塑料薄膜衬底上复合敏感膜热释电传感器的制备

将Sol-Gel法制备的掺钙钛酸镧铅纳米粉粒(PCLT)与聚偏氟乙烯-三氟乙烯(P(VDF-TrFE)均匀复合,作为热释电传感器的敏感膜,比同样制备条件的纯聚偏氟乙烯-三氟乙烯膜的探测优值高约22.4%。并以沉积有35nmITO薄膜的廉价PET塑料为衬底,用旋转涂膜法沉积PCLT/P(VDF-TrFE)复合敏感膜,用Ni-Cr薄膜作上电极,制备了PCLT/P(VDF-TrFE)/PET热释电传感器。PET塑料可有效降低热释电元件的热导,下电极ITO可反射红外辐射,明显提高了传感器的电压响应和降低热释电元件的热噪声。测试结果表明,PCLT/P(VDF-TrFE)/PET热释电传感器的探测率达到3.4×107cmHz1/2W-1,比同样制备条件的体硅衬底传感器高2个数量级以上。     

P(VDF/TrFE)热释电探测器的研究

采用电晕极化和超低频电场极化两种方法极化偏氟乙烯/三氟乙烯共聚物P(VDF/TrFE)73/27,发现制得的热释电探测器性能相似.计算了P(VDF/TrFE)73/27热释电探测器的介质损耗噪声,发现计算值与探测器噪声测量值符合得很好,从而得出P(VDF/TrFE)73/27热释电探测器噪声主要来源于P(VDF/TrFE)73/27介质损耗噪声.     

16×16纳米陶瓷/聚合物复合敏感膜热释电面阵研制

用三维集成CMOS 工艺研制了16×16 有机/无机复合敏感膜红外热释电面阵.用掺钙和镧的钛酸铅(PCLT)纳米粉粒与聚偏氟乙烯-三氟乙烯[P(VDF-TrFE)]均匀复合,作面阵的敏感膜.用PMOS场效应管作热释电元件的阻抗转换,用双16位移位寄存器作敏感元件信号读出的选址.用6 μm厚的聚烯亚胺薄膜作为热释电面阵与CMOS读出电路间的热隔离.用40 nm厚的Ni-Cr膜作面阵的上电极及吸收层.测得该面阵单元在600 Hz下探测率峰值为2.6×107cmHz1/2/W.     

LB法制备的P(VDF-TrFE)共聚物薄膜其光学和电学特性研究

运用郎缪尔-布尔吉特法在聚酰亚胺衬底上制备聚偏氟乙烯及三氟乙烯(P(VDF-TrFE))共聚物薄膜.不同厚度薄膜的X射线衍射结果表明,薄膜具有良好的结晶特性,取向为(110).运用波长范围为300～1300nm的椭圆偏振光谱仪对薄膜光学特性进行了表征;运用Cauchy模型对不同角度(θ=75°和85°)测得的Ψ和Δ数据进行了拟合.获得了P(VDF-TrFE)薄膜的光学参数n, k, α以及薄膜的厚度.另外对薄膜的铁电性质的测量,其剩余极化达到了6.3μC/cm2, 矫顽电场为100MV/cm.介电测量得到了薄膜两个明显的相变,铁电-介电相变以及β弛豫.     

（Pb,La）TiO3铁电薄膜的制备及热释电性能研究

讨论了ＰＬＴ１５铁电薄膜的溶胶－凝胶制备技术,及ＰＬＴ薄膜的结构和电性能研究。结果表明,在Ｓｉ基片上成功地生长出钙钛矿型结构多晶铁电薄膜,在（１１１）Ｐｔ／Ｔｉ／ＳｉＯ２／Ｓｉ上外延生长出（１１１）ＰＬＴ１５铁电薄膜。溶胶－凝胶制备的ＰＬＴ１５铁电薄膜具有优良的热释电性能,其热释电系数ｐ为５．２５×１０－８Ｃｃｍ－２Ｋ－１,电压响应率优值ＦＶ达到０．７８×１０－１０Ｃｃｍ／Ｊ,探测率优值Ｆｍ为１．１３×１０－８Ｃｃｍ／Ｊ,适于制备热释电红外探测器     

自支撑P(VDF-TrFE)红外探测器（英文）

制备了具有自支撑绝热结构的Al/P(VDF-TrFE)/NiCr红外探测器单元,其中NiCr半透明膜作为探测器的上电极和吸收层.实验结果表明:P(VDF-TrFE)薄膜具有很好的铁电性和热释电性,其铁电剩余极化强度和热释电系数分别为7.1μC/cm~2和27μC/m~2K;探测器单元在10 Hz工作频率下对黑体温度500 K的辐射源的电压响应率和探测率分别为1500 V/W和5×10~7 cmHz~(1/2)W~(-1);通过对电压响应率随频率变化的实验数据进行拟合,得到探测器单位面积的热导和吸收率分别为2.5×10~(-3) W/cm~2K和0.1;利用P(VDF-TrFE)探测器单元可对目标物体实现热成像.     

自支撑P(VDF-TrFE)红外探测器

本文中制备了具有自支撑绝热结构的Al/P(VDF/TrFE)/NiCr红外探测器单元,其中NiCr半透明膜作为探测器的上电极和吸收层。实验结果表明：P(VDF/TrFE)薄膜具有很好的铁电性和热释电性,其铁电剩余极化强度和热释电系数分别为7.1 μC/cm2 和27 μC/m2K;探测器单元在500 K温度下的电压响应率和探测率分别为4436 V/W和3.3×108 cmHz1/2W-1;通过对电压响应率随频率变化的实验数据进行拟合,得到探测器单位面积的热导和吸收率分别为2.6×10-3 W/cm2K 和0.1;利用P(VDF-TrFE)探测器单元可对目标物体实现热成像。     

利用动态法测量相变热释电材料的热释电系数

用动态法测量了相变热释电材料(Ba0.65Sr0.35)TiO3薄膜的热释电系数,并对相变热释电系数的计算进行了理论分析.先测量了传统热释电材料LiTaO3单晶薄片的热释电系数,温度信号和热释电电压存在90°相位差,热释电系数为2.1×10-8C cm-2K-1,与文献测量值、理论计算一致,说明测试系统真实可靠.用动态法测量了工作在1.5 V偏压下的(Ba0.65Sr0.35)TiO3薄膜,输出电压由DC电压和AC电压构成,前者由(Ba0.65Sr0.35)TiO3薄膜的漏电流引起,后者为热释电响应电压.热释电响应电压与正弦温度信号同相位,其振幅与正弦温度信号的振幅成正比.理论计算表明,动态法测量相变热释电材料时,热释电响应电压与温度信号同相位变化是由相变热释电材料的电容随温度信号的变化引起的.     

热释电薄膜在红外探测器中的应用

介绍了热释电效应及热释电薄膜红外探测器的工作模式,特别是探测器单元对热释电薄膜的材料与低温生长要求。为了克服薄膜生长过程中较高的基片温度对读出集成电路(ROIC)的破坏性影响,一方面发展了离子束辅助沉积、外延缓冲层等多种低温生长技术,另一方面发展了复合探测器结构设计。已研制出了性能良好的铁电薄膜非制冷红外焦平面阵列,其噪声等效温差(NEDT)可达20mK。     

利用Ba0.65Ru0.35TiO3缓冲层制备高热释电系数的Ba0.65Sr0.35TiO3薄膜

采用射频溅射,在Ba0.65Sr0.35TiO3(BST)薄膜和Pt/Ti/SiO2/Si衬底之间制备10 nm的Ba0.65Ru0.35RUO3 (BSR)缓冲层,研究了BSR缓冲层对BST薄膜结构和性能的影响.与没有BSR缓冲层的BST薄膜相比,BSR缓冲层可使BST薄膜呈高度a轴择优取向生长,改善了薄膜的介电常数,降低了薄膜的漏电流密度,使其热释电系数达到7.45×10-1 C cm-2 K-1.表明利用BSR缓冲层可以制备高热释电性能的BST薄膜.     

Langmuir-blodgett films of stilbazole complexes of iridium(I) and rhodium(I)

Complexes of 4-alkoxystilbazoles with iridium and rhodium form stable Langmuir layers at the air-water interface even when the alkoxy chain is relatively short (C₅–C₁₂). The surface pressure-area isotherms indicate that condensed molecular monolayers are obtained. The area per molecule of each compound in its monolayer form is typically 0.60 nm², which agrees well with the cross-sectional area of the [Ir(CO)₂CI] or [Rh(CO)₂CI] head group predicated using molecular models. This suggests that the molecules are oriented with the metal moiety close to the water surface and their alkoxystilbazole ‘rod’ protruding from the plane of the water surface. Such floating monolayers have been transferred on to solid substrates such as glass, aluminium (AI₂O₃/AI/Glass) and silicon (SiO₂/Si) at relatively high speed (10 mm min ^?1) to form Y-type LB assemblies. The UV–Visible absorption properties of these materials in solution and LB film form have been studied. LB films of these complexes yield bathochromically shifted spectra relative to the LB film spectrum of the uncomplexed stilbazole. Additionally, these spectra are often broader and hypsochromically shifted relative to their corresponding solution spectra as a result of the close molecular packing within the LB film and the associated dipole–dipole interactions. The electrically polar nature of the molecules described in this paper suggest that they may be suitable candidates for new pyroelectric materials. Thus the pyroelectric coefficient (the rate of change of electric polarisation with respect to temperature) has been measured for a polar multilayer LB film containing an iridium complex. A pyroelectric coefficient of 3.5 μCm^?2K^?1 (at 30 °C) has been measured, which is one of the highest reported valued for an LB film. Additionally, a low dielectric loss of around 0.01 has been found over the frequency range 50 Hz–1 kHz, indicating that such LB films may be usfeul materials for pyroelectric sensors.     

P(VDF-TrFE)膜悬空结构集成热释电线列研究

用聚偏氟乙烯－三氟乙烯「Ｐ（ＶＤＦ－ＴｒＦＥ）」薄膜作１６＊１集成热释电线性阵列的敏感膜,经退火和７５ＫＶ／ｍｍ场强极化后测得其相对介电常数为１２．６,介电损耗约０．０１。为了降低热导和热容,提高探测器的探测灵敏度,用ＫＯＨ作化学腐蚀完全去除了线性阵列下方的硅衬底,形成悬空结构。     

朗谬尔（LB）热电薄膜及其在热电器件方面的应用

LB膜是一种由有机高分子定向排列组成的单分子层或多分子层薄膜材料。通过沉积两种不同种分子的交替层,可以形成非中心对称结构的热电性LB膜,是制作红外检测系统用热电元件的新型有机薄膜材料。本文主要叙述LB膜的制法、热电性膜的制法、热电性LB膜的进展概况及其在热电器件方面的应用和性能评价。     

PVDF/P(VDF-TrFE)混合薄膜形貌的原子力显微镜研究

利用原子力显微镜研究PVDF/P（VDF-TrFE）混合薄膜的结晶形貌受退火温度的影响,发现随着退火温度的升高,两种成份的结晶情况各异,并受到分子链间的作用而互相影响。α相的PVDF大球晶结构受P（VDF-TrFE）分子链的影响不易转化成β相的小球晶。在P（VDF-TrFE）的熔融温度以上退火后,P（VDF-TrFE）结晶成长纤维状晶体,并随着退火温度的升高而长大。共混薄膜中发生了两种类型的相分离,P（VDF-TrFE）的结晶可以使整个混合薄膜的宏观相容性得到提高,使两种成份的分层现象消失。     

Topography engineering of ferroelectric crystalline copolymer film

Effects of surface roughness as well as crystallinity onto functionalities of crystalline copolymer films were studied using a dipping method to inject the crystalline grains into voids among crystalline nano-rods. Differently from a widely-used fabrication method such as spin-coating of solution, we achieved a smooth surface and high crystallinity in ferroelectric P(VDF-TrFE) films, simultaneously. Varying dipping temperature and time, remnant polarization and relative dielectric constant values increased by 20% and 75% with a decrease of surface roughness from 20 nm to 7 nm in root mean square value, respectively. The ferroelectric stabilities of P(VDF-TrFE) film capacitors were found to be strongly dependent on the crystallinity.     

脉冲准分子激光制备PCLT热释电薄膜

采用脉冲激光沉积的方法,在Pt/SiO_2/Si衬底上制备了掺Ca的(Pb,La)TiO_3薄膜。薄膜呈多晶结构,具有较好的铁电性和热释电性。由于掺Ca的作用,使薄膜的材料探测优值和电压响应优值几乎与单晶MgO衬底上的c轴取向的PbTiO_3或(Ph,La)TiO_3薄膜相比拟。这些较好的实验结果是在硅基衬底上的铁电薄膜中获得的,因而对研制单片集成的红外热释电阵列将有一定的意义。     

Influence of nano-embossing on properties of poly(VDF-TrFE)

Poly(vinylidene fluoride-trifluoroethylene), P(VDF-TrFE), copolymer films nanostructures are attracting increasing interests for potential applications in FERAM, NEMS and sensors. In this work we apply hot embossing lithography to fabricate P(VDF-TrFE) copolymer nanostructures and investigate the influence of this patterning process on the material and electrical properties by using AFM, XRD, FTIR and Precision Ferroelectric Tester. It was found that nano-embossing technique offers not only a low-cost and effective way to fabricate nanoscale structures but also a way to control the orientation and crystal quality of P(VDF-TrFE) films. The electrical measurement also indicated superior ferroelectric characteristics for the imprinted structure to the un-imprinted area of P(VDF-TrFE) films.     

新型热释电材料及其在红外探测器中的应用

以(1-x)Pb(Mg1/3Nb2/3)O3-xPbTiO3{PMNT[(1-x)/x}为代表的大尺寸、高质量弛豫铁电单晶具有非常高的热释电系数、探测优值和较低的热扩散系数,其综合热释电性能远优于传统的热释电材料.概述了PMNT[(1-x)/x]单晶、掺锰PMNT(74/26)单晶和0.42Pb(In1/2Nb1/2)...     

微波烧结法制备Ba0.65Sr0.35TiO3热释电陶瓷

采用溶胶－凝胶工艺制备了（Ba,Sr)TiO3凝胶，并利用微波烧结技术对粉体进行了合成和烧结，获得了晶粒尺寸在1μm以内的Ba0.65Sr0.35TiO3热释电陶瓷。对样品的介电特性和热释电特性进行了测试，分析了微波烧结工艺对材料电性能的影响。实验结果表明：该工艺可将钙钛矿相的合成温度由1100℃降低至900℃，并在1310℃烧结25min获得细晶粒的Ba0.65Sr0.35TiO3，其热释电系数和介电常数与传统陶瓷相差不大，从而材料的热释电响应优值因子要比传统方法获得的样品提高了近1倍。