Analytical modeling of subthreshold current and subthreshold swing of an underlap DGMOSFET with tied-independent gate and symmetric-asymmetric options

Novel analytical models for subthreshold current and subthreshold slope of a generic underlap DGMOSFET are proposed. The proposed models are validated with published models, experimental data along with numerical simulation results. The reasonably good agreement shows the accuracy of the proposed model. It is demonstrated how device subthreshold leakage current and subthreshold slope values can be favorably affected by proper back gate biasing, back gate asymmetry and gate work function engineering in combination with gate underlap engineering. It is demonstrated that independent gate operation in combination with gate underlap engineering significantly reduce subthreshold leakage currents as compared to nonunderlap-tied gate DGMOSFET. With the reduction in body thickness, an improvement in subthreshold slope value of underlap 4T DGMOSFET is seen, particularly as back/front gate oxide asymmetry. Developed models demonstrate that asymmetric work function underlap 4T DGMOSFETs would have better device subthreshold slope value along with increased back gate oxide asymmetry.     

Dual material gate doping-less tunnel FET with hetero gate dielectric for enhancement of analog/RF performance

In this paper, charge-plasma-based tunnel FET is proposed by employing dual material gate with hetero gate dielectric technique and it is named hetero-dielectric dual material gate doping-less TFET(HD_DMG_DLTFET). It is compared with conventional doping-less TFET(DLTFET) and dual material gate doping-less TFET(DMG_DLTFET) on the basis of analog and RF performance. The HD_DMG_DLTFET provides better ON state current(I_ON=94 μA/μm), I_ON/I_OFF(≈ 1:36×10¹³), point(≈ 3 mV/dec) and average subthreshold slope(AV-SS=40.40 mV/dec). The proposed device offers low total gate capacitance(C_gg)along with higher drive current. However, with a better transconductance(g_m) and cut-off frequency(f_T), the HD_DMG_DLTFET can be a good candidate for RF circuitry. The early voltage(V_EA) and output conductance(g_d) are also moderate for the proposed device with comparison to other devices and therefore can be a candidate for analog devices. From all these simulation results and their study, it is observed that HD_DMG_DLTFET has improved analog/RF performance compared to DLTFET and DMG_DLTFET.     

Impact of gate material engineering(GME) on analog/RF performance of nanowire Schottky-barrier gate all around (GAA) MOSFET for low power wireless applications: 3D T-CAD simulation

In this paper Gate Material Engineered (GME) Gate-Stack (GS) silicon nanowire Schottky-Barrier (SB) Gate All Around (GAA) MOSFET and Single Material Gate Stack Schottky-Barrier Source/Drain Gate All Around (SM-GS-SB-S/D GAA) structures are proposed for low- power wireless applications. The Analog/RF performance for wireless applications of these devices are demonstrated. The effect of Schottky-Barrier (Metal) S/D is studied for Single Metal (SM)–SB-GAA, (Dual Metal) DM-SB-GAA, SM-GS-SB-GAA and GME-GS-SB-GAA MOSFETs, and it is found that GME-GS-SB-GAA MOSFET with metal drain source shows much improved performance in terms of transconductance (g_m), output conductance (g_d), Early Voltage (V_EA), Maximum Transducer Power Gain, cut-off frequency (f_T), and I_on/I_off ratio. Further, harmonic distortion for wireless applications is also studied using ATLAS-3D device simulator. Due to low parasitic S/D resistance the metal Source/Drain DM-GS-SB-S/D-GAA MOSFET demonstrates remarkable I_on of~31.8 μA/μm and saturation transconductance g_m of~68.2 μS with improved third order derivative of transconductance g_m3.     

The impact of gate misalignment on the analog performance of a dual-material double gate junctionless transistor

The analog performance of gate misaligned dual material double gate junctionless transistor is demonstrated for the first time. The cases considered are where misalignment occurs towards source side and towards drain side. The analog performance parameters analyzed are: transconductance, output conductance, intrinsic gain and cut-off frequency. These figures of merits (FOMs) are compared with a dual material double gate inversion mode transistor under same gate misalignment condition. The impacts of different length of control gate (L₁) for a given gate length (L) are also studied and the optimum lengths L₁ under misalignment condition to have better analog FOMs and high tolerance to misalignment are presented.     

Impact of underlap spacer region variation on electrostatic and analog performance of symmetrical high-k SOI FinFET at 20 nm channel length

Continued scaling of CMOS technology to achieve high performance and low power consumption of semiconductor devices in the complex integrated circuits faces the degradation in terms of electrostatic integrity,short channel effects (SCEs),leakage currents,device variability and reliability etc.Nowadays,multigate structure has become the promising candidate to overcome these problems.SOI FinFET is one of the best multigate structures that has gained importance in all electronic design automation (EDA) industries due to its improved short channel effects (SCEs),because of its more effective gate-controlling capabilities.In this paper,our aim is to explore the sensitivity of underlap spacer region variation on the performance of SOI FinFET at 20 nm channel length.Electric field modulation is analyzed with spacer length variation and electrostatic performance is evaluated in terms of performance parameter like electron mobility,electric field,electric potential,sub-threshold slope (SS),ON current (Ion),OFF current (Ioff) and Ion/Ioff ratio.The potential benefits of SOI FinFET at drain-to-source voltage,VDS =0.05 V and VDS =0.7 V towards analog and RF design is also evaluated in terms of intrinsic gain (Av),output conductance (gd),trans-conductance (gm),gate capacitance (Cgg),and cut-off frequency (fT =gm/2πCgg) with spacer region variations.     

Robustness comparison of DG FinFETs with symmetric, asymmetric, tied and independent gate options with circuit co-design for ultra low power subthreshold logic

Double gate FinFETs are shown to be better candidates for subthreshold logic design than equivalent bulk devices. However it is not so clear which configuration of DG FinFETs will be more optimal for subthreshold logic. In this paper, we compare the different device and circuit level performance metrics of DG FinFETs with symmetric, asymmetric, tied and independent gate options for subthreshold logic. We observe that energy delay product (EDP) shows a better subthreshold performance metric than power delay product (PDP) and it is observed that the tied gate symmetric option has ≈78% lower EDP value than that of independent gate option for subthreshold logic. The asymmetry in back gate oxide thickness adds to further reduction in EDP for tied gate and has no significant effect on independent gate option. The robustness (measured in terms of % variation in device/circuit performance metrics for a ±10% variation in design parameters) of DG FinFETs with various options has also been investigated in presence of different design parameter variations such as silicon body thickness, channel length, threshold voltage, supply voltage and temperature, etc. Independent gate option has been seen to be more robust (≈40% less) than that of tied gate option for subthreshold logic. Comparison of logic families for subthreshold regime with DG FinFET options shows that for tied gate option, sub-CMOS, sub-Domino and sub-DCVSL have almost similar and better energy consumption and robustness characteristics with respect to PVT variations than other families.     

Performance assessment and sub-threshold analysis of gate material engineered AlGaN/GaN HEMT for enhanced carrier transport efficiency

The present work explores the features of gate material engineered (GME) AlGaN/GaN high electron mobility transistor (HEMT) for enhanced carrier transport efficiency (CTE) and suppressed short channel effects (SCEs) using 2-D sub-threshold analysis and device simulation. The model accurately predicts the channel potential, electric field and sub-threshold current for the conventional and GME HEMT, taking into account the effect of work function difference of the two metal gates. This is verified by comparing the model results with the ATLAS simulation results. Further, simulation study has been extended to reflect the wide range of benefits exhibited by GME HEMT for its on-state and analog performance. The simulation results demonstrate that the GME HEMT exhibits much higher on current, lower conductance and higher transconductance as compared to the conventional HEMT due to improved CTE and reduced SCEs. This in turn has a direct bearing on the device figure of merits (FOMs) such as intrinsic gain, device efficiency and early voltage. Tuning of GME HEMT in terms of the relative lengths of the two metal gates, their work function difference and barrier layer thickness has further been carried out to enhance the drive current, transconductance and the device FOMs illustrating the superior performance of GME HEMT for future high-performance high-speed switching, digital and analog applications.     

Source/drain extension region engineering in nanoscale double gate SOI MOSFETs: Novel design methodology for low-voltage analog applications

The present paper proposes for the first time, a novel design methodology based on the optimization of source/drain extension (SDE) regions to significantly improve the trade-off between intrinsic voltage gain (A_VO) and cut-off frequency (f_T) in nanoscale double gate (DG) devices. Our results show that an optimally designed 25 nm gate length SDE region engineered DG MOSFET operating at drain current of 10 μA/μm, exhibits up to 65% improvement in intrinsic voltage gain and 85% in cut-off frequency over devices designed with abrupt SDE regions. The influence of spacer width, lateral source/drain doping gradient and symmetric as well as asymmetrically designed SDE regions on key analog figures of merit (FOM) such as transconductance (g_m), transconductance-to-current ratio (g_m/I_ds), Early voltage (V_EA), output conductance (g_ds) and gate capacitances are examined in detail. The present work provides new opportunities for realizing future low-voltage/low-power analog circuits with nanoscale SDE engineered DG MOSFETs.     

后栅工艺高k/金属栅结构NMOSFET偏压温度不稳定性特性研究

本文对后栅工艺高k/金属栅结构NMOSFET偏压温度不稳定性特性进行了研究。在加速应力电压和高温条件下,NMOSFET的阈值电压的退化与时间呈幂指数关系。然而幂指数随应力电压的增大而减小;在本文中,应力从0.6V到12V,幂指数则相应的由0.26减小到0.16。通过对应力前后器件的亚阈值特性分析,在应力过程中没有界面态产生。根据实验数据提取到数值为0.1eV的热激活能,表明偏压温度不稳定性是由栅介质中预先存在的陷阱俘获从衬底隧穿的电子造成的。恢复阶段的测试显示阈值电压的退化与对数时间呈线性关系,同时可以用确定的数学表达式来表明其与应力电压和温度之间的关系。     

The electrical and physical analysis of Pt gate/Al<Subscript>2</Subscript>O<Subscript>3</Subscript>/p-Si (100) with dual high-k gate oxide thickness for deep submicron complementary metal-oxide-semiconductor device with low power and high reliability

In order to examine the electrical and physical properties of Al₂O₃ layers with dual thickness on a chip, Pt gate/Al₂O₃ with dual thickness/p-type Si (100) samples were fabricated using atomic-layer deposition, separation photolithography, and 100:1 HF wet etching to remove the first Al₂O₃ layer. Dual metal-oxide-semiconductor (MOS) capacitors with thin (physical thickness, ∼4.5 nm, equivalent oxide thicknesses (EOT): 2.8 nm) and thick (physical thickness, ∼8.2 nm, EOT: 4.3 nm) Al₂O₃ layers showed a good leakage current density of −5.4×10⁻⁶ A/cm² and −2.5×10⁻⁹ A/cm² at −1 V, respectively; good reliability characteristics as a result of the good surface roughness; low capacitance versus voltage measurements (C-V) hysteresis; and a good interface state density (∼7×10¹⁰ cm⁻²eV⁻¹ near the midgap) as a result of pre-rapid thermal annealing (pre-RTA) after depositing the Al₂O₃ layer compared with the single MOS capacitors without the pre-RTA. These results suggest that dual Al₂O₃ layers using the dual gate oxide (DGOX) process can be used for the simultaneous integration of the low power transistors with a thin Al₂O₃ layer and high reliability regions with a thick Al₂O₃ layer.