基于DVD光学头的二维微小角度测量研究

为了实现精密平台二维角度的在线检测,提出了一种基于DVD光学头的二维微小角度测量的方法。利用DVD光学头进行角度测量,是基于激光自准直原理,以四象限光电探测器作为检测元件,以固定在被测物上的反射镜作为被测元件进行测量的一种角度测量方法。搭建了基于英国RPI精密转台的实验系统,对测量方法进行了实验测试。结果表明:基于DVD光学读取头设计的二维角度测量装置测量范围为±110″,平均分辨率达到0.2″。该测量方法稳定、可行,且测量装置具有结构紧凑、成本低等特点。     

二维电子动态自准直仪

利用四象限光电探测器制成一种电子自准直仪，它具有自动测量，速度快，精度较高，能同时测量二维角位移的特点。文中介绍此种自准直仪的工作原理，以及检测和使用的情况。     

微位移检测系统中精密光电转换电路设计

基于像散原理的光学检测系统,是通过对光路系统聚焦信号的离焦量FES的检测实现微位移的测量.四象限光电探测器作为检测系统的光电转换传感器,需要设计光电探测器电路,实现对FES信号的检测,并由微单片机系统采集处理,通过串口通信传给PC机进行数据存储和被测对象二维图像分析和重建.通过将所设计的电路集成在光学测头装置上进行实验测量,光电转换信号稳定,相对误差小于5%.     

四象限光电探测器用于二维小角度测量的研究

介绍了利用高灵敏度四象限硅光电管作为探测器的二维小角度测量系统,详细分析了其测试原理及实验装置.测试系统利用半导体激光器做光源,采用了偏振分光器件,结构小巧,能量利用率高,具有较高的测量精度.为小角度测试技术的研究提出了一种新的方法.     

二维光电水平倾角测量系统

针对高端装备制造中对大尺度机床误差测量与补偿的要求,本文基于光学自准直原理和液体表面反射原理,研制了一种二维光电水平倾角测量系统以实现对机床滚转角和俯仰角的测量。该系统使用半导体激光器发射激光,经光学自准直系统于待测硅油表面将被测倾角放大二倍。然后,由位置敏感探测器感测光斑位置变化,输出包含角度信息的光电流信号,并由低噪声四路同步微弱信号处理电路进行相同倍数的放大以减小误差。最终,由高速采集卡进行数据采集,经均值滤波、曲线拟合、解算处理后将其转化为倾角信息,从而实现二维角度测量。在光学平台进行了对比实验,结果表明:测量系统在-10~10mm/m(约为-2 000″~2 000″)量程内,角度测量误差小于±0.050mm/m(约为±10″),线性度优于0.25%,满足大尺度机床二维水平倾角检测对大量程、高精度、高稳定性的要求。     

四象限光电探测器用于表面形貌测量的研究

提出了一种PIN田字形四象限光电探测器接收激光干涉条纹的空间布置方法.利用积分分析法分析了在理想干涉条纹下,条纹宽度d和条纹旋转角度β与光电探测器差分信号幅值和相差的关系,并给出了满足正交条件的合适的条纹宽度d以及对应的条纹旋转角度β.设计了PIN型四象限光电探测器用于三维表面形貌测量的前置放大电路.实验应用结果表明,PIN型四象限光电探测器的差分信号能满足计数和细分要求,用于拾取激光干涉条纹能达到纳米级分辨率,能满足微纳米表面形貌测量的要求.     

便携式二维激光位移传感器

设计了一种能应用于野外环境的便携式二维激光位移传感器,能够实时探On,0635nm激光在传感器靶面所呈光斑的二维位置坐标。利用CCD图像传感器和DSP数字信号处理电路进行图像的采集和处理。采用窄带滤光片和中性密度衰减滤光片消除太阳光的干扰,提高了图像对比度。采用超短焦距大视场镜头将传感器靶面成像在CCD靶面上,增大了量程,缩小了体积。编写算法校正了图像畸变。最后通过实验验证了该传感器有较高的测量精度。     

一种大量程端度孔径测量瞄准装置的设计

端度和孔径的测量采用光电显微瞄准装置进行瞄准,光栅尺或激光干涉仪作为测长系统,从而实现端度测量和二等及以下环规尺寸的测量要求,而对较大面宽度的端度件及较大尺寸的孔径类被测件缺乏有效方法.文中通过对光电显微瞄准装置的光路仿真设计及机械配件设计,采用增大显微物镜焦距的设计方法,实现测量范围达到3～300 mm的大量程端度孔...     

基于PSD的光电自准直仪角度测量系统研究

PSD是一种新型半导体光电位置敏感探测器件,利用PSD作为光电接收器件的自准直仪,实现对角度形变的测量.系统处理电路采用C8051F005单片机为核心器件对传感器输出信号进行处理,利用CPL-D完成多路数据的采样和传输的控制.系统实现了实时处理、动态显示,降低了PSD信号处理电路噪声干扰、简化了信号处理电路,提高了测量准确度.     

基于PSD的激光跟踪仪光电瞄准技术应用与研究

光电瞄准与定位技术是空间运动目标动态跟踪测量的关键技术,起到目标捕获与运动位置偏差精确指向作用。基于光电位置传感器(PSD)对激光跟踪仪的光电瞄准和跟踪定位控制技术进行了分析研究与设计,提出了光电瞄准控制方案,设计了探测光路,分析了PSD误差修正与信号处理。经过实际样机测试,静态定位测量精度达到6μm,随机动态跟踪测量速度大于1 m/s。     

大靶面激光光幕靶研究

针对大靶面、高精度弹丸速度测量的要求,提出一种新型激光光幕靶弹丸速度测量系统。该系统采用大功率90°扇形线状激光器做为光源,两列高灵敏度光电二极管阵列作为接收装置,当弹丸穿越激光光幕面时,遮挡了部分投射在光电二极管上的光线,光电二极管产生微弱电信号,经放大、整形后输出一个脉冲信号,触发计时仪开始或停止计时。两台同样的装置配合测时仪,便可组成激光光幕靶测速系统。经实弹实验证明,该系统具有高灵敏度和高精度的特点。     

A new method for determining geometric accuracy in the axis of movement of machine tools

Measurements of geometric accuracy in machine tools, especially of errors in moving machine parts against their theoretical axes, are taken by means of displacement pick-ups moving along a reference standard^1,2, such as a cylindrical test specimen. This procedure is impeded by physical form errors in the standards, especially for heavy machines, as well as by adjustment errors in the standards against the machine part to be measured. These disadvantages can be avoided by using a non-material standard like a laser beam with a four quadrant photodiode as sensor and a special analysis of the measurement data.     

A 6-degree-of-freedom measurement system for the accuracy of X-Y stages

A precision 6-degree-of-freedom measurement system has been developed for simultaneous on-line measurements of six motion errors of an X-Y stage. The system employs four laser Doppler scales and two quadrant photo detectors to detect the positions and the rotations of an optical reflection device mounted on the top of the X-Y stage. Compared to the HP5528A system, the linear positioning accuracy of the developed measurement system is better than ±0.1 μm to the range of 200 mm and the vertical straightness error is within ±1.5 μm for the measuring range of ±0.1 mm. The yaw and pitch errors are about ±1 arcsec, and the roll error is about ±3 arcsec within the range of ±50 arcsec.     

A high frequency sensor for optical beam deflection atomic force microscopy

We demonstrate a novel electronic readout for quadrant photodiode based optical beam deflection setups. In our readout, the signals used to calculate the deflections remain as currents, instead of undergoing an immediate conversion to voltages. Bipolar current mirrors are used to perform all mathematical operations at the transistor level, including the signal normalizing division. This method has numerous advantages, leading to significantly simpler designs that avoid large voltage swings and parasitic capacitances. The bandwidth of our readout is solely limited by the capacitance of the quadrant photodiode junctions, making the effective bandwidth a function of the intensity of photocurrents and thus the applied power of the beam deflection laser. Using commercially available components and laser intensities of 1-4 mW we achieved a 3 dB bandwidth of 20 MHz with deflection sensitivities of up to 0.5-1 V/nm and deflection noise levels below 4.5 fm/Hz. Atomic resolution imaging of muscovite mica using FM-AFM in water demonstrates the sensitivity of this novel readout.     

光学内反射型精密角度传感器

本文基于光从光密介质传到光疏介质时,在临界角附近随光的入射角的微小变化,光的反射率发生急剧变化的原理,设计了利用临界角棱镜组成的多次反射型临界角角度传感器。通过光学式差动检测方法,减小了反射光所固有的随入射角的变化,其反射率变化曲线的非线性,进而通过检测光的反射率,可高精度地检测角度变化量。该传感器体积小结构简单,可通过调整初始入射角、反射次数及反射光的性质控制其精度和测量范围,可设计适于多种精度要求的微小角度的精密测量仪器。     

采用衍射、干涉技术提高光电轴角编码器的测角精度和分辨率

光电轴角编码器广泛应用于精密角位置的测量、数控及数显系统中,是国内外研究的热点.采用衍射、干涉技术的光电轴角编码器(简称激光编码器)具有结构紧凑、小型化;分辨率和测角精度高;响应频率高等优点.通过对几种激光编码器的成功方案的深入分析,阐述了这项技术的最新进展和所面临的问题.     

Three-dimensional high-resolution particle tracking for optical tweezers by forward scattered light

A quadrant photodiode placed in the back-focal plane of the microscope of a laser trap provides a high-resolution position sensor. We show that in addition to the lateral displacement of a trapped sphere, its axial position can be measured by the ratio of the intensity of scattered laser light to the total amount of the light reaching the detector. The addition of the axial information offers true three-dimensional position detection in solution, creating, together with a position control, a photonic force microscope with nanometer spatial and microsecond temporal resolution. The measured position signals are explained as interference of the unscattered trapping laser beam with the laser light scattered by the trapped bead. Our model explains experimental data for trapped particles in the Rayleigh regime (radius a <0.2lambda) for displacements up to the focal dimensions. The cross-talk between the signals in the three directions is explained and it is shown that this cross-talk can be neglected for lateral displacements smaller than 75 nm and axial displacements below 150 nm. The advantages of three-dimensional single-particle tracking over conventional video-tracking are shown through the example of the diffusion of the GPI-anchored membrane protein Thy1.1 on a neurite.     

采用玻尔兹曼统计法分析光阱刚度的测量精度

考虑高精度的光阱刚度测量是光阱力测量的关键,本文提出了采用玻尔兹曼统计法来分析光阱刚度的测量精度。首先,描述了实验室搭建的近红外光镊系统,并将其搭建在暗室中的气垫平台上,以便隔离光干扰和振动干扰。然后,用四象限光电探测器探测被光镊捕获的微球向后散射的光,并选用与溶液黏度无关的玻尔兹曼统计法计算样品池底面附近的光阱刚度。最后,分析和讨论了溶液温度的变化、四象限光电探测器的灵敏度、采样频率以及采样时间对光阱刚度测量精度的影响。理论分析及实验计算显示:溶液温度的变化对光阱刚度的测量影响很小,但四象限光电探测器的灵敏度对光阱刚度测量精度影响较大。考虑采样的完整性和数据处理速度,采样频率通常取为被捕获颗粒拐角频率的5~10倍。对于本文搭建的近红外光镊测量系统,采样时间取为1~7s时,可以保证高精度地测量光阱刚度。     

Nanometer edge profile measurement of diamond cutting tools by atomic force microscope with optical alignment sensor

This paper describes an atomic force microscope (AFM) based instrument for nanometer edge profile measurements of diamond cutting tools. The instrument is combined with an AFM unit and an optical sensor for alignment of the AFM probe tip with the top of the diamond cutting tool edge in the submicrometer range. In the optical sensor, a laser beam from a laser diode is focused to generate a small beam spot with a diameter of approximately 10 μm at the beam waist, and then received by a photodiode. The tool edge top and the AFM probe tip are brought to the center of the beam waist, respectively, through monitoring the variation of the photodiode output. To reduce the influence of the electronic noise on the photodiode output so that the positioning resolution can be improved, a modulation technique is employed that modulates the photodiode output to an AC signal by driving the laser diode with a sinusoidal current. Alignment experiments and edge profile measurements are carried out.     

带USB接口的光斑位置漂移检测校正系统设计

针对光固化成形系统中激光束光斑零点漂移和增益漂移的问题，提出了一种结合USB接口的光斑位置漂移检测校正方法，该方法利用OF1301光电传感器和小区域矩阵扫描方式检测激光光斑，并通过相应的数据处理实时检测校正漂移误差，提高振镜的重复定位精度，提高制件精度。