共查询到20条相似文献,搜索用时 15 毫秒
1.
A novel fabrication process for micro patterns with curvature was introduced. The curved structures were made by compensating rectangular micro structures with liquid photoresist layer. Because of the surface tension of the liquid in micro scale, various shapes of meniscus can be made on the micro channels. The micro channels were made on the silicon substrate in advance, and then the liquid layer was coated on the micro channels. From the nature of liquid behavior, the curved patterns with smooth surface are obtained, which cannot be made easily with the conventional mechanical machining, as well as with the microfabrication processes, such as wet and dry etching. With this principle, it is expected that the smooth and curved surfaces can be made by simple processes and the results can be applied widely, such as optical patterns. 相似文献
2.
Forming of Micro Channels with Ultra Thin Metal Foils 总被引:3,自引:0,他引:3
The objective of this paper is to investigate the feasibility of producing micro scale structures by forming ultra thin metal foils. During this investigation, flat rolled foils of AISI 304 stainless steel (2.5μm in thickness) and pure copper (3.0μm in thickness) were formed into channels of varying shapes. The shapes of these channels were straight lines, concentric circles, crosses, and other curved shapes. The cross sections of the channels ranged from 10∼20μm wide and 5-10μm deep. Forming was done by cold isostatic pressing. Two types of micro dies were used. One was made of SU-8 photo resist on a Si wafer, the other of dry etched (DRIE) Si wafer. The die and metal foil were vacuum packed in a bag made of multilayered film. The forming was conducted with a 240MPa cold hydrostatic press. The formed structures were examined in terms of their dimensions, surface qualities, and potential for defect. The fabrication results show that the sheet metal forming process can be applied to the manufacturing of micro scale structures. 相似文献
3.
4.
分层厚度直接影响微细电火花铣削加工的加工效率及表面粗糙度。为了合理规划微细电火花铣削加工的分层厚度,提高加工效率,研究了分层厚度对微细电火花加工的模具型腔及相应热压成形制品表面粗糙度的影响,同时分析了热压成形制品表面与微模具型腔表面之间的关系,以及热压前、后微模具型腔表面轮廓的变化。结果表明:当电极轨迹重叠率一定时,模具型腔底面的表面粗糙度值随着分层厚度的增加而增大;分层厚度对型腔侧壁表面粗糙度无明显影响;热压制品表面轮廓算术平均偏差小于模具型腔表面轮廓算术平均偏差;热压后的模具表面轮廓发生了变化,表面粗糙度值Ra和峰高Rpk减小,峰谷Rvk增大。 相似文献
5.
《CIRP Annals》2020,69(1):325-328
Demand for generating functional micro patterns on a curved surface such as molds has increased in various industrial sectors. In order to meet the demand, it is important to develop advanced micro machining technology to generate curved form and fine patterns, simultaneously and efficiently. This paper presents a newly developed machining system equipped with a fast tool servo mechanism for milling process driven by a giant magnetostrictive actuator and evaluation of its basic machining performance. The results confirmed that the developed system has capability to position the end mill precisely during machining and to generate patterned curved surface. 相似文献
6.
铝合金以其优异的性能而被广泛应用于工业生产的各个领域,通过一系列方法可以在铝合金表面构筑多种类型的微纳米结构。这些微纳米结构可以提高铝合金的摩擦学性能、耐蚀性能、界面结合力、抗结冰性以及装饰性能,对将铝合金应用到更广阔和更苛刻的环境中具有重要意义。介绍了铝合金表面微/纳结构的主要构筑方法。化学刻蚀法制备出了凸台和凹坑的迷宫形貌;阳极氧化法构筑出了高度有序的孔洞结构;微弧氧化法制备出了表面布满微孔的氧化膜;水热法可以构筑形状多样的纳米花朵形貌;电解加工对阴极材料的表面结构进行复刻,可以采用不同比例的阴阳极材料进行大面积的制备。阐述了这些微纳米结构的生长过程,并分析了实验条件(如温度、处理时间、电参数、溶液成分及浓度等因素)对铝合金表面微纳米二元结构生长的影响规律,重点总结分析了其研究现状和影响微纳米结构的因素。通过对现有铝合金表面结构制备方法的总结和分析,展望了其今后的发展趋势。 相似文献
7.
8.
9.
胶接具有独特的性能而被广泛关注,但在实际应用中往往由于界面结合强度不足而导致接头在服役过程中过早失效。激光表面处理是一种能够有效提高胶接接头表面性能的方法,通过激光表面处理会使黏接材料表面形成不同的表面微纳结构,从而改善接头的性能。首先介绍了激光表面处理原理及激光器分类,对比了不同激光器的优缺点及加工质量特性,分析了激光加工参数对接头强度的影响。其次从激光加工不同表面微纳结构入手,阐述了不同表面微纳结构的加工方式,分析了不同表面微纳结构对不同材料接头强度的影响。此外,针对不同的表面微纳结构,其结构参数有所不同,导致接头表面化学成分和润湿性能也有所不同,使得接头强度有所差异,在此基础上分析了微纳结构参数对接头强度的影响及原因。同时,胶层间的作用机制与接头强度具有密不可分的联系,研究表明,不同的表面微纳结构对胶层的作用机制具有明显的不同,归纳总结发现,经激光表面处理形成表面微纳结构后接头表面粗糙度、化学性质、润湿性能及胶层间裂纹的扩展对接头强度的提升具有一定作用。最后,对激光表面处理微纳结构的研究进行了展望。 相似文献
10.
11.
林昌健 《腐蚀科学与防护技术》1992,(1)
设计研制了微 Ag/AgCl 复合电极和微 Cl~-选择性液膜复合电极,考察了这两种微复合电极作为传感器用于现场测量金属腐蚀体系表面二维方向微区cI~-浓度分布的可行性。结果表明,微 Ag/AgCl 和微 C1~-选择性液膜复合电极均可敏感检测金属表面微区C1~-浓度分布,是研究金属局部腐蚀发生发展过程Cl~-的微区行为及局部腐蚀机理的一种重要手段。 相似文献
12.
针对微零件成形的方法做了一个新的尝试,将电磁脉冲力应用于微零件成形工艺中,采用不同充电电压进行试验,对比每次的试验效果,取得了一些试验数据和试验结果,并在放大300倍的情况下观察了成形微零件的表面,对比了工件表面和模具的表面光洁度.试验结果显示,采用电磁力驱动用于微零件成形,成形速度快,成形效果好.电磁脉冲驱动力应用于微零件成形具有很好的应用前景.具体的工艺参数尚需进一步的试验来确定. 相似文献
13.
14.
齿轮钢30CrMnTi磨削强化试验 总被引:1,自引:0,他引:1
30CrMnTi钢广泛应用于齿轮的生产制造中,为提高齿轮的抗疲劳性能及探讨磨削工艺参数对其表面强化的影响,开展了齿轮钢30CrMnTi的磨削试验,分析了磨削速度和磨削深度对磨削表面强化层显微组织、强化层深度、表面显微硬度和强化层残余应力的影响规律。结果表明,齿轮钢30CrMnTi磨削加工后得到一定强化层,表面显微组织为针状马氏体、碳化物和少量残余奥氏体,且强化层马氏体组织由磨削表面到心部呈"细—较粗"的变化趋势,硬度先增大后减小,强化层深度随磨削深度或磨削速度的增大而增加,磨削后表面显微硬度提高2%~13%,随磨削速度降低或磨削深度增大而增大。磨削过程对残余应力的影响在表面表现为拉应力,沿层深向内逐渐转化为压应力。磨削表面残余压应力的值随磨削速度或磨削深度的增大而降低。通过合理的磨削参数可实现齿轮钢30CrMnTi的表面磨削强化。 相似文献
15.
综合电火花加工快速蚀除材料与电解加工溶解重铸层的优势,提出了在低电导率的NaNO3溶液中使用电极逐层往复式铣削加工微小方孔的电火花-电解复合加工方法,并研究了电解液浓度、电压和电容参数对微小方孔加工质量的影响。结果表明:电解液浓度与加工电压对微小方孔加工质量影响较大,电容影响相对较小。选用最优加工参数在100μm厚的321不锈钢片上加工微小方孔,得到的方孔加工质量好、侧壁表面无重铸层,且工具电极相对损耗仅0.05%。 相似文献
16.
17.
18.
An attempt has been made to improve the corrosion resistance in liquid Pb‐Bi by micro‐arc oxidation (MAO), and the effects under different current densities on the corrosion resistance of the coatings were discussed. Scanning electron microscope, energy dispersive spectrometer, and X‐ray diffraction were used to analyze the surface morphology and phase constituents of the MAO coatings produced under different current densities. The corrosion resistance of the coatings was evaluated by studying the element changes and morphology evolution. The results show that the compactness of the ceramic coating decreases with the current density increasing. In contrast to the performance of matrix metal, the ceramic coating exhibited a much better corrosion resistance in liquid Pb‐Bi. Moreover, the ceramic coating produced under current density of 10 A/dm 2 shows the best corrosion resistance. 相似文献
19.
介绍了天然抗菌微纳结构的特点及抗菌效果,从灵感来源、基底材料、构建方法、表面特性和结构、抗菌效率六个方面,总结了利用不同技术模拟蝉和蜻蜓的翅膀、蛾眼和壁虎皮肤微纳结构的仿生研究进展。阐述了材料表面微纳结构的形貌和粗糙度对抗菌效率的影响,发现具有多层次、间隔紧密、尖锐纳米柱结构的表面对革兰氏阳性和革兰氏阴性菌均表现出较强的抗菌活性。微纳结构抗菌表面与细菌相互作用,破坏细胞壁/膜,导致细菌死亡,该抗菌机制是物理机械性的,避免了细菌耐药性的产生。该综述为今后仿生微纳结构抗菌表面的发展提供了理论基础,并提出了未来的研究思路和发展方向。 相似文献