钼掺杂降低TiO2氧敏薄膜最佳工作温度研究

用直流反应磁控溅射法在陶瓷基片上制备出TiO2薄膜.并进行1100℃,2h的退火处理.配置钼酸铵溶液,利用浸渍法处理TiO2薄膜若干时间.取出后,进行500℃,3h退火处理.用气敏测试箱对制备出的TiO2薄膜的氧敏特性进行试验测试,发现对氧气有很好的敏感特性,比未经此项工艺处理的TiO2薄膜的最佳工作温度降低100℃,为300℃左右,并进行SEM测试,分析其表面结构,研究气敏机理.     

热处理温度对氧化铟薄膜特性的影响

利用离子束溅射沉积的方式在Al2O3陶瓷基片表面制备了In2O3薄膜,并分别研究了热处理温度对薄膜相结构、电阻-温度特性及气敏特性的影响。结果表明:薄膜相结构受热处理温度影响显著,热处理温度高于600℃时,薄膜相结构由无定形状态变为立方相状态;随着热处理温度的升高,薄膜电阻率显著增大;薄膜对CO气体具有良好的气敏特性,热处理温度为600℃时,薄膜对CO气体灵敏度达到最大值。     

SnO2超微粒薄膜气敏元件的研制与测试

用射频磁控反应溅射法在Si基片上沉积SnO_2超微粒薄膜,溅射过程中适量掺Pd,用IC技术制成气敏元件.实验结果表明:该元件在90℃左右时对氢气有极高的灵敏度,是一种薄膜化、集成化、高选择性的气敏元件.本文介绍薄膜制备、微观结构分析、元件设计及气敏特性测试.     

直流反应磁控溅射WO3薄膜气敏特性研究

用直流反应磁控溅射法制成纳米结构的WO3薄膜气敏传感器,通过XRD,SEM和XPS对该薄膜的晶体结构和化学成分进行分析,研究了不同基片上制备的WO3薄膜的氨敏特性与薄膜厚度、退火温度的关系.实验得到的薄膜粒径大小约30-50 nm,结果表明:在未抛光的三氧化二铝基片上沉积厚度为40 nm的WO3薄膜,经过400℃退火,在体积分数为5×10-5 NH3中的灵敏度达到300,而且气体选择性好,响应-恢复时间短,可以作为理想的氨敏元件.     

氧化钨纳米线修饰多孔硅结构的制备及NO2气敏性能研究

针对多孔硅气敏传感器在室温下对NO2气体灵敏度较低、选择性不强的问题,采用双槽电化学腐蚀法制备多孔硅,然后在多孔硅顶部溅射沉积金属钨薄膜并经高温热处理氧化形成WO3纳米线,制备出WO3纳米线修饰多孔硅结构及其气敏传感器,对WO3纳米线/多孔硅材料进行了SEM和XRD分析,测试了传感器室温下对NO2的气敏特性。结果表明,制备WO3纳米线的最佳热处理条件是700℃,此温度下增加金属钨膜溅射时间可提升WO3纳米线的生长密度? 所制备的传感器对NO2气体表现出反型气敏响应,特别是溅射1min金属钨的样品显示出优异的NO2室温探测能力与选择性,对4×10-6NO的气敏灵敏度是单纯多孔硅样品的 5.8倍。     

一种微型平面薄膜型酒敏器件的研制

粉末溅射有制靶简单、掺杂容易的特点,并有掺杂稳定的优点.利用反溅,发展了粉末溅射,制备了酒敏微型平面薄膜.对薄膜的相关特性进行了研究,给出了薄膜最佳掺杂范围、最佳灵敏度的膜厚以及响应时间与恢复时间随膜厚变化的规律,总结了最优参数.又测试了器件性能,通过实验对影响灵敏度测试的条件如测试电压和湿度影响灵敏度的规律进行了分析和讨论.结论认为,所研制的粉末溅射微型薄膜酒敏器件性能可靠、灵敏度高、稳定性好.     

纳米薄膜乙醇传感器的研制

在陶瓷管上用Ti O2溅射法研制纳米薄膜乙醇传感器,同时作了机理分析。利用X射线衍射技术分析确定,在利用溅射法制备Ti O2纳米薄膜时,随着退火温度的提高,所形成的Ti O2薄膜晶体结构由无定型结构,向锐钛矿结构转变,随后又随温度升高逐渐转向金红石结构。晶粒大小随着退火温度的升高而增大,分别为13nm(500℃)、16nm(700℃)、28nm(1100℃)。经500℃退火的样品为锐钛矿晶体结构,晶粒尺寸为13nm,其乙醇灵敏度特性最好。此时元件的最佳加热工作电压8.0V,对应的工作温度为370℃。利用红外光谱测定,反应的生成物中有H2O、CH3CHO、C2H4,分别对应1694cm-1、1756cm-1和1720cm-1的红外吸收峰。但在反应生成物中,没有发现有乙酸产生。     

ITO薄膜的气敏特性􀀁

本文研究了胶体法制备的ＩＴＯ薄膜的气敏特性;并同时研究了各种掺杂杂质对ＩＴＯ薄膜的气敏特性的影响。通过实验发现ＩＴＯ薄膜对乙醇气体具有最高的灵敏度,对二氧化氮等也有较好的敏感特性。一般催化剂型掺杂物如贵金属等掺杂杂对提高ＩＴＯ薄膜的灵敏度没有多大帮助。ＩＴＯ薄膜与ＳｎＯ２薄膜相比具有更高的稳定性。ＩＴＯ薄膜的气敏特性既具有表面控制型的特征,又权有体效应气敏材料的敏感特性。     

MEMS铂薄膜温度传感器的电阻温度系数研究

采用MEMS工艺在硅衬底上制备了铂电阻薄膜温度传感器,在500℃、600℃、700℃和800℃四个温度点下对铂电阻样品进行了热处理,对样品在退火前后的电阻值进行了测试和对比分析,对800℃的退火样品的阻温特性进行了多次测量,其在零摄氏度的电阻温度系数可达3150×10-6/K。另外还对退火后的铂电阻样品阻温特性进行了多次升温降温测试,其升温曲线和降温曲线基本重合,表明退火处理可以明显的改善铂薄膜温度传感器的稳定性和重复性。     

三氧化钨纳米薄膜制备与气敏性能的研究

讨论一种对二氧化氮具有高灵敏性的WO3纳米薄膜的制备方法.当基片温度为室温,溅射混合气体(O2/Ar)的比例为1:1时,用直流反应磁控溅射法制备的薄膜,经过两步热处理(300℃/600℃),得到纳米结构WO3气敏元件.通过XRD、XPS和SEM对该薄膜的晶体结构和化学成分进行分析,用静态配气法测试NO2气敏特性.在Si3N4基片上制备的这种薄膜对空气中较低浓度的NO2(体积分数为0.1×10-5～3×10-5)具有优异的敏感特性和响应特性,最佳工作温度为150℃,在此温度下对其他一些气体(如CO,C2H5OH,NH3)的敏感性很差,显示出良好的选择性.     

稀土Nd掺杂纳米ZnO薄膜气敏特性

研究了用真空气相沉积法在玻璃衬底上制备掺稀土Nd的ZnO薄膜的气敏特性,实验给出,经温度为500℃,时间为45min的氧化、热处理的掺Nd的ZnO薄膜的晶粒尺寸、结构特性均发生变化。随掺Nd质量分数的增大,薄膜的晶粒尺寸从53nm减小至20nm。经掺Nd(质量分数为4.96×10-2)后纳米ZnO薄膜对乙醇气体的选择性和灵敏性均得到明显的改善。在1.5×10-3体积分数的乙醇气体中最高灵敏度为34,相应的薄膜工作温度为200℃。     

Mg2+离子表面修饰ZnO传感器阵列的乙醚敏感机理研究

为研究金属离子对金属氧化物半导体的表面敏化作用,以均匀沉淀法制备了ZnO纳米颗粒,并通过金属离子表面微滴注以及二次退火的方法制备出金属离子表面修饰的平面型ZnO气体传感器阵列。并以乙醚蒸汽为目标气体,进行气敏性能测试。发现大部分传感器对乙醚响应性很好,并且经过表面修饰,ZnO的乙醚敏感性能大多得到提升。特别地,Mg2+表面修饰的ZnO膜层展现了最优的气敏性能。X射线光电子能谱和光致发光谱证实,经过Mg2+表面修饰之后,氧空位缺陷浓度明显增加,并且表面羟基基团的数量显著减少,二者的协同作用构成了Mg2+表面修饰ZnO的敏化机制。     

α-MoO3/TiO2 core/shell nanorods: Controlled-synthesis and low-temperature gas sensing properties

Crystalline α-MoO₃/TiO₂ core/shell nanorods are fabricated by a hydrothermal method and subsequent annealing processes under H₂/Ar flow and in the ambient atmosphere. The shell layer is composed of crystalline TiO₂ particles with a diameter of 2-6 nm, and its thickness can be easily controlled in the range of 15-45 nm. The core/shell nanorods show enhanced sensing properties to ethanol vapor compared to bare α-MoO₃ nanorods. The sensing mechanism is different from that of other one-dimensional metal oxide core/shell nanostructures due to very weak response of TiO₂ nanoparticles to ethanol. The enhanced sensing properties can be explained by the change of type II heterojunction barrier formed at the interface between α-MoO₃ and TiO₂ in the different gas atmosphere. The present results demonstrate a novel sensing mechanism available for gas sensors with high performance.     

超细MgFe_2O_4复合氧化物的气敏性能研究

以FeSO4·7H2O和MgCl2·6H2O为材料,用新型化学共沉淀法制备了纳米尺寸的复合金属氧化物MgFe2O4粉体。将样品做成厚膜型气敏元件,测定了其对乙醇、甲醛、丙酮、甲苯、苯氨气、石油醚等还原(可燃)性气体的气敏特性。测试显示:700℃下,热处理1h,所得纳米微粉制作的元件在300℃工作温度下对丙酮有较高灵敏度和良好的选择性,并对气敏机理给予了解释。     

Ag掺杂SnO2纳米纤维的制备及其气敏特性研究

以聚乙烯醇(PVA)和SnCl2·2H2O为原料采用静电纺丝技术制备纯sno2及Ag掺杂sno2纳米纤维.经700℃退火烧结后制得了连续多孔的snO2纳米纤维.研究了Ag的掺杂对SnO2纳米纤维的C2H2气体敏感性能的影响,结果表明Ag的掺杂对SnO2纳米纤维的C2H2气体敏感性能具有明显的影响,在Ag掺杂量为8at%...     

罗丹明6G/PMMA复合材料荧光的温度传感特性

罗丹明6G/PMMA(R6G/PMMA)荧光复合材料在室温附近表现出良好的温度传感特性.通过在20℃~60℃温度范围内测试不同配比的R6G/PMMA复合材料的荧光发射光谱,对荧光光强It、谱峰位置λp以及新型荧光特征参数"谱带重心"λB等材料荧光特性的分析表明:①对于不同组分配比的材料,荧光强度均随温度升高而猝灭,光强的温度敏感规律呈线性;②以质量比R6G:PMMA=1:5的复合材料为代表,实验系统作温度传感应用,以谱带重心波长为传感信号的温度传感方程为λB=581.9+0.065T,拟合优度(R2)为0.98,系统的分辨力为1 ℃,以30 ℃测试数据作参考的相对灵敏度为3.3%/℃,精度远远优于谱峰位置作温度传感信号;③荧光复合材料的R6G:PMMA质量比变化基本不影响谱带重心为温度传感信号的灵敏度.本文分析了实验观察到的温敏荧光现象的成因,对基于R6G/PMMA荧光复合材料的新型温度传感器在电磁干扰环境、生物体温监测、大气环境温度监测等方面的应用作出了明确预期.     

Gas sensing properties of a composite composed of electrospun poly(methyl methacrylate) nanofibers and in situ polymerized polyaniline

Poly(methyl methacrylate) (PMMA) nanofibers with different diameters were fabricated by electrospinning and their composites with polyaniline (PANI) were formed by virtue of in situ solution polymerization. The coaxial composite nanofibers so prepared were then transferred to the surface of a gold interdigitated electrode to construct a gas sensor. The structure and morphology of the PANI/PMMA composite fibers were characterized by UV–vis spectroscopy and scanning electron microscopy, which indicated that the coaxial nanofibres of PANI emeraldine salt and PMMA were successfully prepared. The electrical responses of the gas sensor based on the composite nanofibres towards triethylamine (TEA) vapors were investigated at room temperature. It was revealed that the sensor showed a sensing magnitude as high as 77 towards TEA vapor of 500 ppm. In addition, the responses were linear, reversible and reproducible towards TEA vapors ranging from 20 to 500 ppm. The diameters of the electrospun PMMA fibers had an effect on the sensing magnitude of the gas sensor, which is proposed to relate to the difference in the surface-to-volume ratio of the fibers. Furthermore, it was found that the concentration of doping acids only led to changes in resistance of the sensor, but could not affect its sensing characteristics. In contrast, the nature of the doping acids was determinative for the sensing magnitude of the sensor. The gas sensor with toluene sulfonic acid as the doping acid exhibited the highest sensing magnitude, which is explained by taking into account of the sensing mechanism and the interactions of doping acids with TEA vapor.     

退火处理对Ti-WO_3薄膜的结构和气敏特性的影响

用X射线衍射和透射电镜表征了直流磁控溅射法制得的Ti-WO3薄膜的晶型、晶格常数、粒径等。研究了退火对Ti-WO3薄膜气敏性质和微结构的影响,找出了最佳退火温度和工作温度;并对机理进行了分析。结果表明:450℃退火的薄膜的气敏效应很好,最佳工作温度在150℃左右;     

Non-solvent induced phase separation as a method for making high-performance chemiresistors based on conductive polymer nanocomposites

The fabrication of novel porous conductive composite vapor sensors characterized by different porosities and specific surface areas is described in this study. These samples were obtained by the dry-cast non-solvent induced phase separation (NIPS) method. Porous composite structures have been studied by the SEM, BET and water evaporation methods. Testing different concentrations of several organic vapors, the porous sensors showed improved sensitivities and response times as compared to their dense counterpart. Improved characteristics of the sensor response were correlated to better sorption and diffusion properties of sensing film due to increased porosity and specific surface area obtained by this method of film fabrication. A competition theory was proposed that describes the optimum porosity and thickness of sensing films in which the highest sensitivities were observed.