基于虚功原理的3-RRPR柔性精密定位工作台动力学分析

为了实现柔性精密操作系统的高频控制,提出一种新型空间柔性并联精密定位工作台系统,该工作台采用多个压电陶瓷驱动方式,通过半圆形凹槽单自由度柔性铰链的弹性变形实现末端执行件3平动自由度的主动调整.根据机构伪刚体模型,采用矢量闭环方法建立其位置、速度以及加速度方程,并结合柔性铰链弹性应变能,采用虚功原理方法进行动力学分析,推...     

Investigation of a 3-DOF micro-positioning table for surface grinding

A novel three degree of freedom numerically controlled micro-positioning table has been developed, optimized for applications such as improving the machining precision of precision grinders. The table consists of a moving platform, coupled to a base, three piezoelectric actuators and three capacitive sensors. An elastic structure with three notch-type flexure hinges both guides the platform and generates a preload for the piezoelectric actuators. The dimensions of the platform and flexure hinges and the position of flexure hinges are designed with the aid of finite element modeling to provide good stiffness with little bending deformation of the platform. The inverse model of the table is developed for numerical control. Experimental results are compared to the model predictions. The table has a natural frequency of 584 Hz, a resolution of 6 nm, an open loop control stiffness of 104 N/μm at the center of the moving platform and a closed loop control stiffness of 650 N/μm across the working area of the table.     

A general dynamics and control model of a class of multi-DOF manipulators for active vibration control

A general dynamic model of a class of parallel platforms for vibration control applications based on Kane's method is presented. A general parallel platform is composed of a moving platform, a base platform, and i limbs with identical kinematic structure. Each limb connects the mobile platform to the base platform by j + 1 hinges and j struts, where the prismatic actuator is fixed at one of the struts. The hinges can be replaced by any other kind of conventional hinges or flexure hinges. The control system architecture based on mixed H₂/H_∞ synthesis method is introduced for a class of parallel platforms as a multiple-input/multiple-output (MIMO) problem for the purpose of active vibration isolation. A case study is illustrated and the theoretical analysis is validated at last.     

Experimental research on a modular miniaturization nanoindentation device

Nanoindentation technology is developing toward the in situ test which requires miniaturization of indentation instruments. This paper presents a miniaturization nanoindentation device based on the modular idea. It mainly consists of macro-adjusting mechanism, x-y precise positioning platform, z axis precise driving unit, and the load-depth measuring unit. The device can be assembled with different forms and has minimum dimensions of 200 mm × 135 mm × 200 mm. The load resolution is about 0.1 mN and the displacement resolution is about 10 nm. A new calibration method named the reference-mapping method is proposed to calibrate the developed device. Output performance tests and indentation experiments indicate the feasibility of the developed device and calibration method. This paper gives an example that combining piezoelectric actuators with flexure hinge to realize nanoindentation tests. Integrating a smaller displacement sensor, a more compact nanoindentation device can be designed in the future.     

Robust control of XYZ flexure-based micromanipulator with large motion

This article describes the development of an XYZ flexure-based micromanipulator, with the features of decoupled kinematic structure, large motion range, high positioning precision, and fast response. The large motion range of flexure mechanisms is quantified by a given definition. Based on the given definition, large motion is achieved in the mechanical design of the XYZ-flexure parallel mechanism (FPM). To ensure high positioning precision and fast dynamic response, a hybrid control algorithm with both position control and vibration control are designed, using the H_∞-theory. The controller strongly solves the three common problems of flexure mechanisms simultaneously, including unmodeled uncertainties, the external disturbances and vibration caused by inherent low damping.     

一种新型3自由度大行程微定位平台设计与分析

为解决微定位平台大行程与高精度之间的矛盾,提出一种新型的3自由度柔性并联机构。该机构三条支链采用特殊方式与动平台相连,使整体机构结构紧凑且具有良好的力学传递性能。同时,机构采用行程大,分辨率高,便于控制的电磁驱动器作为驱动部件,保证机构在不需要引入放大机构的前提下便可获得较大的行程和较高的分辨率。使用大行程柔性铰链代替普通的球铰,降低了加工制造难度和机构刚度模型的求解难度。采用螺旋理论分析了3-P(4S)并联机构末端运动特征,结合单元刚度矩阵法和矩阵位移法推导了3-P(4S)柔性并联机构的静刚度模型,并采用ANSYS进行了分析验证。     

激光干涉微轮廓测量仪

基于Michelson干涉仪测量原理研制的微轮廓测量仪,载物平台采用步进电机和压电陶瓷(PZT)两级闭环驱动与定位,步进电机用于快速粗定位和扩大测量范围,压电陶瓷用于精密定位,重复定位精度为10 nm;测量光路采用共干涉系统,对机械振动,温度漂移不敏感;测量范围20 mm×20 mm×0.4 mm,纵向分辨率为0.32 μm,横向分辨率为0.5μm.     

混合型柔性铰链构型设计与柔度建模

通过将对称型柔性铰链进行分段和命名,提出一种基于柔性铰链基段和镜像段串联组合的混合型柔性铰链构型设计方法。基于卡式第二定理,将基段柔度建模转化成与其槽口形状函数有关的定积分问题。推导得到镜像段与其基段间的柔度映射和多段基段的柔度矩阵,进而构建出形式统一的两段混合型柔性铰链通用柔度和精度模型。选取圆锥曲线、矩形梁和棱台型基段类型,基于组合设计共获得96种新型混合型柔性铰链。结合具体算例和借助有限元验证理论模型的正确性,并对所设计和现有的柔性铰链构型性能统一进行评价分析。研究工作可为柔性铰链构型优选和特性评价提供理论指导。     

Design and analysis of a multi-notched flexure hinge for compliant mechanisms

This article presents a new multi-notched flexure hinge, which consists of two right circular and two parabolic notches, for positioning stages based on compliant mechanisms. First, the configuration of the presented multi-notched hinge is obtained using topology optimization, and the final shape is proposed based on post-processing. Second, the dimensionless empirical equations for the stiffness, rotational precision and stress levels of the flexure hinges are developed using finite element analysis (FEA). Third, based on the established equations, the influences of the geometric parameters on the performance of the flexure hinge are investigated. Finally, to further understand the characteristics of this type of flexure hinge, comparisons with flexure hinges of various shapes are performed in terms of stiffness, rotational precision and stress levels.     

DEVELOPMENT OF A 3-DOF MICRO-POSITIONING WORKPIECE TABLE

In order to achieve active grinding control, a novel numerical control micropositioning workpiece table with a resolution of 6 nm has been developed. The table is driven by three piezoelectric actuators mounted on the base. An elastic structure with three half-notch flexure hinges is designed to apply preload to the piezoelectric actuators. The position of flexure hinges is also elaborately designed with consideration to reduce the bending deformation of the moving part. Three capacitive sensors are used to form close loop control system. Considering the table as a damped 3-DOF mass-spring system, the models of static and dynamic stiffness and error owing to the action of external forces have been established. In order to make the table have high resolution and positioning accuracy, an error compensation algorithm is implemented by using the established models. The experimental testing has been carried out to verify the performance of the workpiece table and the established models of the micropositionin     

DEVELOPMENT OF A 3-DOF MICROOSITIONING WORKPIECE TABLE

In order to achieve active grinding control,a novel numerical control micropositioning workpiece table with a resolution of 6 nm has been developed.The table is driven by three piezoelectric actuators mounted on the base.An elastic structure with three half-notch flexure hinges is designed to apply preload to the piezoelectric actuators.The position of flexure hinges is also elaborately designed with consideration to reduce the bending deformation of the moving part.Three capacitive sensors are used to form close loop control system.Considering the table as a damped 3-DOF mass-spring system,the models of static and dynamic stiffness and error owing to the action of external forces have been established.In order to make the table have high resolution and positioning accuracy,an error compensation algorithm is implemented by using the established models.The experimental testing has been carried out to verify the performance of the workpiece table and the established models of the micropositioning workpieee table.     

深切口椭圆柔性铰链优化设计

考虑深切口椭圆形柔性铰链比其他常用的柔性铰链更适用于具有大行程要求的柔性机构,本文对其进行了优化设计。建立了深切口椭圆形柔性铰链的刚度模型,探讨了结构参数对其转动刚度的影响。分析了深切口椭圆柔性铰链的柔度矩阵,利用Newton-cotes求积公式简化了柔度系数的计算,在此基础上构建了多目标加权优化模型,利用模糊优化设计方法对各结构参数进行了优化设计。优化结果表明:绕Z轴旋转的角位移提高了16.72%;绕Y轴旋转角位移下降了16.01%;沿X轴、Y轴和Z轴产生的线位移分别下降了10%、29.33%和51.84%。数据显示:经过优化的柔性铰链在所期望的Z轴方向上的转动能力得到了提高,同时抑制了其他方向上的运动能力,从而提高了柔性铰链的整体运动精度和结构柔度,可用于高精密、大行程光波导封装定位平台。     

三支链六自由度并联柔性铰微动机器人的研究

提出了一种过程中采用的新型三支链六自由度并联微动机器人结构。采用两端分别带有柔性球铰和柔性旋转铰的支杆以简化结构,整体加工包含三个二自由度单元的基平台来有效减小装配误差,并用压电陶瓷驱动弹性平板获得高分辨率高精度。根据运动影响系数理论对其运动学进行分析,求出了其平动台、支杆和柔性铰链的速度表达式。考虑柔性铰链的弹性变形,基于虚功原理建立了其刚度模型。 分析了此类并联微动机器人的设计目标和柔性铰链设计原则,采用模块化精密定位控制器设计了控制系统。实验结果表明,所设计的微动机器人可达到纳米级精度, 简化了六支链六自由度并联微动机器人的复杂结构,减小了装配误差。     

Manufacturing error analysis of compliant 3-DOF microrobot

In the fields of micro/nanopositioning application, error analysis is an effective way to enhance the precision of micromanipulators. Manufacturing imperfections, which are inevitable, are the most important factors influencing the accuracy. Therefore, various manufacturing imperfections were studied by taking a planar 3 degrees of freedom (3-DOF) flexure hinge-based microrobot as a case. By formulating static stiffness of the robot, mapping between manufacturing imperfections and end-effector positioning accuracy was obtained. Using the theoretical calculation and finite element method (FEM), effects of various machining imperfection types on end-effector positioning accuracy were evaluated. The results showed that errors of the radium of the hinges and angular differences of the centerline of the hinges were dominant factors resulting in output errors. Conclusions drawn from the experiments can be used to instruct the design of compliant parallel mechanisms by distributing various manufacturing differences of configurable parameters to guarantee precision in the positioning of the end-effector within the required range; they may also be helpful while calibrating this kind of manipulator. __________ Translated from Journal of Beijing University of Aeronautics and Astronautics, 2005, 31(7) (in Chinese)     

Three flexure hinges for compliant mechanism designs based on dimensionless graph analysis

This paper presents the dimensionless empirical equations and graph expressions of three flexure hinges for compliant mechanism designs. The in-plane and out-of-plane stiffnesses of the flexure hinges are developed. The rotational precision, denoted by the midpoint stiffness, is derived for the purpose of optimized geometric design. Based on the developed methodologies, the influences of the geometric parameters on the performance of the flexure hinges are investigated, and the performance comparisons among the flexure hinges are conducted to further understand the characteristics of these kinds of compliant mechanisms.     

黏滑驱动式小型精密运动平台

为满足微纳操作系统对精密驱动技术的需求,本文提出了一种基于黏滑原理的小型精密运动平台。该平台将柔性铰链、惯性质量块以及弹性元件结合为独立的定子基座,并与压电叠堆、陶瓷球固连为定子,安装在平台基座底部,通过螺钉调节弹性元件端部垂直方向的位置,就可以改变定子与移动台间的预压力,进而获得最佳的驱动力。为研究黏滑驱动的运动机理,分析各参数对平台运动的影响,进行了力学建模;而摩擦力作为黏滑驱动的关键因素,为了能准确地表达黏滑驱动的摩擦机理,在力学建模中引入了LuGre摩擦模型,并利用Matlab/Simulink软件进行了仿真分析。设计加工的黏滑驱动平台的整体尺寸为40mm×40mm×18mm,质量为32g。试验表明:该平台最小可实现10nm的运动步长,速度最高可达2.5mm/s,行程为22mm。     

基于三角原理的压电驱动微位移定位机构的设计与分析

设计了一种基于三角原理的精密柔性定位机构,机构由压电叠堆作为驱动元件,经由柔顺机构输出缩小的位移。首先说明了机构的设计原理,然后设计了柔顺机构的结构,进行了理论计算和有限元分析,最后在试制的样机上进行了静态特性的实验,结果表明该柔顺机构可以实现预期的运动。     

Robust control of XYZ flexure-based micromanipulator with large motion

This article describes the development of an XYZ flexure-based micromanipulator, with the features of decoupled kinematic structure, large motion range, high positioning precision, and fast response. The large motion range of flexure mechanisms is quantified by a given definition. Based on the given definition, large motion is achieved in the mechanical design of the XYZ-flexure parallel mechanism (FPM). To ensure high positioning precision and fast dynamic response, a hybrid control algorithm with both position control and vibration control are designed, using the H_∞-theory. The controller strongly solves the three common problems of flexure mechanisms simultaneously, including unmodeled uncertainties, the external disturbances and vibration caused by inherent low damping.     

Design and development of 3–DOF modular micro parallel kinematic manipulator

This paper presents the research and development of a 3–legged micro parallel kinematic manipulator (PKM) for positioning in micromachining and assembly operations. The structural characteristics associated with parallel manipulators are evaluated and the PKMs with translational and rotational movements are identified. Based on these identifications, a hybrid 3–UPU (universal joint–prismatic joint–universal joint) parallel manipulator is designed and fabricated. The principles of the operation and modelling of this micro PKM are largely similar to a normal-sized Stewart platform (SP). The overall size of the platform is contained within a space of 300 mm×300 mm×300 mm. A modular design methodology is introduced for the construction of this micro PKM. Calibration results of this hybrid 3–UPU PKM are discussed in this paper.     

Topological and Shape Optimization of Flexure Hinges for Designing Compliant Mechanisms Using the Level Set Method

A flexure hinge is a major component in designing compliant mechanisms that o ers unique possibilities in a wide range of application fields in which high positioning accuracy is required. Although various flexure hinges with di erent configurations have been successively proposed, they are often designed based on designers' experiences and inspirations. This study presents a systematic method for topological optimization of flexure hinges by using the level set method. Optimization formulations are developed by considering the functional requirements and geometrical constraints of flexure hinges. The functional requirements are first constructed by maximizing the compliance in the desired direction while minimizing the compliances in the other directions. The weighting sum method is used to construct an objective function in which a self-adjust method is used to set the weighting factors. A constraint on the symmetry of the obtained configuration is developed. Several numerical examples are presented to demonstrate the validity of the proposed method. The obtained results reveal that the design of a flexure hinge starting from the topology level can yield more choices for compliant mechanism design and obtain better designs that achieve higher performance.