Growth of multiwalled carbon nanotubes during the initial stages of aerosol-assisted CCVD

We report a study of the initial stages of growth of aligned multiwalled carbon nanotubes (MWNT) synthesised by catalytic chemical vapour deposition (CCVD) of liquid aerosol obtained from toluene/ferrocene solution. A special experimental procedure has been developed to stop the process after short durations (30 s to 2 min). Two different pyrolysis temperatures are considered: 800 and 850 °C. Both scanning and transmission electron microscopy (SEM, TEM) coupled to energy-dispersive X-ray (EDX) analyses are used in order to determine the location of catalyst particles and to examine their chemical nature, morphology and size distribution when nanotubes start to grow. During the early stages (30 s), we observe the formation of a layer of catalyst particles on silicon substrates before the growth of nanotubes. X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) measurements indicate the occurrence of iron oxide (γ-Fe₂O₃ or Fe₃O₄). In addition, XPS analysis reveals the formation of graphite-like carbon, demonstrating that iron oxide particles catalyse the decomposition of toluene vapour. SEM and TEM observations show that these particles are most often located at the nanotube root, suggesting a base growth mechanism responsible for the formation of aligned nanotube when prolonging growth time (2 min).     

Production of controlled architectures of aligned carbon nanotubes by an injection chemical vapour deposition method

High purity, aligned multi-wall carbon nanotube films were grown on quartz substrates by injecting a solution of ferrocene in toluene into a suitable reaction furnace. The injection CVD method allows excellent control of the catalyst to carbon ratio. The detailed study presented here demonstrates how such a system can be used to control the nanotube diameter, length, alignment and yield by manipulating the experimental parameters. Primary growth was found to occur via a base growth mechanism, although overgrowths of single wall carbon nanotubes were obtained under certain conditions. Such a method also allows nanotubes of various packing densities to be produced which may be useful for specific applications such as electrodes.     

Chemical vapour deposition of pyrolytic carbon on carbon nanotubes: Part 3: Growth mechanisms

As a first step to identify the growth mechanism of various pyrolytic carbon deposit morphologies onto multiwall carbon nanotubes (MWNTs) presented in earlier papers, we determined their growth chronology by carrying-out synthesis experiments involving a large time range. We propose that the formation of any of the deposit morphologies is the consequence of the primary formation of hydrocarbon liquid droplets in the gas phase and their subsequent deposition onto the MWNTs. This makes the formation mechanisms of the various deposit morphologies depend on physical phenomena related to the wetting of nanotube surfaces by the droplets, where the [droplet diameter]/[nanotube diameter] ratio plays an important role. The droplets are the result of the recombination of species issued from the cracking of the gaseous precursor (methane), and their characteristics (number, size, and aromaticity) depend on experimental parameters such as temperature, time of flight, and gas phase composition. The results bring a new light to the currently admitted hypotheses for the mechanisms of pyrolytic carbon deposition, and revitalise the liquid droplet theory formerly proposed by Grisdale in the 1950s, at least in the range of conditions investigated.     

Growth and characterization of filled carbon nanotubes with ferromagnetic properties

Strong vertically aligned Fe-filled multiwalled nanotubes have been synthesised by decomposition of ferrocene in a liquid source CVD process. By varying the reaction parameter such as deposition time, reaction temperature and precursor concentration we determined the influences on the length, diameter and filling yield of the carbon nanotubes. The length and the diameter of the nanotubes are only controlled by the ferrocene concentration in the gas phase and there is no influence on the deposition time. The filling yield achieved about 45 wt.%. Using alternating gradient magnetometry measurements really high coercivities, high magnetization moments and strong magnetic anisotropies with an easy magnetic axis parallel to the aligned nanotubes are observed. In addition, this LSCVD is highly suited for the high scale production of filled multiwalled carbon nanotubes with selected properties.     

Low temperature synthesis of carbon nanofibres on carbon fibre matrices

Carbon nanofibres are grown on a carbon fibre cloth using plasma enhanced chemical vapour deposition from a gas mixture of acetylene and ammonia. A cobalt colloid is used as a catalyst to achieve a good coverage of nanofibres on the surface of the carbon fibres in the cloth. The low temperature growth conditions that we used would allow growth on temperature sensitive polymers and fibres. The nanofibres grown by a tip growth mechanism have a bamboo-like structure. A significant increase of the bulk electrical conductivity of the carbon cloth was observed after the nanofibre growth indicating a good electrical contact between carbon nanofibres and carbon fibres. The as-grown composite material could be used as high surface area electrodes for electrochemical applications like fuel cells and super-capacitors.     

Growth of carbon nanotubes by open-air laser-induced chemical vapor deposition

Carbon nanotubes have remarkable mechanical, electronic and electrochemical properties, but the full potential for application will be realized only if the growth of high quantity and quality carbon nanotubes can be optimized and well controlled. In this study, carbon nanotubes have been successfully grown on fused quartz rods by a novel open-air laser-induced chemical vapor deposition (LCVD) technique with gold palladium nanoparticles as catalyst material. In this LCVD technique, a curtain of inert nitrogen gas was used to shield the deposition zone from the surrounding environment and allows the growth of the nanotubes to occur under open-air conditions. A 35-W continuous CO₂ laser was used as a heat source to induce a local temperature rise on the substrate surface covered with metal nanoparticles, subsequently resulting in deposition of multi-wall carbon nanotubes. The carbon nanotubes deposited in this study are derived from a precursor mixture that consists of propane and hydrogen, and are in tangled form with different diameters (10-250 nm) and structures. Raman spectroscopy, transmission and scanning electron microscopy are used to investigate the microstructure and composition of the carbon nanotubes.     

Growth and electrical characterization of high-aspect-ratio carbon nanotube arrays

The remarkable properties of carbon nanotubes (CNTs) make them attractive for microelectronic applications, especially for interconnects and nanoscale devices. In this paper, we describe a microelectronics compatible process for growing high-aspect-ratio CNT arrays with application to vertical electrical interconnects. A lift-off process was used to pattern catalyst (Al₂O₃/Fe) islands to diameters of 13 or 20 μm. After patterning, chemical vapor deposition (CVD) was involved to deposit highly aligned CNT arrays using ethylene as the carbon source, and argon and hydrogen as carrier gases. The as-grow CNTs were characterized by transmission electron microscopy (TEM), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The results demonstrated that the CNTs have high purity, and form densely-aligned arrays with controllable array size and height. Two-probe electrical measurements of the CNT arrays indicate a resistivity of ∼0.01 Ω cm, suggesting possible use of these CNTs as interconnect materials.     

Ru-doped nanostructured carbon films

Pure and Ru-doped carbon films are deposited on Si (100) substrates by electron cyclotron resonance chemical vapor deposition. The films are characterized by transmission electron microscopy, electron energy loss spectroscopy, energy dispersive X-ray spectroscopy and atomic force microscopy. In both the pure and Ru-doped samples, diamond nanocrystallites are formed in amorphous carbon matrices. The Ru-doped film contains much smaller diamond nanocrystallites (approx. 3 nm) than the pure samples (approx. 11 nm). Lower surface roughnesses are observed in both pure and Ru-doped samples as compared to other reported nanocrystalline diamond films. The conductivity of the Ru-doped film is significantly higher than that of the pure film. The results show that Ru-doped nanocrystalline diamond films have unique structures and properties as compared to pure nanocrystalline diamond films or metal doped diamond-like carbon films, which may offer advantages for electrochemical, optical-window, field emission or tribological applications.     

Optical emission spectroscopy study of the influence of nitrogen on carbon nanotube growth

In-situ optical emission spectroscopy was used to systematically study the influence of nitrogen on the growth of carbon nanotubes (CNTs) by microwave-plasma enhanced chemical vapor deposition at different CH₄ concentrations in a CH₄/N₂ gas mixture. The results show that CN and C₂ co-exist in the plasma and emission intensities of the two species are correlated. The morphology and microstructure of the samples vary with the CH₄ concentration. Well aligned nanotubes are obtained at 20% CH₄. With the participation of N₂, the CNTs present a polymerized nanobell structure. More importantly, the length and thickness of each nanobell can be modulated by varying the CH₄ concentration. Without N₂, conventional cylindrical CNTs are obtained.     

The effect of feedstock and process conditions on the synthesis of high purity CNTs from aromatic hydrocarbons

High purity multi-walled carbon nanotubes were synthesized from aromatic hydrocarbons (benzene, toluene, xylene and trimethyl benzene) using ferrocene as the source of Fe catalyst. Screening studies of aromatic feeds at 675 °C, residence time of 14 s and Fe/C atom ratio of 1.07%, resulted in feedstock carbon conversion of 20-31%, CNT yield of 19.8-30.5%, and catalyst yield of 5.3-8.3 (g CNT/g catalyst). While the quality of the CNTs as determined by TGA, SEM, TEM and Raman spectroscopy, were high and comparable for different feedstocks; their carbon conversion, CNT yield and catalyst yield differed noticeably. A process optimization study for toluene feed showed that carbon conversion of more than 39%, CNT yield of 38.7% and catalyst yield of 18.3 can be achieved at temperature of 800 °C, Fe/C atom ratio of 0.47%, and residence time of 10-20 s.     

High-throughput screening for carbon nanotube production

High-throughput screening has been used to optimise the catalyst composition for the growth of carbon nanotubes. Microarrays of candidate catalysts were formed by printing metal salt solutions onto quartz substrates. Each solution formed a spot approximately 250 μm in diameter, with a density of 384 different spots per square inch. The solutions consisted of three components: a catalyst precursor, a substrate precursor (TEOS) and a micelle agent (P85). The printed substrates were calcined and then reacted in methane and hydrogen. The reacted substrates were studied using Raman spectroscopy and electron microscopy. The effect of varying the relative amounts of the three components was investigated. Analysis showed that bamboo nanotubes were grown when the metal to silicon ratio was high and small diameter nanotubes, including some single-walled tubes, were grown when the ratio was low.     

Single-walled carbon nanotubes grown on natural minerals

Single-walled carbon nanotubes (SWNTs) are successfully grown on magnesite crystal by pyrolysis of methane gas under moderate conditions, demonstrating the possibility of naturally occurring SWNTs.The obtained SWNTs were analyzed by Raman scattering, transmission electron microscope (TEM), and thermogravimetric (TG) measurements. These measurements revealed that high purity SWNTs having diameters of about 1-1.8 nm occur on the surface of natural magnesite sample by the pyrolysis of methane gas at 1073-1173 K. Structural properties and formation mechanism of the obtained SWNTs were discussed.     

Effect of Substrate Morphology on Growth and Field Emission Properties of Carbon Nanotube Films

Carbon nanotube (CNT) films were grown by microwave plasma-enhanced chemical vapor deposition process on four types of Si substrates: (i) mirror polished, (ii) catalyst patterned, (iii) mechanically polished having pits of varying size and shape, and (iv) electrochemically etched. Iron thin film was used as catalytic material and acetylene and ammonia as the precursors. Morphological and structural characteristics of the films were investigated by scanning and transmission electron microscopes, respectively. CNT films of different morphology such as vertically aligned, randomly oriented flowers, or honey-comb like, depending on the morphology of the Si substrates, were obtained. CNTs had sharp tip and bamboo-like internal structure irrespective of growth morphology of the films. Comparative field emission measurements showed that patterned CNT films and that with randomly oriented morphology had superior emission characteristics with threshold field as low as ~2.0 V/μm. The defective (bamboo-structure) structures of CNTs have been suggested for the enhanced emission performance of randomly oriented nanotube samples.     

Nanotubes and nanofilaments from carbon monoxide disproportionation over Co/MgO catalysts: I. Growth versus catalyst state

A catalyst prepared from the pyrolysis of Co and Mg nitrates and citric acid after their co-dissolution in water was used for carbon deposition from CO. Good yields of nanotubes or nanofilaments were obtained over catalysts which had been reduced by H₂ without preliminary treatment at high temperature. Nanotubes with 10 or more cylindrical carbon layers were obtained from pure CO or from CO+CO₂ mixtures. Nanofilaments with truncated conical layers were obtained from CO+H₂ mixtures in the 500–600 °C range. In both cases, high shape selectivity was obtained and almost all MgO could be eliminated by HCl treatment. The only significant impurities were embedded cobalt particles. This process is therefore suitable for preparing nanotubes or nanofilaments with good shape selectivity and 98 wt% purity. Lowering the Co content of the catalyst produces thinner nanotubes but reduces the yield.     

Identification of carbon phases and analysis of diamond/substrate interfaces by Raman spectroscopy

Raman spectroscopy is employed to characterize thin diamond and diamond-like carbon films deposited by hot filament chemical vapour deposition (HFCVD). A method is proposed and experimentally verified for a contact-less measurement of the actual substrate temperature by Raman spectroscopy.     

Diameter control of multiwalled carbon nanotubes using experimental strategies

Multiwalled carbon nanotubes (MWNTs) were synthesized using a chemical vapor deposition floating feed method in a vertical reactor. Effects of the preparation variables on the average diameter of carbon nanotubes were systematically examined using the fractional factorial design (FFD), path of the steepest ascent, and central composite design (CCD) coupled with the response surface methodology. From the FFD study, the main and interactive effects of reaction temperature, methane flow rate, and chamber pressure were concluded to be the key factors influencing the diameter of MWNTs. Two empirical models, representing the dependence of the diameter of carbon nanotubes at the vicinities around maximum (420 nm) and minimum (15 nm) on the reaction temperature and methane flow rate, were constructed in two independent CCD studies. These models, shown as contour diagrams, indicated that the diameter of carbon nanotubes generally increased with increasing reaction temperature and methane flow rate. Based on both models, the diameter of MWNTs from 15 to 420 nm can be controlled precisely by using a continuous CVD fabrication method.