设计,提供了有价值的参考。     

SiGe HBT的脉冲中子及γ辐射效应

测量了反应堆脉冲中子及γ辐照SiGe HBT典型电参数变化.在反应堆1×1013cm-2的脉冲中子注量和256.85Gy(Si)γ总剂量辐照后,SiGe HBT静态共射极直流增益减小了20%.辐照后基极电流、结漏电流增大,集电极电流、击穿电压减小.特征截止频率fT基本不变,fmax略有减小.初步分析了SiGe HBT反应堆脉冲中子及γ辐射的损伤机理.     

微波功率SiGe HBT研究进展

Si的热导率比大部分化合物半导体(如GaAs)的热导率高,SiGe HBT在一个较宽的温度范围内稳定,SiGe HBT的发射结电压VBE的温度系数dVBE/dT比Si的小,双异质结SiGe HBT本身具有热-电耦合自调能力,所加镇流电阻可以较小,所有这些使SiGe HBT比GaAs HBT和SiBJT在功率处理能力上占一定优势。文章对微波功率SiGe HBT一些重要方面的国内外研究进展进行评述,希望对从事微波功率SiGe HBT的研究者有所帮助。     

The effects of base dopant diffusion on DC and RF characteristicsof InGaAs/InAlAs heterojunction bipolar transistors

The effects of base p-dopant diffusion at junction interfaces of InGaAs/InAlAs HBTs with thin base thicknesses and high base dopings are reported. It is shown that HBTs with compositionally graded emitter-based (E-B) junctions are very tolerant to base dopant outdiffusion into the E-B graded region. The RF performance is nearly unaffected by the diffusion, and the DC current gain and E-B junction breakdown voltages are improved with finite Be diffusion into the E-B graded region     

A comparative study of metamorphic InP/InGaAs double heterojunction bipolar transistors with InP and InAIP buffer layers grown by molecular beam epitaxy

We present a comparison of material quality and device performance of metamorphic InGaAs/InP heterojunction bipolar transistors (HBTs) grown by molecular beam epitaxy (MBE) on GaAs substrates with two different types of buffer layers (direct InP and graded InAlP buffers). The results show that the active layer of InP-MHBT has more than one order of magnitude more defects than that of the InAlP-MHBT. The InAlP-MHBTs show excellent direct current (DC) performance. Low DC current gain and a high base junction ideality factor from the InP-MHBT are possibly due to a large number of electrically active dislocations in the HBT active layers, which is consistent with a large number of defects observed by cross-sectional transmission electron microscopy (TEM) and rough surface morphology observed by atomic force microscopy (AFM).     

Quantifying neutral base recombination and the effects ofcollector-base junction traps in UHV/CVD SiGe HBTs

This work quantifies neutral base recombination in UHV/CVD SiGe heterojunction bipolar transistors (HBTs) using calibrated two-dimensional (2-D) simulation. The simulated collector-base conductance through neutral base recombination (NBR) modulation is far below the experimentally observed values, and hence does not explain the measured output resistance degradation under forced-I_B operation. In spite of the output resistance degradation, these UHV/CVD SiGe HBTs have approximately the same base current as the silicon control, and hence higher current gain. Based on the observation of the majority carrier concentration limited recombination in the CB junction depletion layer, as opposed to the minority carrier concentration limited recombination in the neutral base, local presence of traps in the CB junction depletion layer is suggested. This explains the measured CB conductance modulation and the related output resistance degradation without compromising the current gain. Numerical simulations using traps locally introduced into the CB junctions successfully reproduced the measured collector-base conductance from simulation without appreciable degradation in current gain     

RF power characteristics of SiGe HBTs at cryogenic temperatures

This paper investigates the temperature dependence (from 77 to 300 K) of dc, ac, and power characteristics for n-p-n SiGe heterojunction bipolar transistors (HBTs) with and without selectively implanted collector (SIC). In SiGe HBTs without SIC, the valance band discontinuity at the base-collector heterojunction induces a parasitic conduction band barrier while biasing at saturation region and high current operation at cryogenic temperatures. This parasitic conduction band barrier significantly reduces the current gain and cutoff frequency. For transistors biased with fixed collector current, the measured output power, power-added efficiency, and linearity at 2.4 GHz decrease significantly with decreasing operation temperatures. The temperature dependence of output power characteristic is analyzed by Kirk effect, current gain, and cutoff frequency at different temperatures. The parasitic conduction band barrier in SiGe HBTs with SIC is negligible, and thus the device achieves better power performance at cryogenic temperatures compared with that in SiGe HBT without SIC.     

极端低温下SiGe HBT器件研究进展

系统地介绍了极端低温下SiGe HBT器件的研究进展。在器件级,分析了能带工程对SiGe HBT器件特性的影响,分析了极端低温下器件的直流、交流、噪声特性的变化,以及器件的特殊现象。在电路级,分析了基于SiGe HBT的运算放大器、低噪声放大器和电压基准源电路的低温工作特性。研究结果表明,SiGe HBT器件在低温微电子应用中具有巨大潜力。