Ion-induced electron emission monitoring of the structure and morphology evolution in HOPG

The temperature dependences of the ion-induced electron emission yield γ of highly-oriented pyrolytic graphite (HOPG) under high-fluence (10¹⁸-10¹⁹ ions/cm²) 30 keV Ar⁺ ion irradiation at ion incidence angles from θ = 0^o (normal incidence) to 80^o have been measured to trace both the structure and morphology changes in the basal oriented samples. The target temperature has been varied during continuous irradiation from T = −180 to 400 ^oC. The surface analysis has been performed by the RHEED and SEM techniques. The surface microgeometry was studied using laser goniophotometry (LGF). The dependences of γ(T) were found to be strongly non-monotonic and essentially different from the ones for Ar⁺ and N₂⁺ ion irradiation of the polygranular graphites. A sharp peak at irradiation temperature T_p ≈ 150 ^oC was found. A strong influence of electron transport anisotropy has been observed, and ion-induced microgeometry is discussed.     

The emission process of secondary ions from solids bombarded with large gas cluster ions

We investigated the effects of size and energy of large incident Ar cluster ions on the secondary ion emission of Si. The secondary ions were measured using a double deflection method and a time-of-flight (TOF) technique. The size of the incident Ar cluster ions was between a few hundreds and several tens of thousands of atoms, and the energy up to 60 keV. Under the incidence of keV energy atomic Ar ions, mainly atomic Si ions were detected, whereas Si cluster ions were rarely observed. On the other hand, under the incidence of large Ar cluster ions, the dominant secondary ions were  (2 ? n ? 11). It has become clear that the yield ratio of secondary Si cluster ions was determined by the velocity of the incident cluster ions, and this strong dependence of the yield ratio on incident velocity should be related to the mechanisms of secondary ion emission under large Ar cluster ion bombardment.     

An attempt to solve Andersen’s puzzle in surface segregation during alloy sputtering

The paper addresses CuPt alloy sputtering by Ar ions and discusses the well-known experiment performed by Andersen et al. 25 years ago, but not yet properly explained. The atomistic (binary-encounter) simulation has been applied to extract the concentrations of surface Cu and Pt atoms from the experimental data. The results of simulations favor segregation of Cu at all bombarding energies studied experimentally (1.25-320 keV). It has been shown that some mysterious results of the experiment can be explained by a reconstruction of the surface undergoing sputtering. For forecasting purposes, the sputtering of CuPt alloy with 0.25-1 keV Ar ions is also considered.     

Shape deformation of embedded metal nanoparticles by swift heavy ion irradiation

Swift heavy ions (SHI) induce high densities of electronic excitations in narrow cylindrical volumes around their path. These excitations have been used to manipulate the size and shape of noble metal nanoparticles embedded in silica matrix. Films containing noble metal nanoparticles were prepared by magnetron co-sputtering techniques. SHI irradiation of films resulted in the formation of prolate Ag nanoparticles with major axis along the ion beam direction. It has been observed that the nanoparticles smaller than the track size dissolve and other grow at their expense, while the nanoparticles larger than track size show deformation with major axis along the ion beam direction. The aspect ratio of elongated nanoparticles is found to be the function of electronic energy loss and ion fluence. Present report will focus on the role of size and volume fraction on the shape deformation of noble metal nanoparticles by electronic excitation induced by SHI irradiation. The detailed results concerning irradiation effects in silica-metal composites for dissolution, growth and shape deformation will be discussed in the framework of thermal spike model.     

Sputtering of cryogenic films of hydrogen by keV ions: Thickness dependence and surface morphology

The sputtering yield induced by keV hydrogen ions measured at CERN and at Risø National Laboratory for solid H₂ and D₂ at temperatures below 4.2 K decreases with increasing film thickness from about 100 × 10¹⁵ molecules/cm². For a film thickness comparable to or larger than the ion range the data from Risø show a slight increase, whereas the yield from CERN continues to decrease up to very large film thicknesses, i.e. one order of magnitude larger than the ion range. The different behavior of the yield is discussed in terms of the probable growth modes of the films. The films produced at the Risø setup are quench-condensed films, while those produced at CERN are supposed to grow with large hydrogen aggregates on top of a thin bottom layer.     

Segregation of atoms in NixPdy alloys during ion irradiation

Sputtering of Ni₅Pd and NiPd₅ alloys by 10 keV Ar ions has been studied using the binary-collision simulation. Special attention was given to the angular distributions of sputtered atoms at the steady-state conditions. The results of simulations were compared with the experimental data published recently. For both targets, the concentrations of Ni and Pd atoms in the top monolayer were extracted from the experimental data. The results of simulations favor segregation of Pd in Ni₅Pd and segregation of Ni in NiPd₅. The total concentration of surface vacancies was found to be about 10-30%.     

Comparison of secondary electron emission in helium ion microscope with gallium ion and electron microscopes

To evaluate secondary electron (SE) image characteristics in helium ion microscope, Si surfaces with a rod and step structures is scanned by 30 keV He and Ga ion beams and 1 keV electron beam. The topographic sensitivity of He ions is in principle higher than that for scanning electron microscope (SEM) because of the stronger dependency of SE yield versus incident angle for He ions. As shrinking to sub nm patterns, the pseudo-images constructed from line profile of SE intensity by the electron beam lose their sharpness, however, the images for the He and Ga ion beams keep clearness due to darkening the bottom corners of the pattern. Here, the sputter erosion for Ga ions must be considered. Furthermore, trajectories of emitted SEs are simulated for a rectangular Al surface scanned by the beams to study voltage contrast, where positive and negative voltages are applied to the small area of the sample. Both less high energy component in the energy distribution of SEs and dominant contribution of direct SE excitation by a projectile He ion keep a high voltage contrast down to a sub nm sized area positively biased against the zero-potential surroundings.     

Electron exchange between an H ion and a spherical cluster of aluminum atoms

The resonant charge transfer (RCT) between a hydrogen anion and a cluster of aluminum atoms is investigated by means of the wave-packet propagation method that does not exploit the perturbation theory. The RCT on a spherical cluster is found to exhibit quantum size effects due to the finite size of the cluster. The survival amplitude of an ion state has been calculated as a function of the distance to the ion-surface in a normal collision. It is shown that depending on the velocity of the impinging particle, the cluster can behave either as a bulk metal or as a quantum structure with discrete energy states existing over two coordinates.     

Double resonant neutralization in hyperthermal energy alkali ion scattering at clean metal surfaces

Resonant neutralization of hyperthermal Na⁺ ions impinging on clean surfaces is studied, focussing on long lived electronic interactions involving the projectile and a target atom. Specific trajectories are considered where the incident particle undergoes multiple collisions within the first surface layers, interacting simultaneously with several target atoms, which leads to single emission of a surface atom that can resonantly exchange charge with both the solid and the projectile. The system is described via a semi-empirical, one-electron potential that includes the effect of a plane metal surface, with projected band gap, the projectile, whose charge state will be eventually investigated, and the substrate atom. On this basis, a model Hamiltonian of the Anderson-Newns type is constructed and the calculated neutralization probability is compared with the angle resolved neutral fraction measured by Keller et al. [C.A. Keller, C.A. DiRubio, G.A. Kimmel, B.H. Cooper, Phys. Rev. Lett. 75 (1995) 1654].     

MD study on temperature dependence of sputtering yield

Temperature dependence of sputtering yield is studied through molecular dynamics (MD) simulation that is performed for Ag sputtered by 12.6 keV Ar impacting at normal incidence. The target temperature is considered from 300 to 1235 K. It is found that the target temperature has little effect on the monomer yield because it comes from the energetic collision cascade. On the other hand, the sputtered cluster yield increases with the target temperature. It seems that the sputtered cluster is produced due to the thermal spike near the surface and the thermal spike is strongly influenced by the target temperature.     

Desorption of gold nanoclusters (2-30 nm) under low excitation of their electronic subsystem by Ar ions (14 keV/nm)

Gold nanodispersed targets with islands-grains sized 2-30 nm were irradiated by Ar⁷⁺ ions with the energy of 45.5 MeV and (dE/dx)_e = 14.2 keV/nm in gold. The desorbed gold nanoclusters were studied by TEM method. For all the targets desorption of intact gold nanoclusters is observed. However, for inelastic stopping of monatomic Ar ions in gold of 14.2 keV/nm desorption of nanoclusters is observed only up to ∼25 nm. The yield of the desorbed nanoclusters considerably decreases from 3 to 0.02 cluster/ion with the increase of the mean size of the desorbed nanoclusters from 3 to 14.2 nm. The results are discussed.     

Scintillation light produced by low-energy beams of highly-charged ions

Measurements have been performed of scintillation light intensities emitted from various inorganic scintillators irradiated with low-energy beams of highly-charged ions from an electron beam ion source (EBIS) and an electron cyclotron resonance ion source (ECRIS). Beams of xenon ions Xe^q+ with various charge states between q = 2 and q = 18 have been used at energies between 5 and 17.5 keV per charge generated by the ECRIS. The intensity of the beam was typically varied between 1 and 100 nA. Beams of highly charged residual gas ions have been produced by the EBIS at 4.5 keV per charge and with low intensities down to 100 pA. The scintillator materials used are flat screens of P46 YAG and P43 phosphor. In all cases, scintillation light emitted from the screen surface was detected by a CCD camera. The scintillation light intensity has been found to depend linearly on the kinetic ion energy per time deposited into the scintillator, while up to q = 18 no significant contribution from the ions’ potential energy was found. We discuss the results on the background of a possible use as beam diagnostics, e.g. for the new HITRAP facility at GSI, Germany.     

Development of secondary ion mass spectroscopy using medium energy C60 ion impact

In this paper, we report time-of-flight (TOF) secondary ion mass spectroscopy using primary C₆₀ ions with an energy range from several tens of keV to several hundreds of keV. Application of the spectroscopy to the analysis of a poly(amino acid) film revealed that characteristic peaks, necessary for identification of the amino acid in proteins, show higher intensities for medium energy C₆₀ (120 keV and 540 keV ) impacts than those for low energy C₆₀ (30 keV ) impacts. This finding demonstrates that medium energy C₆₀ ion impacts are useful for highly sensitive characterization of amino acids.     

Large-area and high-density silicon nanocone arrays by Ar sputtering at room temperature

The large-area, high-density of ∼1-2 × 10⁹/cm² silicon nanocone arrays by ion-irradiation with incident angle of 75° have been achieved by using carbon-cone-mask. The scanning electron microscopy (SEM) images show that the width of silicon nanocones is ∼150 nm and the height is ∼400 nm. The investigation of SEM shows that the formation of the silicon nanocones proceeds through three periods, carbon nanocones-nanocones with carbon on the top and silicon at the bottom-silicon nanocones.     

Alkali ion scattering from Ag(0 0 1) and Ag thin films at low and hyperthermal energies

We have investigated the scattering of K⁺ and Cs⁺ ions from a single crystal Ag(0 0 1) surface and from a Ag-Si(1 0 0) Schottky diode structure. For the K⁺ ions, incident energies of 25 eV to 1 keV were used to obtain energy-resolved spectra of scattered ions at θ_i = θ_f = 45°. These results are compared to the classical trajectory simulation safari and show features indicative of light atom-surface scattering where sequential binary collisions can describe the observed energy loss spectra. Energy-resolved spectra obtained for Cs⁺ ions at incident energies of 75 eV and 200 eV also show features consistent with binary collisions. However, for this heavy atom-surface scattering system, the dominant trajectory type involves at least two surface atoms, as large angular deflections are not classically allowed for any single scattering event. In addition, a significant deviation from the classical double-collision prediction is observed for incident energies around 100 eV, and molecular dynamics studies are proposed to investigate the role of collective lattice effects. Data are also presented for the scattering of K⁺ ions from a Schottky diode structure, which is a prototype device for the development of active targets to probe energy loss at a surface.     

Formation of InAs nanocrystals in Si by high-fluence ion implantation

We have studied the formation of InAs precipitates with dimensions of several nanometers in silicon by means of As (245 keV, 5 × 10¹⁶ cm⁻²) and In (350 keV, 4.5 × 10¹⁶ cm⁻²) implantation at 500 °C and subsequent annealing at 900 °C for 45 min. RBS, SIMS, TEM/TED, RS and PL techniques were used to characterize the implanted layers. The surface density of the precipitates has been found to be about 1.2 × 10¹¹ cm⁻². Most of the crystallites are from 3 nm to 6 nm large. A band at 1.3 μm has been registered in the low-temperature PL spectra of (As + In) implanted and annealed silicon crystals. The PL band position follows the quantum confinement model for InAs.     

Z2 structure and gas-solid effect in the stopping of slow ions

A recent claim by Paul of a systematic gas-solid difference in stopping cross sections for ions such as nitrogen and oxygen in the velocity range v ? v₀ is studied on the basis of existing experimental data. We find that all existing data support the commonly known Z₂ structure which, by and large, follows the valence structure of the target material. Existing experimental evidence is not found to support a specific gas-solid difference in the velocity range under consideration. The possibility of such an effect due to a gas-solid difference in charge state is rejected on theoretical grounds. Data for compound gases and solids are found to be well described by the Bragg additivity rule.We have also studied nitrogen/helium and oxygen/helium stopping ratios which determine the so-called effective-charge ratio. Taking into account the scatter of experimental data, we do not find clear evidence against Northcliffe’s assumption of a stopping ratio independent of Z₂ and common for gases and solids in the considered velocity range, although the absolute value appears too high.     

Optical emission from Be, Cu and CuBe targets during ion beam sputtering

A spectral structure of the radiation (190-590 nm) emitted during sputtering of polycrystalline Cu, Be and CuBe targets by Kr⁺ ions with 5 keV have been presented. Evolution of surface composition during ion beam sputtering is investigated. Several time scales are distinguished, corresponding to different processes: the elimination of surface contaminants, the removal of the corroded layer. The implications for the use of ion beam optical spectroscopy in surface analysis are discussed. In the case of Be and Cu98 Be2, a molecular structure appears between 492 nm and 502 nm. It is similar for both samples and is ascribed to de-excitation of BeH.     

The influence of projectile charge state on ionization probabilities of sputtered atoms

The ionization probability of atoms sputtered from a clean polycrystalline metal surface was measured for different charge states of the projectile used to bombard the sample. More specifically, a polycrystalline indium surface was irradiated with Ar⁺ and Ar⁰ beams of energies between 5 and 15 keV, and In⁺ secondary ions and neutral In atoms emitted from the surface were detected under identical experimental conditions regarding the sampled emission angle and energy. The resulting energy integrated ionization probability of sputtered In atoms is consistently found to be smaller for neutral projectiles, the difference decreasing with decreasing impact energy. The observed trends agree with those measured for kinetic electron emission, indicating that secondary ion formation is at least partly governed by kinetic substrate excitation.     

Desorption of nanoclusters from gold nanodispersed layers by 72 keV Au400 ions: Experiment and molecular dynamics simulation

The interaction of 72 keV Au₄₀₀ ions (with a diameter of approximately 2 nm) with nanodispersed gold targets has been studied. These interactions are dominated by elastic collisions. The gold nanodispersed target with 2-12 nm nanoislets was bombarded with a fluence of 1.7 × 10¹² ions/cm². The desorbed nanoclusters were collected on carbon foils supported by TEM-grids. Intact 29 nm gold nanoclusters were found on the collectors. The desorption yield (normalized to the total cross-section of the projectile-cluster interaction) was estimated to be 0.62 nanocluster/projectile. Preliminary estimates were made using molecular dynamic simulations for comparison with the experimental results.