基于时域相移技术的结构光三维微纳形貌检测方法

针对微纳器件三维形貌快速检测及重构中的高精度和高速度难以兼得的技术难题,本文提出一种基于时域相移技术的结构光检测方法,通过空间光调制器对测量光进行调制,结合时域相移技术实现微纳器件三维形貌检测和重构.相比传统的结构光检测方法,本技术在样片轴向扫描的同时,利用空间光调制器进行相移测量,保证测量精度的同时提高测量的效率.通...     

一种新型光纤传像微三维测量系统

根据结构光测量原理，利用光纤传像束所具有的自由度大、能弯曲及易实现长光路等特点，结合数字条纹投影技术和相移法测量技术，提出了一种新型微三维测量系统．因为从投影仪投射出来的光栅条纹是经光纤传像束及其两端的光学系统投射到被测物体上的。所以与其它同类系统相比，该系统降低了对被测物体方位的要求，从而使测量更加方便。拓展了微三维测量系统的适用范围．构建了测量系统，并对不同对象进行了测量，且重构出了被测物的三维形貌，验证了系统的可行性．     

用双波长法和相移法确定光弹性参数

分别采用双波长法和相移法研究了光弹性条纹的自动分析技术。分别采用波长为630nm和532nm的激光作光源,根据在不同光场下获得的等差线条纹光强变化,可实现等差线条纹的自动定级。同时,提出了新的图像处理方法,结合等倾线相移技术实现了第一主应力方向的全场确定,再以Tardy补偿法为基础,提出了全场等差线的相移方法。该文结合经典的实验对比,详细比较分析了这两种方法的优缺点。结果表明:该文提出的新的相移方法可实现光弹性条纹的自动化分析。     

微/纳结构三维形貌高精度测试系统

为实现微/纳结构三维形貌的高精度测量,提出利用显微干涉技术和偏振技术相结合的方法来研制微/纳结构三维形貌亚纳米级精度测试系统.首先,利用五步相移干涉技术采集5幅带有n/2相移增量的干涉条纹图.然后,通过Hadharan五步相移算法得到包裹相位图.最后,利用分割线相位去包裹算法和相位高度关系转换得到微/纳结构三维形貌.在测试过程中通过偏振片产生强度可调的线偏振光,再由1/2波片改变偏振光在分光镜中的分光比,补偿参考镜与试件的反射性能差异,可得到亮度适中且对比度高的干涉条纹图,从而有利于实现微/纳结构三维形貌的高精度测量.系统的轮廓算术平均偏差R_a的重复测量精度可迭0.06 nm,最大示值误差不到±1%,示值变动性不到0.5%.通过对标准多刻线样板、硅微麦克风膜和硅微陀螺仪折叠梁的三维形貌测量验证了系统的有效性和实用性.     

十六步相移技术在弹痕条纹图分析中的应用

在三维弹痕测量系统中,为了获取较高的测量精度,为此本文提出一种采用十六步相移技术的条纹图处理算法。首先分析了物体三维形貌相位分布获取原理,然后对采集到的弹痕图像进行自适应维纳滤波,去除一部分系统噪声,再利用小波变换对原始图像进行3层sym4小波分解去噪,本系统在小波软阈值分析法的基础上,加入了3层的小波系数分解,同时结合十六步相移法进行相位主值的计算。实验结果表明,弹痕条纹图的位相值曲线更加平滑,原始图像条纹图位相高度偏差的最大值为1.631μm,在经过十六步相移技术处理后,位相主值最大偏差值仅为0.8674μm,对本系统的精度提高奠定了基础。     

人体三维扫描结构光解相位方法研究

在三维表面测绘中,基于格雷码和相移的结构光三维测量技术在临床医学中已被广泛应用.由于环境光、相机以及被测人体表面反光不均匀等因素的影响,相位展开时容易出现错误.针对上述问题本文提出一种算法,采用一幅没有条纹投影的目标图像和一幅经过条纹投影的图像共同完成图像分割,以期提高格雷码投影图像的分割准确率,消除目标表面纹理和环境光线的影响.再对格雷码图像和四步相移图像进行解码,得到绝对相位,并对绝对相位进行周期错位校正,最终获得理想的相位信息.实验系统由一个投影仪和平行双目摄像头组成,先后对仿真头部模型以及人的小臂进行三维扫描,生成的三维点云结果表明了该算法的可靠性.     

光学三维测量中结构光栅投影系统的开发

为解决结构光三维测量系统中的光栅投影质量问题,提出并实现了以物理光栅为核心的结构光栅投影系统。该系统以现代光栅制造技术制造的精密光栅元件为核心,基于幻灯投影原理实现高质量的光栅条纹投影,利用步进电机带动高精密滚轴丝杆进行平移实现投影光栅的切换。实验结果表明,基于该系统实现的光学三维测量系统的可以达到1：100以上的对比度,具有较大的光强和良好的景深,同时能获得连续的强度分布及较好的正弦性,测量误差小于0．04mm,测量精度约为0．03mm,满足工业应用的要求。     

复合式结构光编码法测量3D图像

为了更加有效地采集物体的三维表面信息,使用结构光技术构建新的三维表面数字化检测平台.结合格雷和相移编码各自所具有的优势,提出了一种新的复合编码法,首先将图片分成一定的区域,然后在各个区域单独投影结构光条纹,之后每幅相移图依次向右移动一定像素.由于该法对投影的简化使编码周期明显缩短,减少了图像处理的数据量,从而提高了扫描速度,尤其适合于实现快速的三维模型重建.在自行研制的三维表面信息采集实验平台上进行了实验,新方法的有效性得到了证明.     

一种两步相移任意步距相位轮廓测量技术研究

对传统相移轮廓测量技术进行研究,提出基于Gram-Schmidt正交化法的两步相移任意步距相位轮廓测量技术并应用到三维轮廓测量中。由CCD采集两幅投影光栅图,且两幅图像之间的相移值不需要事先给定,可以随机取任意值;在保证精度的前提下,该技术只需两幅变形光栅图,同时无需对相移器的相移精度作要求。实验表明:与现有的几种相移轮廓术比较,提出的两步相移任意步距相位轮廓测量技术可以快速地恢复待测相位,且获取待测物体的三维数据精度较高,具有较强的适用性。     

含孤立物体场景的高速、高密度三维面形采集

提出了一种用于采集含空间孤立物体场景的高速、高密度三维面形采集方法。该方法将三幅图案高速投影到被测物体上并同步采集图像,从而实现场景三维形貌及纹理的高速记录。其中两幅图案是互相具有π相移的正弦条纹,采用傅里叶变换法求解变形条纹相位。将拍摄到的两幅变形条纹图相加可得到物体表面纹理。另一幅图案用来确定条纹级次,实现绝对相位测量,解决高速形貌采集中孤立物体相位展开难题。它由一系列宽度与正弦条纹周期相同的竖条构成,采用三种灰度对竖条编码。每个竖条由单一灰度或两种在竖直方向上周期性分布的灰度构成,这样可编6个码。将竖条按由这些码构成的伪随机序列排列,得到编码图案。测量时,对拍摄的编码图案解码,通过子序列匹配来确定对应正弦条纹的级次。设计了采用DLP投影仪及高速摄像机的高速测量系统。采用提出的方法实现了640×480分辨率下每秒60帧和320×240分辨率下每秒120帧的三维形貌及纹理采集。     

基于白光相移干涉术的微结构几何尺寸表征

将Carré等步长相移法与白光垂直扫描相结合形成了一种白光等步长相移算法,该方法快速、准确、非接触,垂直分辨力可达亚纳米级.测量系统集成了Mirau显微干涉物镜,并通过高精度压电陶瓷纳米定位器带动物镜进行垂直扫描.分析了Carré法应用于白光干涉信号的相位提取的精度,对不同扫描步距以及不同信噪比情况下的测量进行了计算机仿真,确定了测量参数.结合重心法将相位计算的数据范围直接定位于干涉信号的零级条纹,从而省去了相位解包裹过程.通过对微谐振器和标准台阶的测量说明了该方法的有效性,并使用白光相移干涉、白光垂直扫描和单色光相移干涉对44 nm标准台阶进行了测量,并对测量结果进行了比较.     

基于条纹投影的复杂曲面测量技术

如何快速、高精度地测量复杂曲面的三维轮廓是目前的一个热点研究方向。与现有的测量方法相比,条纹投影轮廓测量技术具有非接触测量、测量速度快和重构点云密集等优点,在逆向工程等领域得到了广泛的应用。本文搭建了基于条纹投影轮廓测量技术的复杂曲面测量装置,并且对相位误差标定及补偿、投影仪精确标定、高阶系统模型简化以及有效点云快速识别等条纹投影轮廓测量的关键技术进行了深入地研究。最后使用该装置进行了叶片表面轮廓测量实验,实验结果表明,本文设计装置的测量偏差最大值不超过0.05 mm。     

Slope of the Out‐of‐Plane Deflection Measurement of Composite Sandwich Plate With a Fully Potted Insert by Using Digital Phase‐Shifting Shearography

Abstract: A digital shearographic (DS) technique is a tool well‐suited for precision strain measurement and is a non‐destructive testing technology. But the fringe patterns of DS have not so high sensitivity due to the limitation of CCD camera resolution. Therefore a phase‐shifting technique is incorporated into DS and demonstrated to yield fringe patterns with good quality. The main purpose of this study is to set‐up a measuring system of digital phase‐shifting shearography (DPSS) to measure slope of the out‐of‐plane deflection of sandwich plate with a fully potted insert. The present system includes piezoelectric transducer, servo controller, Michelson shearing mechanism, image processing system and loading system. The four‐step phase shifting method is used to obtain phase map and then the phase expansion is proceeded by Macy algorithm to obtain the slope of the out‐of‐plane deflection of honeycomb sandwich plate with insert/potting material. Finally, comparing the slope of the out‐of‐plane deflection of DPSS with that of DS shows 2 to 7% difference of slope of deflection exhibiting.     

Digital speckle pattern interferometry using spatial phase shifting: influence of intensity and phase gradients

Spatial phase shifting technique in digital speckle pattern interferometry (DSPI) and digital shearography (DS) provides the phase information due to the object displacement from two images, one stored before and other after loading. The technique needs a carrier fringe system. The double aperture mask in front of the imaging system is one of the methods for introducing the spatial carrier frequency for phase evaluation. The size of the apertures and their separation are important criteria to obtain appropriate phase shift/column within the desired size of the speckle for phase retrieval. The assumptions of constant intensity and phase on adjacent pixels of the camera while calculating phase in spatial phase shifting (SPS) are not met as the speckled object wave contains intensity and phase gradients, resulting in distortions in the calculated phase profiles. In this paper we discuss a strategy to overcome these problems. The contrast of the correlation fringe obtained using this approach is much improved. It also eliminates the distortion in the unwrapped phase map like wave ripples. The experimental results on an edge clamped circular plate loaded at the center are presented.     

采用光栅投影的三维测量方法

提出一种新的三维坐标测量方法,该方法基于光栅投影、相移和三角测量等测量方法。与传统的光学测量方法不同,测量系统采用两个CCD相机记录投影光栅,减小了测量误差,提高了测量精度。测量实验结果在各个坐标上的精度分别为?靘,?靘,?8.5靘,总体精度优于20靘,证明了该方法的先进性和可行性。     

Shape measurement by use of liquid-crystal display fringe projection with two-step phase shifting

The use of an optical fringe projection method with two-step phase shifting for three-dimensional (3-D) shape measurement of small objects is described. In this method, sinusoidal linear fringes are projected onto an object's surface by a programmable liquid-crystal display (LCD) projector and a long-working-distance microscope (LWDM). The image of the fringe pattern is captured by another LWDM and a CCD camera and processed by a phase-shifting technique. Usually a minimum of three phase-shifted fringe patterns is necessary for extraction of the object shape. In this method, a new algorithm based on a two-step phase-shifting technique produces the 3-D object shape. Unlike in the conventional method, phase unwrapping is performed directly by use of an arccosine function without the need for a wrapped phase map. Hence, shape measurement can be speeded up greatly with this approach. A small coin is evaluated to demonstrate the validity of the proposed measurement method, and the experimental results are compared with those of the four-step phase-shifting method and the conventional mechanical stylus method.     

用于变压器损耗校准的移相装置研制

针对变压器损耗测量系统(TLMS)校准中,对功率因数可调高压大电流信号源的需要,开展了移相技术研究及装置研制。装置在机理上利用希尔伯特变换,对输入信号进行卷积运算,得到正交参考信号;然后通过双参数的矢量合成技术生成相位可调的输出,从而产生不同功率因数的试验信号。基于此技术,搭建并实现了Compact RIO平台的移相装置。同时利用Compact RIO作为硬件平台、LabVIEW软件实现可视化操作,设计了相位测量仪器,并结合相角电压表Clark-Hess 2600对移相装置的稳定性和分辨率进行实验验证。实验结果表明:所研制的移相装置分辨率、稳定性及准确度优于0.001°。     

A general gamma nonlinearity compensation method for structured light measurement with off-the-shelf projector based on unique multi-step phase-shift technology

ABSTRACT

Nonlinearities in the application of fringe projection metrology make it very difficult to acquire perfect 3D data. This paper describes a six-step phase-shifting technique for a structured light measurement system with an off-the-shelf projector. First, the phase error is analysed and a gamma model is established by deriving the relative expression between the wrapped phase and input images. This is then expressed in matrix form to derive a unique solution, which is used for the gamma solver. The complex gamma calibration and projector error compensation can be removed once the gamma value of the off-the-shelf projector has been determined. The ideal model reconstruction results are obtained through simulations and experiments, and the standard deviation of the phase error is found to be only 0.0039 radians. Hence, the proposed method eliminates the nonlinear errors associated with fringe projection technology using existing projectors and improves the overall image reconstruction quality.     

A fast 3D shape measurement method based on sinusoidal and triangular fringe projection

Existing methods to measure 3D shape of complex object involve processing more than six captured images to obtain the absolute phase, which limit the measurement speed. This paper presents two sinusoidal fringes and two triangular wave fringes which is used to measure 3D shape of complex object. The two-step phase-shifting sinusoidal fringes and two-step phase-shifting triangular wave fringes are calculated to obtain the wrapped phase, and then the two-step phase-shifting triangular wave fringes are used to determine the fringe order. Due to decrease the number of projection fringes, the speed of measurement increases. The triangular wave fringe carries more information of the object than linear increasing/decreasing ramp fringe in the actual measurement, more noise in the base phase to be overcome, thus improving the measurement accuracy. The benefits can be widely applied in high-speed, real-time 3D measurement of complex shape. Experimental results have demonstrated that the proposed method is simple, but effective.