共查询到5条相似文献,搜索用时 0 毫秒
1.
J. C. Olson H. A. Davis D. J. Rej W. J. Waganaar R. W. Stinnett D. C. Mc Intyre 《Journal of Electronic Materials》1996,25(1):81-85
Intense pulsed ion beams (500 keV, 30 kA, 0.5 μs) are being investigated for materials processing. Demonstrated and potential
applications include film deposition, glazing and joining, alloying and mixing, cleaning and polishing, corrosion improvement,
polymer surface treatments, and nanophase powder synthesis. Initial experiments at Los Alamos have emphasized thin-film formation
by depositing beam ablated target material on substrates. We have deposited films with complex stoichiometry such as YBa2Cu3O7−x and formed diamond-like-carbon films. Instantaneous deposition rates of 1 mm/s have been achieved because of the short ion
range (typically 1 μm), excellent target coupling, and the inherently high energy of these beams. Currently the beams are
produced in single shot uncomplicated diodes with good electrical efficiency. High-voltage modulator technology and diodes
capable of repetitive firing, needed for commercial application, are being developed. 相似文献
2.
D. Cheneler J. TengM. Adams C.J. AnthonyE.L. Carter M. Ward 《Microelectronic Engineering》2011,88(1):121-126
By combining low-cost printed circuit board technology and focused ion beam techniques, a simple method has been developed to produce thermal microsensors in a robust package with straightforward electrical connectivity. Two devices have been developed to demonstrate the principle. The first was fabricated using a single step process comprised of FIB deposited platinum. The second device utilised a multistep process using FIB milled thermally evaporated Au on a PCB platform with through-plated vias. The performance of these devices was tested by measuring their thermo-electrical characteristics. 相似文献
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A novel method combining focused ion beam (FIB) milling and image processing for fine trimming of micro-device is introduced in detail in this paper. By using small beam spot size and beam current, selective milling can be realized according to requirement in terms of the difference of gray scale color intensity between defects and useful areas of the FIB images. A magnetoresistive head and ink jet spray head of color printer trimming were described as examples. Trimming result shows that the method is practical and suitable for the fine trimming of micro-device by the selective milling. 相似文献
5.
C. H. Lin J. P. Chu T. Mahalingam T. N. Lin S. F. Wang 《Journal of Electronic Materials》2003,32(11):1235-1239
The thermal annealing behavior of Cu films containing insoluble 2.0 at. % Mo magnetron co-sputtered on Si substrates is discussed
in the present study. The Cu-Mo films were vacuum annealed at temperatures ranging from 200°C to 800°C. X-ray diffraction
(XRD) and scanning electron microscopy (SEM) observations have shown that Cu4Si was formed at 530°C, whereas pure Cu film exhibited Cu4Si growth at 400°C. Twins are observed in focused ion beam (FIB) images of as-deposited and 400°C annealed, pure Cu film,
and these twins result from the intrinsically low stacking-fault energy. Twins appearing in pure Cu film may offer an extra
diffusion channel during annealing for copper silicide formation. In Cu-Mo films, the shallow diffusion profiles for Cu into
Si were observed through secondary ion mass spectroscopy (SIMS) analysis. Higher activation energy obtained through differential
scanning calorimetry (DSC) analysis for the formation of copper silicide further confirms the beneficial effect of Mo on the
thermal stability of Cu film. 相似文献