共查询到20条相似文献,搜索用时 437 毫秒
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在半导体器件制造中,光掩模与中间版的修整仍然是增加产量和提高可靠性的一个关键因素。目前,不仅有更多的修整工作要做,而且随着线宽的缩小,修整较小的缺陷已势在必行。尤为重要的是,修整缺陷须用更加严密的几何尺寸。 相似文献
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激光修整青铜金刚石砂轮精度研究 总被引:4,自引:3,他引:1
基于三角测量在线检测闭环控制烧蚀系统,以声光调Q YAG脉冲激光径向辐照方式进行青铜金刚石砂轮修整.根据砂轮表面的漫反射和成像情况,选取柱面透镜作为接收透镜,改进设计一套比较完善的接收光路系统,对此激光烧蚀系统进行了标定.依照标定结果调整电路,选取合理的激光和工艺参数进行砂轮修整试验.试验结果表明,经激光修整后砂轮精度有了明显的提高.在此基础上研究了激光-机械复合精密修整技术,即青铜金刚石砂轮通过激光修整后,再辅以机械法整形.该方法使修整精度进一步得到提高,同时使砂轮表面地形地貌得到了改善. 相似文献
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激光辅助机械修整金刚石砂轮的温度场分析 总被引:7,自引:3,他引:4
激光辅助机械修整金刚石砂轮是一种金刚石砂轮修整新方法,它利用激光束加热砂轮表面使得金刚石修整笔的修整材料模式从脆性断裂变为塑性流动,从而提高砂轮表面修整质量,降低金刚石笔的磨损。运用ANSYS软件建立了激光辅助机械修整过程中金刚石砂轮温度场的有限元模型,并用热成像仪NEC TH7IOOWX/WV测量了实际工况下的温度场。结果表明,在相同工况下运用仿真模型所得分析结果与实测值拟合得很好。利用所建立的金刚石砂轮温度场的计算机仿真系统可对砂轮修整过程进行前期预测、工艺参数调整及优化等,避免加热温度过高使砂轮表面金刚石颗粒石墨化,或加热温度不足使砂轮表面硬度下降不够等情况的发生,从而减少了直接进行修整实验带来的盲目性。 相似文献
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本文对现有的各种精密放大器失调误差修整技术进行比较,阐述了ADI的DigiTrim修整技术的原理,以及DigiTrim系列精密放大器的主要特性及应用。 相似文献
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对化学机械抛光(CMP)工艺中的抛光垫特性、劣化以及修整进行了简单阐述,重点先从抛光垫表面特性(抛光垫表面微形貌、微孔及抛光垫的结构、表面沟槽纹理的形状、微凸体的分布)和材质特性(硬度、弹性模量和化学性能)入手,对近年来国内外的实验研究与理论模拟分析两方面进行了概括,总结了目前各个特性参数对抛光垫性能以及对CMP过程影响的进展,此外,从机械磨损和化学腐蚀两方面对抛光垫的劣化机理进行简要分析。随后,为进一步探究抛光垫修整对抛光性能影响,对抛光垫的两种修整方式和修整参数对修整的效果进行了归纳,介绍了几种新型自修整材料。最后,指出了抛光垫特性和修整在发展现状中存在的问题,未来抛光垫的发展趋势将逐渐走向创新化、智能化、理论化以及应用集成化。 相似文献
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王明权 《电子工业专用设备》2001,30(3):26-28
从划片机的划切机理出发建立数学模型 ;用数学的方法定性、定量分析划切过程中未修整刃具对划切质量的影响。摸索刃具修整的合理方式 ,提出刃具内孔配合间隙的实用数据。 相似文献
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介绍了厚膜电阻常用的喷砂微调和脉冲电压微调、激光微调三种微调技术及其发展趋势,重点介绍了激光微调机理、调阻方式以及微调图形分类。与喷砂和脉冲电压微调技术相比,激光微调具有精度高、速度快、效率高的特点,因而具有广阔的发展前景。 相似文献
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Marek Wroski Sawomir Kamiski Edward Mi Andrzej Dziedzic 《Microelectronics Reliability》2005,45(12):1941-1948
In this paper a new approach to laser trimming is investigated and compared with traditional trimming. It relies on creating an additional contact for lowering resistance values thus simplifying the design and widening resistance trimming ranges. This enables to achieve a correction with shorter cut length of, so it can lead to a faster and cheaper fabrication process of hybrid integrated circuit. This paper analyses trimming range and trimming characteristics computed for different shapes of added contact using a new, very fast and easily programmable method. Moreover the experimental verification of such approach is presented. The relative trimming range and sensitivity are analyzed as a function of additional contact shape and cut length. Next long-term stability, pulse durability and low frequency noise are compared for two- and three-contact resistors versus trim pathway length. 相似文献
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Laser resistor trimming, an effective tool for producing accurate and reliable electrical elements is discussed. Laser trimming has minimum effect on power handling capability; element value variation with time, temperature, and voltage; and electrical noise. The principles of laser trimming, laser types used, trimming techniques, and technology trends are described. Laser cutting of ceramics in such applications as electronic packaging and the use of lasers to pattern thin films are also discussed 相似文献
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利用Rene95合金在DD3单晶基材的 (0 0 1)面、(10 0 )面和与 (0 0 1)面夹角分别为 4 5°和 2 2 .5°的晶面上进行激光多层涂覆 ,研究了基材晶体取向对单晶显微组织的影响规律。研究表明 ,当实验在基材的择优晶面 { 0 0 1}上进行 ,涂层的组织为定向凝固柱状晶 ,晶体取向与基材的晶体取向相一致 ,一次间距约为 10 μm ,二次臂退化。当实验在基材的非择优晶面 (与(0 0 1)面的夹角θ分别为 4 5°和 2 2 .5°的晶面 )上进行 ,涂层的晶体取向仍然与基材的晶体取向一致 ,但枝晶二次臂出现 ,θ为4 5°角的晶面与 2 2 .5°角的晶面相比 ,枝晶二次臂的发展不平衡性加大。 相似文献
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全自动激光调阻机是各种薄、厚膜片式电阻的工业化专用生产设备,提高调阻性能是提升设备生产力,降低生产成本,节能增效的主要途径.因此,在原系统基础上对激光调阻中光束定向控制系统进行改进设计,以先验知识为基础,构造预置、简单变速、实时变速等光刻控制模型,得到预置式变速光刻控制方法.它能根据不同的精度、速度要求和片阻初值偏差进行优化决策,实现在激光粗调电阻时,采用快速光刻;在激光精调电阻时,采用慢速光刻.这样不仅动态改变了片阻的光刻阻值变化率,提高了调阻精度,而且缩短了粗调光刻时间,提高了调阻速度,从整体上提高了激光调阻性能. 相似文献
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Embedded resistors will potentially allow electronic applications to cost less and perform better. However, it is difficult to fabricate embedded resistors to the correct resistance value, so embedded resistors are often fabricated with a lower value and then trimmed to raise the resistance to the desired value. A computer simulation for the trimming process of an embedded resistor has been developed that has been verified and calibrated against experimental results. A study of embedded resistors containing random voids of varying size has been performed. A new trimming strategy in which the trims are made randomly (rather than conventional L-shaped trims) is proposed and the results of the analysis demonstrate that single-dive trimming combined with random trimming allows higher precision embedded resistors to be obtained than conventional trimming patterns. 相似文献
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《Electronics & Communication Engineering Journal》1998,10(2):53-63
On-chip, non-volatile analogue memory is essential in hardware implementations of many of the early stages of signal processing, including neural network preprocessors and other adaptive sensor fusion amplifiers. Such storage is also desirable for trimming analogue circuits electronically and for parameter retention on power-down. This paper reviews the current state-of-the-art from a designer's perspective, highlighting the promises and problems associated with a range of approaches 相似文献